CN202183364U - Quartz boat used for diffusion - Google Patents
Quartz boat used for diffusion Download PDFInfo
- Publication number
- CN202183364U CN202183364U CN2011202688624U CN201120268862U CN202183364U CN 202183364 U CN202183364 U CN 202183364U CN 2011202688624 U CN2011202688624 U CN 2011202688624U CN 201120268862 U CN201120268862 U CN 201120268862U CN 202183364 U CN202183364 U CN 202183364U
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- CN
- China
- Prior art keywords
- quartz
- rod
- rods
- diffusion
- subsequent use
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a quartz boat used for diffusion, comprising two upper quartz rods(1) arranged parallelly and at a same height, two lower quartz rods(2) arranged parallelly and at a same height, and quartz baffles(3) arranged at the two ends of the four quartz rods and used for supporting the quartz rods(1, 2). The spacing between the two upper quartz rods can bear a 156 mm *156 mm silicon chip, and a standby quartz rod(4) is arranged between the two upper quartz rods(1), and the spacing between the standby quartz rod(4) and one of the upper quartz rods(1) can bear a 125 mm *125 mm silicon chip. In the utility model, by arranging the standby quartz rod between the two upper quartz rods, the quartz rods can be determined whether to be embedded according to the dimensions of the silicon chips when the quartz boat used for diffusion is used; and the arranged quartz boat can bear the silicon chips of 125mm *125mm and 156mm *156 mm, so that the quartz boat can avoid being replaced due to replacing the silicon chip dimension, and the production cost is reduced.
Description
Technical field
The utility model relates to a kind of quartz boat, relates in particular to a kind of diffusion of in the silicon solar cell diffusion process, using and uses quartz boat.
Background technology
Among the manufacture craft process of silicon solar cell, require the silicon chip after making herbs into wool to carry out the P elements doping, with the boron element formation pn knot of silicon substrate, this realizes through diffusion technology.
Diffusion technology be the silicon substrate that is doped with boron element under the elevated-temperature seal environment, through chemical reaction, P elements deposits diffusing, doping at silicon face, forms the pn knot with the boracic silicon substrate.In the sealing anemostat, silicon chip is carried on the quartz boat body, places diffusion furnace to spread P elements, and quartz boat works to carry silicon chip.
In process of production, use existing quartz boat owing to the restriction that itself designs, quartz boat can only carry the wherein a kind of of 125mm * 125mm or 156mm * 156mm silicon chip; Like this in batch process; As change the size of silicon chip, and then must change supporting with it quartz boat, increase production cost;
The utility model content
The utility model purpose: the purpose of the utility model is the deficiency to prior art, provides a kind of diffusion that can carry 125mm * 125mm silicon chip and 156mm * 156mm silicon chip simultaneously to use quartz boat.
Technical scheme: quartz boat is used in the described diffusion of the utility model; Comprise parallel two following quartz rods that wait high two of being provided with to go up quartz rod and parallel setting such as height such as grade; And be arranged on the quartz baffle that four quartz rod two ends are used to support said quartz rod; Said two spacings that go up between the quartz rod can be carried 156mm * 156mm silicon chip; Go up between the quartz rods and be provided with a subsequent use quartz rod for said two, said subsequent use quartz rod can carry 125mm * 125mm silicon chip with spacing that goes up quartz rod wherein.
Preferably, said quartz baffle is provided with the circular hole with said subsequent use quartz rod coupling, and said subsequent use quartz rod two ends can be fixed in the said circular hole.
Preferably, an end of said subsequent use quartz rod is provided with dop, and the other end is provided with screw thread, through supporting fixed by nut.
The utility model compared with prior art; Its beneficial effect is: 1, the utility model is through being provided with a subsequent use quartz rod between the quartz rod on two; Can be during use according to the die size size, whether decision embeds quartz rod, quartz boat is set can supplies to carry 125mm * 125mm and 156mm * 156mm silicon chip; Avoid changing quartz boat, reduce production costs because of changing die size; 2, the utility model can embed corresponding with it subsequent use quartz rod through at the quartz baffle place circular hole being set, the installation of convenient subsequent use quartz rod; 3 the utility model are not influencing the silicon chip diffusion effect simultaneously, improve diffusion quartz boat utilization ratio.
Description of drawings
Fig. 1 is the structural representation of the utility model diffusion with quartz boat.
Fig. 2 is the structural representation of subsequent use quartz rod in the utility model.
Embodiment
Be elaborated in the face of the utility model technical scheme down, but the protection range of the utility model is not limited to said embodiment.
Embodiment 1: as shown in Figure 1; Quartz boat is used in the said diffusion of the utility model; Comprise parallel two following quartz rods 2 that wait high two of being provided with to go up quartz rod 1 and parallel setting such as height such as grade, and be arranged on four quartz rod 1,2 two ends and be used to support said quartz rod 1; 2 quartz baffle 3; Said two spacings that go up between the quartz rods 1 can be carried 156mm * 156mm silicon chip, go up between the quartz rod 1 and are provided with a subsequent use quartz rod 4 for said two, and said subsequent use quartz rod 4 can carry 125mm * 125mm silicon chip with spacing that goes up quartz rod 1 wherein.Said quartz baffle 3 is provided with the circular hole 5 with said subsequent use quartz rod 4 couplings, and said subsequent use quartz rod 4 two ends can be fixed in the said circular hole 5.One end of said subsequent use quartz rod 4 is provided with dop 6, and the other end is provided with screw thread, fixes through supporting nut 7.
In the present embodiment, quartz boat is long to be 528mm; Four quartz rods and subsequent use quartzy shank diameter are 14mm; Circular hole 5 diameters are 14mm; Circular hole hole heart distance quartz rod 2 bar heart vertical ranges down is 97mm; The said circular hole hole heart with wherein one to go up quartz rod 1 bar heart distance be 132mm; Subsequent use quartzy pole length is 543mm; Said subsequent use quartz rod one end dop 6 thick 5mm, diameter 20mm; Said subsequent use quartz rod threaded one end length 15mm; Corresponding nut 7 internal diameter 14mm with subsequent use quartz rod screw thread, thickness 10mm.
As stated, although represented and explained the utility model that with reference to specific preferred embodiment it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the utility model that does not break away from the accompanying claims definition, can make various variations in form with on the details to it.
Claims (3)
1. quartz boat is used in a diffusion; Comprise parallel two the following quartz rods (2) that wait high two of being provided with to go up quartz rod (1) and parallel setting such as height such as grade; And be arranged on four quartz rods (1; 2) two ends are used to support the quartz baffle (3) of said quartz rod (1,2), and said two spacings that go up between the quartz rod (1) can be carried 156mm * 156mm silicon chip; It is characterized in that: go up between the quartz rods (1) and be provided with a subsequent use quartz rod (4) for said two, said subsequent use quartz rod (4) can carry 125mm * 125mm silicon chip with spacing that goes up quartz rod (1) wherein.
2. quartz boat is used in diffusion according to claim 1, it is characterized in that: said quartz baffle (3) is provided with the circular hole (5) with said subsequent use quartz rod (4) coupling, and said subsequent use quartz rod (4) two ends are fixed in the said circular hole (5).
3. quartz boat is used in diffusion according to claim 2, it is characterized in that: an end of said subsequent use quartz rod (4) is provided with dop (6), and the other end is provided with screw thread, and is fixing through supporting nut (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202688624U CN202183364U (en) | 2011-07-27 | 2011-07-27 | Quartz boat used for diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202688624U CN202183364U (en) | 2011-07-27 | 2011-07-27 | Quartz boat used for diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202183364U true CN202183364U (en) | 2012-04-04 |
Family
ID=46176392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202688624U Expired - Lifetime CN202183364U (en) | 2011-07-27 | 2011-07-27 | Quartz boat used for diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202183364U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723301A (en) * | 2012-06-05 | 2012-10-10 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion |
| CN103489954A (en) * | 2012-06-11 | 2014-01-01 | 苏州安融石英有限公司 | Quartz boat |
| CN110364465A (en) * | 2019-07-21 | 2019-10-22 | 常州时创能源科技有限公司 | Quartz boat is used in a kind of carrying of silicon wafer |
| CN110379750A (en) * | 2019-07-21 | 2019-10-25 | 常州时创能源科技有限公司 | It is a kind of for carrying the quartz boat of silicon wafer |
| CN110379750B (en) * | 2019-07-21 | 2024-05-31 | 常州时创能源股份有限公司 | Quartz boat for bearing silicon wafers |
-
2011
- 2011-07-27 CN CN2011202688624U patent/CN202183364U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102723301A (en) * | 2012-06-05 | 2012-10-10 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion |
| CN103489954A (en) * | 2012-06-11 | 2014-01-01 | 苏州安融石英有限公司 | Quartz boat |
| CN110364465A (en) * | 2019-07-21 | 2019-10-22 | 常州时创能源科技有限公司 | Quartz boat is used in a kind of carrying of silicon wafer |
| CN110379750A (en) * | 2019-07-21 | 2019-10-25 | 常州时创能源科技有限公司 | It is a kind of for carrying the quartz boat of silicon wafer |
| CN110364465B (en) * | 2019-07-21 | 2023-08-29 | 常州时创能源股份有限公司 | Quartz boat for bearing silicon wafer |
| CN110379750B (en) * | 2019-07-21 | 2024-05-31 | 常州时创能源股份有限公司 | Quartz boat for bearing silicon wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120404 |