JP5125025B2 - Imaging device and measuring device - Google Patents

Description

  The present invention relates to an imaging device and a measurement device.

  The following methods are known as methods for optically measuring the external dimensions of a workpiece. That is, first, a light source, a workpiece, and an imaging mechanism are arranged linearly in this order, and light is emitted from the light source to the workpiece. Then, the light is imaged by an imaging mechanism, and the outer dimension of the workpiece is measured from the dimension of the shadow of the workpiece reflected in the obtained image. Patent Document 1 describes an optical shape measuring apparatus using such a principle.

  Here, at the time of imaging, the distance (working distance) between the objective lens included in the imaging mechanism and the workpiece (working distance) is always a constant value. This is because the position of the imaging mechanism is finely adjusted so that the work is in focus each time the work is installed.

JP-A-7-1295

  On the other hand, when the light source is fixed, the distance between the work and the light source changes each time the work is replaced depending on the shape and mounting method of the work. When an extremely fine work is used, there is a problem that even if the change in the distance is as small as several tens of μm, a measurement error occurs due to a shift in optical conditions due to this change. Specifically, depending on the distance between the workpiece and the light source, the way in which light near the workpiece is diffracted due to diffraction changes, resulting in a difference in the captured image even if the workpiece has the same shape. An error occurs in the calculated measurement value.

  The present invention has been made in view of the above problems, and by one of the effects exhibited by the present invention, the distance between the work and the light source is maintained at a constant value regardless of the work attachment state, and the same optical conditions are obtained. Measurements can be performed below.

  An imaging apparatus according to the present invention includes a clamp mechanism that grips a rod-shaped workpiece, an imaging mechanism having an objective lens that images the workpiece gripped by the clamp mechanism from a direction perpendicular to the axis of the workpiece, and the workpiece And a light source for irradiating the work with light, which is disposed on the opposite side of the objective lens with a constant distance from the objective lens.

  According to such a configuration, both the distance from the objective lens to the workpiece (working distance) and the distance from the workpiece to the light source in a state where the workpiece is in focus are always constant. Thereby, the illumination state of the workpiece | work by the light source seen from the imaging mechanism (objective lens) becomes always constant. Here, the illumination state refers to the intensity and incident angle of light received by the work from the light source, the amount of light that wraps around the work due to diffraction, and how to wrap around the light. Therefore, according to the imaging apparatus having the above-described configuration, the illumination state is always constant even when the workpiece to be measured is replaced, so that the workpiece can be imaged in a state where there is little error in the external dimension due to variations in how light wraps around. Can do.

  In the imaging apparatus, it is preferable that the light source is fixed to the imaging mechanism. According to such a configuration, when the imaging mechanism including the objective lens is moved for focusing, the light source is also moved following the movement. Therefore, the distance between the objective lens and the light source, and hence the distance between the workpiece and the light source, can be easily kept constant.

  The measuring apparatus according to the present invention includes a clamp mechanism that grips a rod-shaped workpiece, an imaging mechanism having an objective lens that images the workpiece gripped by the clamp mechanism from a direction orthogonal to the axis of the workpiece, and the workpiece A light source for irradiating the work with light, which is disposed on the opposite side of the objective lens across the objective lens so as to have a constant distance from the objective lens, and an outer shape of the work from an image taken by the imaging mechanism And a calculation unit for calculating a dimension.

  According to such a configuration, both the distance from the objective lens to the workpiece (working distance) and the distance from the workpiece to the light source in a state where the workpiece is in focus are always constant. Thereby, the illumination state of the workpiece | work by the light source seen from the imaging mechanism (objective lens) becomes always constant. As a result, even if the workpiece to be measured is replaced, the workpiece can always be imaged in a constant illumination state. Therefore, the external dimensions calculated from the obtained image have less errors due to variations in how light wraps around. Become. Therefore, according to the measuring apparatus having the above configuration, it is possible to suppress an error in the outer dimension of the workpiece to be measured.

  In the measurement apparatus, it is preferable that the light source is fixed to the imaging mechanism. According to such a configuration, when the imaging mechanism including the objective lens is moved for focusing, the light source is also moved following the movement. Therefore, the distance between the objective lens and the light source, and hence the distance between the workpiece and the light source, can be easily kept constant.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings shown below, the dimensions and ratios of the components are appropriately different from the actual ones in order to make the components large enough to be recognized on the drawings.

(Measurement device)
FIG. 1 is a schematic diagram illustrating a configuration of a measurement apparatus 100 according to an embodiment of the present invention. The measuring device 100 is a device that optically measures the external dimensions of an extremely thin round bar-shaped workpiece R, and includes a clamp mechanism 30 that grips the workpiece R parallel to the X axis, and a clamp mechanism 30 disposed on the upper surface. A table 31 and an imaging mechanism 35 that images the workpiece R from the Z-axis direction orthogonal to the axis Ra of the gripped workpiece R are provided. The workpiece R measured in the present embodiment has an extremely thin round bar shape with a diameter of about 400 μm to 1.5 mm.

  The imaging mechanism 35 includes a support base 51 having a surface substantially parallel to the Z axis, and a table 32 attached to be movable in the Z axis direction via a stepping motor 52 (see FIG. 2) provided on the surface. And two camera units 36 and 37 as imaging means fixed to the table 32. Two light sources 33 and 34 are fixed to the table 32 so as to face the camera units 36 and 37, respectively. Accordingly, the relative positional relationship between the light sources 33 and 34 and the camera units 36 and 37 is always kept constant.

  The above configuration will be described in detail with reference to FIG. FIG. 2 is a side view showing a part of the imaging mechanism 35 and the clamp mechanism 30. From the viewpoint of this figure, the camera unit 36 and the light source 33 are not drawn because they are hidden, but their configuration and relative positional relationship are the same as those of the camera unit 37 and the light source 34.

  The camera units 36 and 37 are configured using, for example, a CCD as an image sensor and an objective lens 39 that enlarges the measurement location of the workpiece R. The camera unit 36 and the camera unit 37 are configured to have different magnifications during imaging. The objective lens 39 is disposed at the tip of the camera unit 37 (36) and faces the workpiece R during measurement. In particular, when the camera unit 37 (36) is focused on the work R, the distance (working distance) between the objective lens 39 and the work R is always constant at D1. A light source 34 (33) for irradiating the work R with light is disposed on the opposite side of the objective lens 39 across the work R. As the light sources 33 and 34, for example, a halogen lamp capable of obtaining high brightness is used, and the illumination brightness is set according to the imaging magnification of the camera units 36 and 37, respectively. Since the light source 34 (33) and the camera unit 37 (36) are fixed to the table 32, the distance between the light source 34 and the objective lens 39 is always constant at D3. From the above, when the camera unit 37 (36) is focused on the workpiece R, the distance between the workpiece R and the light source 34 (33) is always constant at D2 (= D3-D1).

  Here, as the CCD of the camera unit 36, for example, a CCD having 2.3 million pixels, a pixel pitch of 4.4 μm, and a resolution of 0.1 μm can be used, and in combination with an optical system including the objective lens 39, an enlargement magnification of 50 times, The imaging field of view is set to 100 μm square and the focal depth is 1 μm. As the CCD of the camera unit 37, for example, a CCD having 4 million pixels, a pixel pitch of 6 μm, and a resolution of 0.6 μm can be used. In combination with an optical system including the objective lens 39, the magnification is 10 times and the imaging field of view 1 .2 mm square and depth of focus of 17 μm.

  The focus adjustment described above is performed by an autofocus mechanism 38 provided in the imaging mechanism 35. The autofocus mechanism 38 has a stepping motor 52 shown in FIG. Then, the autofocus mechanism 38 uses the stepping motor 52 to move the table 32 in the Z-axis direction to change the distance between the workpiece R and the objective lens 39, thereby adjusting the focus of the camera units 36 and 37. . Instead of the stepping motor 52, a motor using a linear motor, an air cylinder, a micrometer, or the like may be used. The autofocus mechanism 38 is provided with a motor combining a stepping motor and gear, a motor combining a voice coil motor and a spring, a piezo actuator, etc. in the vicinity of the objective lens 39 in order to finely adjust the position of the objective lens 39. Furthermore, you may provide.

  Returning to FIG. 1, the measuring apparatus 100 has a table so that at least a part of the gripped work R is positioned on the optical axes 33 a and 34 a between the camera units 36 and 37 and the light sources 33 and 34. A drive unit (not shown) for moving 31 in the X-axis direction and the Y-axis direction is provided. The drive unit includes an X-axis motor and a Y-axis motor. For example, a servo motor or a pulse motor is used as the X-axis motor and the Y-axis motor.

  Furthermore, the measurement device 100 includes a control device 40 that controls each unit of the measurement device 100. The control device 40 includes a CPU 41 corresponding to the calculation unit of the present invention, a memory 42 composed of an EPROM, an image processing unit 43, an X-axis motor control unit 44, a Y-axis motor control unit 45, and a clamp mechanism 30. And a motor control unit 46 that controls the motor 29. The control device 40 is configured using a personal computer or the like, for example.

  Here, the clamp mechanism 30 is demonstrated using FIG. FIG. 3 is a schematic perspective view showing the structure of the clamp mechanism 30. The clamp mechanism 30 includes a gripping unit 10 that grips the workpiece R, a posture adjustment unit 20 that adjusts the posture of the gripped workpiece R, a bearing 27 that pivotally supports the gripping unit 10 and the posture adjustment unit 20, and A motor 29 is provided as a rotation drive unit that rotates the gripping unit 10 and the posture adjustment unit 20 together. As the motor 29, for example, a servo motor or a pulse motor can be used.

  Between the bearing 27 and the motor 29, a position detection mechanism 28 that detects the origin position of the posture adjustment unit 20, and a sleeve-like connection that connects the rotation shaft of the motor 29 and the posture adjustment unit 20 via the bearing 27. A portion 29a is provided. Each of the above components is disposed on the surface of the support plate 25.

  The position detection mechanism 28 includes a position detection plate (dog plate) 28a, an attachment portion 28b of the dog plate 28a, and an origin sensor 28c. An attachment portion 28b is fixed to one shaft (not shown) of the posture adjusting portion 20 that is rotatably supported by the bearing 27. The origin sensor 28c uses, for example, a photomicrosensor in which a light emitting unit (not shown) and a light receiving unit (not shown) are arranged to face each other, and the dog plate 28a attached to the attachment unit 28b is configured to have the light emitting unit and the light receiving unit. Is disposed on the surface of the support plate 25 so as to cross between the two. The origin position is detected by the dog plate 28a shielding the optical axis between the light emitting unit and the light receiving unit. In this embodiment, a photomicrosensor having a detection position accuracy of 30 μm is used. When the rotation angle is converted, the origin can be detected with an accuracy of 0.1 °.

  The grip 10 includes a cradle arm 11, a cradle 1 attached to one end 11a of the cradle arm 11, a T-shaped presser arm 12, and a presser attached to the end 12a. 5 is provided. The cradle 1 has a V-shaped groove for guiding the workpiece R. The pressing portion 5 facing this has a downwardly convex V-shape corresponding to the groove of the cradle 1 so as to come into contact with the work R arranged in the groove of the cradle 1 from above. In the downwardly convex V-shape, the tip portion is flattened, and this flat portion abuts against the workpiece R. Accordingly, the workpiece R is gripped by the groove of the cradle 1 and the flat tip portion of the pressing portion 5.

  Here, the pressing portion arm 12 is urged by a spring (not shown) in a direction in which the pressing portion 5 comes into contact with the cradle 1 with the base of the T-shaped support column as a fulcrum. Using this elastic force, the workpiece R is gripped by the cradle 1 and the pressing portion 5.

  The posture adjustment unit 20 includes an arm guide 16 that guides the cradle arm 11 and a hollow block 21 that serves as a position adjustment unit that supports the other end 11 b of the cradle arm 11. Further, the rotary table 18 in which the arm guide 16 and the block 21 are disposed, and the rotary plate 24 that is supported by the bearing 27 and to which the block 21 is attached are provided.

  Therefore, when the motor 29 is driven, the rotating plate 24 supported by the bearing 27 rotates. Since the rotary table 18 is fixed to the rotary plate 24 via the block 21, the cradle arm 11 supported by the block 21 and the arm guide 16 rotates. That is, it is configured to be able to rotate around the rotation axis of the motor 29 while the work R is gripped by the gripping part 10.

  Of the measurement apparatus 100 described above, an apparatus including the imaging mechanism 35 including the autofocus mechanism 38, the clamp mechanism 30, and the light sources 33 and 34 corresponds to the imaging apparatus according to the present invention.

(Measurement method)
Next, a measurement method using the measurement apparatus 100 will be described. FIG. 4 is a process diagram in the case of measuring the outer dimensions of the workpiece R using the measuring device 100. Hereinafter, it demonstrates along the process drawing of FIG.

  In step S <b> 1, the workpiece R is attached to the clamp mechanism 30. First, the clamping mechanism 30 grips the workpiece R by the gripping portion 10 by the above-described mechanism, and the posture adjusting unit 20 is adjusted so that the axis line Ra of the workpiece R and the rotation axis of the motor 29 coincide. As an actual adjustment method, the work R is gripped by the clamp mechanism 30 and rotated, and the state of taking an image of the state by the image pickup mechanism 35 and checking whether the axis line Ra is shaken is repeatedly performed.

  In subsequent step S2, the clamp mechanism 30 is moved to a predetermined position. This step is performed by operating the measuring device 100 by operating the control device 40. First, the CPU 41 sends control signals to the X-axis motor control unit 44 and the Y-axis motor control unit 45 based on the measurement program input to the memory 42. The X-axis motor control unit 44 and the Y-axis motor control unit 45 drive the X-axis motor and the Y-axis motor based on the control signal so that, for example, the measurement position of the workpiece R is positioned on the optical axis 33a. Move.

  Here, the X-axis motor control unit 44 and the Y-axis motor control unit 45 may move the table 31 so that the measurement location of the workpiece R is positioned on the optical axis 34a. Whether the workpiece R is positioned on the optical axis 33a or the optical axis 34a is determined by the range of the part to be measured. That is, for example, when measuring the shape of a very small processing region in a very narrow range, it is positioned on the optical axis 33a in order to capture an image with the camera unit 36 having a magnification of 50 times, and the shape in a wider range is measured. In such a case, the camera unit 37 having a magnification of 10 times is positioned on the optical axis 34a for imaging.

  Next, in step S3, autofocus is executed by the autofocus mechanism 38. That is, the CPU 41 sends a control signal to the autofocus mechanism 38 and drives the autofocus mechanism 38 so that the work R illuminated by the light source 33 is in focus. More specifically, the image processing unit 43 specifies the outer shape of the workpiece R based on the image information captured by the camera unit 36, and the stepping motor 52 included in the autofocus mechanism 38 so that the outer line can obtain a predetermined sharpness. To focus.

  At the time of focusing, the objective lens 39 may be simultaneously driven by a motor incorporated in the vicinity of the objective lens 39 for further fine adjustment. In addition, when the focus is shifted beyond the standard range and the autofocus mechanism 38 does not function, or when the measuring apparatus 100 does not have the autofocus mechanism 38, the focus may be manually adjusted.

  In this state, the distance between the objective lens 39 and the workpiece R is always a constant value D1 (working distance) depending on the characteristics of the objective lens 39 (see FIG. 2). In this embodiment, D1 is about 10 mm. Here, the camera unit 36 including the objective lens 39 is fixed to the table 32. On the other hand, the light source 33 is also fixed to the table 32 included in the imaging mechanism 35. Therefore, even if the stepping motor 52 is driven for focusing, the distance between the objective lens 39 and the light source 33 is always kept constant at D3. In this embodiment, D3 is about 45 mm. From the above, the distance between the workpiece R and the light source 33 is always kept at a constant value D2 (= D3-D1), and the size thereof is about 35 mm.

  Next, in step S <b> 4, the workpiece R is imaged by the camera unit 36 included in the imaging mechanism 35. FIG. 5 is a diagram illustrating an imaging range of the imaging mechanism 35 at this time. In the present embodiment, the tip of the workpiece R is imaged as shown in this figure. Based on the image, for example, the diameter of the workpiece R is calculated in step S5 described later.

  FIG. 6A is a diagram showing the luminance detection result of the CCD along the line A-A ′ in FIG. 5. At the position related to the workpiece R, the light from the light source 33 is blocked and the luminance is low, and at the position outside the workpiece R, the luminance from the light source 33 is measured and the luminance is high.

  In imaging by the measuring apparatus 100 of the present embodiment, when the same workpiece R is measured, a result as shown in FIG. 6A is always obtained. That is, for example, as shown in FIG. 6B, a result including an error such that the workpiece R looks thin (corresponding to the workpiece R ′ in FIG. 5) hardly occurs. This is because, as described above, the distance between the workpiece R and the light source 33 is always kept at D3, so that the workpiece R is illuminated in a constant illumination state. Here, the illumination state refers to the intensity and incident angle of light received by the work R from the light source 33, the amount of light that wraps around the work R due to diffraction, and how to wrap around the light.

  For example, when the distance between the work R and the light source 33 changes by about several tens of μm, the degree to which the light from the light source 33 wraps around the outline of the work R due to diffraction changes, and the work has an outer shape originally indicated by the symbol R in FIG. R is imaged as if it is the outer shape indicated by the symbol R ′ in FIG. That is, even with the work R for which the result of FIG. 6A is to be obtained, imaging with a shape different from the actual shape is performed as shown in FIG. 6B. However, due to the features described above, such a problem is unlikely to occur in the measurement apparatus 100 of the present embodiment. Such a defect is particularly likely to occur when the diameter of the workpiece R is extremely thin such that it is about 1 mm or less than 1 mm.

  Next, in step S5, the measured value of the outer dimension of the workpiece R is calculated based on the image obtained in step S4. This step is performed as follows. First, the image processing unit 43 converts captured image information into bitmap data, and sends the bitmap data to the CPU 41 serving as a calculation unit. The CPU 41 calculates the dimension of the measurement location from this bitmap data and outputs it. In this calculation, for example, two points where the contrast greatly changes in the data of FIG. 6A (that is, a point where the brightness suddenly increases or decreases) are specified, and conversion processing is performed using the imaging magnification from the number of pixels between them. Is done by. According to the data of FIG. 6A, the diameter of the workpiece R can be measured.

  Through the above steps, measurement of the shape of the workpiece R is completed. Thereafter, in order to increase the measurement data and increase the measurement accuracy, the workpiece R may be rotated by a certain angle, and the steps S3 to S5 may be performed in this state, or this process may be further repeated.

  This process is performed as follows. First, the control device 40 sends a control signal to the motor control unit 46 to drive the motor 29 so as to rotate the workpiece R in a plurality of times. In synchronization with this, steps S3 to S5 are performed in order to image the workpiece R, and the output data is statistically processed by the CPU 41. Thereby, an average value and variation are obtained from a plurality of sampling data at the measurement location. Further, by rotating the work R in a plurality of times, dimensional information such as eccentricity can be obtained.

  In addition, after the completion of step S1 to step S5 or after the workpiece R is rotated and measured a plurality of times, the other of the two camera units 36 and 37 having different imaging magnifications with respect to the same workpiece R. You may measure using.

  When the measurement of one workpiece R is completed, the workpiece R is removed from the clamp mechanism 30 and the same measurement is performed on another workpiece (hereinafter referred to as workpiece R2). At this time, according to the measuring apparatus 100 of the present embodiment, even if the mounting posture of the workpiece R2 is slightly different from the previous mounting posture of the workpiece R, the distance D3 between the workpiece R2 and the light sources 33 and 34 is set to the workpiece R. Thus, the workpiece R2 can be illuminated in the same illumination state as the workpiece R. For this reason, a measurement error due to a variation in the distance D3, that is, a measurement error due to a difference in how the light wraps around due to diffraction, for example, due to a variation in the illumination state of the work R2 is unlikely to occur. Therefore, even when a large number of ultra-fine workpieces R are measured, it is possible to appropriately measure the outer dimensions, perform inspections based on this, and select non-defective products.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. For example, modifications other than the above embodiment are as follows.

(Modification 1)
The imaging mechanism 35 in the above embodiment includes the table 32 to which the light sources 33 and 34 are fixed. Instead, the following configuration may be employed. FIG. 7 is a side view showing a part of the imaging mechanism 35 and the clamp mechanism 30 according to this modification. As can be seen from this figure, the camera units 36 and 37 and the light sources 33 and 34 are attached to different support bases 51a and 51b separated from each other. That is, the camera units 36 and 37 are attached to the support base 51a via the table 32a and the stepping motor 52a. The light sources 33 and 34 are attached to the support base 51b via the table 32b and the stepping motor 52b.

  Here, the stepping motors 52a and 52b are configured to always receive the same drive signal and realize the same drive state. That is, the stepping motor 52a always moves the table 32a, and the stepping motor 52b always moves the table 32b in the Z direction by the same distance at the same speed in the same direction. Therefore, the relative positional relationship between the table 32a and the table 32b is always constant, and as a result, the relative distance between the camera units 36 and 37 and the light sources 33 and 34 is always constant. According to such a configuration, the distance between the objective lens 39 included in the camera units 36 and 37 and the light sources 33 and 34 is constant. Therefore, as in the above-described embodiment, the distances D1, D2, and D3 in the focused state are always constant values, and it is possible to illuminate in the same illumination state even if the workpiece R is replaced, and the outer dimensions have few errors. Measurement can be performed.

(Modification 2)
In the above embodiment, the workpiece R is not limited to a simple round bar. For example, the tip portion may be processed into a thin shape, or may have a shape whose diameter changes stepwise. Further, the cross section may be a polygon or the outer shape may include a curve.

(Modification 3)
In the measurement apparatus 100 of the above-described embodiment, the arrangement of each part such as the clamp mechanism 30, the table 31, and the imaging mechanism 35 is not limited to this. For example, in FIG. 1, the clamp mechanism 30 is arranged on the table 31 so that the axis Ra of the round bar-shaped workpiece R and the Z-axis direction coincide with each other, and the optical axis 33a extends in a direction perpendicular to the axis Ra of the workpiece R. The camera unit 36 and the light source 33 may be arranged so as to face each other. According to this, the workpiece R is inserted into the groove of the cradle 1 from the Z-axis direction, and the operation is relatively easy.

(Modification 4)
The configuration of the clamp mechanism 30 is not limited to the one having the cradle 1 having the V-shaped groove as in the above embodiment, and any configuration can be used as long as the workpiece R can be gripped. Good. For example, a chuck having a clamping portion that supports the workpiece R from three directions and a clamping portion that clamps the clamping portion to fix the workpiece R, or a configuration that supports the workpiece R from two directions like a vise. Can be used.

Schematic which shows the structure of the measuring device which concerns on embodiment of this invention. The side view which shows a part of imaging mechanism and a clamp mechanism. The schematic perspective view which shows the structure of a clamp mechanism. The process figure in the case of measuring the external dimension of a workpiece | work using a measuring device. The figure which shows the imaging range of an imaging mechanism. (A) And (b) is a figure which shows the brightness | luminance detection result of CCD along the A-A 'line | wire in FIG. The side view which shows a part of imaging mechanism and clamp mechanism which concern on the modification of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Grasp part, 20 ... Attitude adjustment part, 29 ... Motor, 30 ... Clamp mechanism, 32 ... Table, 33, 34 ... Light source, 35 ... Imaging mechanism, 36, 37 ... Camera unit, 38 ... Auto-focus mechanism, 39 ... Objective lens 40 ... Control device 41 ... CPU as calculation unit 51 ... Support base 52 ... Stepping motor 100 ... Measurement device

Claims (4)

A clamp mechanism for gripping a rod-shaped workpiece;
An imaging mechanism having an objective lens that images the workpiece gripped by the clamping mechanism from a direction orthogonal to the axis of the workpiece;
A light source for irradiating the work with light, disposed on the opposite side of the objective lens across the work, so that the distance from the objective lens is constant ,
The said clamp mechanism has an attitude | position adjustment part which adjusts the attitude | position of the hold | gripped said workpiece | work, The imaging device characterized by the above-mentioned . The imaging apparatus according to claim 1,
The imaging apparatus, wherein the light source is fixed to the imaging mechanism. A clamp mechanism for gripping a rod-shaped workpiece;
An imaging mechanism having an objective lens that images the workpiece gripped by the clamping mechanism from a direction orthogonal to the axis of the workpiece;
A light source for irradiating the work with light, which is disposed on the opposite side of the objective lens across the work, so that the distance from the objective lens is constant,
A calculation unit that calculates an outer dimension of the workpiece from an image captured by the imaging mechanism ,
The measuring apparatus according to claim 1, wherein the clamp mechanism includes a posture adjusting unit that adjusts a posture of the gripped workpiece . It is a measuring device of Claim 3, Comprising:
The measuring device, wherein the light source is fixed to the imaging mechanism.

Images