CN104317451A - Method for manufacturing touch display device - Google Patents
Method for manufacturing touch display device Download PDFInfo
- Publication number
- CN104317451A CN104317451A CN201410582512.3A CN201410582512A CN104317451A CN 104317451 A CN104317451 A CN 104317451A CN 201410582512 A CN201410582512 A CN 201410582512A CN 104317451 A CN104317451 A CN 104317451A
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- China
- Prior art keywords
- alignment mark
- metal film
- filter substrate
- laser
- colored filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
The invention discloses a method for manufacturing a touch display device. The method includes providing a semi-finished display panel product which comprises an array substrate, a color filter substrate and a liquid crystal layer, wherein the liquid crystal layer is positioned between the array substrate and the color filter substrate, assembling of the array substrate, the color filter substrate and the liquid crystal layer is already completed in the semi-finished display panel product, and the color filter substrate is provided with an alignment mark; forming a metal film on the surface of one side, away from the liquid crystal layer, of the color filter substrate, wherein the metal film shields the alignment mark; utilizing laser to remove the metal film shielding the alignment mark to expose the alignment mark; taking the exposed alignment mark as a reference to perform photoetching on the metal film to form touch sensing layer patterns. A removing method through laser irradiation is adopted to expose the alignment mark on the color filter substrate, so that original photomask and photoetching processes used for exposing the alignment mark can be omitted, and process for exposing the alignment mark is simplified.
Description
Technical field
The present invention relates to the technical field of touch control display apparatus, particularly about a kind of manufacture method of touch control display apparatus.
Background technology
Along with the development of information age and the quickening of rhythm of life, touch technology is due to the feature such as input of its human oriented design and simple and fast, replace traditional mouse and keyboard gradually, be applied in electronic product miscellaneous widely, wherein, to have reaction velocity fast, highly sensitive due to it for capacitive touch screen, the good and durability advantages of higher of fiduciary level and being widely used.Capacitive touch screen mainly comprises cover plate (Cover Lens) and pixel control layer (Touch Sensor), its principle of induction acts on four corners of screen induction zone with voltage and forms a stationary electric field, when pointing touching, capacitance variations is produced between human body and transparency electrode, electric field can be made to cause electric current, measured by controller, according to the difference of current distance four corner ratios, can contact position be calculated.
Different according to pixel control layer set-up mode in a display device, touch control display apparatus is divided into the structures such as external hanging type, single glass touch (One Glass Solution, OGS), embedded (In cell) and externally embedded type (On cell).The touch control display apparatus of external hanging type due to touch-screen and display panel be separate setting, product thickness is comparatively large, can not meet the ultra-thin requirement of some hand-held devices and portable set.The touch control display apparatus of OGS pixel control layer and cover glass is combined to fit on a display panel by optical cement again, has touch-control sensitivity advantages of higher, and be one of current main flow touch-control structure, main shortcoming is that intensity is bad frangible.The touch control display apparatus of In Cell be pixel control layer is integrated into display panel colored filter substrate inside, but the touch control display apparatus of In Cell is because of structure, the equal more complicated of processing procedure and to cause it to produce yield lower.The touch control display apparatus of On Cell be pixel control layer is arranged on display panel colored filter substrate outside, be also one of current main flow touch-control structure.In recent years, On Cell touch-screen is widely used, and usually, On Cell touch-screen pixel control layer is embedded to be arranged between the colored filter substrate of display panel and upper polaroid.
Fig. 1 is the manufacture method process flow diagram of existing a kind of On Cell formula touch control display apparatus, and the method comprises:
Step S101, provides display panel semi-manufacture.Wherein, the liquid crystal layer that the display panel semi-manufacture provided comprise array base palte, colored filter substrate and are folded between array base palte and colored filter substrate, colored filter substrate is provided with alignment mark (alignment mark), when making On Cell touch-screen at the outer surface of colored filter substrate, this alignment mark can as the follow-up contraposition reference when making pixel control layer.
Step S102, at the side surface formation metal film of colored filter substrate away from liquid crystal layer.Wherein, metal film will block this alignment mark due to light tight.
Step S103, carries out first time photoetching process to metal film and comes out to make alignment mark.Wherein, first time photoetching process comprise photoresist coating, exposure, development, etching and the operation such as photoresist lift off, through first time photoetching process the metal film blocking alignment mark part is removed, come out to make alignment mark.
Step S104, with the alignment mark exposed for benchmark, carries out second time photoetching process to form touch-control sensing layer pattern to metal film.Wherein, second time photoetching process comprises the operations such as photoresist coating, exposure, development, etching and photoresist lift off, after second time photoetching process, namely achieves the patterning to this metal film, makes this metal membrane-coating composition be formed as pixel control layer.
In the manufacture process of above-mentioned On Cell formula touch control display apparatus, before metal film is formed as touch-control sensing layer pattern, need first the alignment mark on colored filter substrate outer surface first to be come out, to carry out the photoetching process processing procedure of follow-up formation pixel control layer.Owing to being also that employing exposes, the photoetching process of etching is carried out by the process-exposed of contrast marker, therefore this method needs increase light shield (mask) and increases by one photoetching process, makes manufacturing process complicated, adds production cost.
Summary of the invention
The object of the invention is the manufacture method providing a kind of touch control display apparatus, when making On Cell formula touch control display apparatus, can saving the light shield for exposing alignment mark and corresponding photoetching process, simplifying manufacturing process, saving production cost.
The invention provides a kind of manufacture method of touch control display apparatus, this manufacture method comprises:
Display panel semi-manufacture are provided, these display panel semi-manufacture comprise array base palte, colored filter substrate and liquid crystal layer, this liquid crystal layer is between this array base palte and this colored filter substrate, these display panel semi-manufacture have completed this array base palte, assembling between this colored filter substrate and this liquid crystal layer, and this colored filter substrate is provided with alignment mark;
At the side surface formation metal film of this colored filter substrate away from this liquid crystal layer, this metal film blocks this alignment mark;
Utilize this metal film of this alignment mark part of laser occlusion removal, this alignment mark is come out; And
With this alignment mark exposed for benchmark, photoetching process is carried out to form touch-control sensing layer pattern to metal film.
Further, this metal film adopts the mode of sputter coating to be formed.
Further, the material of this metal film is molybdenum, copper or aluminium.
Further, this alignment mark is formed in the processing procedure of this colored filter substrate.
Further, the material of this alignment mark is resin.
Further, provide the laser instrument of this laser to be neodymium-doped yttrium-aluminum garnet crystal, this laser instrument produces pulse laser.
Further, the wavelength coverage of the laser of this laser instrument generation is 266 ~ 1064nm.
Further, the wavelength of this laser is 355nm, the power of this laser is 20uj, the irradiation number of times of this laser to the metal film on this alignment mark is 10 times, the incident direction of this laser is vertical with the outside surface of this colored filter substrate, and the distance between this laser instrument and outside surface of this colored filter substrate is 10mm.
Further, with this alignment mark exposed for benchmark, photoetching process is carried out to metal film and comprises with the step forming touch-control sensing layer pattern:
By this alignment mark exposed, the light shield making pixel control layer is aimed at this alignment mark, utilizes this light shield to be come out by metal membrane material unwanted on this metal film; And
Remove unwanted metal membrane material by etching and form touch-control sensing layer pattern.
In embodiments of the invention, sharp light-struck removing method is adopted to be come out by the alignment mark on colored filter substrate, original one light shield (mask) for exposing alignment mark and one photoetching process can being saved, greatly having simplified the process exposing alignment mark.In addition, the present invention adopts the metal film of low power laser occlusion removal alignment mark, laser irradiates from the outer surface of colored filter substrate, thus other elements in array base palte and colored filter substrate can not be hurt, it also avoid and use acid solution to etch the fouling and cleaning operation brought, make production process more simple, reduce further production cost, finished product rate is high.
Accompanying drawing explanation
Fig. 1 is the manufacture method process flow diagram of existing a kind of On Cell formula touch control display apparatus.
Fig. 2 is the process flow diagram of the manufacture method of touch control display apparatus in one embodiment of the invention.
Fig. 3 A to Fig. 3 D is the cross-sectional view of touch control display apparatus in each step in one embodiment of the invention.
Embodiment
For further setting forth the present invention for the technological means reaching predetermined goal of the invention and take and effect, below in conjunction with accompanying drawing and preferred embodiment, to the specific embodiment of the present invention, structure, feature and effect thereof, be described in detail as follows.
Fig. 2 is the process flow diagram of the manufacture method of touch control display apparatus in one embodiment of the invention.As shown in Figure 2, the manufacture method of a kind of touch control display apparatus in the embodiment of the present invention comprises the steps:
S201: display panel semi-manufacture are provided;
S202: at the side surface formation metal film of colored filter substrate away from liquid crystal layer;
S203: the metal film utilizing this alignment mark part of laser occlusion removal; And
S204: with the alignment mark exposed for benchmark, carries out photoetching process to form touch-control sensing layer pattern to metal film.
Please refer to Fig. 3 A, in step s 201, the liquid crystal layer 23 that display panel semi-manufacture 20 comprise array base palte 21, colored filter substrate 22 and are folded between array base palte 21 and colored filter substrate 22, these display panel semi-manufacture 20 have completed array base palte 21, assembling between colored filter substrate 22 and liquid crystal layer 23, and liquid crystal layer 23 is between array base palte 21 and colored filter substrate 22.Colored filter substrate 22 is provided with alignment mark (alignment mark) 221, usually, alignment mark 221 is formed in black matrix (black matrix) processing procedure of colored filter substrate 22, and alignment mark 221 is formed at the side surface (i.e. the inner surface of colored filter substrate 22) of colored filter substrate 22 near liquid crystal layer 23, colored filter substrate 22 is transparency carrier, can see the alignment mark 221 of inner side through it.Alignment mark 221 and black matrix are all resin material and make, and quantity, the size and location of the alignment mark 221 on colored filter substrate 22 can be different according to the machine difference of On Cell touch-screen, this dawn known to those skilled in the art.When making On Cell touch-screen at the outer surface of colored filter substrate 22, this alignment mark 221 can as the follow-up contraposition reference when making pixel control layer, subsequent handling all uses this alignment mark 221 to aim at, and guarantees that the pattern obtained there will not be skew.
Please refer to Fig. 3 B, in step S202, form metal film 24 at colored filter substrate 22 away from the side surface (i.e. the outer surface of colored filter substrate 22) of liquid crystal layer 23, this metal film 24 is the materials for making the touch-control line in pixel control layer.In the present embodiment, metal film 24 adopts physical gas-phase deposite method to be formed, and such as adopt the mode of sputter coating (sputtering) to be formed on the outer surface of colored filter substrate 22, the thickness of metal film 24 can be
or other thickness.This metal film 24 covers the whole outer surface of colored filter substrate 22, thus this metal film 24 blocks alignment mark 221.The material of metal film 24 can be molybdenum, copper or aluminium, and in the present embodiment, the material of metal film 24 is molybdenum.
Utilize before metal film 24 is made as touch-control sensing layer pattern by photoetching process follow-up, alignment mark 221 need be come out and find contraposition reference point for exposure machine.Please refer to Fig. 3 C, in step S203, utilize the metal film 24 swashing light-struck mode occlusion removal alignment mark 221 part, namely laser is utilized to irradiate the part metal film 24 corresponding with alignment mark 221, so that the part metal film blocking alignment mark 221 is removed, alignment mark 221 is come out, as shown in Figure 3 D.
Particularly, the laser instrument (not shown) of laser is provided to adopt neodymium-doped yttrium-aluminum garnet crystal (Nd:YAG crystal) as solid laser material in the present embodiment, and adopting the pulse laser that this laser instrument produces, the wavelength coverage of the laser that this laser instrument produces is 266 ~ 1064nm.In concrete embodiment, first, set the running parameter of laser instrument, the parameter of laser instrument comprises: the operation wavelength of setting laser is such as 355nm, and the power of laser instrument is such as 20uj (micro-joule).Then, as shown in Figure 3 C, control the part metal film 24 of this laser instrument occlusion removal alignment mark 221, alignment mark 221 is come out, when removing, the incident direction of laser is vertical with the outside surface of colored filter substrate 22, distance between the outside surface of laser instrument and colored filter substrate 22 is such as 10mm, this laser instrument irradiates such as 10 times the metal film 24 on alignment mark 221 and is removed by metal film 24, the irradiation time of laser adjusts according to the thickness of metal film 24, generally completes in one minute.Metal film 24 remove the area that area is more than or equal to alignment mark 221, be as the criterion so that alignment mark 221 can be made to come out.Utilize laser to irradiate and remove metal material, the wavelength that laser removes success or not and selected laser instrument has relation, the energy that different metal materials absorbs each wavelength has difference, the efficiency removing metal residual depends on the energy of Metal absorption and reflection, energy is absorbed more, and metal is more easily removed.When selecting the wavelength of laser instrument, can be obtained by different metal absorptivity at different wavelengths and experiment.
The method preparing On Cell touch-screen in prior art adopts the photoetching process of the multiple working procedures such as exposure machine and light shield expose metal film 24, etching to come out to make the alignment mark 221 on colored filter substrate 22 outer surface usually, therefore need to add one light shield with together with photoetching process, because photoetching process needs to comprise the multiple working procedures such as photoresist coating, exposure, development, etching and photoresist lift off, and the light shield adopted (mask) cost is higher, therefore increase production process and production cost.And in step S203 of the present invention, adopt sharp light-struck removing method, alignment mark 221 is realized to come out, original one light shield (mask) for exposing alignment mark 221 and one photoetching process can being saved, in contrast greatly having simplified the process exposing alignment mark 221.In addition, the present invention adopts the metal film 24 of low power laser occlusion removal alignment mark 221, laser irradiates from the outer surface of colored filter substrate 22, thus other elements in array base palte 21 and colored filter substrate 22 can not be hurt, it also avoid and use acid solution to etch the fouling and cleaning operation brought, make production process more simple, reduce further production cost, finished product rate is high.
In step S204, utilize exposure machine with the alignment mark 221 come out for contraposition reference, photoetching process is carried out to form touch-control sensing layer pattern to metal film 24, particularly, by this alignment mark 221 exposed, the light shield making pixel control layer is aimed at this alignment mark 221, this light shield is utilized to be come out by metal membrane material unwanted on this metal film, realize by the Graphic transitions on light shield on metal film 24, and then remove unwanted metal membrane material by etching and form final touch-control sensing layer pattern.About the detailed step preparing touch-control sensing layer pattern that the present invention is follow-up, for those skilled in the art knows, do not repeat them here.
The above, it is only preferred embodiment of the present invention, not any pro forma restriction is done to the present invention, although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be do not depart from technical solution of the present invention content, according to any simple modification that technical spirit of the present invention is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (9)
1. a manufacture method for touch control display apparatus, is characterized in that, this manufacture method comprises:
Display panel semi-manufacture are provided, these display panel semi-manufacture comprise array base palte, colored filter substrate and liquid crystal layer, this liquid crystal layer is between this array base palte and this colored filter substrate, these display panel semi-manufacture have completed this array base palte, assembling between this colored filter substrate and this liquid crystal layer, and this colored filter substrate is provided with alignment mark;
At the side surface formation metal film of this colored filter substrate away from this liquid crystal layer, this metal film blocks this alignment mark;
Utilize this metal film of this alignment mark part of laser occlusion removal, this alignment mark is come out; And
With this alignment mark exposed for benchmark, photoetching process is carried out to form touch-control sensing layer pattern to metal film.
2. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: this metal film adopts the mode of sputter coating to be formed.
3. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: the material of this metal film is molybdenum, copper or aluminium.
4. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: this alignment mark is formed in the processing procedure of this colored filter substrate.
5. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: the material of this alignment mark is resin.
6. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: provide the laser instrument of this laser to be neodymium-doped yttrium-aluminum garnet crystal, and this laser instrument produces pulse laser.
7. the manufacture method of touch control display apparatus as claimed in claim 6, is characterized in that: the wavelength coverage of the laser that this laser instrument produces is 266 ~ 1064nm.
8. the manufacture method of touch control display apparatus as claimed in claim 7, it is characterized in that: the wavelength of this laser is 355nm, the power of this laser is 20uj, the irradiation number of times of this laser to the metal film on this alignment mark is 10 times, the incident direction of this laser is vertical with the outside surface of this colored filter substrate, and the distance between this laser instrument and outside surface of this colored filter substrate is 10mm.
9. the manufacture method of touch control display apparatus as claimed in claim 1, is characterized in that: with this alignment mark exposed for benchmark, carries out photoetching process comprise with the step forming touch-control sensing layer pattern metal film:
By this alignment mark exposed, the light shield making pixel control layer is aimed at this alignment mark, utilizes this light shield to be come out by metal membrane material unwanted on this metal film; And
Remove unwanted metal membrane material by etching and form touch-control sensing layer pattern.
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| CN201410582512.3A CN104317451B (en) | 2014-10-27 | 2014-10-27 | The manufacturing method of touch control display apparatus |
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| CN201410582512.3A CN104317451B (en) | 2014-10-27 | 2014-10-27 | The manufacturing method of touch control display apparatus |
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| CN104317451B CN104317451B (en) | 2018-11-13 |
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| CN105093641A (en) * | 2015-07-29 | 2015-11-25 | 武汉华星光电技术有限公司 | Terminal laminating alignment method and color membrane substrate |
| CN105182697A (en) * | 2015-08-28 | 2015-12-23 | 京东方科技集团股份有限公司 | On Cell structure touch display screen and manufacturing method thereof and display device |
| CN105785637A (en) * | 2016-05-04 | 2016-07-20 | 深圳市华星光电技术有限公司 | CF substrate production line and manufacturing method of CF substrate |
| CN106211796A (en) * | 2015-03-27 | 2016-12-07 | 深圳市柔宇科技有限公司 | Touch screen module and preparation method thereof |
| CN108132554A (en) * | 2018-01-02 | 2018-06-08 | 上海中航光电子有限公司 | Display device |
| CN110303256A (en) * | 2019-07-01 | 2019-10-08 | 东莞市德普特电子有限公司 | A kind of laser special-shaped processing technology of polaroid |
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| CN105093641A (en) * | 2015-07-29 | 2015-11-25 | 武汉华星光电技术有限公司 | Terminal laminating alignment method and color membrane substrate |
| CN105182697A (en) * | 2015-08-28 | 2015-12-23 | 京东方科技集团股份有限公司 | On Cell structure touch display screen and manufacturing method thereof and display device |
| CN105785637A (en) * | 2016-05-04 | 2016-07-20 | 深圳市华星光电技术有限公司 | CF substrate production line and manufacturing method of CF substrate |
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| CN110303256A (en) * | 2019-07-01 | 2019-10-08 | 东莞市德普特电子有限公司 | A kind of laser special-shaped processing technology of polaroid |
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| Publication number | Publication date |
|---|---|
| CN104317451B (en) | 2018-11-13 |
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