CN102639665B - 粒子的静电沉积方法、磨粒以及制品 - Google Patents

粒子的静电沉积方法、磨粒以及制品 Download PDF

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Publication number
CN102639665B
CN102639665B CN201080053959.1A CN201080053959A CN102639665B CN 102639665 B CN102639665 B CN 102639665B CN 201080053959 A CN201080053959 A CN 201080053959A CN 102639665 B CN102639665 B CN 102639665B
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China
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particles
abrasive
nanoparticles
less
microns
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Chinese (zh)
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CN102639665A (zh
Inventor
卡特里·容鲍尔
吉米·R·小巴兰
罗克珊·A·伯默尔
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles

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  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
CN201080053959.1A 2009-12-03 2010-11-17 粒子的静电沉积方法、磨粒以及制品 Active CN102639665B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US26628609P 2009-12-03 2009-12-03
US61/266,286 2009-12-03
PCT/US2010/056973 WO2011068678A1 (en) 2009-12-03 2010-11-17 Method of electrostatic deposition of particles, abrasive grain and articles

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CN102639665A CN102639665A (zh) 2012-08-15
CN102639665B true CN102639665B (zh) 2015-04-01

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US (1) US8894466B2 (enExample)
EP (1) EP2507336B1 (enExample)
JP (1) JP5658761B2 (enExample)
CN (1) CN102639665B (enExample)
BR (1) BR112012013350A2 (enExample)
SG (1) SG181046A1 (enExample)
WO (1) WO2011068678A1 (enExample)

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US20160263722A1 (en) * 2013-10-18 2016-09-15 3M Innovative Properties Company Coated abrasive article and method of making the same
JP2015147276A (ja) * 2014-02-07 2015-08-20 株式会社中村超硬 ワイヤソー
CN104785349B (zh) * 2015-04-29 2017-05-03 浙江冠旗纳米科技有限公司 纳米级固体粉末高效制备方法
CN104947169B (zh) * 2015-06-19 2017-05-17 浙江大学 一种超疏水二氧化硅薄膜的制备方法
US11351653B2 (en) 2016-09-26 2022-06-07 3M Innovative Properties Company Nonwoven abrasive articles having electrostatically-oriented abrasive particles and methods of making same
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WO2021214576A1 (en) * 2020-04-21 2021-10-28 3M Innovative Properties Company Surface-modified nanoparticle additives in printable particle-containing compositions
KR20220130544A (ko) * 2021-03-18 2022-09-27 삼성에스디아이 주식회사 텅스텐 패턴 웨이퍼 연마용 cmp 슬러리 조성물 및 이를 이용한 텅스텐 패턴 웨이퍼의 연마 방법

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Also Published As

Publication number Publication date
US8894466B2 (en) 2014-11-25
WO2011068678A1 (en) 2011-06-09
JP2013512786A (ja) 2013-04-18
EP2507336B1 (en) 2017-08-09
US20120252321A1 (en) 2012-10-04
SG181046A1 (en) 2012-07-30
JP5658761B2 (ja) 2015-01-28
CN102639665A (zh) 2012-08-15
BR112012013350A2 (pt) 2017-12-12
EP2507336A1 (en) 2012-10-10

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