CN102681251B - A kind of colored filter and preparation method thereof and liquid crystal panel and display device - Google Patents
A kind of colored filter and preparation method thereof and liquid crystal panel and display device Download PDFInfo
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- CN102681251B CN102681251B CN201210148742.XA CN201210148742A CN102681251B CN 102681251 B CN102681251 B CN 102681251B CN 201210148742 A CN201210148742 A CN 201210148742A CN 102681251 B CN102681251 B CN 102681251B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/23—Photochromic filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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Abstract
The invention provides a kind of method for making of colored filter, comprise the step that forms black matrix and form the first colour filter successively, the step of the second colour filter and the 3rd colour filter, described first colour filter is by the first colour filter alignment mark, second colour filter is respectively formed in black matrix by the second colour filter alignment mark and the 3rd colour filter by the 3rd colour filter alignment mark, in above-mentioned steps, 3rd colour filter alignment mark and the first colour filter are formed simultaneously, or formed after the first colour filter is formed, described first colour filter alignment mark, the color of the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.Invention increases the accuracy of exposure sources contraposition identification in exposure process in step of exposure.The phenomenon that the present invention can avoid exposure sources to be difficult to acquisition the 3rd color filter alignment mark occurs, and has greatly saved the production time, has reduced production cost.
Description
Technical field
The invention belongs to technical field of liquid crystal display, relate to a kind of colored filter and preparation method thereof and comprise liquid crystal panel and the display device of this colored filter.
Background technology
In liquid crystal display (Liquid Crystal Display is called for short LCD), colored filter (Color Filter is called for short CF) is that liquid crystal panel realizes one of vitals of colored display.
In the manufacturing process of current colored filter; generally black matrix (the Black Matrix first cleaning transparent substrate and make shading thereon; be called for short BM), then make Red Green Blue colour filter successively, finally make protective seam and transparency electrode (ITO) etc.In the making of Red Green Blue colour filter, the processing step of " photoresist of coating respective color forms color filter film → leading portion, and pre-baked → exposure → development → back segment toasts " is normally adopted.Wherein, exposure → development is most important technique during colour filter makes, and the figure for colour filter is formed and plays vital effect.Exposure technology generally adopts exposure sources, automatically exposure aligning mark (mark) pre-set is detected in real time by exposure sources, and the mask plate being provided with colour filter figure is aimed at it, then the color filter of coated respective color is exposed, again through techniques such as development, bakings, thus form corresponding colour filter on colored filter.
In the exposure technology of prior art, expose adopted alignment mark to each color filter is generally formed with black matrix in the process forming black matrix simultaneously.Figure 1 shows that in the method for making of prior art colored filter the schematic diagram forming black matrix and three colour filter alignment marks after black matrix.As shown in Figure 1, the region on substrate beyond black matrix is respectively arranged with red color filter layer alignment mark 3, green color filter layer alignment mark 4 and blue color filter layer alignment mark 5.Wherein, for make red color filter layer red color filter layer alignment mark 3, for making the green color filter layer alignment mark 4 of green color filter layer and the blue color filter layer alignment mark 5 for making blue color filter layer is all formed with black matrix simultaneously.As seen from the figure, the material making above-mentioned alignment mark is identical with the material for making black matrix, and is black.When making red color filter layer, normally black matrix area coating red color filter film (making material is red photoresist), then mask plate is positioned with the red color filter layer alignment mark 3 that substrate is arranged and aims at, and pass through exposure → technique of developing by the graph copying on mask plate on red color filter film, thus form red color filter layer as shown in Figure 2.And then make green color filter layer and blue color filter layer successively.Because green color filter layer is similar with the manufacturing process of blue color filter layer and the manufacturing process of red color filter layer, repeat no more here.
But, in the manufacturing process of colour filter, in order to the convenience of technique, overall coating method is generally adopted when coating chromatic color filter, namely color filter film is not only coated in black matrix, also be coated on other regions beyond black matrix simultaneously, like this, after red color filter layer and green color filter layer complete, be arranged on substrate for make blue color filter layer blue color filter layer alignment mark 5 on not only coating gone up red photoresist, also green photoresist has been gone up in coating simultaneously, thus after coating blue color film (making material is blue photoresist), make blue color filter layer alignment mark 5 lower with the color contrast of the blue photoresist in black matrix, cause in the exposure technology made at blue color filter layer, exposure sources is to the automatic identification difficulty of blue color filter layer alignment mark 5, exposure sources is usually caused to report to the police, operating personnel's manual operations is now needed to position, not only expend the production time, and be easy to because contraposition is forbidden to cause exposure inaccurate and cause the reduction of colored filter yields even to be scrapped, thus increase production cost.
Summary of the invention
Technical matters to be solved by this invention is for above shortcomings in colored filter manufacturing process in prior art, there is provided a kind of colored filter and preparation method thereof and comprise liquid crystal panel and the display device of this colored filter, this colored filter method for making can improve the accuracy of colored filter exposure sources contraposition identification in exposure process when forming filter layer.
Solve the technology of the present invention problem to adopt technical scheme be that the method for making of this colored filter comprises the step that forms black matrix and forms the first colour filter successively, the step of the second colour filter and the 3rd colour filter, described first colour filter is by the first colour filter alignment mark, second colour filter is respectively formed in black matrix by the second colour filter alignment mark and the 3rd colour filter by the 3rd colour filter alignment mark, wherein, in above-mentioned steps, 3rd colour filter alignment mark and the first colour filter are formed simultaneously, or formed after the first colour filter is formed, described first colour filter alignment mark, the color of the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Preferably, described 3rd colour filter alignment mark and the second colour filter are formed simultaneously, or are formed after the second colour filter is formed.
Further preferably, the second colour filter alignment mark and black matrix are formed simultaneously, or are formed with the first colour filter simultaneously, or are formed after the first colour filter is formed.
Preferably, the first colour filter alignment mark and described black matrix are formed simultaneously.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S11): on substrate, make black matrix and the first colour filter alignment mark, the color of described first colour filter alignment mark is identical with the color of black matrix simultaneously;
Step S12): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the second colour filter alignment mark and the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, described second colour filter alignment mark is identical with the color of described first colour filter with the color of the 3rd colour filter alignment mark;
Step S13): with described second colour filter alignment mark for benchmark, in black matrix, make the second colour filter;
Step S14): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S21): on substrate, make black matrix and the first colour filter alignment mark, the color of described first colour filter alignment mark is identical with the color of black matrix simultaneously;
Step S22): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the second colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described second colour filter alignment mark is identical with the color of the first colour filter;
Step S23): with described second colour filter alignment mark for benchmark, the second colour filter is made in black matrix, make the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the second colour filter;
Step S24): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
A kind of preferred version is that this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix and the first colour filter alignment mark and the second colour filter alignment mark, described first colour filter alignment mark is identical with the color of black matrix with the color of the second colour filter alignment mark simultaneously;
Step S32): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the first colour filter;
Step S33): with described second colour filter alignment mark for benchmark, in black matrix, make the second colour filter;
Step S34): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
Preferably, described first colour filter is red color filter layer, and described second colour filter is green color filter layer, and described 3rd colour filter is blue color filter layer.
A kind of colored filter, comprise black matrix and the first colour filter, the second colour filter, the 3rd colour filter, and the 3rd colour filter alignment mark that the first colour filter alignment mark of formation first colour filter employing, the second colour filter alignment mark forming the second colour filter employing and formation the 3rd colour filter adopt, wherein, the color of described first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Preferably, described first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark are arranged in the border area on substrate beyond black matrix.
Preferably, described first colour filter alignment mark is not identical with the color of described second colour filter alignment mark, the 3rd colour filter alignment mark; Or the color of described first colour filter alignment mark, described second colour filter alignment mark, the 3rd colour filter alignment mark is different; Or described first colour filter alignment mark, the second colour filter alignment mark are not identical with the color of described 3rd colour filter alignment mark.
A kind of liquid crystal panel, comprise colored filter and array base palte, described colored filter adopts above-mentioned colored filter.
A kind of display device, comprise liquid crystal panel, described liquid crystal panel adopts above-mentioned liquid crystal panel.
The invention has the beneficial effects as follows: due in the present invention, the 3rd colour filter alignment mark and the first colour filter that make the 3rd colour filter are formed simultaneously or are formed after the first colour filter is formed, thus when making the 3rd colour filter, color contrast between 3rd colour filter alignment mark and the blue color rete be coated with in black matrix is larger, thus to improve in exposure technology exposure sources to the recognition capability of the 3rd colour filter alignment mark, thus avoid and occur that exposure sources is difficult to the phenomenon of acquisition the 3rd colour filter alignment mark, greatly save the production time, and contraposition accuracy is improved, thus also improve the yields of colorized optical filtering flake products, reduce production cost.
Accompanying drawing explanation
Fig. 1 is the schematic diagram forming black matrix and three colour filter alignment marks after black matrix in the method for making of prior art colored filter;
Fig. 2 is the schematic diagram that in the method for making of prior art colored filter, red color filter layer forms rear black matrix and three colour filter alignment marks;
Fig. 3 is the schematic diagram of black matrix and the first colour filter alignment mark after forming black matrix in the method for making of the embodiment of the present invention 1,2 colored filter;
Fig. 4 is the schematic diagram of red color filter layer black matrix and three colour filter alignment marks after completing in the method for making of the embodiment of the present invention 1 colored filter;
Fig. 5 is the schematic diagram of blue color filter layer black matrix and three colour filters after completing in the method for making of the embodiment of the present invention 1 colored filter;
Fig. 6 be in the method for making of the embodiment of the present invention 2 colored filter red color filter layer complete after schematic diagram;
Fig. 7 is the schematic diagram after the method for making Green colour filter of the embodiment of the present invention 2 colored filter completes;
Fig. 8 is the schematic diagram of blue color filter layer black matrix and three colour filters after completing in the method for making of the embodiment of the present invention 2 colored filter;
Fig. 9 is the schematic diagram forming black matrix and the first colour filter alignment mark after black matrix, the second colour filter alignment mark in the method for making of the embodiment of the present invention 3 colored filter;
Figure 10 is the schematic diagram of red color filter layer black matrix and three colour filter alignment marks after completing in the method for making of the embodiment of the present invention 3 colored filter;
Figure 11 is the schematic diagram after the method for making Green colour filter of the embodiment of the present invention 3 colored filter completes;
Figure 12 is the schematic diagram of blue color filter layer black matrix and three colour filters after completing in the method for making of the embodiment of the present invention 3 colored filter;
Figure 13 is the process flow diagram of the method for making of the embodiment of the present invention 1 colored filter;
Figure 14 is the process flow diagram of the method for making of the embodiment of the present invention 2 colored filter;
Figure 15 is the process flow diagram of the method for making of the embodiment of the present invention 3 colored filter.
In figure: 1-border area; The black matrix of 2-; 3-red color filter layer alignment mark; 4-green color filter layer alignment mark; 5-blue color filter layer alignment mark; 6-first colour filter; 7-second colour filter; 8-the 3rd colour filter; 13-first colour filter alignment mark; 14-second colour filter alignment mark; 15-the 3rd colour filter alignment mark.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
A kind of method for making of colored filter, comprise the step that forms black matrix and form the first colour filter successively, the step of the second colour filter and the 3rd colour filter, described first colour filter is by the first colour filter alignment mark, second colour filter is respectively formed in black matrix by the second colour filter alignment mark and the 3rd colour filter by the 3rd colour filter alignment mark, in above-mentioned steps, 3rd colour filter alignment mark and the first colour filter are formed simultaneously, or formed after the first colour filter is formed, described first colour filter alignment mark, the color of the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
A kind of colored filter, comprise black matrix and the first colour filter, the second colour filter, the 3rd colour filter, and the 3rd colour filter alignment mark that the first colour filter alignment mark of formation first colour filter employing, the second colour filter alignment mark forming the second colour filter employing and formation the 3rd colour filter adopt, wherein, the color of described first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.
Embodiment 1:
In the present embodiment, the method for making of this colored filter mainly comprises the step forming black matrix and the step forming the first colour filter, the second colour filter and the 3rd colour filter successively, wherein, the alignment mark making the first colour filter is the first colour filter alignment mark 13, the alignment mark making the second colour filter is the second colour filter alignment mark 14, and the alignment mark making the 3rd colour filter is the 3rd colour filter alignment mark 15.In above-mentioned steps, the first colour filter alignment mark 13 and black matrix are formed simultaneously, and the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 and the first colour filter 6 are formed simultaneously.
In the present embodiment, the first colour filter 6 is red color filter layer, and the second colour filter 7 is green color filter layer, and the 3rd colour filter 8 is blue color filter layer.Certainly, the first colour filter 6 also can be green color filter layer or blue color filter layer, and the second colour filter 7 and the 3rd colour filter 8 are in like manner.
As shown in figure 13, this method for making specifically comprises the steps:
Step S11): on substrate, make black matrix and the first colour filter alignment mark 13, the color of described first colour filter alignment mark is identical with the color of black matrix simultaneously.
In this step, adopt photoetching process on substrate, make black matrix 2 and the first colour filter alignment mark 13 simultaneously, described first colour filter alignment mark 13 is mainly used in exposure sources contraposition in exposure technology and exposes to make the first colour filter, and the color of the first made colour filter alignment mark 13 is the black identical with black matrix 2.
Figure 3 shows that in the present embodiment the schematic diagram of black matrix 2 and the first colour filter alignment mark 13 after forming black matrix.Wherein, the first colour filter alignment mark 13 is formed in the border area 1 on substrate beyond black matrix 2 region.
Concrete, the manufacture craft of black matrix 2 comprises: on substrate the photoresist of painting black formed black rete → leading portion pre-baked → step such as exposure → development → back segment baking, wherein, the exposure process forming black matrix does not carry out contraposition.
Step S12): with described first colour filter alignment mark 13 for benchmark, the first colour filter 6 is made in black matrix, make the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 in border area simultaneously on substrate beyond black matrix, described second colour filter alignment mark is identical with the color of described first colour filter with the color of the 3rd colour filter alignment mark.
In this step, as shown in Figure 4, adopt photoetching process in black matrix, make the first colour filter 6, described first colour filter 6 is red color filter layer, makes the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 simultaneously.Described second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 to be mainly used in exposure technology exposure sources respectively contraposition exposure to make the second colour filter 7 and the 3rd colour filter 8.Wherein, described second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 are arranged in the border area 1 on substrate beyond black matrix 2 region, and arrange with the first colour filter alignment mark 13 one-tenth yi word patterns.Second colour filter alignment mark 14 and the color of the 3rd colour filter alignment mark 15 are the redness identical with the first colour filter 6.
Concrete, the manufacture craft of the first colour filter 6 comprises: the steps such as pre-baked → exposure → development → back segment baking that the red photoresist of coating forms red color filter rete → leading portion, described second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 pass through the formation of exposure → development step.
Fig. 4 is the schematic diagram of red color filter layer black matrix and three colour filter alignment marks after completing in the method for making of the present embodiment colored filter.In exposure process, when exposure sources is by ensureing to expose for the formation of a series of automatic alignings between the mask plate of red color filter layer and the first colour filter alignment mark 13, substrate is formed the precision of figure.
Step S13): with the second colour filter alignment mark 14 for benchmark, in black matrix 2, make the second colour filter 7.
Described second colour filter 7 is green color filter layer.
Concrete, the manufacture craft of green color filter layer comprises: the steps such as pre-baked → exposure → development → back segment baking that the green photoresist of coating forms green color film → leading portion.In exposure process, when exposure sources is by ensureing to expose for the formation of a series of automatic alignings between the mask plate of green color filter layer and the second colour filter alignment mark 14, substrate is formed the precision of figure.
Step S14): with the 3rd colour filter alignment mark 15 for benchmark, in black matrix 2, make the 3rd colour filter 8.
Described 3rd colour filter 8 is blue color filter layer.
Concrete, the manufacture craft of blue color filter layer comprises: the steps such as pre-baked → exposure → development → back segment baking that the blue photoresist of coating forms green film → leading portion.In exposure process, when exposure sources is by ensureing to expose for the formation of a series of automatic alignings between the mask plate of blue color filter layer and the 3rd colour filter alignment mark 15, substrate is formed the precision of figure.
Figure 5 shows that the schematic diagram of blue color filter layer black matrix 2 and three colour filters after completing in embodiment.
Step S15): at completing steps S14) substrate on make protective seam and transparency electrode.
In this step, the step making protective seam and transparency electrode is same as the prior art, repeats no more here.
Here it should be understood that, for saving technique, the present embodiment is in the process making colored filter, and the first colour filter alignment mark 13, second colour filter alignment mark 14 and the material that the 3rd colour filter alignment mark 15 adopts are the materials that material that the black matrix that formed in same operation with it or colour filter adopt is identical.But, do not limit and be necessary for identical material.
A kind of colored filter, it adopts the method for making of colored filter described in the present embodiment to make.Wherein, described colored filter comprises black matrix and the first colour filter, the second colour filter and the 3rd colour filter, also comprise the first colour filter alignment mark of formation first colour filter employing, form the second colour filter alignment mark that the second colour filter adopts and the 3rd colour filter alignment mark forming the 3rd colour filter employing, wherein, the color of described first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same.In the present embodiment, the color of described first colour filter alignment mark is black, and the color of described second colour filter alignment mark and the 3rd colour filter alignment mark is red.
A kind of liquid crystal panel, comprise colored filter and array base palte, it adopts the colored filter described in the present embodiment.
For enhancing productivity, colored filter and array base palte are generally made into large scale specification, after colored filter becomes liquid crystal panel with array base palte to box-like, be divided into the junior unit liquid crystal panel of certain specification more as required, due to the first colour filter alignment mark in colored filter here, second colour filter alignment mark, in the border area 1 that 3rd colour filter alignment mark is all arranged on substrate or non-display area, therefore, in follow-up division processing process, the divided removal of they possibilities, or be still retained in border area or the non-display area of junior unit liquid crystal panel.
A kind of display device, comprise liquid crystal panel, it adopts the liquid crystal panel described in the present embodiment.
Embodiment 2:
The difference of the present embodiment and embodiment 1 is, described 3rd colour filter alignment mark 15 is not formed while formation first colour filter 6 together with the second colour filter alignment mark 14, but is formed with the second colour filter 7 simultaneously.
As shown in figure 14, this method for making specifically comprises the steps:
Step S21): on substrate, make black matrix 2 and the first colour filter alignment mark 13, the color of described first colour filter alignment mark is identical with the color of black matrix, as shown in Figure 4 simultaneously.
Step S22): with the first colour filter alignment mark 13 for benchmark, the first colour filter 6 is made in black matrix 2, the second colour filter alignment mark 14 is made in border area simultaneously on substrate beyond black matrix, the color of described second colour filter alignment mark is identical with the color of the first colour filter, as shown in Figure 6.
Step S23): with the second colour filter alignment mark 14 for benchmark, the second colour filter 7 is made in black matrix 2, the 3rd colour filter alignment mark 15 is made in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the second colour filter, as shown in Figure 7.
Step S24): with the 3rd colour filter alignment mark 15 for benchmark, in black matrix 2, make the 3rd colour filter 8, as shown in Figure 8.
Step S25): at completing steps S24) substrate on make protective seam and transparency electrode.
In the present embodiment, described first colour filter alignment mark 13 is identical with the color of black matrix 2, is black; Described second colour filter alignment mark 14 is identical with the color of the first colour filter 6, is redness; Described 3rd colour filter alignment mark 15 is identical with the color of the second colour filter 7, is green.
In the present embodiment, in the method for making of colored filter except the difference on the production order of alignment mark, other concrete manufacturing process steps are all identical with embodiment 1, repeat no more here.
A kind of colored filter, it adopts the method for making of colored filter described in the present embodiment to make.Wherein, the color of described first colour filter alignment mark is black, and the color of described second colour filter alignment mark is red, and the color of described 3rd colour filter alignment mark is green.
A kind of liquid crystal panel, comprise colored filter and array base palte, it adopts the colored filter described in the present embodiment.
A kind of display device, comprise liquid crystal panel, it adopts the liquid crystal panel described in the present embodiment.
Embodiment 3:
The difference of the present embodiment and embodiment 1 is, described first colour filter alignment mark 13 and the second colour filter alignment mark 14 are formed with black matrix simultaneously, and the 3rd colour filter alignment mark 15 and the first colour filter 6 are formed simultaneously.
As shown in figure 15, this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix 2 and the first colour filter alignment mark 13 and the second colour filter alignment mark 14, described first colour filter alignment mark is identical with the color of black matrix with the color of the second colour filter alignment mark, as shown in Figure 9 simultaneously.
Step S32): with the first colour filter alignment mark 13 for benchmark, the first colour filter 6 is made in black matrix 2, the 3rd colour filter alignment mark 15 is made in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the first colour filter, as shown in Figure 10.
Step S33): with the second colour filter alignment mark 14 for benchmark, in black matrix 2, make the second colour filter 7, as shown in figure 11.
Step S34): with the 3rd colour filter alignment mark 15 for benchmark, in black matrix 2, make the 3rd colour filter 8, as shown in figure 12.
Step S35): at completing steps S34) substrate on make protective seam and transparency electrode.
In the present embodiment, described first colour filter alignment mark 13 and the second colour filter alignment mark 14 identical with the color of black matrix 2, be black; Described 3rd colour filter alignment mark 15 is identical with the color of the first colour filter 6, is redness.
In the present embodiment, in the method for making of colored filter except the difference on the production order of alignment mark, other concrete manufacturing process steps are all identical with embodiment 1, repeat no more here.
A kind of colored filter, it adopts the method for making of colored filter described in the present embodiment to make.Wherein, the color of described first colour filter alignment mark and described second colour filter alignment mark is black, and the color of described 3rd colour filter alignment mark is red.
A kind of liquid crystal panel, comprise colored filter and array base palte, it adopts the colored filter described in the present embodiment.
A kind of display device, comprise liquid crystal panel, it adopts the liquid crystal panel described in the present embodiment.
Certainly, described first colour filter alignment mark 13, the formation order of the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 is not limited to above three kinds of situations, such as, first colour filter alignment mark 13 and the second colour filter alignment mark 14 are not necessarily formed with black matrix simultaneously, can also after black matrix be formed, first colour filter 6 is formed separately before being formed, or the second colour filter alignment mark 14 and the 3rd colour filter alignment mark 15 are not necessarily formed with the first colour filter 6 layers simultaneously, can also after the first colour filter 6 be formed, second colour filter 7 is formed separately before being formed, etc..Any production order meeting essence of the present invention is all in protection scope of the present invention.
The method for making of hinge structure colored filter, embodiment 1-3 is by the formation order of adjustment the 3rd colour filter alignment mark, ensure that the 3rd colour filter alignment mark being coated with after blue photoresist, exposure making the 3rd colour filter time there is enough large color contrast, to improve in the 3rd colour filter forming process exposure sources to the recognition capability of the 3rd colour filter alignment mark, thus avoid exposure sources be difficult to acquisition the 3rd color filter alignment mark phenomenon occur, greatly save the production time, reduce production cost.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (13)
1. the method for making of a colored filter, comprise the step that forms black matrix and form the first colour filter successively, the step of the second colour filter and the 3rd colour filter, described first colour filter is by the first colour filter alignment mark, second colour filter is respectively formed in black matrix by the second colour filter alignment mark and the 3rd colour filter by the 3rd colour filter alignment mark, it is characterized in that, in above-mentioned steps, 3rd colour filter alignment mark and the first colour filter are formed simultaneously, or formed after the first colour filter is formed, described first colour filter alignment mark, the color of the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same, and described first colour filter alignment mark, described second colour filter alignment mark and described 3rd colour filter alignment mark are not overlapping mutually.
2. method for making according to claim 1, is characterized in that, described 3rd colour filter alignment mark and the second colour filter are formed simultaneously, or is formed after the second colour filter is formed.
3. method for making according to claim 1 and 2, is characterized in that, the second colour filter alignment mark and black matrix are formed simultaneously, or are formed with the first colour filter simultaneously, or is formed after the first colour filter is formed.
4. method for making according to claim 3, is characterized in that, the first colour filter alignment mark and described black matrix are formed simultaneously.
5. method for making according to claim 4, is characterized in that, this method for making specifically comprises the steps:
Step S11): on substrate, make black matrix and the first colour filter alignment mark, the color of described first colour filter alignment mark is identical with the color of black matrix simultaneously;
Step S12): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the second colour filter alignment mark and the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, described second colour filter alignment mark is identical with the color of described first colour filter with the color of the 3rd colour filter alignment mark;
Step S13): with described second colour filter alignment mark for benchmark, in black matrix, make the second colour filter;
Step S14): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
6. method for making according to claim 4, is characterized in that, this method for making specifically comprises the steps:
Step S21): on substrate, make black matrix and the first colour filter alignment mark, the color of described first colour filter alignment mark is identical with the color of black matrix simultaneously;
Step S22): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the second colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described second colour filter alignment mark is identical with the color of the first colour filter;
Step S23): with described second colour filter alignment mark for benchmark, the second colour filter is made in black matrix, make the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the second colour filter;
Step S24): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
7. method for making according to claim 4, is characterized in that, this method for making specifically comprises the steps:
Step S31): on substrate, make black matrix and the first colour filter alignment mark and the second colour filter alignment mark, described first colour filter alignment mark is identical with the color of black matrix with the color of the second colour filter alignment mark simultaneously;
Step S32): with described first colour filter alignment mark for benchmark, the first colour filter is made in black matrix, make the 3rd colour filter alignment mark in border area simultaneously on substrate beyond black matrix, the color of described 3rd colour filter alignment mark is identical with the color of the first colour filter;
Step S33): with described second colour filter alignment mark for benchmark, in black matrix, make the second colour filter;
Step S34): with described 3rd colour filter alignment mark for benchmark, in black matrix, make the 3rd colour filter.
8. the method for making of colored filter according to claim 4, is characterized in that, described first colour filter is red color filter layer, and described second colour filter is green color filter layer, and described 3rd colour filter is blue color filter layer.
9. a colored filter, comprise black matrix and the first colour filter, second colour filter, 3rd colour filter, and form the first colour filter alignment mark of the first colour filter employing, form the second colour filter alignment mark that the second colour filter adopts and the 3rd colour filter alignment mark forming the 3rd colour filter employing, it is characterized in that, described first colour filter alignment mark, the color of the second colour filter alignment mark and the 3rd colour filter alignment mark is incomplete same, described first colour filter alignment mark, second colour filter alignment mark and the 3rd colour filter alignment mark are not overlapping mutually, described first colour filter alignment mark, described second colour filter alignment mark is identical with both colors in described 3rd colour filter alignment mark.
10. colored filter according to claim 9, is characterized in that, described first colour filter alignment mark, the second colour filter alignment mark and the 3rd colour filter alignment mark are arranged in the border area on substrate beyond black matrix.
11. colored filters according to claim 9, is characterized in that, described first colour filter alignment mark is not identical with the color of described second colour filter alignment mark, the 3rd colour filter alignment mark; Or described first colour filter alignment mark, the second colour filter alignment mark are not identical with the color of described 3rd colour filter alignment mark.
12. 1 kinds of liquid crystal panels, comprise colored filter and array base palte, it is characterized in that, described colored filter adopts the arbitrary described colored filter of claim 9-11.
13. 1 kinds of display device, comprise liquid crystal panel, it is characterized in that, described liquid crystal panel adopts liquid crystal panel according to claim 12.
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CN201210148742.XA CN102681251B (en) | 2012-05-14 | 2012-05-14 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
PCT/CN2012/084605 WO2013170595A1 (en) | 2012-05-14 | 2012-11-14 | Color filter, method for manufacturing same, liquid crystal panel, and display device |
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CN201210148742.XA CN102681251B (en) | 2012-05-14 | 2012-05-14 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
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CN102681251B true CN102681251B (en) | 2015-09-09 |
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Families Citing this family (11)
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CN102681251B (en) * | 2012-05-14 | 2015-09-09 | 京东方科技集团股份有限公司 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
CN103389533A (en) * | 2013-07-31 | 2013-11-13 | 京东方科技集团股份有限公司 | Method for manufacturing color filter and color filter |
CN103969873B (en) * | 2014-04-23 | 2016-05-25 | 京东方科技集团股份有限公司 | Be used for mask and the method for substrate alignment and the manufacture method of color membrane substrates |
CN104102042B (en) * | 2014-06-30 | 2017-08-25 | 京东方科技集团股份有限公司 | A kind of color membrane substrates and preparation method thereof, display device |
CN104317451B (en) * | 2014-10-27 | 2018-11-13 | 昆山龙腾光电有限公司 | The manufacturing method of touch control display apparatus |
CN105093641A (en) * | 2015-07-29 | 2015-11-25 | 武汉华星光电技术有限公司 | Terminal laminating alignment method and color membrane substrate |
CN105511126B (en) * | 2016-01-21 | 2018-11-13 | 京东方科技集团股份有限公司 | Display panel and preparation method thereof and detection method |
CN107065281B (en) * | 2017-04-12 | 2020-07-03 | 深圳市华星光电技术有限公司 | Method for manufacturing color resistor |
CN107808933B (en) * | 2017-10-31 | 2020-03-10 | 京东方科技集团股份有限公司 | Method for manufacturing cover plate, cover plate and display device |
CN109739030B (en) * | 2019-01-02 | 2022-03-01 | 合肥京东方显示技术有限公司 | Display panel, preparation method thereof, mask plate and display device |
CN112987362A (en) * | 2019-12-17 | 2021-06-18 | 上海仪电显示材料有限公司 | Liquid crystal display substrate and forming method thereof, liquid crystal display panel and forming method thereof |
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JP2001033617A (en) * | 1999-07-19 | 2001-02-09 | Toppan Printing Co Ltd | Manufacture of color filter and exposing method used therefor |
JP2003084120A (en) * | 2001-09-14 | 2003-03-19 | Dainippon Printing Co Ltd | Method for manufacturing color filter |
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JPH0850202A (en) * | 1994-08-05 | 1996-02-20 | Dainippon Printing Co Ltd | Color filter with alignment mark |
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CN102681251B (en) * | 2012-05-14 | 2015-09-09 | 京东方科技集团股份有限公司 | A kind of colored filter and preparation method thereof and liquid crystal panel and display device |
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- 2012-05-14 CN CN201210148742.XA patent/CN102681251B/en active Active
- 2012-11-14 WO PCT/CN2012/084605 patent/WO2013170595A1/en active Application Filing
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JPS6446704A (en) * | 1987-08-17 | 1989-02-21 | Casio Computer Co Ltd | Manufacture of color filter |
JP2001033617A (en) * | 1999-07-19 | 2001-02-09 | Toppan Printing Co Ltd | Manufacture of color filter and exposing method used therefor |
JP2003084120A (en) * | 2001-09-14 | 2003-03-19 | Dainippon Printing Co Ltd | Method for manufacturing color filter |
CN101363991A (en) * | 2007-08-06 | 2009-02-11 | 中华映管股份有限公司 | Colourful filtering substrate, method for manufacturing same and liquid crystal display panel |
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CN102681251A (en) | 2012-09-19 |
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