CN102735324A - Device for measuring micro-vibration amplitude of object through laser single slit-single grating - Google Patents
Device for measuring micro-vibration amplitude of object through laser single slit-single grating Download PDFInfo
- Publication number
- CN102735324A CN102735324A CN2012101566224A CN201210156622A CN102735324A CN 102735324 A CN102735324 A CN 102735324A CN 2012101566224 A CN2012101566224 A CN 2012101566224A CN 201210156622 A CN201210156622 A CN 201210156622A CN 102735324 A CN102735324 A CN 102735324A
- Authority
- CN
- China
- Prior art keywords
- monochromatic light
- grating
- seam
- light grid
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention designs a device for measuring the micro-vibration amplitude of an object through laser single slit-single grating. The device comprises a semiconductor laser (1), a single slit (2) and a single grating (3) which are sequentially and coaxially arranged, wherein the slit width of the single slit (2) is 0.5-1.5 mm; the single slit (2) is parallel to the single grating (3); the distance between the single slit (2) and the single grating (3) is 1-5 mm; the single grating (3) is fixed together with a vibrating object (4), so that the vibration direction of the vibrating object (4) is perpendicular to the grating line of the single grating (3) and is parallel to the plane on which the grating line is positioned; and a photoelectric probe (5) is used for receiving diffracted light passing through the single grating (3) and is connected with an oscillograph (6). When the vibrating object vibrates, photoelectric signals are received by the photoelectric probe and shown on the oscillograph, and the amplitude of the vibrating object can be determined according to the shown waveform. The device has the advantages of convenient and quick measurement process, large measurement range and ideal waveform. Thus, the device is a favorable one for measuring the period, frequency and amplitude of micro vibration.
Description
Technical field
The present invention relates to the device of the little vibration amplitude of Measuring Object, specifically belong to the device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object.
Background technology
The little Oscillation Amplitude of laser double grating method Measuring Object is accurately to measure small amplitude according to Doppler effect through the principle that double grating forms photo-beat, and this experiment need be done strict adjustment to the depth of parallelism of double grating, need two grating spaces be done suitable adjustment.Also need adjust the frequency in the power and signal source of laser in addition, otherwise, be difficult to access desirable signal waveform.Sometimes, " burr " phenomenon can appear in signal waveform.Can bring some errors to accurate measurement like this.
Summary of the invention
The object of the present invention is to provide the device of a kind of adjustment simple in structure, easy, the highly sensitive little vibration amplitude of laser list seam-monochromatic light grid Measuring Object.
The device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object provided by the invention comprises semiconductor laser, single seam and monochromatic light grid, their coaxial successively settings; The seam of single seam is wide to be 0.5-1.5mm (preferred 0.8-1.2mm); List stitches parallel with the monochromatic light grid and the distance between them is 1-5mm (preferred 3mm); Monochromatic light grid and vibrating object are fixed together; Make the direction of vibration of vibrating object vertical with the grid line of monochromatic light grid, and with the plane parallel at grid line place; Photoelectric probe is used to receive diffraction light through the monochromatic light grid (preferred 0 grade, 1 grade of ﹢ or ﹣ 1 order diffraction light), and photoelectric probe is connected with oscillograph.
During measurement: the parallel beam that laser instrument sends is radiated on the monochromatic light grid after through single slit diffraction; Diffraction takes place in light through the monochromatic light grid once more; This diffraction light is the stack of single seam and monochromatic light grid diffraction light; Diffraction light (preferred 0 grade, 1 grade of ﹢ or ﹣ 1 order diffraction light) after the stack is radiated on the photoelectric probe, and the photo-signal that photoelectric probe receives is presented on the oscillograph; During the testee vibration, on oscillograph, just can demonstrate waveform, just can confirm the amplitude of object vibration according to this waveform.
Diffraction fringe formed beat frequency between the corresponding stage that the different stripeds of vibrating grating and static single seam produce was inferior, and through the analysis to the beat signal waveform character, we just can record the Oscillation Amplitude of vibrating grating.
If two-beam is respectively:
Photocurrent after the stack is:
Wherein ξ is a photoelectric conversion factors.ω
0Be the original frequency of lasing light emitter, ω
a=ω
0+ ω
dBe light generation Doppler shift.
and
are initial phase.Electrically driven tuning fork is done microvibration with the cosine form:
We know that photoelectric detector can not detect the optical frequency signal, so in following formula, have only the 4th can be converted into electric signal output.Electric current is like this:
Just can obtain the amplitude of little vibration through the wave number in the beat frequency in the calculating half period:
Wherein A is the vibrating object amplitude, and T is the cycle,
Be the photo-beat frequency,
The number of ripple in the expression T/2; The grating constant n of grating 3
0Can be 1/50mm, 1/100mm, 1/300mm, or 1/600mm etc.
The device of the little vibration amplitude of laser list seam-monochromatic light grid Measuring Object of the present invention has overcome the problems that existing laser double grating method is measured little vibration adjustment aspect, and is more simple and efficient, measurement range is big, waveform is desirable.It is a kind of preferably device of cycle, frequency and amplitude of measuring little vibration, has wide practical use in fields such as physical vibration experiment, military projects.
Description of drawings:
The little vibration amplitude device of a kind of laser list of Fig. 1 the present invention seam-monochromatic light grid Measuring Object synoptic diagram is among the figure: 1-semiconductor laser, the single seam of 2-, 3-monochromatic light grid, 4 vibrating objects, 5-photoelectric probe, 6-oscillograph.
Fig. 2 is the beat pattern of tuning fork under different dynamics that frequency is 102Hz with Fig. 3 demonstration.
Embodiment
The device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object as shown in Figure 1; Comprise that power is the semiconductor laser 1 of 3mw, single seam 2 and monochromatic light grid 3, their coaxial successively settings, the seam of single seam 2 is wide to be 1mm; The grating constant of monochromatic light grid 3: d=1/100mm; Distance between single seam 2 and the monochromatic light grid 3 is 3mm, and list seam 2 is parallel with the grid line of monochromatic light grid 3, and the tuning fork 4 of resonance frequency 102Hz is fixed on the monochromatic light grid 3; Make the direction of vibration of tuning fork 4 vertical with the grid line of monochromatic light grid 3, and with the plane parallel at grid line place; With the 0 order diffraction light that laser photoelectricity probe 5 receives through monochromatic light grid 3, laser photoelectricity probe 5 is connected with oscillograph 6.
During measurement: the parallel beam that laser instrument 1 sends is radiated on the monochromatic light grid 3 after stitching 2 diffraction through list; Diffraction takes place in light through monochromatic light grid 3 once more; This diffraction light is the stack of single seam 2 and monochromatic light grid 3 both diffraction lights; Diffraction light (0 grade) after the stack is radiated on the photoelectric probe 5, and the photo-signal that photoelectric probe 5 receives is presented on the oscillograph 5; During the testee vibration, on oscillograph 5, demonstrate waveform (like Fig. 2), just can confirm the amplitude of object vibration according to this waveform.
Can calculate the amplitude A of tuning fork.
The preferred embodiment for the present invention: the diffraction light after will superposeing (selecting 1 grade of 1 grade of ﹢ or ﹣ for use) is radiated on the photoelectric probe 5, and other is with embodiment shown in Figure 1.
Fig. 2 is the beat pattern of tuning fork under different dynamics that frequency is 102Hz with Fig. 3 demonstration.
Claims (4)
1. the device of the little vibration amplitude of laser list seam-monochromatic light grid Measuring Object is characterized in that, comprises semiconductor laser (1), single seam (2) and monochromatic light grid (3), their coaxial successively settings; The seam of single seam (2) is wide to be 0.5-1.5mm; Single seam (2) and distances they between parallel with monochromatic light grid (3) are 1-5mm; Monochromatic light grid (3) are fixed together with vibrating object (4); The vibration side that makes vibrating object (4) is with vertical to the grid line of monochromatic light grid (3), and with the plane parallel at grid line place; Photoelectric probe (5) is used for receiving the diffraction light through monochromatic light grid (3), and photoelectric probe (5) is connected with oscillograph (6).
2. the device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object as claimed in claim 1 is characterized in that, the seam of described single seam (2) is wide to be 0.8-1.2mm.
3. the device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object as claimed in claim 1 is characterized in that, described single seam (2) and distances they between parallel with monochromatic light grid (3) are 3mm.
4. the device of the little vibration amplitude of a kind of laser list seam-monochromatic light grid Measuring Object as claimed in claim 1 is characterized in that, described photoelectric probe (5) is used for receiving through monochromatic light grid (3) 0 grade, 1 grade of ﹢ or ﹣ 1 order diffraction light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210156622.4A CN102735324B (en) | 2012-05-21 | 2012-05-21 | Device for measuring micro-vibration amplitude of object through laser single slit-single grating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210156622.4A CN102735324B (en) | 2012-05-21 | 2012-05-21 | Device for measuring micro-vibration amplitude of object through laser single slit-single grating |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102735324A true CN102735324A (en) | 2012-10-17 |
CN102735324B CN102735324B (en) | 2014-07-30 |
Family
ID=46991237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210156622.4A Expired - Fee Related CN102735324B (en) | 2012-05-21 | 2012-05-21 | Device for measuring micro-vibration amplitude of object through laser single slit-single grating |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102735324B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1138082A (en) * | 1966-04-28 | 1968-12-27 | Rolls Royce | Apparatus, e.g. for determining the position of a movable member, and method of using same |
GB1284641A (en) * | 1970-01-08 | 1972-08-09 | Ferranti Ltd | Improvements relating to measuring apparatus |
GB1370307A (en) * | 1970-10-23 | 1974-10-16 | Bendix Corp | Apparatus for and method of determinging displacements using moire fringes |
SU1379613A1 (en) * | 1986-09-24 | 1988-03-07 | Предприятие П/Я Ю-9995 | Fibre-optic strain gauge |
CN1712904A (en) * | 2005-05-25 | 2005-12-28 | 山西大学 | Displacement sensor with single grating |
CN101000252A (en) * | 2006-12-01 | 2007-07-18 | 华中科技大学 | Double-raster displacement sensor |
-
2012
- 2012-05-21 CN CN201210156622.4A patent/CN102735324B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1138082A (en) * | 1966-04-28 | 1968-12-27 | Rolls Royce | Apparatus, e.g. for determining the position of a movable member, and method of using same |
GB1284641A (en) * | 1970-01-08 | 1972-08-09 | Ferranti Ltd | Improvements relating to measuring apparatus |
GB1370307A (en) * | 1970-10-23 | 1974-10-16 | Bendix Corp | Apparatus for and method of determinging displacements using moire fringes |
SU1379613A1 (en) * | 1986-09-24 | 1988-03-07 | Предприятие П/Я Ю-9995 | Fibre-optic strain gauge |
CN1712904A (en) * | 2005-05-25 | 2005-12-28 | 山西大学 | Displacement sensor with single grating |
CN101000252A (en) * | 2006-12-01 | 2007-07-18 | 华中科技大学 | Double-raster displacement sensor |
Non-Patent Citations (4)
Title |
---|
《大学物理》 20040430 黄壮雄,等 激光双光栅法测微小位移中光拍信号波形改进 第23卷, 第4期 * |
杨宁,等: "一种光电式微位移测量装置", 《仪器仪表学报》, vol. 32, no. 6, 30 June 2011 (2011-06-30) * |
陈长鹏,等: "测量动光栅瞬时速度的有效方法", 《物理实验》, vol. 30, no. 7, 31 July 2010 (2010-07-31) * |
黄壮雄,等: "激光双光栅法测微小位移中光拍信号波形改进", 《大学物理》, vol. 23, no. 4, 30 April 2004 (2004-04-30) * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
CN106644038B (en) * | 2017-01-18 | 2023-08-18 | 山东大学 | MOEMS wireless vibration sensor based on comb-shaped grids and working method thereof |
Also Published As
Publication number | Publication date |
---|---|
CN102735324B (en) | 2014-07-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102004255B (en) | Chirp amplitude laser infrared radar distance-Doppler zero-difference detection system | |
CN102538775B (en) | Cold atom beam interference gyro device | |
CN101799318B (en) | Laser homodyne vibration detection optical system | |
CN102176022B (en) | Method for measuring young modulus by adopting multi-beam laser heterodyne distance measurement device | |
CN102680118B (en) | A kind of measuring method of laser frequency stability and device | |
CN204666496U (en) | Micro-cantilever thermal vibration signal measurement apparatus | |
JP2009025245A (en) | Device for observing optical interference | |
JP5363231B2 (en) | Vibration measuring apparatus and vibration measuring method | |
JP2007285898A (en) | Laser vibrometer | |
JP2010203860A (en) | Vibration measuring device and vibration measuring method | |
CN105446051A (en) | Laser acousto-optical scanning method and device thereof | |
CN104820223A (en) | Optical field matching filtering range finding device based on M-sequence phase coding | |
CN103884418A (en) | Tuning fork type quartz crystal oscillator resonant frequency measurement method based on sound excitation and device | |
CN103292687A (en) | Laser feedback interferometer | |
CN101706361B (en) | System and method for testing diffraction efficiency of acousto-optic tunable filter | |
CN103091681A (en) | Continuous wave with frequency modulation interferometer based on multiple refection technology | |
CN102323555A (en) | Method for measuring magnetostriction constant by using multi-beam laser heterodynes | |
CN104535172B (en) | A kind of method and application for realizing that micro-cantilever high order resonance excites using light emitting diode matrix | |
CN105300274A (en) | Heterodyne interference measuring system convenient in splitting ratio adjustment | |
CN102735324B (en) | Device for measuring micro-vibration amplitude of object through laser single slit-single grating | |
CN102680119A (en) | Method and device for measuring laser frequency stability | |
CN106908803B (en) | Ultra wide band scalariform FM/CW laser velocimeter system based on double parallel MZM | |
CN111880188B (en) | Optical coherence distance measuring device and method | |
CN102680407A (en) | Imaging method and device for inducing surface thermal deformation effect based on laser array | |
CN104297598A (en) | Multi-parameter testing device and method of VCSEL |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140730 Termination date: 20170521 |