JP2010287458A - Method and device for driving top entry stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To facilitate movement of an object at high magnification concerning a method and a device for driving a top entry stage. <P>SOLUTION: In the top entry stage provided with a round sample stage 1, wherein first and second notch sections 11, 12 are formed on both ends and a third notch section 13 is formed at a point at an equal distance from both ends, for mounting a sample on, an X lever 2 and a Y lever 3 arranged on the first and second notch sections, X and Y driving motors 21, 22 driving the levers at both forward and backward directions and respectively arranged in X and Y directions, a fixed block 4 arranged on the third notch section 13, and a spring 5 for giving biasing force in a designated direction of the sample stage mounted in the vicinity of the fixed block, when the sample stage 1 is to be moved in the X and Y directions, the X and Y driving motors 21, 22 are structured to be simultaneously moved by the same amount when a moving amount is small. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a driving method and apparatus for a top entry stage, and more particularly, to a driving method and apparatus for a top entry stage that can facilitate the movement of a sample at a high magnification.

  FIG. 3 is a diagram showing a configuration example of the top entry stage. Here, the top entry stage refers to a stage in which a sample holder on which a sample is mounted is dropped onto the sample stage from above the lens barrel. This corresponds to the side entry stage in which the sample holder is inserted from the side surface of the lens barrel.

  In the figure, reference numeral 1 denotes a sample stage. The sample stage 1 has first and second cutout portions 11 and 12 at both ends thereof, and a third cutout portion 13 at a point equidistant from the both ends, and a circle on which the sample is placed. This is a sample stage having a shape. Reference numeral 2 denotes a lever X provided in the first cutout portion 11, and 3 denotes a lever Y provided in the second cutout portion 12.

  The lever X is in contact with the first notch 11 through the ball 11a, and the lever Y is in contact with the second notch 12 through the ball 12a. Reference numeral 4 denotes a fixed block provided in the third cutout portion 13. The fixed block 4 and the third notch portion 13 are in contact with each other via a ball 13a. A spring 5 is attached to the sample stage 1 in the vicinity of the notch 13 and applies a biasing force in the direction of the arrow in the figure.

  When the lever is pushed in the direction of the arrow A in the lever X, the sample stage 1 moves downward in the drawing according to the principle of the lever, and when pulled in the direction of the arrow B, the sample stage 1 moves upward in the drawing. When the lever is pushed in the direction of arrow A in the figure Y, the sample stage 1 moves downward in the figure, and when pulled in the direction of arrow B in the figure, the sample stage 1 moves upward in the figure.

  The sample stage 1 is a stage that can hold the sample at the center of the stage, and can move the sample by driving the lever X and lever Y. By pulling in the direction of the arrow with the spring 5, the sample stage 1 is pressed against the fixed block 4, the lever X and the lever Y and fixed.

  FIG. 4 shows the operation of the top entry stage. By moving the lever X, the sample stage 1 moves in the direction of the arrow X drawn on the sample stage 1 so as to draw a circle around the point C as shown in FIG. Similarly, by moving the lever Y, the sample stage 1 moves in the direction of the arrow Y drawn on the sample stage 1 so as to draw a circle around the point D. By these movements, X driving and Y driving are realized. In this case, the amount of movement in each direction is about ± 0.8 mm.

  A conventional apparatus of this type includes a plurality of support mechanisms that press a sample stage that is held on a substrate via a plurality of contact points and that can move in any direction against the substrate. A rod body implanted in the base body and loosely fitted to the sample stage, a spring receiver slidably fitted to the rod body, and a pressure spring stretched between the spring receiver and the rod body; A sample stage support mechanism comprising a plurality of balls provided between the spring receiver and the sample stage is known (see, for example, Patent Document 1).

  In addition, a moving body installed in an XY plane orthogonal to the reference axis Z, positioning means for determining the position of the moving body in the XY plane formed at three locations around the moving body, and two positioning means An apparatus comprising two driving means for directly deviating from a movable body, a conduit attached to the movable body for flowing a coolant, and movable connecting means for connecting the conduit to an externally provided conduit; There is known a precision moving device having a cooling means characterized in that the movable connecting means is arranged in the vicinity of the positioning means to which the displacement by the driving means is not directly given (see, for example, Patent Document 2).

  In addition, a driving contact surface including an electron beam optical axis is provided on the sample moving body holding the sample, a lever body rotatably supported in the sample chamber is brought into contact with the driving contact surface, and the lever body is rotated. In the apparatus for moving the sample moving body in a plane orthogonal to the optical axis, a second lever body is further connected in series to the lever body, and the second lever body is held movably in the sample chamber. There is known a sample moving device in an electron microscope or the like, which is rotatably supported by a slider, provided with means for rotating the second lever, and provided with means for moving the slider. (For example, refer to Patent Document 3).

  In a scanning tunneling microscope that detects a tunnel current by driving a probe close to a sample in three dimensions, a sample stage for holding the sample and a piezoelectric element driving mechanism for driving the probe are mounted on a base. And a fine movement mechanism that finely moves the sample in the XY plane perpendicular to the Z direction or in the Z-axis direction when the height direction between the probe and the sample surface is the Z direction, and the fine movement mechanism There is known a scanning tunneling microscope characterized in that a driving shaft for driving the motor is provided, and the driving shaft is provided so as to be separable from the precision fine movement mechanism (see, for example, Patent Document 4).

Japanese Utility Model Publication No. 59-129160 (page 5, line 8 to page 7, line 2) Japanese Utility Model Publication No. 60-73161 (page 4, line 19 to page 6, line 13) Japanese Utility Model Publication No.57-133301 (page 4, line 20 to page 7, line 13) JP-A-3-41303 (page 2, upper left column, line 15 to page 3, lower left column, line 5)

  In this type of conventional apparatus, when the X drive is performed, the movement actually interferes in the Y direction at the start of movement and then moves in the X drive direction. FIG. 5 is a diagram showing an operation locus of the top entry stage. As shown in the figure, when moving from the point A in the −X direction → the + X direction → the −X direction →..., It moves in the order A → A ′ → B → B ′ → A → A ′ → B →.

  Similarly, when Y driving is performed, the movement starts in the Y direction after interfering with the X direction when starting to move. When moving from the point C in the + Y direction → the −Y direction → the + Y direction →..., The movement moves in the order C → C ′ → D → D ′ → C → C ′ → D. When moving a large amount, it is difficult to see the moving part due to the interference, but when observing the magnification at a high magnification, when the sample is moved a little, both the X drive and Y drive interfere with each other, so they do not move at right angles. Therefore, there is a problem that it is difficult to move the target at a high magnification.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a method and apparatus for driving a top entry stage that facilitates movement of a target at a high magnification.

In order to solve the above problems, the present invention has the following configuration.
(1) In the invention described in claim 1, the first and second cutouts are formed at both ends, and the third cutout is formed at a point equidistant from the both ends. A circular sample stage to be placed, levers provided in the first and second cutouts, and X and Y drive motors provided in the X and Y directions, respectively, for driving the levers in both positive and negative directions A top entry stage comprising: a fixed block provided in the third cutout portion; and a spring attached in the vicinity of the fixed block for applying a biasing force in a predetermined direction of the sample stage. When the stage is moved in the X and Y directions, when the movement amount is small, the X and Y drive motors are simultaneously moved by the same amount.

  (2) In the invention described in claim 2, the first and second cutouts are formed at both ends, and the third cutout is formed at a point equidistant from the both ends. A circular sample stage to be placed, levers provided in the first and second cutouts, and X and Y drive motors provided in the X and Y directions, respectively, for driving the levers in both positive and negative directions A fixed block provided in the third notch, a spring attached in the vicinity of the fixed block for applying a biasing force in a predetermined direction of the sample stage, and an input device for providing an amount of movement in the X and Y directions And a control circuit that receives position information from the input device and applies a drive signal corresponding to the position information to the X and Y drive motors, and the control circuit moves the sample stage in the X and Y directions. When moving, if the amount of movement is small, X, Y Characterized in that the move by the same amount of dynamic motor simultaneously.

  (3) The invention according to claim 3 provides a reference value for the amount of movement that needs to move the X and Y drive motors at the same time, and if the amount of movement exceeds the reference value during sample movement, It is characterized in that Y drive is performed.

  (1) According to the first aspect of the present invention, when the sample stage is moved in the X and Y directions, when the moving amount is small, the X and Y driving motors are simultaneously moved by the same amount. The X drive and the Y drive move properly orthogonally. Therefore, the target can be easily moved at a high magnification.

  (2) According to the invention described in claim 2, when the sample stage is moved in the X and Y directions, when the moving amount is small, the X and Y driving motors are simultaneously moved by the same amount. The X drive and the Y drive move properly orthogonally. Therefore, the target can be easily moved at a high magnification.

  (3) According to the invention described in claim 3, when a reference value is provided for the amount of movement in which the X and Y drive motors need to be moved simultaneously, and the amount of movement does not exceed the reference value during sample movement. Performs X and Y driving as in the present invention, and when the amount of movement exceeds the reference value, normal X and Y driving is performed. Therefore, the sample should be moved perpendicularly from high magnification to low magnification. Will be able to.

It is a block diagram which shows one Example of the top entry stage which concerns on this invention. It is explanatory drawing of operation | movement of the top entry stage which concerns on this invention. It is a figure which shows the structural example of a top entry stage. It is a figure which shows operation | movement of a top entry stage. It is a figure which shows the operation | movement locus | trajectory of a top entry stage.

Examples of the present invention will be described in detail below.
FIG. 1 is a block diagram showing an embodiment of a top entry stage according to the present invention. The same components as those in FIG. 3 are denoted by the same reference numerals. In the figure, reference numeral 1 denotes a sample stage. The sample stage 1 has first and second cutout portions 11 and 12 at both ends thereof, and a third cutout portion 13 at a point equidistant from the both ends, and a circle on which the sample is placed. This is a sample stage having a shape. Reference numeral 2 denotes a lever X provided in the first cutout portion 11, and 3 denotes a lever Y provided in the second cutout portion 12.

  The lever X is in contact with the first notch 11 through the ball 11a, and the lever Y is in contact with the second notch 12 through the ball 12a. Reference numeral 4 denotes a fixed block provided in the third cutout portion 13. The fixed block 4 and the third notch portion 13 are in contact with each other via a ball 13a. A spring 5 is attached to the sample stage 1 in the vicinity of the notch 13 and applies a biasing force in the direction of the arrow in the figure.

  Reference numeral 21 denotes an X drive motor that drives the lever X in the vertical direction in the figure, and 22 denotes a Y drive motor that drives the lever Y in the vertical direction in the figure. As these X drive motor 21 and Y drive motor 22, for example, stepping motors are used. The stepping motor rotates by a predetermined rotation angle in a predetermined direction based on the number of input pulses and the phase of the pulse. Then, according to the rotation of the stepping motor, the lever X or the lever Y moves the sample stage 1 upward or downward in the drawing based on the lever principle.

  The sample stage 1 is pressed and fixed to the lever X, lever Y, and fixed block 4 by being pulled by the spring 5. An X drive motor 21 is connected to the lever X, and the lever X is moved by the motor 21 to move the sample stage 1 in the X direction. When the lever X is pushed by the X drive motor 21, the sample stage 1 moves in the + X direction, and when the lever X is moved in the pulling direction, the sample stage 1 moves in the -X direction.

  A Y drive motor 22 is connected to the lever Y, and the lever Y is moved by the motor 22 to move the sample stage 1 in the Y direction. When the lever Y is pushed by the Y drive motor 22, the sample stage 1 moves in the -Y direction, and when the lever Y is pulled, the sample stage 1 moves in the + Y direction.

  A control circuit 26 is connected to the X drive motor 21 and the Y drive motor 22, and the X drive motor 21 and the Y drive motor 22 are moved through the control circuit 26 by inputting a sample movement signal from the input device 25. Thus, the sample stage 1 can be driven. Here, signals from the input device 25 are (a) driving in the + X direction, (b) driving in the -X direction, (c) driving in the + Y direction, and (d) driving in the -Y direction. There are types. The operation of the apparatus configured as described above will be described as follows.

  FIG. 2 is an explanatory diagram of the operation of the top entry stage. The same components as those in FIG. 1 are denoted by the same reference numerals. In FIG. 2, the input device 25 and the control circuit 26 are omitted. The control circuit 26 moves the X drive motor 21 and the Y drive motor 22 so as to drive the same amount simultaneously with respect to the signal of the input device 25.

  Here, when a drive signal in the + X direction is received from the input device 25, the control circuit 26 drives the X drive motor 21 to push the lever X and the Y drive motor 22 to pull the lever Y. Thereby, the sample stage 1 moves in the + X direction in the X direction and in the + Y direction in the Y direction. As a result, the sample stage 1 moves in the vector X ′ direction, which is a combination of the vector + X direction and the vector + Y direction.

  Next, when receiving a drive signal in the −X direction from the input device 25, the control circuit 26 drives the X drive motor 21 to pull the lever X and the Y drive motor 22 to push the lever Y. Thereby, the sample stage 1 moves in the −X direction in the X direction and in the −Y direction in the Y direction. As a result, the sample stage 1 moves in the vector -X 'direction, which is a combination of the vector -X direction and the vector -Y direction.

  Next, when a drive signal in the + Y direction is received from the input device 25, the control circuit 26 drives the X drive motor 21 in the direction of pulling the lever X and the Y drive motor 22 in the direction of pulling the lever Y. Thereby, the sample stage 1 moves in the −X direction in the X direction and in the + Y direction in the Y direction. As a result, the sample stage 1 moves in the + Y ′ direction of the combination of the vector −X direction and the vector + Y direction.

  Next, when a drive signal in the −Y direction is received from the input device 25, the control circuit 26 drives the X drive motor 21 in the direction of pushing the lever X and the Y drive motor 22 in the direction of pushing the lever Y. Thereby, the sample stage 1 moves in the + X direction in the X direction and in the -Y direction in the Y direction. As a result, the sample stage 1 moves in the −Y ′ direction of the combination of the vector + X direction and the vector −Y direction.

  When the amount of movement is small, it operates while interfering with the operations of lever X and lever Y, but by moving the X drive motor 21 and the Y drive motor 22 simultaneously by the same amount, the movements that interfere with each other are moved. Is canceled and moves in the interference area, it moves almost orthogonally. And when it moves so that it moves beyond the area that moves due to interference, it will move as much as the motor has moved, and will move perpendicularly.

  Therefore, a reference value is set and stored in the control circuit 26 for the amount of movement required to move the X and Y drive motors at the same time. If the amount of movement does not exceed the reference value during sample movement, the X drive is performed. When the motor 21 and the Y drive motor 22 are simultaneously moved by the same amount and the movement amount exceeds the reference value, the conventional X and Y drive may be performed.

  Thus, according to the present invention, when the sample stage 1 is moved in the X and Y directions, the X and Y drive motors 21 and 22 are simultaneously moved by the same amount when the movement amount is small. Therefore, both the X drive and the Y drive move properly orthogonally. Therefore, the target can be easily moved at a high magnification.

  According to the present invention, a reference value is provided for the amount of movement that needs to move the X and Y drive motors 21 and 22 at the same time, and if the amount of movement does not exceed the reference value during sample movement, the present application Since the X and Y driving as in the invention is performed and the movement amount exceeds the reference value, the normal X and Y driving is performed, so that the sample can be moved in a right angle from a high magnification to a low magnification. It becomes like this.

  As described above, according to the present invention, since the interfering operations can be canceled by simultaneously moving the X drive motor and the Y drive motor by the same amount, the movement of the sample movement becomes orthogonal, and the sample movement There is an effect that the movement can be easily performed.

1 Sample stage 2 Tekko X
3 Tek Y
4 Fixed Block 5 Spring 11 Notch 11a Ball 12 Notch 12a Ball 13 Notch 13a Ball 21 X Drive Motor 22 Y Drive Motor 25 Input Device 26 Control Circuit

Claims (3)

A circular sample stage on which a sample is placed, on which first and second cutout portions are formed at both ends and a third cutout portion is formed at a point equidistant from both ends;
Levers provided in the first and second cutouts;
X and Y drive motors respectively provided in the X and Y directions for driving the lever portion in both positive and negative directions;
A fixing block provided in the third notch;
A spring attached in the vicinity of the fixed block for applying a biasing force in a predetermined direction of the sample stage;
In the top entry stage consisting of
When the sample stage is moved in the X and Y directions, the X and Y drive motors are simultaneously moved by the same amount when the amount of movement is small. A circular sample stage on which a sample is placed, on which first and second cutout portions are formed at both ends and a third cutout portion is formed at a point equidistant from both ends;
Levers provided in the first and second cutouts;
X and Y drive motors respectively provided in the X and Y directions for driving the lever portion in both positive and negative directions;
A fixing block provided in the third notch;
A spring attached in the vicinity of the fixed block for applying a biasing force in a predetermined direction of the sample stage;
An input device for giving movement amounts in the X and Y directions;
A control circuit for receiving position information from the input device and providing a drive signal corresponding to the position information to the X and Y drive motors;
With
In the top entry stage, the control circuit moves the X and Y drive motors simultaneously by the same amount when the sample stage is moved in the X and Y directions and the movement amount is small. Drive device.   A reference value is provided for the amount of movement required to move the X and Y drive motors at the same time, and normal X and Y driving is performed when the amount of movement exceeds the reference value during sample movement. The top entry stage drive device according to claim 2.

Images