CN102648389B - 用于动态确定样品空间取向并动态重新定位的装置和方法 - Google Patents

用于动态确定样品空间取向并动态重新定位的装置和方法 Download PDF

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Publication number
CN102648389B
CN102648389B CN201080029227.9A CN201080029227A CN102648389B CN 102648389 B CN102648389 B CN 102648389B CN 201080029227 A CN201080029227 A CN 201080029227A CN 102648389 B CN102648389 B CN 102648389B
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Prior art keywords
sample
radiation
magnifier
detector
target sample
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Expired - Fee Related
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CN201080029227.9A
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CN102648389A (zh
Inventor
阿列克谢·Y·沙罗诺夫
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Bionano Genomics Inc
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Bionano Genomics Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/04Measuring microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • G02B21/244Devices for focusing using image analysis techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/006Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • G02B21/245Devices for focusing using auxiliary sources, detectors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Focusing (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN201080029227.9A 2009-05-19 2010-05-18 用于动态确定样品空间取向并动态重新定位的装置和方法 Expired - Fee Related CN102648389B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17949809P 2009-05-19 2009-05-19
US61/179,498 2009-05-19
PCT/US2010/035253 WO2010135323A1 (en) 2009-05-19 2010-05-18 Devices and methods for dynamic determination of sample spatial orientation and dynamic repositioning

Publications (2)

Publication Number Publication Date
CN102648389A CN102648389A (zh) 2012-08-22
CN102648389B true CN102648389B (zh) 2015-04-29

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ID=42712355

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CN201080029227.9A Expired - Fee Related CN102648389B (zh) 2009-05-19 2010-05-18 用于动态确定样品空间取向并动态重新定位的装置和方法

Country Status (9)

Country Link
US (1) US20120097835A1 (https=)
EP (2) EP2881701A1 (https=)
JP (2) JP2012527651A (https=)
KR (1) KR20120039547A (https=)
CN (1) CN102648389B (https=)
AU (1) AU2010249729A1 (https=)
CA (1) CA2762684A1 (https=)
SG (1) SG176579A1 (https=)
WO (1) WO2010135323A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI721486B (zh) 2017-03-07 2021-03-11 美商伊路米納有限公司 用於使用光源配置之改進的聚焦追蹤的系統和方法

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017203492A1 (de) * 2017-03-03 2018-09-06 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Verfahren und Vorrichtung zur Abbildung einer Probenoberfläche
US20150330776A1 (en) * 2012-10-15 2015-11-19 Sony Corporation Image obtaining apparatus, and method of measuring an inclination of a slide
KR102003202B1 (ko) * 2012-10-18 2019-07-24 칼 짜이스 엑스-레이 마이크로스코피, 인크. 결정학적 그레인 배향 맵핑 능력을 가진 실험실 x-레이 마이크로-단층촬영 시스템
EP2959015B1 (en) 2013-02-20 2020-11-04 Bionano Genomics, Inc. Characterization of molecules in nanofluidics
US10844424B2 (en) 2013-02-20 2020-11-24 Bionano Genomics, Inc. Reduction of bias in genomic coverage measurements
CN103674839B (zh) * 2013-11-12 2016-01-06 清华大学 一种基于光斑检测的可视化样品定位操作系统及方法
WO2015126840A1 (en) 2014-02-18 2015-08-27 Bionano Genomics, Inc. Improved methods of determining nucleic acid structural information
CN106164295B (zh) 2014-02-25 2020-08-11 生物纳米基因公司 减小基因组覆盖测量中的偏差
WO2016022359A1 (en) * 2014-08-06 2016-02-11 Cellomics, Inc. Image-based laser autofocus system
CN104197847A (zh) * 2014-09-19 2014-12-10 孙维 一种传感器
US9921399B2 (en) 2015-03-31 2018-03-20 General Electric Company System and method for continuous, asynchronous autofocus of optical instruments
JP6590366B2 (ja) * 2015-09-25 2019-10-16 オリンパス株式会社 顕微鏡装置、オートフォーカス装置、及び、オートフォーカス方法
EP3400430A4 (en) * 2016-01-07 2019-11-06 Arkema, Inc. OBJECT-POSITION-INDEPENDENT METHOD FOR MEASURING THE THICKNESS OF COATINGS THAT ON CURED OBJECTS MOVING AT HIGH SPEEDS
DE102016212019A1 (de) 2016-07-01 2018-01-04 Carl Zeiss Microscopy Gmbh Neigungsmessung und -korrektur des Deckglases im Strahlengang eines Mikroskops
CN106324795B (zh) * 2016-09-29 2018-10-16 电子科技大学 一种检测仪显微镜多视野自动快速对焦方法
US11385180B2 (en) 2017-03-03 2022-07-12 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Method and device for imaging a specimen surface
NL2018854B1 (en) 2017-05-05 2018-11-14 Illumina Inc Systems and methodes for improved focus tracking using blocking structures
NL2018853B1 (en) 2017-05-05 2018-11-14 Illumina Inc Systems and methods for improved focus tracking using a hybrid mode light source
US10416430B2 (en) * 2017-05-10 2019-09-17 Applejack 199 L.P. Focusing of optical devices
CN107189940A (zh) * 2017-05-19 2017-09-22 上海理工大学 基于激光的自动化快速复温装置
CN108020163B (zh) * 2017-12-26 2020-01-31 中国科学技术大学 一种显微追踪微粒三维位移的装置
NL2020618B1 (en) 2018-01-12 2019-07-18 Illumina Inc Real time controller switching
EP3614192A1 (en) * 2018-08-20 2020-02-26 Till GmbH Microscope device
JP7651453B2 (ja) * 2018-09-10 2025-03-26 フリューダイム カナダ インコーポレイテッド オートフォーカスサンプルイメージング装置及び方法
DE102018131427B4 (de) * 2018-12-07 2021-04-29 Leica Microsystems Cms Gmbh Verfahren zur automatischen Positionsermittlung auf einer Probenanordnung und entsprechendes Mikroskop, Computerprogramm und Computerprogrammprodukt
DE102019109832B3 (de) * 2019-04-12 2020-04-23 Leica Microsystems Cms Gmbh Lichtblattmikroskop und Verfahren zum Erfassen einer Messgröße
US11086118B2 (en) 2019-04-29 2021-08-10 Molecular Devices, Llc Self-calibrating and directional focusing systems and methods for infinity corrected microscopes
CN113873933A (zh) * 2019-05-08 2021-12-31 安盟生技股份有限公司 光学系统及其检测方法
DE102019113975B4 (de) * 2019-05-24 2023-10-19 Abberior Instruments Gmbh Verfahren und Vorrichtung zum Überwachen des Fokuszustands eines Mikroskops sowie Mikroskop
CN110260783B (zh) * 2019-07-10 2020-11-10 中国工程物理研究院机械制造工艺研究所 一种干涉显微镜自动对焦装置及方法
CN112113501A (zh) * 2020-10-12 2020-12-22 中国科学院生物物理研究所 一种基于干涉测量的单分子轴向定位装置及其工作方法
JP2022150678A (ja) * 2021-03-26 2022-10-07 株式会社日立ハイテク 顕微鏡システム
CN112987292B (zh) * 2021-04-15 2021-08-10 中国人民解放军国防科技大学 基于点阵光斑质心偏差信息的计算机辅助装调方法及装置
EP4092462A1 (en) 2021-05-18 2022-11-23 Leica Instruments (Singapore) Pte. Ltd. Laser assisted autofocus
CN115854891A (zh) * 2021-09-26 2023-03-28 深圳中科飞测科技股份有限公司 一种检测方法、检测系统及计算机可读存储介质
CN115876077A (zh) * 2021-09-26 2023-03-31 深圳中科飞测科技股份有限公司 一种检测方法、检测系统及计算机可读存储介质
CN114414589A (zh) * 2022-02-23 2022-04-29 湖北九峰山实验室 一种用于芯片缺陷检测的系统
KR20230139684A (ko) * 2022-03-28 2023-10-05 주식회사 스타노스 광학현미경을 위한 자동 초점 장치 및 자동 초점 유지 방법
CN114647058B (zh) * 2022-05-18 2022-09-06 合肥金星智控科技股份有限公司 焦点调整方法、焦点调整装置、libs检测系统和存储介质
CN115717859B (zh) * 2022-11-16 2023-09-29 南京博视医疗科技有限公司 一种点扫描光学系统激光标定方法及其装置
US12607563B2 (en) 2022-11-23 2026-04-21 Bionano Genomics, Inc. Top hat illumination biological sample imaging devices, and methods of using the same
CN116540395A (zh) * 2023-04-28 2023-08-04 广东粤港澳大湾区黄埔材料研究院 一种可锁定成像焦面的激发模组、显微镜及显微成像系统
WO2025072986A1 (de) * 2023-10-04 2025-04-10 Akrima Gmbh Anbaugerät für ein mikroskop
BE1032505B1 (nl) * 2024-04-03 2025-11-03 Soleras Advanced Coatings Bvba Reflectometersysteem en werkwijze voor het bepalen van een reflectie
WO2025213063A1 (en) * 2024-04-05 2025-10-09 Fei Deutschland Gmbh Systems and methods for autofocusing images

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784164A (en) * 1997-03-20 1998-07-21 Zygo Corporation Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means
US6172349B1 (en) * 1997-03-31 2001-01-09 Kla-Tencor Corporation Autofocusing apparatus and method for high resolution microscope system
WO2005093483A1 (ja) * 2004-03-25 2005-10-06 Research Organization Of Information And Systems 標本合焦位置高精度計測法
CN1926460A (zh) * 2004-04-28 2007-03-07 奥林巴斯株式会社 激光聚光光学系统
CN101281289A (zh) * 2007-12-29 2008-10-08 青岛海信电器股份有限公司 自动聚焦方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617934B2 (ja) * 1985-09-30 1994-03-09 三鷹光器株式会社 非接触自動位置合わせ装置
US4687913A (en) * 1985-11-25 1987-08-18 Warner Lambert Technologies, Inc. Microscope autofocus system
JPH0769162B2 (ja) * 1990-04-23 1995-07-26 大日本スクリーン製造株式会社 光学的検査システムのための自動焦点合わせ装置
JP3180229B2 (ja) * 1992-03-31 2001-06-25 キヤノン株式会社 自動焦点合わせ装置
JPH05332735A (ja) * 1992-05-29 1993-12-14 Canon Inc 3次元形状測定装置及びそれを用いた3次元形状測定方法
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
JP3460131B2 (ja) * 1995-06-29 2003-10-27 株式会社ニコン 投影露光装置
JP4671463B2 (ja) * 2000-03-24 2011-04-20 オリンパス株式会社 照明光学系及び照明光学系を備えた顕微鏡
DE10244767A1 (de) * 2002-09-26 2004-04-08 Europäisches Laboratorium für Molekularbiologie Verfahren und Vorrichtung zum Bestimmen des Abstands zwischen einer Referenzebene und einer inneren oder äußeren optischen Grenzfläche eines Objekts sowie Verwendung derselben zum Bestimmen eines Oberflächenprofils eines, inbesondere metallischen, Objekts, Autofokus-Modul, Mikroskop und Verfahren zum Autofokussieren eines Mikroskops
DE10308171A1 (de) * 2003-02-27 2004-09-09 Leica Microsystems Jena Gmbh Verfahren zur automatischen Fokussierung
JP4690132B2 (ja) * 2005-07-13 2011-06-01 オリンパス株式会社 焦点検出装置
DE102006034205B4 (de) * 2006-07-25 2012-03-01 Carl Mahr Holding Gmbh Dynamische Bildaufnahme mit bildgebenden Sensoren
US8249440B2 (en) * 2008-10-01 2012-08-21 Hong Kong Applied Science And Technology Research Institute Co. Ltd. Multi-drive mechanism lens actuator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784164A (en) * 1997-03-20 1998-07-21 Zygo Corporation Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means
US6172349B1 (en) * 1997-03-31 2001-01-09 Kla-Tencor Corporation Autofocusing apparatus and method for high resolution microscope system
WO2005093483A1 (ja) * 2004-03-25 2005-10-06 Research Organization Of Information And Systems 標本合焦位置高精度計測法
CN1926460A (zh) * 2004-04-28 2007-03-07 奥林巴斯株式会社 激光聚光光学系统
CN101281289A (zh) * 2007-12-29 2008-10-08 青岛海信电器股份有限公司 自动聚焦方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
一种全自动显微镜快速聚焦方法;罗丽等;《光学仪器》;20090228;第31卷(第1期);全文 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI721486B (zh) 2017-03-07 2021-03-11 美商伊路米納有限公司 用於使用光源配置之改進的聚焦追蹤的系統和方法

Also Published As

Publication number Publication date
JP2015028637A (ja) 2015-02-12
CN102648389A (zh) 2012-08-22
SG176579A1 (en) 2012-01-30
AU2010249729A1 (en) 2011-12-15
JP2012527651A (ja) 2012-11-08
KR20120039547A (ko) 2012-04-25
WO2010135323A1 (en) 2010-11-25
US20120097835A1 (en) 2012-04-26
EP2433087A1 (en) 2012-03-28
EP2433087B1 (en) 2015-01-21
CA2762684A1 (en) 2010-11-25
EP2881701A1 (en) 2015-06-10

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