CN102625493A - Friction-welding copper electrode for polycrystalline silicon vacuum furnace and manufacturing process thereof - Google Patents
Friction-welding copper electrode for polycrystalline silicon vacuum furnace and manufacturing process thereof Download PDFInfo
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- CN102625493A CN102625493A CN201210076789XA CN201210076789A CN102625493A CN 102625493 A CN102625493 A CN 102625493A CN 201210076789X A CN201210076789X A CN 201210076789XA CN 201210076789 A CN201210076789 A CN 201210076789A CN 102625493 A CN102625493 A CN 102625493A
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Abstract
The invention relates to a copper electrode used in polycrystalline silicon vacuum furnace production equipment and discloses a friction-welding copper electrode for a polycrystalline silicon vacuum furnace and a manufacturing process thereof. The product of the friction-welding copper electrode comprises a copper electrode rod, a copper flange, a power connection board, a locking nut, an O-shaped seal ring, an insulation protective assembly and a connecting bolt. The friction-welding copper electrode is characterized in that the copper electrode rod comprises at least two sections which hare connected into a whole through friction welding. The manufacturing process is characterized in that: when a continuous driving friction welding machine is adopted for manufacture, the main process parameters is as follows: the spindle rotation speed is 1300-1800r/min, the upsetting pressure is 100-130MPs, and the pressure holding time is 4-10s; and when an inertia friction welding machine is adopted for manufacture, the main process parameters are as follows: the initial rotation speed is 1500-2200r/min, the rotational inertia is 1.2-3.6kg.m<2>, the upsetting pressure is 100-130Mpa, and the pressure holding time is 3-5s. By means of the manufacturing process disclosed by the invention, the advantages of simplicity for manufacturing and firmness in welding line combination are achieved, the electrical conductivity is not influenced, the service life of a product is long, and the damaged copper electrode rod can be repaired for use.
Description
Technical field
The present invention relates to a kind of vacuum furnace with copper electrode and manufacturing process thereof, relate in particular to a kind of polysilicon vacuum stove with friction welding (FW) copper electrode and manufacturing process thereof.
Background technology
In photovoltaic industry, the polycrystalline silicon ingot casting vacuum furnace is the equipment that is used for the casting large-scale polycrystal silicon ingot, and it is with passing through the directional solidification condensation-crystallization after the silicon material high-temperature fusion, making it form the consistent silicon ingot in crystal orientation, thereby reach the requirement of solar cell to the silicon chip quality.The effect of copper electrode is to import powerful electric current (ampere about 2000) into graphite electrode through copper electrode to heat graphite cake again, makes its heating, heats the silicon material through thermal radiation.Existing copper electrode comprises that the rear end brings out the copper electrode bar of cooling water pipe into, and the copper flange connects electroplax, locking nut, O RunddichtringO, insulation protection assembly, connecting bolt etc.The common external diameter 32mm～50mm of copper electrode bar, internal diameter 15mm～20mm, wall thickness 8.0mm～15.0mm, length 800mm～1000mm, the front end sealing, the periphery circle is provided with screw thread, uses with the graphite electrode internal thread to be connected.Extraneous electricity is gone into graphite electrode through the copper electrode rod guidance.At present, dual mode is adopted in the manufacturing of copper electrode bar: a kind of is to select pure copper tube for use, end melting welding sealing; Because defectives such as conventional melting method commissure unavoidably produces pore, is mingled with, slag; Under the rapid heat cycle environment, front end commissure fatigue of materials under the thermal stress effect produces be full of cracks, leaks easily and scraps; Useful life is short, and maintenance workload is big.Another kind is to select fine copper rod for use, adopts the deep hole machining mode, though this processing mode front end need not weld, has solved the front end seepy question, because excellent height, and deep hole machining chip removal difficulty and difficulty of processing is big, material consumption is high.In addition, be connected by screw thread entirely between copper electrode and the graphite electrode, and be the line contact, even some place is a contact; When powerful electric current flow through this place, because contact area is less, resistance was excessive, produced great amount of heat at this position; Temperature is sharply raise, and after use a period of time, two electrodes often bond together because of ablation; Influence electric current and pass through, conductance reduces, and must blowing out overhaul replacing; And can't repair, also cause production of polysilicon enterprise copper electrode and graphite electrode short useful life, production cost is high.In sum, copper electrode front end weld leaks and screw thread joining place heavy current starting the arc erosion progressively damages it, is to cause copper electrode short main cause in useful life.At present, homemade copper electrode was generally 1 year useful life, and import copper electrode (adopting fine copper rod deep hole machining mode to make) was generally 3 years useful life.
Study a kind of long service life, can repair, enterprise reduces production costs significantly for production of polysilicon, makes simply simultaneously, and the polysilicon vacuum stove that can substitute import is fully used copper electrode, is an important topic of the present invention.
Summary of the invention
This problem is inquired into and is adopted the spin friction welding technology, solves existing issue.Spin friction weldering can be divided into two kinds of Continuous Drive Friction Welding and flywheel friction weldings.The operation principle of Continuous Drive Friction Welding is: usually workpiece to be welded two ends are separately fixed in rolling clamp and the mobile anchor clamps; After workpiece is clamped; By workpiece rotation of motor drives, press to rotational workpieces to another workpiece simultaneously, friction generates heat each other and certain plastic deformation to make its contact-making surface; Stop the rotation then, apply upsetting force simultaneously and accomplish welding.Welding quality and rotating speed, fraction time, friction pressure, upsetting force are relevant with the workpiece forge length.The operation principle of flywheel friction welding is: rotational workpieces and flywheel are fixed, and reach the rotating speed of setting by the Motor Drive flywheel, and motor is through clutch and main shaft disengagement subsequently; Press to the turning of work piece that is clamped on the flywheel shaft to a workpiece then; Frictional resistance between workpiece slows down flywheel, and converts the kinetic energy of flywheel to welding required heat energy, makes end face reach the thermoplasticity state; Rapid then upset is accomplished welding.Welding quality is relevant with flywheel the moment of inertia, rotating speed and upsetting force.The used friction-welding machine of friction welding (FW) comprises drive system (inertia friction welder also comprises flywheel) and pressue device.Lot of documents record proof, friction welding (FW) has been widely used in engine chamber, vent valve, axle, axle sleeve, rod member, pipe and flange, oil drill rocker and being connected of brill core and being connected of Bars with Variable Cross-Section on the plant produced line.
The purpose of this invention is to provide that a kind of manufacturing is simple, long service life, recoverable polysilicon vacuum stove be with friction welding (FW) copper electrode and manufacturing process thereof.
In order to solve the problems of the technologies described above, the technical scheme that the present invention adopted is:
A kind of polysilicon vacuum stove is used the friction welding (FW) copper electrode, comprises that external diameter is the copper electrode bar of 32mm～50mm, and the copper flange connects electroplax; Locking nut, O RunddichtringO, insulation protection assembly; Connecting bolt is characterized in that: the copper electrode bar is provided with two sections at least, adopts friction welding (FW) to be connected as a single entity.
In before said copper electrode bar is arranged to back three sections, in, back segment selects for use two kinds of specification pure copper tube friction welding (FW)s of various outer diameter to connect, leading portion is selected the fine copper rod for use, is connected with the stage casing friction welding (FW).
In before said copper electrode bar is arranged to back three sections, front and rear sections selects for use the fine copper rod boring back of various outer diameter to be connected with the pure copper tube friction welding (FW) in stage casing.
Said copper electrode bar is arranged to two sections of the front and back of same outer diameter as, and leading portion selects for use fine copper rod boring back to be connected with the pure copper tube friction welding (FW) of back segment.
For easy to process, the copper electrode bar also can be provided with friction welding (FW) connection more than three sections.
A kind of being exclusively used in produced the manufacturing process of polysilicon vacuum stove with the friction welding (FW) copper electrode, comprises the spin friction welding machine, and it is characterized in that: external diameter is the copper electrode bar segment design of 32mm～50mm; When adopting the Continuous Drive Friction Welding machine to make, the technological parameter of copper electrode bar friction welding (FW) is: the speed of mainshaft 1300～1800r/min, friction pressure 70～90MPa; Fraction time 1～6s (s is second, down together), upsetting force 100～130MPa; Dwell time 3～10s, workpiece forge length 3～8mm; When adopting inertia friction welder to make, the technological parameter of copper electrode bar friction welding (FW) is: initial rotating speed 1500～2200r/min, moment of inertia 1.2～3.6kgm
2, friction pressure 70～90MPa, fraction time 1～5s, upsetting force 100～130MPa, dwell time 3～5s, workpiece forge length 3～8mm.
The copper electrode bar is selected fine copper rod or pure copper tube for use, is designed to workpiece more than two sections or two sections, after the roughing; Adopt above-mentioned process friction welding; Remove inside and outside burr, flash, fine finishining again, all circle machining screw screw threads in front end periphery circle and the rear end; Carry out 1.5MPa hydraulic pressure and continue detection in 60 seconds, friction welding place ne-leakage can use.
When the friction welding (FW) copper electrode that adopts technology of the present invention to make uses, be installed into water pipe and outlet pipe, fix with silver soldering or brazing from front end suit copper flange in the rear end of copper electrode bar; Insulation protection assemblies such as polytetrafluoroethylene pallet, polytetrafluoroethylene bolt sleeve, the polytetrafluoroethylene collar, polytetrafluoroethylene gasket ring are installed successively, the sealing of O RunddichtringO is installed, can send production of polysilicon factory to use.
The present invention compared with prior art, its advantage is:
1, the friction welding (FW) copper electrode bar that adopts technology of the present invention to make; The commissure metallographic detects the proof (see figure 6); The frictional heat energy that relative motion produces between workpiece makes the composition surface be heated to forging temperature and under the effect of blocking power; Through the plastic deformation and the diffusion process of material, surface oxide layer and pollutant are extruded, and form the weld seam of solid-state connection.The commissure has overcome defectives such as conventional melting method unavoidably produces pore, is mingled with, slag, and grain refinement, thereby weld seam combines firmly, and long service life reaches import copper electrode result of use.
2, adopt the friction welding technology of the present invention's research and development, realized high-quality welding, copper electrode bar segmental machining becomes possibility, has reduced the workpiece difficulty of processing, has improved machining accuracy, has reduced material consumption.Copper electrode conductance measured result shows: select identical material T1 fine copper deep hole machining mode conductance 99.9% for use, and friction welding (FW) processing mode conductance 99.6%, it is very little to descend, and this material satisfies conductance 98% above requirement fully.
3, adopt the friction welding technology of the present invention's research and development, only need small quantity of material, just can repair, reduced the production of polysilicon cost of applying unit again significantly, realized the theory of making the best use of everything for copper electrode bar existing and that damage from now on.
4, adopt the friction welding technology of the present invention's research and development, the welding required time has only several seconds to tens seconds, steady quality, and production efficiency is high.
5, adopt the friction welding technology of the present invention's research and development, low energy does not need the special source of welding current, and institute's energy requirement is merely about 20% of traditional welding technology, does not also need other consumable material such as welding rod, solder flux electrode, protective gas etc., low cost of manufacture.
6, adopt the friction welding technology of the present invention's research and development, welding machine operational environment cleaning can not produce smog, arc light, high frequency and pernicious gas, and is environmentally friendly.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is a copper electrode bar structural representation of the present invention
Fig. 3 is the another kind of structural representation of copper electrode bar of the present invention
Fig. 4 is the isometrical structural representation of copper electrode bar of the present invention
Fig. 5 is copper electrode bar mother metal metallographic detection figure of the present invention
Fig. 6 is copper electrode bar of the present invention commissure metallographic detection figure
Embodiment
In order to guarantee copper electrode bar conductance more than 95%, the trade mark manufacturing in material selection GB/T 19850 " conduction is used seamless circular copper pipe " or YS/T 615 " conduction the is used copper rod " standard.
Friction-welding machine is selected medium-sized friction-welding machine for use, programmable controller (PLC) control.The C-25, C-32, C-32C type Continuous Drive Friction Welding machine or the Americanized technology company that produce like Jiangsu Kai Diou electric equipment Co., Ltd produce 180B, 180BX inertia friction welder.
As shown in Figure 2, external diameter is that the copper electrode bar 1 of 32mm～50mm is arranged to three sections of leading portion A, stage casing B and back segment C, and stage casing B selects for use two kinds of specification pure copper tube friction welding (FW)s of various outer diameter to be connected with back segment C, forms weld seam bc; Front-end A adopts the fine copper rod, with stage casing B friction welding, also forms weld seam ab.Like this, three sections workpiece are connected as a single entity through friction welding (FW), constitute the copper electrode bar 1 of end sealing.As shown in Figure 3; External diameter is that the copper electrode bar 1 of 32mm～50mm is arranged to three sections of leading portion A, stage casing B and back segment C; Leading portion A and back segment C select two kinds of specification fine copper rods of various outer diameter for use, and leading portion A blind hole is bored, and back segment C through hole bores; In order to cancel fixedly operation of back segment C and the silver soldering of copper flange or brazing, back segment C also can adopt the integral body of die forging or machining band copper flange.The handling ease because excellent body is short.Back segment C also can directly select pure copper tube for use.Stage casing B selects pure copper tube for use, leading portion A be connected with the two ends friction welding (FW) of stage casing B respectively after back segment C processes, form two weld seam ab and bc, constitute the copper electrode bar 1 of end sealing.As shown in Figure 4, external diameter is that the copper electrode bar 1 of 32mm～50mm is arranged to two sections of isometrical leading portion A, back segment B, and leading portion A selects for use the fine copper rod to be connected with the pure copper tube friction welding (FW) of back segment B, forms a weld seam ab, constitutes the copper electrode bar 1 of end sealing.Damage the copper electrode bar of scrapping 1 because of the screw thread joining place for copper electrode bar existing and from now on; Adopt the reparations of Fig. 3 or Fig. 4 version: divide cutting with the threaded joints that damages; Select the fine copper rod for use by leading portion A among Fig. 3 or Fig. 4 again, blind hole is bored and is processed, and friction welding can be repaired.Because the present invention has guaranteed high-quality welding, guarantee copper electrode bar conductance more than 95%, based on the use of short material, the workpiece friction welding more than three sections does not influence result of use.Copper electrode bar 1 manufacturing process of three kinds of structures: external diameter is the copper electrode bar segment design of 32mm～50mm, and when adopting the Continuous Drive Friction Welding machine to make, the technological parameter of copper electrode bar friction welding (FW) is: the speed of mainshaft 1300～1800r/min; Friction pressure 70～90MPa; Fraction time 1～6s, upsetting force 100～130MPa, first top rear brake; Dwell time 3～10s, workpiece forge length 3～8mm; When adopting inertia friction welder to make, the technological parameter of copper electrode bar friction welding (FW) is: initial rotating speed 1500～2200r/min, moment of inertia 1.2～3.6kgm
2, friction pressure 70～90MPa, fraction time 1～5s, upsetting force 100～130MPa, dwell time 3～5s, workpiece forge length 3～8mm.
The friction welding (FW) copper electrode bar of different size adopts Continuous Drive Friction Welding manufacturing process embodiment to see table 1.
The friction welding (FW) copper electrode bar of table 1 different size adopts the Continuous Drive Friction Welding manufacturing process
The friction welding (FW) copper electrode bar of different size adopts flywheel friction welding manufacturing process embodiment to see table 2.
The friction welding (FW) copper electrode bar of table 2 different size adopts the flywheel friction welding manufacturing process
(GT Solar International, the φ 115mm * 980mm specification copper electrode that uses on the GT-DSS450TM model vacuum furnace of Inc.) producing is instance, further specifies the present invention with U.S. GT Solar international corporation below.As shown in Figure 2, the diameter of this copper electrode bar 1 leading portion A, stage casing B is φ 37.5mm, and the diameter of back segment C is φ 47.0mm, and internal diameter is φ 20mm.Copper electrode bar 1 blank dimension: back segment C: select the fine copper rod for use, external diameter φ 48mm, length 110mm, processing internal diameter φ 19.5mm also can directly select external diameter φ 48mm for use, internal diameter φ 20mm, the pure copper tube of length 110mm; Stage casing B: select pure copper tube for use, external diameter φ 39mm, internal diameter φ 20mm, length 890mm; Leading portion A: select the fine copper rod for use, external diameter φ 39mm, length 60mm.When manufacturing process adopted the Continuous Drive Friction Welding machine to make, the technological parameter of copper electrode bar friction welding (FW) was: speed of mainshaft 1300r/min, friction pressure 80MPa, fraction time 3s, upsetting force 120MPa, dwell time 4s, workpiece forge length 6mm; When adopting inertia friction welder to make, the technological parameter of copper electrode bar friction welding (FW) is: initial rotating speed 1500r/min, moment of inertia 3.0kgm
2, friction pressure 80MPa, fraction time 3s, upsetting force 125MPa, dwell time 3s, workpiece forge length 6mm.After adopting above-mentioned process friction welding, burr, flash inside and outside removing, fine finishining again, all circle machining screw screw threads carry out 1.5MPa hydraulic pressure and continue detection in 60 seconds in front end periphery circle and the rear end, and friction welding place ne-leakage can use.
Fig. 5, Fig. 6 are mother metal of the present invention, commissure metallographic detection figure, relatively can find out from Fig. 5, Fig. 6, and the commissure is through forging, and crystal grain is refinement, thereby weld seam combines firmly.
Product assembling of the present invention is used: as shown in Figure 1, front end sealing, rear end are equipped with the copper electrode bar 1 of water inlet pipe 10 and outlet pipe 11, through fill cycle cooling copper electrode.From the front end suit copper flange 8 of copper electrode bar 1, fix (integral body of band copper flange does not need this operation) with silver soldering or brazing; The polytetrafluoroethylene collar 3, polytetrafluoroethylene pallet 7, polytetrafluoroethylene bolt sleeve 6, O RunddichtringO 4, polytetrafluoroethylene gasket ring 5 are installed successively; Insert vacuum furnace then; Pass the screw on the copper flange 8 with bolt; Be fixed on the vacuum furnace (not shown), will guarantee the insulation of copper electrode and vacuum furnace during installation.The installing electrodes terminal block 9 again, graphite electrode are connected, screw with copper electrode bar 1 front threads, copper nut 2 lockings.At last graphite electrode is connected with the graphite cake (not shown) through carbon carbon composite bolt, the water flowing energising can be used.
Claims (5)
1. a polysilicon vacuum stove is used the friction welding (FW) copper electrode, comprises that external diameter is the copper electrode bar of 32mm～50mm, and the copper flange connects electroplax; Locking nut, 0 RunddichtringO, insulation protection assembly; Connecting bolt is characterized in that: the copper electrode bar is provided with two sections at least, adopts friction welding (FW) to be connected as a single entity.
2. a kind of polysilicon vacuum stove according to claim 1 is used the friction welding (FW) copper electrode; It is characterized in that: said copper electrode bar be arranged to before in back three sections; In, back segment selects for use two kinds of specification pure copper tube friction welding (FW)s of various outer diameter to connect, leading portion is selected the fine copper rod for use, is connected with the stage casing friction welding (FW).
3. a kind of polysilicon vacuum stove according to claim 1 is used the friction welding (FW) copper electrode, it is characterized in that: in before said copper electrode bar is arranged to back three sections, front and rear sections selects for use the fine copper rod boring back of various outer diameter to be connected with the pure copper tube friction welding (FW) in stage casing.
4. a kind of polysilicon vacuum stove according to claim 1 is used the friction welding (FW) copper electrode, it is characterized in that: said copper electrode bar is arranged to two sections of the front and back of same outer diameter as, and leading portion selects for use fine copper rod boring back to be connected with the pure copper tube friction welding (FW) of back segment.
5. a manufacturing process that is exclusively used in production polysilicon vacuum stove with the friction welding (FW) copper electrode comprises the spin friction welding machine, and it is characterized in that: external diameter is the copper electrode bar segment design of 32mm～50mm; When adopting the Continuous Drive Friction Welding machine to make, the technological parameter of copper electrode bar friction welding (FW) is: the speed of mainshaft 1300～1800r/min, friction pressure 70～90MPa; Fraction time 1～6s; Upsetting force 100～130MPa, dwell time 3～10s, workpiece forge length 3～8mm; When adopting inertia friction welder to make, the technological parameter of copper electrode bar friction welding (FW) is: initial rotating speed 1500～2200r/min, moment of inertia 1.2～3.6kgm
2, friction pressure 70～90MPa, fraction time 1～5s, upsetting force 100～130MPa, dwell time 3～5s, workpiece forge length 3～8mm.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103586577A (en) * | 2013-12-02 | 2014-02-19 | 兰州连城铝业有限责任公司 | Friction welding method of aluminum guide rod and steel claw |
| CN104923907A (en) * | 2015-05-21 | 2015-09-23 | 陕西理工学院 | Friction welding method of sacrificial anode of water heater on continuous driving friction welding machine |
| CN105108328A (en) * | 2015-09-21 | 2015-12-02 | 重庆江增船舶重工有限公司 | Continuous driving friction welding method for spindle of supercharger |
| CN108358207A (en) * | 2018-05-18 | 2018-08-03 | 武汉材料保护研究所有限公司 | The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again |
| CN112846480A (en) * | 2021-01-11 | 2021-05-28 | 西部金属材料股份有限公司 | Welding method of auxiliary electrode for vacuum consumable arc melting |
| CN112846479A (en) * | 2021-01-11 | 2021-05-28 | 西部金属材料股份有限公司 | Welding method of vacuum consumable electrode |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103586577A (en) * | 2013-12-02 | 2014-02-19 | 兰州连城铝业有限责任公司 | Friction welding method of aluminum guide rod and steel claw |
| CN104923907A (en) * | 2015-05-21 | 2015-09-23 | 陕西理工学院 | Friction welding method of sacrificial anode of water heater on continuous driving friction welding machine |
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| CN112846480A (en) * | 2021-01-11 | 2021-05-28 | 西部金属材料股份有限公司 | Welding method of auxiliary electrode for vacuum consumable arc melting |
| CN112846479A (en) * | 2021-01-11 | 2021-05-28 | 西部金属材料股份有限公司 | Welding method of vacuum consumable electrode |
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Application publication date: 20120801 |