CN102707090A - Acceleration transducer - Google Patents
Acceleration transducer Download PDFInfo
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- CN102707090A CN102707090A CN2012100070734A CN201210007073A CN102707090A CN 102707090 A CN102707090 A CN 102707090A CN 2012100070734 A CN2012100070734 A CN 2012100070734A CN 201210007073 A CN201210007073 A CN 201210007073A CN 102707090 A CN102707090 A CN 102707090A
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Abstract
The invention provides an acceleration transducer which comprises a folding spring and detecting units, wherein the folding spring can be twisted and is disposed in the middle, and the detecting units are located on two sides of the folding spring. Each detecting unit comprises a first substrate, a second substrate, a first mass block, a second mass block, a first moving electrode, a second moving electrode, a first fixed electrode, a second fixed electrode, a first fixing end and a second fixing end. The first mass block and the second mass block are disposed above the first substrate and the second substrate and are connected with two sides of the folding spring. The first moving electrode and the second moving electrode extends out from the first mass block and the second mass block away from one side of the folding spring. The first fixed electrode and the second fixed electrode and the first moving electrode and the second moving electrode are in a comb teeth structure generating capacitance effect. The first fixing end and the second fixing end are used for supporting and fixing the first fixed electrode and the second fixed electrode. A first beam spring and a second beam spring are disposed at positions near the folded spring on the first mass block and the second mass block respectively. Compared with the prior art, the acceleration transducer is high in measurement accuracy and better in sensitivity performance.
Description
[technical field]
The present invention relates to a kind of acceleration transducer, relate in particular to a kind of can the use separately, also can combine to constitute the acceleration transducer of three axis accelerometer with twin-axis accelerometer.
[background technology]
Along with the intellectuality that deeply reaches electronic equipment of electronic mechanical system research, various types of sensors are greatly paid close attention to.Wherein, be widely used in the acceleration transducer of kinematic system monitoring and control, measure the Sensitive Apparatus acceleration transducer such as the core in the automotive safety air-cushion device and formed product.The kind of acceleration transducer is a lot, is main direction with capacitance acceleration transducer especially.
Acceleration transducer comprises two kinds of acceleration transducer and double-axel acceleration sensors; The acceleration transducer cost is low, application is wider; Not only can measure the acceleration of single direction; Can also combine with double-axel acceleration sensor to constitute three axis accelerometer, the acceleration that comes Measuring Object three directions in motion process is to measure the motion state of object.
The acceleration transducer of correlation technique is a capacity plate antenna formula sensor, and it mainly comprises spring, the mass that links to each other with spring, the moving electrode that links to each other with mass, is provided with at interval and fixed stationary electrode with moving electrode.Do the time spent as external force; Mass and moving electrode move under the traction of spring, and the said relatively stationary electrode of moving electrode is subjected to displacement, the changing over against area of the relative stationary electrode of moving electrode; Computing formula according to capacitor C: C=ε S/D, thus form a capacitor C between moving electrode and the stationary electrode.Wherein, S represents the relative area between the said relatively stationary electrode of said moving electrode, and D represents the spacing between the said relatively stationary electrode of said moving electrode.Can know by above-mentioned formula, capacitor C and space D change over nonlinear relationship.Therefore, the acceleration and the changes in capacitance of this acceleration transducer institute sensing also are nonlinearities change.Yet, in practical operation, need in the integrated circuit that flat acceleration transducer is arranged, a processing module be set, the non-linear output quantity that this processing module can degree of will speed up sensor converts linear output quantity to, to obtain required parameter value.But the existence of processing module can make the integrated circuit of this acceleration transducer become more complicated, in real work, can produce more noise, thereby reduce the signal to noise ratio (S/N ratio) of product largely, makes sensitivity and precision limited.
Therefore, be necessary to propose a kind of new acceleration transducer and overcome the problems referred to above.
[summary of the invention]
It is high that the technical matters that the present invention need solve provides a kind of measuring accuracy, the acceleration transducer that performance is more excellent.
A kind of acceleration transducer; It comprises the detecting unit that is positioned at central coilable folded spring, is positioned at the folded spring both sides; Said detecting unit comprises first substrate and second substrate, be positioned at first substrate and second substrate top and first mass that links to each other with the folded spring both sides respectively and second mass, respectively from first mass and second mass to first moving electrode that extends away from a side of folded spring and second moving electrode, constitute first fixed electrode and second fixed electrode that comb structure forms capacity effect, first stiff end and second stiff end that reaches support fixation first fixed electrode and second fixed electrode with first moving electrode and second moving electrode respectively, the position near folded spring on said first mass and second mass is respectively equipped with the first beam type spring and the second beam type spring.
As a kind of improvement of the present invention, the size of said first mass and second mass, shape all equate.
As a kind of improvement of the present invention, the first beam type spring and the second beam type spring are about the folded spring symmetry.
As a kind of improvement of the present invention, the length of two moving electrodes is identical, and the length of two fixed electrodes is identical.
As a kind of improvement of the present invention, the two ends of the said first beam type spring and the second beam type spring are respectively equipped with the fixed block of clamping mass.
Compare with correlation technique; Acceleration transducer of the present invention supports the inspection unit that is positioned at its both sides by the coilable folded spring that is positioned at central authorities; Realization can torsion type acceleration transducer, realizes the measurement effect that error is little, precision is high through the detecting unit of balance both sides.Compare flat acceleration transducer, can export linear measurement result, thereby avoid adopting processing module in the correlation technique and cause the low drawback of signal to noise ratio (S/N ratio), improve sensitivity and precision greatly, performance is more excellent.
[description of drawings]
Constitutional diagram when Fig. 1 interlocks with two fixed electrodes for two moving electrodes of acceleration transducer of the present invention.
The constitutional diagram that Fig. 2 separates for two moving electrodes of acceleration transducer of the present invention and two fixed electrodes.
[embodiment]
Below in conjunction with accompanying drawing and embodiment the present invention is described further.
As depicted in figs. 1 and 2, be acceleration transducer 10 of the present invention, it comprises the detecting unit that is positioned at central coilable folded spring 11, is positioned at folded spring 11 both sides.In the present embodiment, detecting unit comprises two detection modules that are symmetrically set, i.e. the first detection module 100 and second detection module 101.The first detection module 100 and second detection module 101 specifically comprise: two first substrates 120 separated by a distance and second substrate 121; First mass 130 and second mass 131 that are positioned at first substrate 120 and second substrate, 121 tops and link to each other with folded spring 11 both sides respectively; Respectively from first mass 130 and second mass 131 to first moving electrode 140 that extends away from a side of folded spring 11 and second moving electrode 141; Constitute first fixed electrode 150 and second fixed electrode 151 that comb structure forms capacity effect with first moving electrode 140 and second moving electrode 141 respectively; And be arranged at first fixed electrode 150 and second fixed electrode, 151 two ends first stiff end 160 and second stiff end 161 to play fixation.Wherein, first stiff end 160 and second stiff end 161 are fixed on a certain outer carrier.First substrate 120 and second substrate 121 can be strengthened the vibratory output of two masses.
Position near folded spring 11 on first mass 130 and second mass 131 is respectively equipped with the first beam type spring 170 and the second beam type spring 171 that supports first detection module 100 and 101 motions of second detection module respectively.The first beam type spring 170 is provided with two first fixed blocks, 701, the second beam type springs 171 that are held on first mass, 130 two ends and is provided with two second fixed blocks 711 that are held on second mass, 131 two ends.
In the present embodiment, the size of first mass 130 and second mass 131, shape equate that all simultaneously, the first beam type spring 170 and the second beam type spring 171 are about folded spring 11 symmetries, with the precision that guarantees to measure.In addition, the equal in length of first moving electrode 140 and second moving electrode 141, the equal in length of first fixed electrode 150 and second fixed electrode 151.
Like this, do the time spent as external force, first detection module 100 is understood because of each autokinesis of different external force with second detection module 101, and produces capacitance Δ C separately
1With Δ C
2, and because folded spring 11 exists, motion that will two detection modules of balance makes the two capacitance Δ C
1With Δ C
2Intimate equating, like this, will make the higher measurement result of the acceleration transducer output linearity, thereby improve the sensitivity and the measuring accuracy of acceleration transducer.
Above-described only is embodiment of the present invention, should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the invention design, can also make improvement, but these all belongs to protection scope of the present invention.
Claims (5)
1. acceleration transducer; It is characterized in that: said acceleration transducer comprises the detecting unit that is positioned at central coilable folded spring, is positioned at the folded spring both sides; Said detecting unit comprises first substrate and second substrate, be positioned at first substrate and second substrate top and first mass that links to each other with the folded spring both sides respectively and second mass, respectively from first mass and second mass to first moving electrode that extends away from a side of folded spring and second moving electrode, constitute first fixed electrode and second fixed electrode that comb structure forms capacity effect, first stiff end and second stiff end that reaches support fixation first fixed electrode and second fixed electrode with first moving electrode and second moving electrode respectively, the position near folded spring on said first mass and second mass is respectively equipped with the first beam type spring and the second beam type spring.
2. acceleration transducer according to claim 1 is characterized in that: the size of said first mass and second mass, shape all equate.
3. acceleration transducer according to claim 2 is characterized in that: the first beam type spring and the second beam type spring are about the folded spring symmetry.
4. acceleration transducer according to claim 3 is characterized in that: the length of two moving electrodes is identical, and the length of two fixed electrodes is identical.
5. according to any described acceleration transducer of claim 1 to 4, it is characterized in that: the two ends of the said first beam type spring and the second beam type spring are respectively equipped with the fixed block of clamping mass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210007073.4A CN102707090B (en) | 2012-01-11 | 2012-01-11 | Acceleration transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210007073.4A CN102707090B (en) | 2012-01-11 | 2012-01-11 | Acceleration transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102707090A true CN102707090A (en) | 2012-10-03 |
| CN102707090B CN102707090B (en) | 2014-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210007073.4A Active CN102707090B (en) | 2012-01-11 | 2012-01-11 | Acceleration transducer |
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| Country | Link |
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| CN (1) | CN102707090B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111122185A (en) * | 2019-06-28 | 2020-05-08 | 浙江荷清柔性电子技术有限公司 | Rotating part health monitoring system and locomotive |
| CN118624942A (en) * | 2024-08-09 | 2024-09-10 | 苏州敏芯微电子技术股份有限公司 | Triaxial accelerometer and electronic equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040182157A1 (en) * | 2003-03-20 | 2004-09-23 | Denso Corporation | Physical quantity sensor having spring |
| CN1605871A (en) * | 2004-10-18 | 2005-04-13 | 北京大学 | Comb capacitance type Z axis accelerometer and preparation method thereof |
| JP2006317182A (en) * | 2005-05-10 | 2006-11-24 | Matsushita Electric Works Ltd | Acceleration sensor |
| JP2007139505A (en) * | 2005-11-16 | 2007-06-07 | Denso Corp | Capacitance-type dynamic quantity sensor |
| CN102308223A (en) * | 2009-02-04 | 2012-01-04 | 罗伯特·博世有限公司 | Acceleration sensor and method for operating an acceleration sensor |
-
2012
- 2012-01-11 CN CN201210007073.4A patent/CN102707090B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040182157A1 (en) * | 2003-03-20 | 2004-09-23 | Denso Corporation | Physical quantity sensor having spring |
| CN1605871A (en) * | 2004-10-18 | 2005-04-13 | 北京大学 | Comb capacitance type Z axis accelerometer and preparation method thereof |
| JP2006317182A (en) * | 2005-05-10 | 2006-11-24 | Matsushita Electric Works Ltd | Acceleration sensor |
| JP2007139505A (en) * | 2005-11-16 | 2007-06-07 | Denso Corp | Capacitance-type dynamic quantity sensor |
| CN102308223A (en) * | 2009-02-04 | 2012-01-04 | 罗伯特·博世有限公司 | Acceleration sensor and method for operating an acceleration sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111122185A (en) * | 2019-06-28 | 2020-05-08 | 浙江荷清柔性电子技术有限公司 | Rotating part health monitoring system and locomotive |
| CN118624942A (en) * | 2024-08-09 | 2024-09-10 | 苏州敏芯微电子技术股份有限公司 | Triaxial accelerometer and electronic equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102707090B (en) | 2014-04-16 |
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Effective date of registration: 20170516 Address after: Singapore Ang Mo Kio 65 Street No. 10 techpoint Building 1 floor, No. 8 Patentee after: AAC Technologies (Singapore) Co., Ltd. Address before: 518057 Nanshan District province high tech Industrial Park, Shenzhen, North West New Road, No. 18 Co-patentee before: AAC Technologies (Singapore) Co., Ltd. Patentee before: AAC Acoustic Technologies (Shenzhen) Co., Ltd. |