CN103489954A - Quartz boat - Google Patents
Quartz boat Download PDFInfo
- Publication number
- CN103489954A CN103489954A CN201210189339.1A CN201210189339A CN103489954A CN 103489954 A CN103489954 A CN 103489954A CN 201210189339 A CN201210189339 A CN 201210189339A CN 103489954 A CN103489954 A CN 103489954A
- Authority
- CN
- China
- Prior art keywords
- boat
- quartz
- feet
- pin
- quartz boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 239000010453 quartz Substances 0.000 title claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 9
- 230000004927 fusion Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Glass Compositions (AREA)
Abstract
The invention provides a quartz boat comprising a boat body and two boat feet for connecting the same side of the boat body. The two boat feet are milky-white non-transparent quartz and the uniformity of materials is guaranteed. In a high-temperature machining process, impurity grains are not released to the outside, and the purity and the yield of a machined object carried by the quartz boat are ensured. In the link of detection, the boat feet can keep higher reflection rate to infrared rays so that the positioning of automatic detection equipment is kept stable, the problem that the boat feet are damaged due to inaccurate positioning can be avoided, and the service life of the quartz boat is obviously prolonged.
Description
Technical field
The present invention relates to a kind of quartz boat, belong to the crystal silicon solar energy battery technical field.
Background technology
The physicochemical characteristics that quartz glass product is good with it, be widely used in microelectronic industry integrated circuit (IC) chip manufacturing industry.Quartz glass is to contain silica species, as crystal, silica.Four silica are that the raw material high temperature melting forms.Its dioxide-containing silica is more much higher than simple glass, and general quartz glass dioxide-containing silica is 99.999%, and the degree of purity of quartz glass product is also very high, even under the condition of high temperature, also can outwards not discharge contaminant particles.Quartz glass also has excellent optical property, and not only the visible ray light transmittance is good especially, and ultraviolet-transmitting, infrared ray.
The quartz glass electric property is splendid, and at normal temperatures, its resistance is equivalent to 10 times of simple glass, and very small to the dielectric absorption of whole frequencies, dielectric voltage withstand intensity is large.
The 5.4*10 of the coefficient of linear expansion of transparency silica glass, be equivalent to simple glass 1/121/20 because the thermal coefficient of expansion of quartz glass is low, therefore thermal stability is good especially, the avergae specific heat of transparency silica glass be 0.251 (0-900 ℃) pyroconductivity be 0.0035 card/centimetre, second, the degree (20 ℃) transparency silica glass deformation point, annealing point and working temperature.
Common tool when quartz boat is diffusion.Diffusion is the process procedure of manufacturing solar cell photoelectric conversion core component-PN junction, is the key technology that solar cell is manufactured.Existing quartz boat boat pin always use be that suprasil carries out the frosted processing, but when being used, reality just started accurately to find out datum mark under ultrared irradiation, but, after after a while, matte surface comes off, just be difficult to find out datum mark.
Summary of the invention
The objective of the invention is, for solving the problems of the technologies described above, provides a kind of quartz boat, and its boat pin is milky white opaque quartz, has advantages of infrared ray is had to the good reflection rate.
Above-mentioned technical purpose of the present invention is achieved by the following technical programs: a kind of quartz boat, two boat pin that comprise boat body and the same side that is connected the boat body, described boat pin is milky white opaque quartz, the material of described boat pin and described boat body is quartzy material and is welded together by high-temperature fusion, in the prior art, all to carry out the frosted processing with suprasil, but when being used, reality just started accurately to find out datum mark under ultrared irradiation, but after after a while, matte surface comes off or surface becomes smooth after, its reflectivity to light just reduces greatly, just be difficult to find out datum mark, cause the automatic checkout equipment location inaccurate, thereby break or the damage quartz boat.
Compared with prior art, advantage of the present invention is, adopted milky white opaque quartz material as the boat pin, guaranteed uniformity on material, in high temperature process, can outwards not discharge contaminant particles, guarantee purity and the yields of the object to be processed that quartz boat carries, and at detection, the boat pin can keep the reflectivity higher to infrared ray always, make the location of automatic checkout equipment can keep stable, not there will be location to be forbidden to break the problem of boat pin, significantly improved the useful life of quartz boat.
The accompanying drawing explanation
Fig. 1 is end view of the present invention;
Fig. 2 is vertical view of the present invention;
In figure, 1-boat body, 2-boat pin
Embodiment
This specific embodiment is only explanation of the invention; it is not limitation of the present invention; those skilled in the art can make to the present embodiment the modification that there is no creative contribution as required after reading this specification, but as long as all are subject to the protection of Patent Law in claim scope of the present invention.
Embodiment mono-
As shown in Figure 1 and Figure 2, a kind of quartz boat, comprise that 2, two described boat pin 2 of boat body 1 and two of the same sides that is connected boat body 1 boat pin are milky white opaque quartz, the material of described boat pin 2 and described boat body 1 is quartzy material, and described boat pin 2 and described boat body 1 weld by high-temperature fusion.
Claims (3)
1. a quartz boat, comprise two boat pin (2) of boat body (1) and the same side for being connected described boat body (1), and it is characterized in that: two the described boat pin in the same side (2) are milky white opaque quartz.
2. a kind of quartz boat according to claim 1, it is characterized in that: described boat pin (2) and described boat body (1) weld by high-temperature fusion.
3. a kind of quartz boat according to claim 1, it is characterized in that: the material of described boat pin (2) and described boat body (1) is quartzy material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210189339.1A CN103489954A (en) | 2012-06-11 | 2012-06-11 | Quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210189339.1A CN103489954A (en) | 2012-06-11 | 2012-06-11 | Quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103489954A true CN103489954A (en) | 2014-01-01 |
Family
ID=49830047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210189339.1A Pending CN103489954A (en) | 2012-06-11 | 2012-06-11 | Quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103489954A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201374326Y (en) * | 2009-02-26 | 2009-12-30 | 上海晶澳太阳能光伏科技有限公司 | Quartz boat |
| CN202094107U (en) * | 2011-06-13 | 2011-12-28 | 浚鑫科技股份有限公司 | Quartz boat |
| CN202145449U (en) * | 2011-07-07 | 2012-02-15 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion in process of manufacturing solar cells |
| CN202183364U (en) * | 2011-07-27 | 2012-04-04 | 中节能太阳能科技（镇江）有限公司 | Quartz boat used for diffusion |
-
2012
- 2012-06-11 CN CN201210189339.1A patent/CN103489954A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201374326Y (en) * | 2009-02-26 | 2009-12-30 | 上海晶澳太阳能光伏科技有限公司 | Quartz boat |
| CN202094107U (en) * | 2011-06-13 | 2011-12-28 | 浚鑫科技股份有限公司 | Quartz boat |
| CN202145449U (en) * | 2011-07-07 | 2012-02-15 | 山东力诺太阳能电力股份有限公司 | Quartz boat for diffusion in process of manufacturing solar cells |
| CN202183364U (en) * | 2011-07-27 | 2012-04-04 | 中节能太阳能科技（镇江）有限公司 | Quartz boat used for diffusion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140101 |