CN102722087B - 一种用于光刻设备的新型视觉系统 - Google Patents
一种用于光刻设备的新型视觉系统 Download PDFInfo
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- CN102722087B CN102722087B CN201210179959.7A CN201210179959A CN102722087B CN 102722087 B CN102722087 B CN 102722087B CN 201210179959 A CN201210179959 A CN 201210179959A CN 102722087 B CN102722087 B CN 102722087B
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- led light
- light source
- color led
- dichroic reflector
- amici prism
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- 238000001259 photo etching Methods 0.000 title abstract description 6
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 230000000007 visual effect Effects 0.000 claims abstract description 29
- 239000004576 sand Substances 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 238000001228 spectrum Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 3
- 239000003086 colorant Substances 0.000 abstract 1
- 238000005286 illumination Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Abstract
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CN201210179959.7A CN102722087B (zh) | 2012-06-01 | 2012-06-01 | 一种用于光刻设备的新型视觉系统 |
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CN201210179959.7A CN102722087B (zh) | 2012-06-01 | 2012-06-01 | 一种用于光刻设备的新型视觉系统 |
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CN102722087A CN102722087A (zh) | 2012-10-10 |
CN102722087B true CN102722087B (zh) | 2014-12-03 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106670652A (zh) * | 2016-12-29 | 2017-05-17 | 苏州逸美德科技有限公司 | 一种激光同轴加工装置及方法 |
CN107463070B (zh) * | 2017-09-22 | 2019-08-30 | 深圳市华星光电技术有限公司 | 曝光用光源系统 |
CN110465750A (zh) * | 2019-09-23 | 2019-11-19 | 珠海格力智能装备有限公司 | 打标设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6421123B1 (en) * | 1995-02-06 | 2002-07-16 | Nikon Corporation | Position detecting apparatus |
CN1794096A (zh) * | 2006-01-06 | 2006-06-28 | 上海微电子装备有限公司 | 一种自动对准装置 |
CN201654453U (zh) * | 2010-03-23 | 2010-11-24 | 南昌航空大学 | 光纤端面微光学器件数字光刻的装置 |
CN102242880A (zh) * | 2011-05-11 | 2011-11-16 | 晋城市环球利特光电技术有限公司 | 一种led白光光源 |
CN202693995U (zh) * | 2012-06-01 | 2013-01-23 | 中山新诺科技有限公司 | 一种视觉系统 |
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2012
- 2012-06-01 CN CN201210179959.7A patent/CN102722087B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6421123B1 (en) * | 1995-02-06 | 2002-07-16 | Nikon Corporation | Position detecting apparatus |
CN1794096A (zh) * | 2006-01-06 | 2006-06-28 | 上海微电子装备有限公司 | 一种自动对准装置 |
CN201654453U (zh) * | 2010-03-23 | 2010-11-24 | 南昌航空大学 | 光纤端面微光学器件数字光刻的装置 |
CN102242880A (zh) * | 2011-05-11 | 2011-11-16 | 晋城市环球利特光电技术有限公司 | 一种led白光光源 |
CN202693995U (zh) * | 2012-06-01 | 2013-01-23 | 中山新诺科技有限公司 | 一种视觉系统 |
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CN102722087A (zh) | 2012-10-10 |
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Address after: 528400, No. 3, Mingzhu Road, Guangdong, Zhongshan Torch Development Zone Applicant after: ZHONGSHAN AISCENT TECHNOLOGIES Co.,Ltd. Address before: 528400, No. 3, Mingzhu Road, Guangdong, Zhongshan Torch Development Zone Applicant before: ZHONGSHAN XINNUO TECHNOLOGY CO.,LTD. |
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Denomination of invention: Novel vision system for photoetching equipment Effective date of registration: 20180316 Granted publication date: 20141203 Pledgee: Shanghai Pudong Development Bank Limited by Share Ltd. Zhongshan branch Pledgor: ZHONGSHAN AISCENT TECHNOLOGIES Co.,Ltd. Registration number: 2018440000056 |
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