CN102646566B - The SEM sample clamp observed for online SEM and SEM sample observation method - Google Patents
The SEM sample clamp observed for online SEM and SEM sample observation method Download PDFInfo
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Abstract
The invention provides a kind of SEM sample clamp observed for online SEM and SEM sample observation method, by providing a kind of disc shape metal support, described disc shape metal support has one or more groove, SEM sample is placed in described groove, thus, SEM sample packaging has been become the shape of complete wafer, thus just the available online SEM being typically only capable to observe complete wafer observes, overcome online SEM in prior art and can not carry out SEM sample/cross-section, or need to be equipped with FIB function, thus cause problem with high costs.
Description
Technical field
The present invention relates to ic manufacturing technology field, observe for online SEM particularly to a kind of
SEM sample clamp and SEM sample observation method.
Background technology
Integrated circuit (Integrated Circuit, IC) is according to the evolution of Moore's Law, and integrated level improves constantly,
Characteristic size constantly reduces.In the device architecture of continuous micro, cause the defect of component failure the most increasingly
Little.Although the various defects produced in major part manufacture process can be captured by defect detecting system, but
Cannot tell that Producer produces the reason of these defects.Scanning electron microscope (Scanning Electron
Microscope, SEM) it is most-often used failure analysis apparatus, utilize the SEM can be to sample in cross section or table
Face carries out trickle observation.SEM amplification can be from thousands of times to hundreds thousand of times, and resolution reaches 3nm,
Thus present stage or even the demand of following many decades integrated circuit microstructure observing can be met.
Although the manufacturer (fab) of integrated circuit is configured with online SEM for Observation of Defects now
(Review), but it is generally based on the design of production line automatic flow, is only used for complete wafer (wafer)
The observation of surface topography.When the failure mode of product needs to observe a certain cross section of complete wafer
Time, can only be by the SEM equipment of failure analysis laboratory.The SEM of this off-line is to sample preparation (SEM
Sample) there is certain requirement, its operation and maintenance are also different from the equipment in fab, so that be equipped with specially
Industry personnel use and manage.On the other hand, fab can have the various inefficacy needing to carry out cross-section every day
The demand analyzed, all uses the SEM equipment of failure analysis laboratory, sometimes results in and need in a large number to carry out cross section
Overstocking of the SEM sample observed.
Focused ion bundle (Focused Ion Bean, FIB) is also provided at the fab of some advanced persons, online SEM
Function (i.e. there is the online SEM of FIB function), the portion to be seen of wafer can be cut online with FIB
Position, does not destroy the integrity of wafer, and the SEM simultaneously carrying out cross section observes.But, this have FIB
The cost that the online SEM of function observes is the highest.Therefore, online SEM equipment how is utilized (not have
Have FIB function) carry out the observation in cross section, become the problem that those skilled in the art are urgently to be resolved hurrily.
Summary of the invention
It is an object of the invention to provide a kind of SEM sample clamp observed for online SEM and SEM sample
Product observational technique, can not carry out SEM sample/cross-section solving online SEM in prior art, or
Need to be equipped with FIB function, thus cause problem with high costs.
For solving above-mentioned technical problem, the present invention provides a kind of SEM specimen holder observed for online SEM
Tool, including:
Disc shape metal support, described disc shape metal bracket edge is provided with Notch notch；
Described disc shape metal support has one or more groove.
Optionally, described in the SEM sample clamp that online SEM observes, described disc gold
Belong to diameter and the thickness of support, and Notch notch meets the SEMI standard-required to wafer, described disk
A diameter of 150 millimeters～300 millimeters of shape metal rack, the thickness of described disc shape metal support is 0.4 milli
Rice～6 millimeters.
Optionally, described in the SEM sample clamp that online SEM observes, described disc gold
Belonging to and have thickened area on support, groove is arranged on described thickened area.
Optionally, described in the SEM sample clamp that online SEM observes, the side of described groove
What wall was surrounded is shaped as cuboid, the through described disc shape metal support of described groove, described disc
The back side of the grooved position of metal rack is pasted with conductive tape.
Optionally, described in the SEM sample clamp that online SEM observes, described conductive tape
It is 100 grades and above carbon film conductive tape or copper film conductive tape for clean level.
Optionally, described in the SEM sample clamp that online SEM observes, the side of described groove
Being shaped as that wall is surrounded is triangular prism shaped.
Optionally, described in the SEM sample clamp that online SEM observes, described thickened area
Thickness is 3 millimeters～20 millimeters.
Optionally, described in the SEM sample clamp that online SEM observes, described thickening position
In the back side of described disc shape metal support, the front of described disc shape metal support is flat surfaces.
Optionally, described in the SEM sample clamp that online SEM observes, described thickened area is remote
Center from described disc shape metal support.
Optionally, described in the SEM sample clamp that online SEM observes, described disc gold
When genus support is placed on the slide glass chuck observed in chamber of online SEM, thickened area bossing is positioned at chuck
Position, internal clearance or outer rim interstitial site.
Optionally, described in the SEM sample clamp that online SEM observes, the length of described groove
Degree is 5 millimeters～30 millimeters, and width is 1 millimeter～5 millimeters.
Optionally, described in the SEM sample clamp that online SEM observes, described disc gold
Belong to support to be made up of aluminum, copper or stainless steel material.
The present invention also provides for a kind of SEM sample observation method, including:
Preparation SEM sample；
Described SEM sample is placed in the groove of above-mentioned SEM sample clamp；
Online SEM is utilized to observe described SEM sample.
Optionally, in described SEM sample observation method, use cutting tool cutting crystal wafer, to obtain
SEM sample.
Optionally, in described SEM sample observation method, described cutting tool is diamant.
Optionally, in described SEM sample observation method, after obtaining SEM sample, by described
Before SEM sample is placed in groove, also comprise the steps:
Described SEM sample is placed in corrosive liquid immersion；
SEM sample after soaking is carried out and is dried.
Optionally, in described SEM sample observation method, online SEM is utilized to observe described SEM sample
Product comprise the steps:
Described SEM sample clamp is put in slide cassette；
Mechanical arm captures described SEM sample clamp, and is sent to observe in chamber；
Online SEM observes the SEM sample in described SEM sample clamp.
Optionally, in described SEM sample observation method, described SEM sample clamp is put into slide glass
Time in the draw-in groove of box, will not encountering when facing up and mechanical arm is captured of disc shape metal support
The bossing at the back side of disc shape metal support.
Optionally, in described SEM sample observation method, load described SEM sample by online SEM
During product fixture, disc shape metal support is after finding Notch notch through prealignment platform, then turns over certain
Angle so that when described disc shape metal support is taken vacuum cavity by mechanical arm, disc will not be encountered
The bossing at the metal rack back side.
The SEM sample clamp observed for online SEM and SEM sample observation method in present invention offer
In, by providing a kind of disc shape metal support, described disc shape metal support has one or more ditch
Groove, SEM sample is placed in described groove, thus, SEM sample packaging has become the shape of complete wafer,
Thus just the available online SEM being typically only capable to observe complete wafer observes, and overcomes in prior art
Online SEM can not carry out SEM sample/cross-section, or needs to be equipped with FIB function, thus causes into
This high problem.
Accompanying drawing explanation
Fig. 1 a is the vertical view signal of the SEM sample clamp observed for online SEM of the embodiment of the present invention one
Figure；
Fig. 1 b is the side-looking signal of the SEM sample clamp observed for online SEM of the embodiment of the present invention one
Figure；
Fig. 2 a is one of groove structure schematic diagram of the embodiment of the present invention one；
Fig. 2 b is the two of the groove structure schematic diagram of the embodiment of the present invention one；
Fig. 3 a be the SEM sample clamp observed for online SEM of the embodiment of the present invention two look up signal
Figure；
Fig. 3 b is the side-looking signal of the SEM sample clamp observed for online SEM of the embodiment of the present invention two
Figure；
Fig. 4 a be the SEM sample clamp observed for online SEM of the embodiment of the present invention three look up signal
Figure；
Fig. 4 b is the side-looking signal of the SEM sample clamp observed for online SEM of the embodiment of the present invention three
Figure；
Fig. 5 is the schematic flow sheet of the SEM sample observation method of the embodiment of the present invention four.
Detailed description of the invention
The SEM sample observed for the online SEM present invention proposed below in conjunction with the drawings and specific embodiments
Product fixture and SEM sample observation method are described in further detail.According to following explanation and claims,
Advantages and features of the invention will be apparent from.It should be noted that, accompanying drawing all uses the form simplified very much and all
Use non-ratio accurately, only in order to facilitate, to aid in illustrating lucidly the purpose of the embodiment of the present invention.
The core concept of the present invention is, it is provided that a kind of SEM sample clamp observed for online SEM and
SEM sample observation method, by providing a kind of disc shape metal support, described disc shape metal support has
One or more groove, SEM sample is placed in described groove, thus, SEM sample packaging has been become complete
The shape of whole wafer, thus just the available online SEM being typically only capable to observe complete wafer observes, gram
Take online SEM in prior art and can not carry out SEM sample/cross-section, or needed to be equipped with FIB merit
Can, thus cause problem with high costs.
Embodiment one
Refer to Fig. 1 a～1b, wherein, Fig. 1 a is observing for online SEM of the embodiment of the present invention one
The schematic top plan view of SEM sample clamp；Fig. 1 b is observing for online SEM of the embodiment of the present invention one
The schematic side view of SEM sample clamp.
As shown in Figure 1a, described SEM sample clamp 1 includes:
Disc shape metal support 10, described disc shape metal support 10 is provided with Notch notch 11；
Described disc shape metal support 10 has one or more groove 12.
Concrete, a diameter of 150 millimeters～300 millimeters of described disc shape metal support 10, thickness is 0.4
Millimeter～6 millimeters.Generally, the size phase of the shape of described disc shape metal support 10 and the wafer on production line
When, the most such as the wafer on this production line is the wafer of 6 cun, the shape of the most described disc shape metal support 10
Shape size is the most also the geomery of 6 cun of wafers.Certainly, if the shape chi of this disc shape metal support 10
Very little bigger or smaller can also, or this disc shape metal support 10 do not hindering the equipment on production line
In the case of, some protruding or depression, about this point, embodiment two, three will be explained further.
In the technique utilizing online SEM that wafer is observed, generally mechanical arm is used to capture to be seen
Wafer, after wafer is grabbed prealignment platform (Prealigner) by mechanical arm, generally by Prealigner
Notch notch according to arranging on wafer positions so that the reference plane of wafer point to same direction, continue
And be directed at more accurately or carry out subsequent technique.Based on this, in the present embodiment, described disc
Be provided with notch notch 11 on metal rack 10, its shape with on wafer Notch notch arrange identical,
It meets SEMI standard.
Generally, described SEM sample clamp 1 is by aluminum, copper, stainless steel material or other metal materials one
Molding, i.e. disc shape metal support 10, Notch notch 11 and groove 12 are made into integration by metal material.
In the present embodiment, two kinds of groove structures are accordingly provided.Concrete, refer to Fig. 2 a～2b, its
In, Fig. 2 a is one of groove structure schematic diagram of the embodiment of the present invention one；Fig. 2 b is the embodiment of the present invention one
Groove structure schematic diagram two.
As shown in Figure 2 a, a kind of structure of described groove 12: the shape that the sidewall 120a of groove 12a is surrounded
Shape is cuboid.When described groove 12a does not runs through described disc shape metal support 10, described groove 12a
Diapire 121a be disc shape metal support 10；When described groove 12a runs through described disc shape metal support 10
Time, the diapire 121a of described groove 12a is conductive tape, the back of the body of the most described disc shape metal support 10
Face is pasted with conductive tape, and described conductive tape can be carbon film conductive tape or copper film conductive tape.
Here, a length of 5 millimeters～30 millimeters of described groove 12a, width is 1 millimeter～5 millimeters, when
So, according to the size of SEM sample, length and the width of described groove 12a can also do adaptations.
As shown in Figure 2 b, the another kind of structure of described groove 12: the sidewall 120b of groove 12b is surrounded
It is shaped as triangular prism shaped.The most now, two sidewall 120b of groove 12b are parallel, another two sidewall 120b
There is common edge.Preferably, the drift angle of described groove 12b (i.e. has between two sidewall 120b of common edge
Angle) be 15 degree～75 degree.
When described disc shape metal support 20 has multiple groove 12, the structure of the plurality of groove 12, chi
Very little can be identical, it is also possible to differ.
Embodiment two
Refer to Fig. 3 a～3b, wherein, Fig. 3 a is observing for online SEM of the embodiment of the present invention two
The elevational schematic view of SEM sample clamp；Fig. 3 b is observing for online SEM of the embodiment of the present invention two
The schematic side view of SEM sample clamp.
As shown in Figure 3 a, described SEM sample clamp 3 includes:
Disc shape metal support 30, described disc shape metal support 30 is provided with Notch notch 31；
Described disc shape metal support 30 has one or more groove 32；
Having thickened area 33 on described disc shape metal support 30, it is described that each groove 32 all has part to be positioned at
On thickened area 33.
The present embodiment is with the difference of embodiment one, is provided with thickening on described disc shape metal support 30
District 33, meanwhile, each groove 32 all has part to be positioned on described thickened area 33.True for SEM equipment
Empty chamber of observing, the chuck of carrying silicon chip is generally annular, here, described thickened area 33 is positioned at described disk
The back side of shape metal rack 30, and this disc shape metal support 30 is placed on the observing in chamber of online SEM
Time on slide glass chuck, the bossing of thickened area 33 is positioned at position, chuck internal clearance.Preferably, add described in
The thickness in thick district is 3 millimeters～20 millimeters.Thus, the degree of depth of groove 32 can arrange more to deepen, such as,
When described groove 32 through described thickened area 33, certainly, the most described groove 32 the most through disc gold
Belonging to support 30, the degree of depth of the most described groove 32 is up to 26 millimeters, thus, can be easy to larger sized SEM
The placement of sample.The concrete structure of described groove 32 refers to Fig. 2 a, 2b, same, when described groove
During 32 through described thickened area 33, it is pasted with conductive tape at the back side of described thickened area 33, to fix
The SEM sample of follow-up placement.
Transmit to online SEM for the ease of SEM sample clamp 3 and observed, particularly, it is simple to machinery
Arm is for the crawl of SEM sample clamp 3, and described thickened area 33 is away from described disc shape metal support 30
Center, i.e. the thickness of the center of disc shape metal support 30 is usually 0.4 millimeter～6 millimeters.
Preferably, the size of described center is more slightly larger than the sucker of mechanical arm, thus, and the sucker of mechanical arm
SEM sample clamp 3 can be drawn easily, it is achieved mechanical arm is for the crawl of SEM sample clamp 3.
Embodiment three
Refer to Fig. 4 a～4b, wherein, Fig. 4 a is observing for online SEM of the embodiment of the present invention three
The elevational schematic view of SEM sample clamp；Fig. 4 b is observing for online SEM of the embodiment of the present invention three
The schematic side view of SEM sample clamp.
As shown in fig. 4 a, described SEM sample clamp 4 includes:
Disc shape metal support 40, described disc shape metal support 40 is provided with Notch notch 41；
Described disc shape metal support 40 has one or more groove 42；
Having thickened area 43 on described disc shape metal support 40, it is described that each groove 42 all has part to be positioned at
On thickened area 43.Vacuum for SEM equipment observes chamber, and the chuck of carrying silicon chip is generally annular,
Here, described thickened area 43 is positioned at the back side of described disc shape metal support 40, and this disc shape metal props up
When frame 40 is placed on the slide glass chuck observed in chamber of online SEM, the bossing of thickened area 43 is positioned at
The outer gap position of chuck.
The present embodiment is with the difference of embodiment two, and described thickened area 43 is farther away from disc shape metal support
The center of 40.
As can be seen here, as long as described thickened area is away from the center of disc shape metal support, the most both to give
Mechanical arm reserves the position of crawl, and thickened area is avoided and the contacting of slide glass chuck simultaneously.Additionally, need
Illustrating, the present invention does not limits for the shape of described thickened area, and i.e. it can be such as embodiment two, reality
Execute the arc shown in example three, it is also possible to be the shape such as rectangle, triangle.Meanwhile, embodiment two embodiment three
In NM part, can reference example one accordingly.
Embodiment four
Refer to Fig. 5, it is the schematic flow sheet of SEM sample observation method of the embodiment of the present invention four.As
Shown in Fig. 5, described SEM sample observation method includes:
S50: obtain SEM sample；
S51: described SEM sample is placed in the groove of SEM sample clamp；
S52: utilize online SEM to observe described SEM sample.
Wherein, described SEM sample clamp is any one in can being embodiment one, embodiment two and embodiment three
Individual SEM sample clamp.At this as a example by SEM sample clamp 1 in embodiment one.
First, SEM sample is obtained, it is preferred that by diamant cutting crystal wafer to obtain SEM sample,
Diamant cutting crystal wafer speed is fast and cheap.Certainly, in other embodiments of the invention, it is also possible to
By other cutting tool cutting crystal wafers to obtain SEM sample, such as focused ion bundle etc..Focus on when using
When ion beam cutting crystal wafer obtains SEM sample, owing to the online SEM of focused ion Shu Buyu integrates, relatively
The online SEM with FIB function mentioned in background technology, its cost also will be cheaper.
In the present embodiment, after obtaining SEM sample, also SEM sample is carried out certain process,
So that SEM sample is more easily observed.Concrete, described SEM sample cutting obtained is placed in corruption
Soaking in erosion solution, described etchant solution can be BOE solution, SPM solution, DHF solution, H3PO4
One or more in solution and KOH solution；Then, to soak after SEM sample be carried out and
It is dried.Thus eliminate some in SEM sample cutting process, thus obtain that quality is better, be easier to
The SEM sample observed.Certainly, in other embodiments of the invention, above-mentioned process can not be carried out, or
Person carries out more processing to obtain the SEM sample of better quality, and this is not limited by the application.
After obtaining SEM sample, SEM sample is placed in the groove of SEM sample clamp, here,
I.e. it is placed in the groove 12 of SEM sample clamp 1.Subsequently, can be according to online SEM for complete brilliant
The observational technique of circle, observes described SEM sample.Specifically include:
Described SEM sample clamp 1 is put in slide cassette, i.e. puts into and generally place complete wafer to be seen
Device in；
Then, mechanical arm captures described SEM sample clamp 1, generally, described mechanical arm first basis
Notch notch 11 carries out prealignment, and then sucker captures described SEM sample clamp 1；
And then, the SEM sample clamp 1 of crawl is sent to observe in chamber by described mechanical arm；
Finally, the SEM sample during online SEM observes described SEM sample clamp 1.
Thus, the mode that just available common online SEM is similar to observe complete wafer observes SEM sample.
It should be noted that, to the placement of SEM sample clamp, crawl and be ultimately delivered to observe the step that chamber is observed
Suddenly, unspecified part in the present invention, can accordingly with reference to the online SEM of prior art for complete wafer
Observe.
The present invention is by providing a kind of SEM sample clamp, concrete, it is provided that a kind of disc shape metal support,
Described disc shape metal support has one or more groove, and SEM sample is placed in described groove, thus,
SEM sample packaging is become the shape of complete wafer, thus just may utilize and be typically only capable to observe complete wafer
Online SEM observes, and overcomes online SEM in prior art and can not carry out SEM sample/cross section sight
Examine, or need to be equipped with FIB function, thus cause problem with high costs.
Foregoing description is only the description to present pre-ferred embodiments, not any restriction to the scope of the invention,
Any change that the those of ordinary skill in field of the present invention does according to the disclosure above content, modification, belong to power
The protection domain of profit claim.
Claims (9)
1. the SEM sample clamp observed for online SEM, it is characterised in that including:
Disc shape metal support, described disc shape metal bracket edge is provided with Notch notch；
Described disc shape metal support has one or more groove；
Multiple circular arc thickened area are positioned at the back side of described disc shape metal support and away from disc shape metal support
Centrally disposed；The sidewall of circular arc thickened area is vertical；The center of circle of described circular arc thickened area is with described
The center of circle of disc shape metal support overlaps；During circular arc thickened area is with the center of circle of disc shape metal support as symmetry
The heart be centrosymmetric distribution and each circular arc thickened area away from this symmetrical centre；Groove is embedded at circular arc and adds
In thick district；, all there is another circular arc thickened area in the pattern constituted for the groove in a circular arc thickened area
In the pattern that constitutes of groove be centrosymmetric distribution with this symmetrical centre therewith, and the figure of described groove composition
It is distributed axisymmetricly with the straight line crossing the center of circle for axis of symmetry between case, the groove being symmetric with this axis of symmetry
Between distance the most equal.
2. the SEM sample clamp observed for online SEM as claimed in claim 1, it is characterised in that
The diameter of described disc shape metal support and thickness, and Notch notch meets SEMI and wants the standard of wafer
Ask, a diameter of 150 millimeters～300 millimeters of described disc shape metal support, described disc shape metal support
Thickness is 0.4 millimeter～6 millimeters.
3. the SEM specimen holder observed for online SEM as described in any one in claim 1 to 2
Tool, it is characterised in that what the sidewall of described groove was surrounded is shaped as cuboid, the through institute of described groove
Stating disc shape metal support, the back side of the grooved position of described disc shape metal support is pasted with conductive tape.
4. according to the SEM sample clamp observed for online SEM described in claims 3, its feature
Be, described conductive tape be clean level be 100 grades and above carbon film conductive tape or copper film conducting resinl
Band.
5. the SEM sample clamp observed for online SEM as claimed in claim 3, it is characterised in that
A length of 5 millimeters～30 millimeters of described groove, width is 1 millimeter～5 millimeters.
6. the SEM specimen holder observed for online SEM as described in any one in claim 1 to 2
Tool, it is characterised in that being shaped as that the sidewall of described groove is surrounded is triangular prism shaped.
7. the SEM sample clamp observed for online SEM as claimed in claim 1, it is characterised in that
The thickness of described thickened area is 3 millimeters～20 millimeters.
8. the SEM sample clamp observed for online SEM as claimed in claim 1, it is characterised in that
When described disc shape metal support is placed on the slide glass chuck observed in chamber of online SEM, thickened area is protruding
Part is positioned at position, chuck internal clearance or outer rim interstitial site.
9. the SEM specimen holder observed for online SEM as described in any one in claim 1 to 2
Tool, it is characterised in that described disc shape metal support is made up of aluminum, copper or stainless steel material.
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| CN103454296A (en) * | 2013-08-27 | 2013-12-18 | 同济大学 | Method for improving quality of energy spectrum face distribution image of inorganic non-metal material sample |
| CN103926120A (en) * | 2014-03-20 | 2014-07-16 | 上海华力微电子有限公司 | Preparation method of SEM sample |
| CN106683995B (en) * | 2015-11-10 | 2019-08-06 | 北大方正集团有限公司 | A kind of processing method for carrying on the back golden product |
| CN108680344B (en) * | 2018-05-23 | 2020-04-03 | 中国科学技术大学 | Manufacturing method of optical high-resolution test target containing hundred-nanometer-size through hole |
| CN110961171B (en) * | 2018-09-30 | 2021-11-02 | 中国科学院上海微系统与信息技术研究所 | Low-temperature sample support |
| CN109883365B (en) * | 2019-01-11 | 2021-04-02 | 深圳赛意法微电子有限公司 | Method for measuring thickness of crystal grain layer and method for judging abnormality of crystal grain layer |
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| CN201465986U (en) * | 2009-08-04 | 2010-05-12 | 山东理工大学 | Block-shaped metal material scanning electron microscope sample stable |
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| JPH0587707A (en) * | 1991-09-27 | 1993-04-06 | Nikon Corp | Sample capsule for x-rays microscope |
| JP2006071608A (en) * | 2004-09-06 | 2006-03-16 | Tdk Corp | Powder holder, measuring sample manufacturing method, and sample analysis method |
| JP5135551B2 (en) * | 2008-12-22 | 2013-02-06 | 新日鐵住金株式会社 | Sample holder |
| JP2010287458A (en) * | 2009-06-12 | 2010-12-24 | Jeol Ltd | Method and device for driving top entry stage |
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| CN201465986U (en) * | 2009-08-04 | 2010-05-12 | 山东理工大学 | Block-shaped metal material scanning electron microscope sample stable |
| CN201464332U (en) * | 2009-08-04 | 2010-05-12 | 山东理工大学 | High-safety sample table for scanning electronic microscope |
| CN202119707U (en) * | 2011-05-17 | 2012-01-18 | 中国计量学院 | Terahertz time domain spectrum sample automatic testing device based on microcontroller |
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