CN102681251A - Color filter, manufacturing method thereof, liquid crystal panel and display device - Google Patents
Color filter, manufacturing method thereof, liquid crystal panel and display device Download PDFInfo
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- CN102681251A CN102681251A CN201210148742XA CN201210148742A CN102681251A CN 102681251 A CN102681251 A CN 102681251A CN 201210148742X A CN201210148742X A CN 201210148742XA CN 201210148742 A CN201210148742 A CN 201210148742A CN 102681251 A CN102681251 A CN 102681251A
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- colour filter
- alignment mark
- color
- black matrix
- filter alignment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/23—Photochromic filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
Abstract
The invention provides a manufacturing method of a color filter. The method comprises a step of forming a black matrix and a step of sequentially forming a first color filter layer, a second color filter layer and a third color filter layer, wherein the first color filter layer, the second color filter layer and the third color filter layer are formed in the black matrix respectively through a first color filter layer alignment mark, a second color filter layer alignment mark and a third color filter layer alignment mark; and in the step of forming the first color filter layer, the second color filter layer and the third color filter layer, the third color filter layer alignment mark is formed at the same time or after the first color filter layer is formed, and the first color filter layer alignment mark, the second color filter layer alignment mark and the third color filter layer alignment mark are not exactly same in color. According to manufacturing method of the color filter, the accuracy of alignment identification of exposure equipment in an exposure process in an exposure step is improved, and the occurrence of a phenomenon that the exposure equipment is difficult to acquire the third color filter layer alignment mark can be avoided, so that the production time is greatly saved, and the production cost is reduced.
Description
Technical field
The invention belongs to technical field of liquid crystal display, the liquid crystal panel and the display device that relate to a kind of colored filter and preparation method thereof and comprise this colored filter.
Background technology
In LCD (Liquid Crystal Display is called for short LCD), colored filter (Color Filter is called for short CF) is that liquid crystal panel is realized one of colored vitals that shows.
At present in the manufacturing process of colored filter; Generally be to clean transparent substrate earlier and make black matrix (the Black Matrix that shading is used above that; Be called for short BM), make the Red Green Blue colour filter then successively, make protective seam and transparency electrode (ITO) etc. at last.In the making of Red Green Blue colour filter, normally adopt the processing step of " photoresist of coating respective color forms color filter film → leading portion roasting → exposure → development in advance → back segment baking " to accomplish.Wherein, exposure → development is a most important technology during colour filter is made, and forms for the figure of colour filter and plays crucial effects.Exposure technology generally adopts exposure sources to accomplish; Detect the exposure aligning mark (mark) that pre-sets through the exposure sources automatic time; And the mask plate that will be provided with the colour filter figure is aimed at it; Colour filter film to coated respective color makes public then, again through technologies such as development, bakings, thereby forms corresponding colour filter on the colored filter.
In the exposure technology of prior art, generally be in the process that forms black matrix, to form simultaneously with black matrix to the make public alignment mark that adopted of each colour filter film.Shown in Figure 1 is the synoptic diagram of deceiving matrix and three colour filter alignment marks in the prior art color filter making method behind the black matrix of formation.As shown in Figure 1, the zone on substrate beyond the black matrix is respectively arranged with red colour filter alignment mark 3, green color filter layer alignment mark 4 and blue colour filter alignment mark 5.Wherein, be used to make the red colour filter alignment mark 3 of red colour filter, the blue colour filter alignment mark 5 that is used to make the green color filter layer alignment mark 4 of green color filter layer and is used to make blue colour filter all forms with black matrix simultaneously.Visible from figure, the material of making above-mentioned alignment mark is with to be used to make the material of deceiving matrix identical, and is black.When making red colour filter; Normally be coated with red colour filter film (manufacturing materials is red photoresist) in black matrix area; Then the red colour filter alignment mark 3 that is provided with on mask plate and the substrate is positioned and aims at; And the technology through exposure → development with the graph copying on the mask plate to red colour filter film, thereby form red colour filter as shown in Figure 2.And then make green color filter layer and blue colour filter successively.Because the manufacturing process of green color filter layer and blue colour filter is similar with the manufacturing process of red colour filter, repeats no more here.
But, in the manufacturing process of colour filter, for the convenience of technology; The whole coating method of general employing in the time of coating chromatic colour filter film, promptly the color filter film not only is coated in the black matrix, also is coated on other zones beyond the black matrix simultaneously; Like this, after red colour filter and green color filter layer complete, be arranged on being used on the substrate to make on the blue colour filter alignment mark 5 of blue colour filter not only coating and gone up red photoresist; Also green photoresist has been gone up in coating simultaneously; Thereby behind the blue colour filter film of coating (manufacturing materials is blue photoresist), make that the color contrast of the blue photoresist that blue colour filter alignment mark 5 and black matrix are interior is lower, cause in the exposure technology that blue colour filter is made; Exposure sources is relatively more difficult to the automatic identification of blue colour filter alignment mark 5; Usually cause the exposure sources warning, need this moment operating personnel's manual operations to position, not only expend the production time; And be easy to that exposure is inaccurate causes the colored filter yields to reduce even scrap because of contraposition is forbidden to cause, thereby increase production cost.
Summary of the invention
Technical matters to be solved by this invention is the above-mentioned deficiency that exists in the colored filter manufacturing process in the prior art; The liquid crystal panel and the display device that a kind of colored filter and preparation method thereof are provided and comprise this colored filter, this colored filter method for making can improve the accuracy of colored filter exposure sources contraposition identification in exposure process when forming filter layer.
Solving technical scheme that technical matters of the present invention is adopted is that this color filter making method comprises step that forms black matrix and the step that forms first colour filter, second colour filter and the 3rd colour filter successively; Said first colour filter is respectively formed in the black matrix through the 3rd colour filter alignment mark through the second colour filter alignment mark and the 3rd colour filter through the first colour filter alignment mark, second colour filter; Wherein, In above-mentioned steps; The 3rd colour filter alignment mark and first colour filter form simultaneously; Perhaps after first colour filter forms, form, the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Preferably, said the 3rd colour filter alignment mark and second colour filter form simultaneously, perhaps after second colour filter forms, form.
Further preferably, the second colour filter alignment mark and black matrix form simultaneously, perhaps form simultaneously with first colour filter, perhaps after first colour filter forms, form.
Preferably, the first colour filter alignment mark and said black matrix form simultaneously.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S11): on substrate, make the black matrix and the first colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix;
Step S12): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the second colour filter alignment mark and the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said second colour filter alignment mark and the 3rd colour filter alignment mark is identical with the color of said first colour filter;
Step S13): with the said second colour filter alignment mark is benchmark, in black matrix, makes second colour filter;
Step S14): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S21): on substrate, make the black matrix and the first colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix;
Step S22): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the second colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of the said second colour filter alignment mark is identical with the color of first colour filter;
Step S23): with the said second colour filter alignment mark is benchmark; In black matrix, make second colour filter; On substrate, make the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said the 3rd colour filter alignment mark is identical with the color of second colour filter;
Step S24): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix and the first colour filter alignment mark and the second colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark and the second colour filter alignment mark is identical with the color of black matrix;
Step S32): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said the 3rd colour filter alignment mark is identical with the color of first colour filter;
Step S33): with the said second colour filter alignment mark is benchmark, in black matrix, makes second colour filter;
Step S34): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
Preferably, said first colour filter is red colour filter, and said second colour filter is a green color filter layer, and said the 3rd colour filter is blue colour filter.
A kind of colored filter; Comprise the black matrix and first colour filter, second colour filter, the 3rd colour filter; And form the first colour filter alignment mark that first colour filter adopts, form the second colour filter alignment mark that second colour filter adopts and form the 3rd colour filter alignment mark that the 3rd colour filter adopts; Wherein, the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Preferably, the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark are arranged in the border area of deceiving on the substrate beyond the matrix.
Preferably, the color of said first colour filter alignment mark and the said second colour filter alignment mark, the 3rd colour filter alignment mark is inequality; The color of the perhaps said first colour filter alignment mark, the said second colour filter alignment mark, the 3rd colour filter alignment mark has nothing in common with each other; The color of the perhaps said first colour filter alignment mark, the second colour filter alignment mark and said the 3rd colour filter alignment mark is inequality.
A kind of liquid crystal panel comprises colored filter and array base palte, and said colored filter adopts above-mentioned colored filter.
A kind of display device comprises liquid crystal panel, and said liquid crystal panel adopts above-mentioned liquid crystal panel.
The invention has the beneficial effects as follows: because among the present invention; Make the 3rd colour filter alignment mark that the 3rd colour filter uses and first colour filter forms simultaneously or formation first colour filter forms after; Thereby when making the 3rd colour filter; Color contrast between the 3rd colour filter alignment mark and the blue color filter that in black matrix, is coated with is bigger, thereby has improved in the exposure technology exposure sources to the recognition capability of the 3rd colour filter alignment mark, thereby has avoided occurring the phenomenon that exposure sources is difficult to obtain the 3rd colour filter alignment mark; Practiced thrift the production time greatly; And make the contraposition accuracy improve, thereby also improved the colored filter yield of products, reduced production cost.
Description of drawings
Fig. 1 is the synoptic diagram of deceiving matrix and three colour filter alignment marks in the prior art color filter making method behind the black matrix of formation;
Fig. 2 forms the synoptic diagram of the black matrix in back and three colour filter alignment marks for red colour filter in the prior art color filter making method;
Fig. 3 is the synoptic diagram of deceiving the matrix and the first colour filter alignment mark in the embodiment of the invention 1,2 color filter making method behind the black matrix of formation;
Fig. 4 is the synoptic diagram of deceiving matrix and three colour filter alignment marks after red colour filter completes in the embodiment of the invention 1 color filter making method;
Fig. 5 is the synoptic diagram of deceiving matrix and three colour filters after the embodiment of the invention 1 color filter making method Smalt colour filter completes;
Fig. 6 is the synoptic diagram after red colour filter completes in the embodiment of the invention 2 color filter making method;
Fig. 7 is the synoptic diagram after green color filter layer completes in the embodiment of the invention 2 color filter making method;
Fig. 8 is the synoptic diagram of deceiving matrix and three colour filters after the embodiment of the invention 2 color filter making method Smalt colour filters complete;
Fig. 9 is the synoptic diagram that forms black matrix and the first colour filter alignment mark behind the black matrix, the second colour filter alignment mark in the embodiment of the invention 3 color filter making method;
Figure 10 is the synoptic diagram of deceiving matrix and three colour filter alignment marks after red colour filter completes in the embodiment of the invention 3 color filter making method;
Figure 11 is the synoptic diagram after green color filter layer completes in the embodiment of the invention 3 color filter making method;
Figure 12 is the synoptic diagram of deceiving matrix and three colour filters after the embodiment of the invention 3 color filter making method Smalt colour filters complete;
Figure 13 is the process flow diagram of the embodiment of the invention 1 color filter making method;
Figure 14 is the process flow diagram of the embodiment of the invention 2 color filter making method;
Figure 15 is the process flow diagram of the embodiment of the invention 3 color filter making method.
Among the figure: the 1-border area; 2-deceives matrix; The red colour filter alignment mark of 3-; 4-green color filter layer alignment mark; The blue colour filter alignment mark of 5-; 6-first colour filter; 7-second colour filter; 8-the 3rd colour filter; The 13-first colour filter alignment mark; The 14-second colour filter alignment mark; 15-the 3rd colour filter alignment mark.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, the present invention is described in further detail below in conjunction with accompanying drawing and embodiment.
A kind of color filter making method; Comprise step that forms black matrix and the step that forms first colour filter, second colour filter and the 3rd colour filter successively; Said first colour filter is respectively formed in the black matrix through the 3rd colour filter alignment mark through the second colour filter alignment mark and the 3rd colour filter through the first colour filter alignment mark, second colour filter; In above-mentioned steps; The 3rd colour filter alignment mark and first colour filter form simultaneously, perhaps after first colour filter forms, form, and the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
A kind of colored filter; Comprise the black matrix and first colour filter, second colour filter, the 3rd colour filter; And form the first colour filter alignment mark that first colour filter adopts, form the second colour filter alignment mark that second colour filter adopts and form the 3rd colour filter alignment mark that the 3rd colour filter adopts; Wherein, the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Embodiment 1:
In the present embodiment; This color filter making method mainly comprises step that forms black matrix and the step that forms first colour filter, second colour filter and the 3rd colour filter successively; Wherein, The alignment mark of making the use of first colour filter is the first colour filter alignment mark 13, and the alignment mark of making the use of second colour filter is the second colour filter alignment mark 14, and the alignment mark of making the use of the 3rd colour filter is the 3rd colour filter alignment mark 15.In above-mentioned steps, the first colour filter alignment mark 13 forms with black matrix simultaneously, and the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 and first colour filter 6 form simultaneously.
In the present embodiment, first colour filter 6 is red colour filter, and second colour filter 7 is a green color filter layer, and the 3rd colour filter 8 is blue colour filter.Certainly, first colour filter 6 also can be green color filter layer or blue colour filter, and second colour filter 7 and the 3rd colour filter 8 are in like manner.
Shown in figure 13, this method for making specifically comprises the steps:
Step S11): on substrate, make the black matrix and the first colour filter alignment mark 13 simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix.
In this step; Adopt photoetching process on substrate, to make the black matrix 2 and the first colour filter alignment mark 13 simultaneously; The said first colour filter alignment mark 13 is mainly used in exposure technology exposure sources contraposition exposure making first colour filter, and the color of the first colour filter alignment mark 13 of made is the black identical with deceiving matrix 2.
Shown in Figure 3 is the synoptic diagram of deceiving the matrix 2 and the first colour filter alignment mark 13 in the present embodiment behind the black matrix of formation.Wherein, the first colour filter alignment mark 13 is formed in the border areas 1 of deceiving on the substrate beyond matrix 2 zones.
Concrete, the manufacture craft of black matrix 2 comprises: the photoresist of painting black forms black rete → leading portion roasting → exposure → development → steps such as back segment baking in advance on substrate, and wherein, the exposure process that forms black matrix does not carry out contraposition.
Step S12): with the said first colour filter alignment mark 13 is benchmark; In black matrix, make first colour filter 6; On substrate, make the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 in the border area beyond the black matrix simultaneously, the color of said second colour filter alignment mark and the 3rd colour filter alignment mark is identical with the color of said first colour filter.
In this step, as shown in Figure 4, adopt photoetching process in black matrix, to make first colour filter 6, said first colour filter 6 is red colour filter, makes the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 simultaneously.Said second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 be mainly used in exposure technology exposure sources respectively the contraposition exposure to make second colour filter 7 and the 3rd colour filter 8.Wherein, said second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 are arranged in the border areas 1 of deceiving on the substrate beyond matrix 2 zones, and arrange with 13 one-tenth yi word patterns of the first colour filter alignment mark.The color of the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 is the redness identical with first colour filter 6.
Concrete; The manufacture craft of first colour filter 6 comprises: the red photoresist of coating forms red color filter → leading portion roasting → exposure → development → steps such as back segment baking in advance, and said second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 form through exposure → development step.
Fig. 4 is the synoptic diagram of deceiving matrix and three colour filter alignment marks after red colour filter completes in the present embodiment color filter making method.In exposure process, when guaranteeing to make public, mask plate and a series of automatic contraposition between the first colour filter alignment mark 13 of exposure sources through being used to form red colour filter form the precision of figure on the substrate.
Step S13): with the second colour filter alignment mark 14 is benchmark, in black matrix 2, makes second colour filter 7.
Said second colour filter 7 is a green color filter layer.
Concrete, the manufacture craft of green color filter layer comprises: the green photoresist of coating forms green colour filter film → leading portion roasting → exposure → development → steps such as back segment baking in advance.In exposure process, when guaranteeing to make public, mask plate and a series of automatic contraposition between the second colour filter alignment mark 14 of exposure sources through being used to form green color filter layer form the precision of figure on the substrate.
Step S14): with the 3rd colour filter alignment mark 15 is benchmark, in black matrix 2, makes the 3rd colour filter 8.
Said the 3rd colour filter 8 is blue colour filter.
Concrete, the manufacture craft of blue colour filter comprises: the blue photoresist of coating forms green film → leading portion roasting → exposure → development → steps such as back segment baking in advance.In exposure process, when guaranteeing to make public, mask plate and a series of automatic contraposition between the 3rd colour filter alignment mark 15 of exposure sources through being used to form blue colour filter form the precision of figure on the substrate.
Shown in Figure 5 is the synoptic diagram of deceiving matrix 2 and three colour filters after embodiment Smalt colour filter completes.
Step S15): at completing steps S14 make protective seam and transparency electrode on the substrate).
In this step, the step of making protective seam and transparency electrode is identical with prior art, repeats no more here.
Here it should be understood that; For saving technology; Present embodiment is in making the process of colored filter, and the first colour filter alignment mark 13, the second colour filter alignment mark 14 with the material that the 3rd colour filter alignment mark 15 is adopted are and its identical material of material that is adopted at formed black matrix or the colour filter of same operation.But, do not limit and be necessary for identical material.
A kind of colored filter, it adopts the said color filter making method of present embodiment to process.Wherein, Said colored filter comprises black matrix and first colour filter, second colour filter and the 3rd colour filter; Also comprise the first colour filter alignment mark that forms first colour filter and adopt, the second colour filter alignment mark that formation second colour filter adopts and the 3rd colour filter alignment mark that forms the employing of the 3rd colour filter; Wherein, the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.In the present embodiment, the color of the said first colour filter alignment mark is a black, and the color of said second colour filter alignment mark and the 3rd colour filter alignment mark is red.
A kind of liquid crystal panel comprises colored filter and array base palte, and it adopts the described colored filter of present embodiment.
For enhancing productivity; Colored filter and array base palte generally are made into the large scale specification; With after array base palte becomes liquid crystal panel to box-like, be divided into the junior unit liquid crystal panel of certain specification at colored filter more as required, because the first colour filter alignment mark, the second colour filter alignment mark, the 3rd colour filter alignment mark all are arranged in the border area 1 or non-display area of substrate in the colored filter here; Therefore; In follow-up division processing process, they possibly cut apart removal, perhaps still are retained in the border area or the non-display area of junior unit liquid crystal panel.
A kind of display device comprises liquid crystal panel, and it adopts the described liquid crystal panel of present embodiment.
Embodiment 2:
The difference of present embodiment and embodiment 1 is that said the 3rd colour filter alignment mark 15 is not to form when forming first colour filter 6 with the second colour filter alignment mark 14, but forms simultaneously with second colour filter 7.
Shown in figure 14, this method for making specifically comprises the steps:
Step S21): on substrate, make the black matrix 2 and the first colour filter alignment mark 13 simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix, and is as shown in Figure 4.
Step S22): with the first colour filter alignment mark 13 is benchmark; In black matrix 2, make first colour filter 6; On substrate, make the second colour filter alignment mark 14 in the border area beyond the black matrix simultaneously; The color of the said second colour filter alignment mark is identical with the color of first colour filter, and is as shown in Figure 6.
Step S23): with the second colour filter alignment mark 14 is benchmark; In black matrix 2, make second colour filter 7; On substrate, make the 3rd colour filter alignment mark 15 in the border area beyond the black matrix simultaneously; The color of said the 3rd colour filter alignment mark is identical with the color of second colour filter, and is as shown in Figure 7.
Step S24): with the 3rd colour filter alignment mark 15 is benchmark, in black matrix 2, makes the 3rd colour filter 8, as shown in Figure 8.
Step S25): at completing steps S24 make protective seam and transparency electrode on the substrate).
In the present embodiment, the said first colour filter alignment mark 13 is identical with the color of black matrix 2, is black; The said second colour filter alignment mark 14 is identical with the color of first colour filter 6, is redness; Said the 3rd colour filter alignment mark 15 is identical with the color of second colour filter 7, is green.
In the present embodiment, the difference in the color filter making method on the production order of alignment mark, other concrete manufacturing process steps are all identical with embodiment 1, repeat no more here.
A kind of colored filter, it adopts the said color filter making method of present embodiment to process.Wherein, the color of the said first colour filter alignment mark is a black, and the color of the said second colour filter alignment mark is red, and the color of said the 3rd colour filter alignment mark is green.
A kind of liquid crystal panel comprises colored filter and array base palte, and it adopts the described colored filter of present embodiment.
A kind of display device comprises liquid crystal panel, and it adopts the described liquid crystal panel of present embodiment.
Embodiment 3:
The difference of present embodiment and embodiment 1 is that the said first colour filter alignment mark 13 and the second colour filter alignment mark 14 form with black matrix simultaneously, and the 3rd colour filter alignment mark 15 and first colour filter 6 form simultaneously.
Shown in figure 15, this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix 2 and the first colour filter alignment mark 13 and the second colour filter alignment mark 14 simultaneously, the color of the said first colour filter alignment mark and the second colour filter alignment mark is identical with the color of black matrix, as shown in Figure 9.
Step S32): with the first colour filter alignment mark 13 is benchmark; In black matrix 2, make first colour filter 6; On substrate, make the 3rd colour filter alignment mark 15 in the border area beyond the black matrix simultaneously; The color of said the 3rd colour filter alignment mark is identical with the color of first colour filter, and is shown in figure 10.
Step S33): with the second colour filter alignment mark 14 is benchmark, in black matrix 2, makes second colour filter 7, shown in figure 11.
Step S34): with the 3rd colour filter alignment mark 15 is benchmark, in black matrix 2, makes the 3rd colour filter 8, shown in figure 12.
Step S35): at completing steps S34 make protective seam and transparency electrode on the substrate).
In the present embodiment, the said first colour filter alignment mark 13 and the second colour filter alignment mark 14 are identical with the color of black matrix 2, are black; Said the 3rd colour filter alignment mark 15 is identical with the color of first colour filter 6, is redness.
In the present embodiment, the difference in the color filter making method on the production order of alignment mark, other concrete manufacturing process steps are all identical with embodiment 1, repeat no more here.
A kind of colored filter, it adopts the said color filter making method of present embodiment to process.Wherein, the color of said first colour filter alignment mark and the said second colour filter alignment mark is a black, and the color of said the 3rd colour filter alignment mark is red.
A kind of liquid crystal panel comprises colored filter and array base palte, and it adopts the described colored filter of present embodiment.
A kind of display device comprises liquid crystal panel, and it adopts the described liquid crystal panel of present embodiment.
Certainly; The formation of the said first colour filter alignment mark 13, the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 is not limited to above three kinds of situation in proper order; Such as, the first colour filter alignment mark 13 and the second colour filter alignment mark 14 not necessarily form with black matrix simultaneously, can also be after black matrix forms, first colour filter 6 forms separately before forming; Perhaps the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 not necessarily form for 6 layers with first colour filter simultaneously; Can also be after first colour filter 6 form, before forming, second colour filter 7 forms separately, or the like.Any production order that meets essence of the present invention is all in protection scope of the present invention.
Relative prior art color filter making method; Embodiment 1-3 is through the formation order of adjustment the 3rd colour filter alignment mark; Guaranteed that the 3rd colour filter alignment mark has enough big color contrast after the blue photoresist of coating, when making public making the 3rd colour filter; Improved in the 3rd colour filter forming process exposure sources to the recognition capability of the 3rd colour filter alignment mark; Thereby avoided exposure sources to be difficult to obtain the phenomenon generation of the 3rd color filter alignment mark, practiced thrift the production time greatly, reduced production cost.
It is understandable that above embodiment only is the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For the one of ordinary skilled in the art, under the situation that does not break away from spirit of the present invention and essence, can make various modification and improvement, these modification also are regarded as protection scope of the present invention with improving.
Claims (13)
1. color filter making method; Comprise step that forms black matrix and the step that forms first colour filter, second colour filter and the 3rd colour filter successively; Said first colour filter is respectively formed in the black matrix through the 3rd colour filter alignment mark through the second colour filter alignment mark and the 3rd colour filter through the first colour filter alignment mark, second colour filter; It is characterized in that in above-mentioned steps, the 3rd colour filter alignment mark and first colour filter form simultaneously; Perhaps after first colour filter forms, form, the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
2. method for making according to claim 1 is characterized in that, said the 3rd colour filter alignment mark and second colour filter form simultaneously, perhaps after second colour filter forms, forms.
3. method for making according to claim 1 and 2 is characterized in that, the second colour filter alignment mark and black matrix form simultaneously, perhaps forms simultaneously with first colour filter, perhaps after first colour filter forms, forms.
4. method for making according to claim 3 is characterized in that, the first colour filter alignment mark and said black matrix form simultaneously.
5. method for making according to claim 4 is characterized in that this method for making specifically comprises the steps:
Step S11): on substrate, make the black matrix and the first colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix;
Step S12): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the second colour filter alignment mark and the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said second colour filter alignment mark and the 3rd colour filter alignment mark is identical with the color of said first colour filter;
Step S13): with the said second colour filter alignment mark is benchmark, in black matrix, makes second colour filter;
Step S14): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
6. method for making according to claim 4 is characterized in that this method for making specifically comprises the steps:
Step S21): on substrate, make the black matrix and the first colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark is identical with the color of black matrix;
Step S22): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the second colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of the said second colour filter alignment mark is identical with the color of first colour filter;
Step S23): with the said second colour filter alignment mark is benchmark; In black matrix, make second colour filter; On substrate, make the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said the 3rd colour filter alignment mark is identical with the color of second colour filter;
Step S24): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
7. method for making according to claim 4 is characterized in that this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix and the first colour filter alignment mark and the second colour filter alignment mark simultaneously, the color of the said first colour filter alignment mark and the second colour filter alignment mark is identical with the color of black matrix;
Step S32): with the said first colour filter alignment mark is benchmark; In black matrix, make first colour filter; On substrate, make the 3rd colour filter alignment mark in the border area beyond the black matrix simultaneously, the color of said the 3rd colour filter alignment mark is identical with the color of first colour filter;
Step S33): with the said second colour filter alignment mark is benchmark, in black matrix, makes second colour filter;
Step S34): with said the 3rd colour filter alignment mark is benchmark, in black matrix, makes the 3rd colour filter.
8. color filter making method according to claim 4 is characterized in that, said first colour filter is red colour filter, and said second colour filter is a green color filter layer, and said the 3rd colour filter is blue colour filter.
9. colored filter; Comprise the black matrix and first colour filter, second colour filter, the 3rd colour filter; And form the first colour filter alignment mark that first colour filter adopts, form the second colour filter alignment mark that second colour filter adopts and form the 3rd colour filter alignment mark that the 3rd colour filter adopts; It is characterized in that the color of the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
10. colored filter according to claim 9 is characterized in that, the said first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark are arranged in the border area of deceiving on the substrate beyond the matrix.
11. colored filter according to claim 9 is characterized in that, the color of said first colour filter alignment mark and the said second colour filter alignment mark, the 3rd colour filter alignment mark is inequality; The color of the perhaps said first colour filter alignment mark, the said second colour filter alignment mark, the 3rd colour filter alignment mark has nothing in common with each other; The color of the perhaps said first colour filter alignment mark, the second colour filter alignment mark and said the 3rd colour filter alignment mark is inequality.
12. a liquid crystal panel comprises colored filter and array base palte, it is characterized in that, said colored filter adopts the arbitrary described colored filter of claim 9-11.
13. a display device comprises liquid crystal panel, it is characterized in that, said liquid crystal panel adopts the described liquid crystal panel of claim 12.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210148742.XA CN102681251B (en) | 2012-05-14 | 2012-05-14 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
| PCT/CN2012/084605 WO2013170595A1 (en) | 2012-05-14 | 2012-11-14 | Color filter, method for manufacturing same, liquid crystal panel, and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210148742.XA CN102681251B (en) | 2012-05-14 | 2012-05-14 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
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| Publication Number | Publication Date |
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| CN102681251A true CN102681251A (en) | 2012-09-19 |
| CN102681251B CN102681251B (en) | 2015-09-09 |
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| CN201210148742.XA Active CN102681251B (en) | 2012-05-14 | 2012-05-14 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
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| Country | Link |
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| CN (1) | CN102681251B (en) |
| WO (1) | WO2013170595A1 (en) |
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| CN103389533A (en) * | 2013-07-31 | 2013-11-13 | 京东方科技集团股份有限公司 | Method for manufacturing color filter and color filter |
| WO2013170595A1 (en) * | 2012-05-14 | 2013-11-21 | 京东方科技集团股份有限公司 | Color filter, method for manufacturing same, liquid crystal panel, and display device |
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| CN105093641A (en) * | 2015-07-29 | 2015-11-25 | 武汉华星光电技术有限公司 | Terminal laminating alignment method and color membrane substrate |
| CN105511126A (en) * | 2016-01-21 | 2016-04-20 | 京东方科技集团股份有限公司 | Display panel and preparing method and testing method thereof |
| CN105511126B (en) * | 2016-01-21 | 2018-11-13 | 京东方科技集团股份有限公司 | Display panel and preparation method thereof and detection method |
| WO2018188134A1 (en) * | 2017-04-12 | 2018-10-18 | 深圳市华星光电技术有限公司 | Method for fabricating multi-color color resistor |
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| CN112987362A (en) * | 2019-12-17 | 2021-06-18 | 上海仪电显示材料有限公司 | Liquid crystal display substrate and forming method thereof, liquid crystal display panel and forming method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102681251B (en) | 2015-09-09 |
| WO2013170595A1 (en) | 2013-11-21 |
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