CN108358207A - The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again - Google Patents

The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again Download PDF

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Publication number
CN108358207A
CN108358207A CN201810481092.8A CN201810481092A CN108358207A CN 108358207 A CN108358207 A CN 108358207A CN 201810481092 A CN201810481092 A CN 201810481092A CN 108358207 A CN108358207 A CN 108358207A
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electrode
silver
damage
brush plating
plating
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CN201810481092.8A
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Inventor
彭正祺
宾昕
彭翔
宾胜武
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Wuhan Material Protection Research Institute Co Ltd
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Wuhan Material Protection Research Institute Co Ltd
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Priority to CN201810481092.8A priority Critical patent/CN108358207A/en
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/04—Electroplating with moving electrodes
    • C25D5/06—Brush or pad plating

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electrolytic Production Of Metals (AREA)

Abstract

The invention discloses a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step is：(1), by changing material；More conversion materials include：T1Red copper, T2Red copper or beryllium-bronze are one such；(2), machine adds；By lathe or machining center, remove the electrode section of damage, machining process is completed to the position segmentation of damage；(3), it welds；The common welding of tradition is substituted by incuding deposition or spin friction weldering, the electrode section newly processed is welded on old remaining electrode, is reprocessed；(4), online aobvious thick Silver Brush Plating technology series of process means, reintegrate, complete manufacture overall process.It is easy to implement the method, it is easy to operate, can carry out repeatedly that repair is remanufactured repeatedly to the old electrode of disabling damage, change material reparation to broken parts or electrode cone head part overhaul again it is silver-plated；Under the premise of fully meeting use, electrode segment is manufactured, the new electrode for integrating one is formed, to achieve the purpose that reduce cost.

Description

The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again
Technical field
The present invention relates to refining polycrystalline silicon reducing furnace technical field, specifically a kind of refinings
The method that polycrystalline silicon reducing furnace electrode damage is repaired again.
Background technology
Polysilicon is used for photovoltaic and semicon industry, and the electrode for refining polycrystalline silicon reducing furnace is easy as reducing furnace system core Parts are damaged, safety and use condition are harsh, and after certain time use, failure mode is usually expressed as：
1. electrode cone head part high temperature and chemical mediator corrosion；
2. screw thread or commissure leak are imported and exported in electrode tail portion；
3. electrode tail portion locking screw deformed damaged；
4. electrode interior cold water tube assembly aqueous corrosion.
Above-mentioned damage main forms not necessarily occur simultaneously, but as long as soon as presence will influence normal use, It is replaced, the electrode of a reduction furnace has 25 or 49, if every all more renewed needs 7~8,000 yuan to 10,000 yuan Left and right, then if 25 or 49 are all replaced, it is primary just to need twenties0000 or forties0000 yuan or so, it greatly carries in this way The high refining cost of polysilicon, while being also the waste to resource.
Invention content
The purpose of the invention is to provide a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, It is easy to implement the method, it is easy to operate, the cost for reducing polysilicon refining is developed, while the reduction furnace of damage is replaced with different materials Electrode section is repaired again.
In order to achieve the above purpose, the present invention uses following technical measures：
To four kinds of electrode failure forms of narration in background technology, it is targetedly segmented repair manufacture respectively, according to It needs selectively to repair, be required according to the manufacture of new part electrode pole, using technology, a kind of refining polycrystalline silicon reducing furnace electrode damage The method that bad part is repaired again, step are：
(1) by changing material；The material that changes is：Material replacement, segment processing are carried out to the old electrode area of disabling damage. More conversion materials include：T1Red copper, T2Red copper or beryllium-bronze etc. are one such.In maintenance process, institute's conversion materials not necessarily with it is old Electrode body is consistent, but material must reach concerned countries standard to meet the needs of electric conductivity；
(2) machine adds；The machine adds：By lathe or machining center, remove the electrode section of damage, while according to damage The size of bad electrode section completes machining process according to the requirement of new part electrode fabrication techniques to the position segmentation of damage；
(3) it welds；The welding is：The common welding of tradition is substituted (in such as stove by incuding deposition or spin friction weldering Preheat manual welding etc.), the electrode section newly processed is welded on old remaining electrode, reprocesses, significantly drop in this way Low labor intensity and caused by smog dust to the negative effect of human and environment so that old electrode segment repair weldquality reaches Related national standard ensures that its electric conductivity is suitable with new electrode, meets production needs；
(4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, complete manufacture overall process, so that its It comes back to life, restores using function, the online aobvious thick Silver Brush Plating technology is：It is passed by showing thick Silver Brush Plating technical substitution online The slot silver plating process of system, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process weldering The part connected reaches the silver plating thicknesses of primary electrode, stops brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, real Now precisely control plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than rolling The silver-colored material of system.
So-called online aobvious thick Silver Brush Plating Introduction on Technology：It according to silver-plated speciality, is programmed using cpu chip, in brush plating process In, real-time online shows thickness of coating.And the calibrator used at present be slot plating complete after, to coating carry out destroy or it is non- Destructive thickness measuring cannot monitor thickness of coating in real time in silver plating process.Existing Wuhan material safeguarding the Graduate Record Examination Research Institute Co., Ltd. is completed The development sizing of the aobvious thick Silver Brush Plating instrument of line, sells into quotations field boundary, typical mono- 50A of model MBPK.
By the technical measures of aforementioned four step, completes neutralization electrode and remanufacture.Electrode repair remanufactures on the whole Four processes it is all critically important, it is indispensable, be that old electrode obtains newborn complete closure reparation chain.Certainly it is used as electrode conehead For silver-plated conductive characteristic, it is crucial that step (4), mainly solve the problems, such as that silver coating size is controllable, accurate plating, it is ensured that The binding force of silver layer, the uniformity of coating and electric conductivity put forward efficient purpose to reach materials saving, ensure product matter Amount is stablized, actual quantization production.Compared with traditional slot is silver-plated, it is advantageous that：1. very convenient data monitoring can intuitively be used And control thickness of coating.2. according to the technical specification of electrode silver coating, thickness must reach >=and 100um could meet use and want It asks.Slot plating can not usually monitor in real time, have certain randomness, silver plating thicknesses and uniformity to be difficult to control.Simultaneously because coating Thicker, after reaching certain thickness, silver layer just generates coarse grains, and rough surface needs to stop plating, and increases mechanical grinding polishing It is modified, slot plates again, its binding force and electric conductivity otherwise will be influenced, although the silver-plated process operations of slot electrode are got up more Cumbersome, product quality stability is more difficult to control.3. since Silver Brush Plating is relatively moved by nanometer anode, generate polishing, friction, Squeezing effect, is formed by electrodeposition layer, and it is silver-plated (being shown in Table one) that hardness is generally greater than slot, and apparent brightness higher, thus wear-resisting Property is more preferable.
One brush plating silver layer of table and slot silver coating Vickers hardness Comparative result
Brush plating silver layer Slot silver coating
HV90-92 HV65-68
Compared with prior art, the present invention haing the following advantages and effect：
Usually new electrode manufacture often uses integral material to manufacture, and manufacturing cost is expensive, is made again by old electrode repair Thinking is made, can carry out multiple repair repeatedly to the old electrode of disabling damage remanufactures, and electrode, which remanufactures, is suitable for different size knot The old electrode of failure of configuration number, and only change material reparation to broken parts or electrode cone head part overhaul again it is silver-plated；Completely may be used Under the premise of meeting use, to be manufactured to electrode segment, the new electrode for integrating one is formed, to reach the mesh for reducing cost 's.
Description of the drawings
Fig. 1 is electrode structure schematic diagram.
Fig. 2 is electrode decomposition texture schematic diagram.
Fig. 3 is overall structure diagram after electrode is repaired.
Fig. 4 is decomposition texture schematic diagram before electrode is repaired.
Fig. 5 is another electrode structure schematic diagram.
Fig. 6 is overall structure diagram after another electrode is repaired
Fig. 7 is decomposition texture schematic diagram after another electrode is repaired
Specific implementation mode
Embodiment 1：
According to fig. 3, Fig. 4 is it is found that a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step It is：
To four kinds of electrode failure forms of narration in background technology, it is targetedly segmented repair manufacture respectively, according to It needs selectively to repair, be required according to the manufacture of new part electrode, using technology, (1) is by changing material；(2) machine adds；(3) it welds； (4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, complete manufacture overall process, so that it is come back to life, Restore to use function.
(1), which changes material, is：Material replacement, segment processing are carried out to the old electrode area of disabling damage.More conversion materials Including：T1Red copper, T2Red copper or beryllium-bronze etc..In maintenance process, institute's conversion materials are not necessarily consistent with old electrode body, but material Matter must reach concerned countries standard to meet the needs of electric conductivity；
Machine, which adds, for (2) is：By lathe or machining center, remove the electrode section 1 of damage, while according to damage The size of electrode section 1 completes machining process according to the requirement of new part electrode fabrication techniques to the position segmentation of damage.
It welds described (3)：It substitutes the common welding of tradition by incuding deposition or spin friction weldering and (preheats hand in such as stove Work weldering etc.), the electrode section newly processed is welded on old remaining electrode, reprocesses, labour is greatly lowered in this way Intensity and caused by smog dust to the negative effect of human and environment so that old electrode segment repair weldquality reaches related state Mark requires, and ensures that its electric conductivity is suitable with new electrode, meets production needs.
Aobvious thick Silver Brush Plating technology is online for (4)：It is silver-plated by showing the traditional slot of thick Silver Brush Plating technical substitution online Technique, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process the part in welding The silver plating thicknesses for reaching primary electrode, stop brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, realizes precisely control Plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than the silver-colored material of rolling.
So-called online aobvious thick Silver Brush Plating Introduction on Technology：It according to silver-plated speciality, is programmed using cpu chip, in brush plating process In, real-time online shows thickness of coating.And the calibrator used at present be slot plating complete after, to coating carry out destroy or it is non- Destructive thickness measuring cannot monitor thickness of coating in real time in silver plating process.Existing Wuhan material safeguarding the Graduate Record Examination Research Institute Co., Ltd. is completed The development of the aobvious thick Silver Brush Plating instrument of line, the unit are ready for declaring national patent.
Embodiment 2：
According to fig. 3, Fig. 4 is it is found that a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step It is：
To four kinds of electrode failure forms of narration in background technology, it is targetedly segmented repair manufacture respectively, according to It needs selectively to repair, is required according to the manufacture of new part electrode, using technology, material is changed by (1)；(2) machine adds；(3) it welds； (4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, complete manufacture overall process, so that it is come back to life, Restore using the material that changes described in function be：Material replacement, segment processing are carried out to the old electrode area of disabling damage.More conversion materials Including：T1Red copper, T2Red copper or beryllium-bronze etc..In maintenance process, institute's conversion materials are not necessarily consistent with old electrode body, but material Matter must reach concerned countries standard to meet the needs of electric conductivity；
Machine, which adds, for (2) is：By lathe or machining center, remove the electrode section 1,2 of damage, while according to damage The size of electrode section 1,2 processing technology mistake is completed to the segmentation of the position of damage according to the requirement of new part electrode fabrication techniques Journey.
It welds described (3)：It substitutes the common welding of tradition by incuding deposition or spin friction weldering and (preheats hand in such as stove Work weldering etc.), the electrode section newly processed is welded on old remaining electrode, reprocesses, labour is greatly lowered in this way Intensity and caused by smog dust to the negative effect of human and environment so that old electrode segment repair weldquality reaches related state Mark requires, and ensures that its electric conductivity is suitable with new electrode, meets production needs.
Aobvious thick Silver Brush Plating technology is online for (4)：It is silver-plated by showing the traditional slot of thick Silver Brush Plating technical substitution online Technique, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process the part in welding The silver plating thicknesses for reaching primary electrode, stop brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, realizes precisely control Plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than the silver-colored material of rolling.
So-called online aobvious thick Silver Brush Plating Introduction on Technology：It according to silver-plated speciality, is programmed using cpu chip, in brush plating process In, real-time online shows thickness of coating.And the calibrator used at present be slot plating complete after, to coating carry out destroy or it is non- Destructive thickness measuring cannot monitor thickness of coating in real time in silver plating process.Existing Wuhan material safeguarding the Graduate Record Examination Research Institute Co., Ltd. is completed The development of the aobvious thick Silver Brush Plating instrument of line, the unit are ready for declaring national patent.
Embodiment 3：
According to fig. 3, Fig. 4 is it is found that a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step It is：
To four kinds of electrode failure forms of narration in background technology, it is targetedly segmented repair manufacture respectively, according to It needs selectively to repair, is required according to the manufacture of new part electrode, using technology, material is changed by (1)；(2) machine adds；(3) it welds； (4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, complete manufacture overall process, so that it is come back to life, Restore to use function.
(1), which changes material, is：Material replacement, segment processing are carried out to the old electrode area of disabling damage.More conversion materials Including：T1Red copper, T2Red copper or beryllium-bronze etc..In maintenance process, institute's conversion materials are not necessarily consistent with old electrode body, but material Matter must reach concerned countries standard to meet the needs of electric conductivity；
Machine, which adds, for (2) is：By lathe or machining center, remove the electrode section 1,2,3 of damage, while according to damage The size of bad electrode section 1,2,3 completes processing technology according to the requirement of new part electrode fabrication techniques to the position segmentation of damage Process.
It welds described (3)：According to best cost performance requirement is repaired, substitutes and pass by incuding deposition or spin friction weldering The common welding of system (manual welding is preheated in such as stove), the electrode section newly processed is welded on old remaining electrode, then Processing, is greatly lowered labor intensity and caused by smog dust to the negative effect of human and environment in this way so that old electrode point Duan Weixiu weldqualities reach related national standard, ensure that its electric conductivity is suitable with new electrode, meet production needs.
Aobvious thick Silver Brush Plating technology is online for (4)：It is silver-plated by showing the traditional slot of thick Silver Brush Plating technical substitution online Technique, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process the part in welding The silver plating thicknesses for reaching primary electrode, stop brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, realizes precisely control Plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than the silver-colored material of rolling.
So-called online aobvious thick Silver Brush Plating Introduction on Technology：It according to silver-plated speciality, is programmed using cpu chip, in brush plating process In, real-time online shows thickness of coating.And the calibrator used at present be slot plating complete after, to coating carry out destroy or it is non- Destructive thickness measuring cannot monitor thickness of coating in real time in silver plating process.Existing Wuhan material safeguarding the Graduate Record Examination Research Institute Co., Ltd. is completed The development of the aobvious thick Silver Brush Plating instrument of line, the unit are ready for declaring national patent.
Embodiment 4：
According to Fig. 6, Fig. 7 it is found that a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step It is：
To four kinds of electrode failure forms of narration in background technology, it is targetedly segmented repair manufacture respectively, according to It needs selectively to repair, is required according to the manufacture of new part electrode, using technology, material is changed by (1)；(2) machine adds；(3) it welds； (4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, complete manufacture overall process, so that it is come back to life, Restore to use function.
(1), which changes material, is：Material replacement, segment processing are carried out to the old electrode area of disabling damage.More conversion materials Including：T1Red copper, T2Red copper or beryllium-bronze etc..In maintenance process, institute's conversion materials are not necessarily consistent with old electrode body, but material Matter must reach concerned countries standard to meet the needs of electric conductivity；
Machine, which adds, for (2) is：By lathe or machining center, remove the electrode section 4 of damage, while according to damage The size of electrode section 4 completes machining process according to the requirement of new part electrode fabrication techniques to the position segmentation of damage.
It welds described (3)：It substitutes the common welding of tradition by incuding deposition or spin friction weldering and (preheats hand in such as stove Work weldering etc.), the electrode section newly processed is welded on old remaining electrode, reprocesses, labour is greatly lowered in this way Intensity and caused by smog dust to the negative effect of human and environment so that old electrode segment repair weldquality reaches related state Mark requires, and ensures that its electric conductivity is suitable with new electrode, meets production needs.
Aobvious thick Silver Brush Plating technology is online for (4)：It is silver-plated by showing the traditional slot of thick Silver Brush Plating technical substitution online Technique, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process the part in welding The silver plating thicknesses for reaching primary electrode, stop brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, realizes precisely control Plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than the silver-colored material of rolling.
So-called online aobvious thick Silver Brush Plating Introduction on Technology：It according to silver-plated speciality, is programmed using cpu chip, in brush plating process In, real-time online shows thickness of coating.And the calibrator used at present be slot plating complete after, to coating carry out destroy or it is non- Destructive thickness measuring cannot monitor thickness of coating in real time in silver plating process.Existing Wuhan material safeguarding the Graduate Record Examination Research Institute Co., Ltd. is completed The development of online aobvious thick Silver Brush Plating instrument, the unit are ready for declaring national patent.

Claims (1)

1. a kind of method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again, step are：
(1) by changing material；The material that changes is：Material replacement, segment processing are carried out to the old electrode area of disabling damage.It replaces Material includes：T1Red copper, T2Red copper or beryllium-bronze etc. are one such.In maintenance process, institute's conversion materials not necessarily with old electrode Ontology is consistent, but material must reach concerned countries standard to meet the needs of electric conductivity；
(2) machine adds；The machine adds：By lathe or machining center, remove the electrode section of damage, while according to damage The size of electrode section completes machining process according to the requirement of new part electrode fabrication techniques to the position segmentation of damage；
(3) it welds；The welding is：It substitutes the common welding of tradition by incuding deposition or spin friction weldering and (is preheated in such as stove Manual welding etc.), the electrode section newly processed is welded on old remaining electrode, reprocesses, labor is greatly lowered in this way Fatigue resistance and caused by smog dust to the negative effect of human and environment so that old electrode segment repair weldquality reaches related National standard ensures that its electric conductivity is suitable with new electrode, meets production needs；
(4) the series of process means such as online aobvious thick Silver Brush Plating technology, reintegrate, manufacture overall process are completed, so that it rises extremely Retrogradation restores using function, and the online aobvious thick Silver Brush Plating technology is：It is traditional by showing thick Silver Brush Plating technical substitution online Slot silver plating process, by showing thick brush plating the silver device whole process online, essence is controlled at any time during brush plating, finally makes newly to process in welding Part reach the silver plating thicknesses of primary electrode, stop brush plating immediately, it is ensured that silver coating quality reaches concerned countries standard, realizes essence Quasi- control plating so that every electrode conehead coating is uniform, and size is controllable, silver coating purity >=99.99%, and electric conductivity is better than rolling silver Material.
CN201810481092.8A 2018-05-18 2018-05-18 The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again Pending CN108358207A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111964456A (en) * 2020-07-22 2020-11-20 山东国晶新材料有限公司 Method for repairing damaged heating element and heating element structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102548061A (en) * 2011-11-14 2012-07-04 新余市长城铜产品开发有限公司 Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace
CN102625493A (en) * 2012-03-22 2012-08-01 新余市长城铜产品开发有限公司 Friction-welding copper electrode for polycrystalline silicon vacuum furnace and manufacturing process thereof
CN205556112U (en) * 2016-03-22 2016-09-07 天津德瑞云科技有限公司 Polysilicon reduction furnace electrode

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102548061A (en) * 2011-11-14 2012-07-04 新余市长城铜产品开发有限公司 Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace
CN102625493A (en) * 2012-03-22 2012-08-01 新余市长城铜产品开发有限公司 Friction-welding copper electrode for polycrystalline silicon vacuum furnace and manufacturing process thereof
CN205556112U (en) * 2016-03-22 2016-09-07 天津德瑞云科技有限公司 Polysilicon reduction furnace electrode

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
孙捷等: "《特种加工技术》", 30 November 2011, 中央广播电视大学出版社 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111964456A (en) * 2020-07-22 2020-11-20 山东国晶新材料有限公司 Method for repairing damaged heating element and heating element structure

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