CN102723301A - Quartz boat for diffusion - Google Patents
Quartz boat for diffusion Download PDFInfo
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- CN102723301A CN102723301A CN2012101822841A CN201210182284A CN102723301A CN 102723301 A CN102723301 A CN 102723301A CN 2012101822841 A CN2012101822841 A CN 2012101822841A CN 201210182284 A CN201210182284 A CN 201210182284A CN 102723301 A CN102723301 A CN 102723301A
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- quartz boat
- upper bracket
- lower carriage
- pair
- diffusion
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Abstract
The invention relates to the technical field of production of solar cells, in particular to a quartz boat for diffusion. The quartz boat for diffusion comprises a side connecting piece and brackets, wherein the brackets comprise a pair of upper brackets and a pair of lower brackets; the pair of upper brackets is symmetrically fixed on the inner side walls at the upper end of the side connecting piece; the pair of lower brackets is symmetrically fixed on the inner side walls at the bottom of the side connecting piece; a plane where the pair of upper brackets is arranged on is mutually parallel to that where the pair of lower brackets is arranged on; the distance between the pair of upper brackets is longer than that between the pair of lower brackets; and grooves at different intervals are formed in the inner side surfaces of the pair of upper brackets and the upper side surfaces of the pair of lower brackets. Through the adoption of the quartz boat for diffusion, the open-circuit voltage and the short-circuit current of the solar cells can be improved, the conversion efficiency is further improved, the square resistance of the cells can be controlled easily, the uniformity is enhanced, the method is feasible, and the operation is simple and convenient.
Description
Technical field
The present invention relates to a kind of solar cell and make workshop section clamp technology field, be specifically related to a kind of diffusion and use quartz boat.
Background technology
Step such as the crystal silicon solar energy battery manufacture craft comprises making herbs into wool, diffusion, etching, deposition antireflective coating, print electrode, diffusing step generally adopts quartz boat as carrying tool, like patent: 200920068241.4.
Prior art is made in the process of PN junction at solar cell, generally adopts groove to be uniformly distributed in the quartz boat on the support with identical distance, when the diffusion inserted sheet, adopts two opposing being close together of silicon chip diffusingsurface to insert the method that groove carries out the single face diffusion.Like this, on the one hand because non-diffusingsurface can not get enough phosphorus sources, thereby weakened the high temperature gettering effect of phosphorous diffusion; Square resistance controllability, the lack of homogeneity of battery on the other hand, thus the transformation efficiency of solar cell reduced.Simultaneously since back-to-back inserted sheet can increase the fragment probability of silicon chip to a certain extent, reduced the qualification rate of product.
And use the quartz boat of prior art to carry out two-sided diffusion, and a slice silicon chip is inserted groove separately, like this, not only make the battery production capacity be reduced to 1/2 of original production capacity, also improved production cost simultaneously, directly reduce company interest.
Summary of the invention
The object of the invention is exactly to provide a kind of diffusion to use quartz boat to the defective of above-mentioned existence.The groove of this quartz boat is in interval alternative distribution by wide, narrow; Can improve the transformation efficiency and the qualification rate of solar cell like this; And can effectively reduce the fragment rate that silicon chip occurs in loading and unloading boat process high, problem such as put back with duration, diffusingsurface, significantly improve operating efficiency.
It is to comprise side connector and support that the quartz boat technical scheme is used in a kind of diffusion of the present invention; Support comprises a pair of upper bracket and a pair of lower carriage; Upper bracket is symmetrically fixed on connector upper end, side madial wall, and lower carriage is symmetrically fixed on side connector bottom inside wall, and upper bracket belongs to the plane and plane, lower carriage place is parallel to each other, and the distance between the upper bracket is wideer than the distance between the lower carriage; Described upper bracket inner surface, lower carriage uper side surface are provided with the gap size different recesses.Said side connector outer upper is provided with handle.
The cross section of upper bracket and lower carriage is a rectangle, and wherein two upper bracket opposed inside have convexity.
The surface of described upper bracket inner bulge, lower carriage uper side surface are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The width of groove is 0.5～2mm, and the width of groove is preferably 1.0 ± 0.1mm.
The width of wide interval is 0.5～5mm, and the width of wide interval is preferably 2.2 ± 0.1mm.
The width at narrow interval is 0.5～4mm, and the width at narrow interval is preferably 1 ± 0.1mm.
Beneficial effect of the present invention is: quartz boat is used in a kind of diffusion of the present invention, comprises side connector and support; Wherein, support comprises a pair of upper bracket and a pair of lower carriage; Upper bracket is symmetrically fixed on connector upper end, side madial wall, and lower carriage is symmetrically fixed on side connector bottom inside wall, and upper bracket belongs to the plane and plane, lower carriage place is parallel to each other, and the distance between the upper bracket is wideer than the distance between the lower carriage; Described upper bracket inner surface, lower carriage uper side surface are provided with the gap size different recesses.
Groove of the present invention is in interval alternative distribution by wide, narrow; Adopt single silicon chip to insert the method that groove carries out two-sided diffusion, can improve the high temperature gettering effect of phosphorous diffusion, improve the transformation efficiency of solar cell; Simultaneously, thoroughly stopped because diffusingsurface is put back problems such as the electrical property that causes is bad; In addition, what can effectively reduce that silicon chip occurs in loading, unloading boat process collapses limit, arrisdefect, latent fragment problems such as split, and has reduced the loading and unloading boat time, significantly improves operating efficiency; Product quality and qualification rate have been improved.
Description of drawings:
Shown in Figure 1 is front section view of the present invention.
Among the figure, 1. upper bracket, 2. handle, 3. side connector, 4. lower carriage, 6. convexity.
Embodiment:
In order to understand the present invention better, specify technical scheme of the present invention below in conjunction with instantiation, but the present invention is not limited thereto.
It is to comprise side connector 3 and support that the quartz boat technical scheme is used in a kind of diffusion of the present invention; Support comprises a pair of upper bracket 1 and a pair of lower carriage 4; Upper bracket 1 is symmetrically fixed on side connector 3 upper end madial walls; Lower carriage 4 is symmetrically fixed on side connector 3 bottom inside walls; And upper bracket plane, 1 place and plane, lower carriage 4 place are parallel to each other, and the distance between the upper bracket 1 is wideer than the distance between the lower carriage 4; Described upper bracket 1 inner surface, prop up 4 uper side surfaces down and be provided with the gap size different recesses.Said side connector 3 outer upper are provided with handle 2.
The cross section of upper bracket 1 and lower carriage 4 is a rectangle, and wherein two upper bracket 1 opposed inside have protruding 6.
The surface of described upper bracket 1 inner bulge 6, lower carriage 4 uper side surfaces are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The width of groove is 0.5～2mm, and the width of groove is preferably 1.0 ± 0.1mm.
The width of wide interval is 0.5～5mm, and the width of wide interval is preferably 2.2 ± 0.1mm.
The width at narrow interval is 0.5～4mm, and the width at narrow interval is preferably 1 ± 0.1mm.
The present invention by even size interval, changes to the groove of the upper bracket 1 of prior art, lower carriage 4 upper bracket 1 and evenly distributes by upper bracket wide interval and upper bracket 1 narrow interval, and lower carriage 4 is by lower carriage 4 wide intervals and lower carriage 4 narrow being in interval alternative distribution.Adopt the method for two-sided diffusion, can improve the high temperature gettering effect of phosphorous diffusion, improve the transformation efficiency of solar cell; Simultaneously, thoroughly stopped because diffusingsurface is put back problems such as the electrical property that causes is bad; In addition, that can reduce effectively that silicon chip occurs in loading, unloading boat process collapses limit, arrisdefect, latent fragment problems such as split, and has improved product quality and qualification rate.
Embodiment 1
Quartz boat is used in a kind of diffusion, comprises side connector 3 and support; Support comprises a pair of upper bracket 1 and a pair of lower carriage 4; Upper bracket 1 is symmetrically fixed on side connector 3 upper end madial walls; Lower carriage 4 is symmetrically fixed on side connector 3 bottom inside walls; And upper bracket plane, 1 place and plane, lower carriage 4 place are parallel to each other, and the distance between the upper bracket 1 is wideer than the distance between the lower carriage 4; Described upper bracket 1 inner surface, prop up 4 uper side surfaces down and be provided with the gap size different recesses.Said side connector 3 outer upper are provided with handle 2.
The cross section of upper bracket 1 and lower carriage 4 is a rectangle, and wherein two upper bracket 1 opposed inside have protruding 6.
The surface of described upper bracket 1 inner bulge 6, lower carriage 4 uper side surfaces are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The employing recess width is 1.0 ± 0.1mm, and the size of wide interval is 2.2 ± 0.1mm, and the size at narrow interval is the quartz boat of 1 ± 0.1mm.Use the monocrystalline silicon piece of P type, after steps such as making herbs into wool, cleaning, get into diffusing step, insert respectively in quartz boat of the present invention and the prior art quartz boat; Quartz boat of the present invention and prior art quartz boat all adopt two opposing insertion grooves that are close together of silicon chip diffusingsurface to carry out the single face diffusion, carry out the test of 80 high square resistances, and diffusion technology is done suitable adjustment according to circumstances.The battery sheet of the embodiment of the invention 1 gained battery sheet and prior art is compared, and the result is following:
Table 1 diffusion back 80 square resistances relatively
Table 2 80 sides resistance electrical property relatively
Quartz boat is used in a kind of diffusion, comprises side connector 3 and support; Support comprises a pair of upper bracket 1 and a pair of lower carriage 4; Upper bracket 1 is symmetrically fixed on side connector 3 upper end madial walls; Lower carriage 4 is symmetrically fixed on side connector 3 bottom inside walls; And upper bracket plane, 1 place and plane, lower carriage 4 place are parallel to each other, and the distance between the upper bracket 1 is wideer than the distance between the lower carriage 4; Described upper bracket 1 inner surface, prop up 4 uper side surfaces down and be provided with the gap size different recesses.Said side connector 3 outer upper are provided with handle 2.
The cross section of upper bracket 1 and lower carriage 4 is a rectangle, and wherein two upper bracket 1 opposed inside have protruding 6.
The surface of described upper bracket 1 inner bulge 6, lower carriage 4 uper side surfaces are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The employing recess width is 1.0 ± 0.1mm, and the size of wide interval is 2.2 ± 0.1mm, and the size at narrow interval is the quartz boat of 1 ± 0.1mm.Use the monocrystalline silicon piece of P type, after steps such as making herbs into wool, cleaning, get into diffusing step, insert respectively in quartz boat of the present invention and the prior art quartz boat; Wherein, quartz boat of the present invention is that single silicon chip insertion groove carries out two-sided diffusion, and the prior art quartz boat is that two opposing insertion grooves that are close together of silicon chip diffusingsurface carry out the single face diffusion, carries out the test of 80 high square resistances, and diffusion technology is done suitable adjustment according to circumstances.The battery sheet of the embodiment of the invention 1 gained battery sheet and prior art is compared, and the result is following:
Table 3 diffusion back 80 square resistances relatively
Table 4 80 sides resistance electrical property relatively
Quartz boat is used in a kind of diffusion, comprises side connector 3 and support; Support comprises a pair of upper bracket 1 and a pair of lower carriage 4; Upper bracket 1 is symmetrically fixed on side connector 3 upper end madial walls; Lower carriage 4 is symmetrically fixed on side connector 3 bottom inside walls; And upper bracket plane, 1 place and plane, lower carriage 4 place are parallel to each other, and the distance between the upper bracket 1 is wideer than the distance between the lower carriage 4; Described upper bracket 1 inner surface, prop up 4 uper side surfaces down and be provided with the gap size different recesses.Said side connector 3 outer upper are provided with handle 2.
The cross section of upper bracket 1 and lower carriage 4 is a rectangle, and wherein two upper bracket 1 opposed inside have protruding 6.
The surface of described upper bracket 1 inner bulge 6, lower carriage 4 uper side surfaces are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The employing recess width is 0.7 ± 0.1mm, and the size of wide interval is 3.0 ± 0.1mm, and the size at narrow interval is the quartz boat of 1.5 ± 0.1mm.Use the monocrystalline silicon piece of P type, after steps such as making herbs into wool, cleaning, get into diffusing step, insert respectively in quartz boat of the present invention and the prior art quartz boat; The present invention and prior art quartz boat all adopt two opposing insertion grooves that are close together of silicon chip diffusingsurface to carry out the single face diffusion, carry out 60 sides resistance test, and diffusion technology is done suitable adjustment according to circumstances.The battery sheet of the embodiment of the invention 1 gained battery sheet and prior art is compared, and the result is following:
Table 5 diffusion back 60 square resistances relatively
Table 6 60 sides resistance electrical property relatively
Embodiment 4
Quartz boat is used in a kind of diffusion, comprises side connector 3 and support; Support comprises a pair of upper bracket 1 and a pair of lower carriage 4; Upper bracket 1 is symmetrically fixed on side connector 3 upper end madial walls; Lower carriage 4 is symmetrically fixed on side connector 3 bottom inside walls; And upper bracket plane, 1 place and plane, lower carriage 4 place are parallel to each other, and the distance between the upper bracket 1 is wideer than the distance between the lower carriage 4; Described upper bracket 1 inner surface, prop up 4 uper side surfaces down and be provided with the gap size different recesses.Said side connector 3 outer upper are provided with handle 2.
The cross section of upper bracket 1 and lower carriage 4 is a rectangle, and wherein two upper bracket 1 opposed inside have protruding 6.
The surface of described upper bracket 1 inner bulge 6, lower carriage 4 uper side surfaces are provided with by wide interval, the narrow groove that is in interval alternative distribution.
The employing recess width is 0.7 ± 0.1mm, and the size of wide interval is 3.0 ± 0.1mm, and the size at narrow interval is the quartz boat of 1.5 ± 0.1mm.Use the monocrystalline silicon piece of P type, after steps such as making herbs into wool, cleaning, get into diffusing step, insert respectively in quartz boat of the present invention and the prior art quartz boat; Wherein, quartz boat of the present invention is that a slice silicon chip inserts groove separately and carries out two-sided diffusion, and the prior art quartz boat is that opposing being close together of two silicon chip diffusingsurfaces inserted grooves and carried out the single face diffusion, carries out 60 sides resistance and tests, and diffusion technology is done suitable adjustment according to circumstances.The battery sheet of the embodiment of the invention 1 gained battery sheet and prior art is compared, and the result is following:
Table 7 diffusion back 60 square resistances relatively
Table 8 60 sides resistance electrical property relatively
Can find out that from the foregoing description the present invention can improve the uniformity of diffusion side's resistance, improve the open circuit voltage of solar cell, short circuit current, and then improve conversion efficiency.
Claims (10)
1. quartz boat is used in a diffusion, comprises side connector and support, it is characterized in that, support comprises a pair of upper bracket and a pair of lower carriage; Upper bracket is symmetrically fixed on connector upper end, side madial wall, and lower carriage is symmetrically fixed on side connector bottom inside wall, and upper bracket belongs to the plane and plane, lower carriage place is parallel to each other, and the distance between the upper bracket is wideer than the distance between the lower carriage; Described upper bracket inner surface, lower carriage uper side surface are provided with the gap size different recesses.
2. quartz boat is used in a kind of diffusion according to claim 1, it is characterized in that, the cross section of upper bracket and lower carriage is a rectangle, and wherein two upper bracket opposed inside have convexity.
3. quartz boat is used in a kind of diffusion according to claim 2, it is characterized in that, the surface of described upper bracket inner bulge, lower carriage uper side surface are provided with by wide interval, the narrow groove that is in interval alternative distribution.
4. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width of groove is 0.5～2mm.
5. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width of groove is 1.0 ± 0.1mm.
6. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width of wide interval is 0.5～5mm.
7. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width of wide interval is 2.2 ± 0.1mm.
8. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width at narrow interval is 0.5～4mm.
9. quartz boat is used in a kind of diffusion according to claim 3, it is characterized in that, the width at narrow interval is 1 ± 0.1mm.
10. quartz boat is used in a kind of diffusion according to claim 1, it is characterized in that, said side connector outer upper is provided with handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101822841A CN102723301A (en) | 2012-06-05 | 2012-06-05 | Quartz boat for diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101822841A CN102723301A (en) | 2012-06-05 | 2012-06-05 | Quartz boat for diffusion |
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| Publication Number | Publication Date |
|---|---|
| CN102723301A true CN102723301A (en) | 2012-10-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101822841A Pending CN102723301A (en) | 2012-06-05 | 2012-06-05 | Quartz boat for diffusion |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105006442A (en) * | 2015-07-15 | 2015-10-28 | 苏州工业园区纳米产业技术研究院有限公司 | Quartz boat for polycrystalline silicon thick film |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01305516A (en) * | 1988-06-03 | 1989-12-08 | Fuji Electric Co Ltd | Preparation of semiconductor element |
| CN101969085A (en) * | 2010-06-18 | 2011-02-09 | 常州亿晶光电科技有限公司 | Lightweight surface contact type anti-fouling quartz boat |
| CN102347211A (en) * | 2010-07-23 | 2012-02-08 | 思阳公司 | Method and apparatus for supporting planar substrates for conducting thermal treatment process |
| CN202183364U (en) * | 2011-07-27 | 2012-04-04 | 中节能太阳能科技（镇江）有限公司 | Quartz boat used for diffusion |
| CN202712236U (en) * | 2012-06-05 | 2013-01-30 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion |
-
2012
- 2012-06-05 CN CN2012101822841A patent/CN102723301A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01305516A (en) * | 1988-06-03 | 1989-12-08 | Fuji Electric Co Ltd | Preparation of semiconductor element |
| CN101969085A (en) * | 2010-06-18 | 2011-02-09 | 常州亿晶光电科技有限公司 | Lightweight surface contact type anti-fouling quartz boat |
| CN102347211A (en) * | 2010-07-23 | 2012-02-08 | 思阳公司 | Method and apparatus for supporting planar substrates for conducting thermal treatment process |
| CN202183364U (en) * | 2011-07-27 | 2012-04-04 | 中节能太阳能科技（镇江）有限公司 | Quartz boat used for diffusion |
| CN202712236U (en) * | 2012-06-05 | 2013-01-30 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105006442A (en) * | 2015-07-15 | 2015-10-28 | 苏州工业园区纳米产业技术研究院有限公司 | Quartz boat for polycrystalline silicon thick film |
| CN105006442B (en) * | 2015-07-15 | 2018-01-05 | 苏州工业园区纳米产业技术研究院有限公司 | Suitable for the quartz boat of thick polysilicon film |
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Application publication date: 20121010 |