CN102548061A - Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace - Google Patents
Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace Download PDFInfo
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- CN102548061A CN102548061A CN2011103580560A CN201110358056A CN102548061A CN 102548061 A CN102548061 A CN 102548061A CN 2011103580560 A CN2011103580560 A CN 2011103580560A CN 201110358056 A CN201110358056 A CN 201110358056A CN 102548061 A CN102548061 A CN 102548061A
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Abstract
The invention relates to polycrystalline silicon production equipment of the photovoltaic industry and discloses a water-cooling copper electrode for producing a polycrystalline silicon vacuum furnace. The water-cooling copper electrode for producing the polycrystalline silicon vacuum furnace comprises a deep-hole copper rod provided with a cooling water inlet-outlet pipe at the rear end, a circular truncated cone shaped copper block and an electric brush and is characterized in that the electric brush is arranged on the large round surface of the circular truncated cone shaped copper block, the lateral side of the copper block and the front end of the deep-hole copper rod are provided with circular truncated cone shaped holes with same taper and are adhered tightly and connected integrally. The water-cooling copper electrode changes a single connecting mode adopted between an existing water-cooling copper electrode and a graphite electrode conduct through threads and is fully contacted with the inner wall of the graphite electrode through a molybdenum wire serving as the electric brush, thereby greatly increasing the contact area between two electrodes and prolonging the service life of the water-cooling copper electrode.
Description
Technical field
The present invention relates to photovoltaic industry production of polysilicon equipment, relate in particular to a kind of production polysilicon vacuum stove and use the water-cooled copper electrode.
Background technology
In photovoltaic industry, polysilicon is very important intermediate products in the silicon product industrial chain, is the primary raw material of making silicon polished, solar cell and HIGH-PURITY SILICON goods.The polycrystalline silicon ingot casting vacuum furnace is the equipment that is used for the casting large-scale polycrystal silicon ingot, and it is with passing through the directional solidification condensation-crystallization after the silicon material high-temperature fusion, making it form the consistent silicon ingot in crystal orientation, thereby reach the requirement of solar cell to the silicon chip quality.The principle of directional solidification casting polycrystalline silicon is: silica crucible is packed into to be placed on the very strong graphite block of thermal conductivity (being oriented solidified blocks) behind the polycrystalline silicon material; Vacuumize after closing burner hearth; After the connection heater power source treated that the silicon material melts fully, heat-insulation cage slowly up promoted, and exposed the lower surface of the oriented solidified blocks that is supported by lower furnace chamber; The heat radiation that discharges during with the crystallization of silicon material through oriented solidified blocks to the water-cooled inwall of lower furnace chamber, thereby form a vertical temperature gradient in the silicon material in crucible.This temperature gradient makes the silicon material in the crucible begin to solidify from the bottom, begins growth from the melt bottom to the top, and after all silicon material all solidified, silicon ingot was annealed, come out of the stove after the cooling and promptly accomplish whole ingot casting process.The effect of water-cooled copper electrode is to import big electric current into graphite electrode through copper electrode to heat graphite cake again, makes its heating, heats the silicon material through thermal radiation.Between existing water-cooled copper electrode and the graphite electrode be threaded, copper nut locking.This connected mode greatest drawback is to have only a kind of connected mode, and the full screw thread that leans on conducts electricity between two electrodes, and is line contact (explain: copper nut is that face contacts with graphite electrode, but still contacts for line with copper rod); Even some place is a contact, and when big electric current flow through this place, less owing to contact area, resistance was excessive; Produce great amount of heat at this position, temperature is sharply raise, after use a period of time; Two electrodes damage connecting thread often because of ablation bonds together, and influence electric current and pass through; Must blowing out overhaul replacing, cause copper electrode and graphite electrode short useful life, production cost is high.
Summary of the invention
A kind of production polysilicon vacuum stove that the purpose of this invention is to provide long service life is used the water-cooled copper electrode.
In order to solve the problems of the technologies described above; The technical scheme that the present invention adopted is: a kind of production polysilicon vacuum stove is used the water-cooled copper electrode; Comprise that the rear end brings out the deep hole copper rod of cooling water pipe, locking copper nut, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring, bakelite insulated bolt sleeve pipe, bakelite insulation pallet, electrode fixed disk, electrode connection plate, connecting bolt, circular platform type copper billet, brush into; It is characterized in that: on the big disc of circular platform type copper billet, brush is set; The side of this copper billet fits tightly with the circular platform type hole that deep hole copper rod front end is provided with identical tapering, is connected as a single entity.
Said brush is made up of the molybdenum filament that a root is erected on the big disc of circular platform type copper billet.
Said molybdenum filament is vertically inlayed or is inserted on the big disc of circular platform type copper billet.
Use when of the present invention, be installed into water pipe and outlet pipe, fix with silver soldering or brazing from front end suit electrode fixed disk in the rear end of deep hole copper rod; Suit bakelite insulation pallet, bakelite insulated bolt sleeve pipe, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring insert vacuum furnace then successively, pass the screw on the electrode fixed disk with bolt, are fixed on the vacuum furnace, the installing electrodes terminal block again; Be pressed into the circular platform type copper billet of front end brushed in deep hole copper rod nose circle bench-type hole, contact-making surface fits tightly, and again graphite electrode is connected, screws with deep hole copper rod front threads, copper nut locking.At this moment, because the elastic reaction of molybdenum filament fully contacts with the graphite electrode inwall, constitute another current path.At last graphite electrode is connected with graphite cake through carbon carbon composite bolt, the water flowing energising can be used.
The present invention compared with prior art; Its advantage is through the circular platform type copper billet is set; And on the big disc of circular platform type copper billet, brush is set, fits tightly with the circular platform type hole that deep hole copper rod front end is provided with identical tapering then, the contact of formation face; And the molybdenum filament that plays the brush effect fully contacts with the graphite electrode inwall, increases the contact area between two electrodes greatly.According to electric current computing formula I=U/R, R=ρ L/S, can release:
I＝US/ρL
In the formula: U is a voltage, unit volt (V)
R is a resistance, unit ohm (Ω .)
ρ is the resistivity of material, and unit is ohm meter (Ω .m).
L is a length, and unit is a rice (m)
S is a sectional area, and unit is a square metre (m
2)
Conclusion: the long-pending relation that is directly proportional of electric current and conductive wire cross-section, conductive wire cross-section is long-pending big more, and the electric current that allows to pass through is big more.The present invention has overcome the deficiency of prior art; Most of electric current imports graphite electrode through brush; Alleviated the load of threaded line contact conduction between two electrodes greatly; Reduced heating starting the arc probability,, thereby improved the water-cooled copper electrode life because molybdenum filament has high temperature resistant (2610 ℃ of fusing points), good conductivity, flexible.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is that B of the present invention is to structural representation
Fig. 3 is that B of the present invention is to another kind of structural representation
Fig. 4 is that the present invention is connected sketch map with graphite electrode
Embodiment
Like Fig. 1, shown in Figure 2, the front end of deep hole copper rod 1 goes out a circular platform type hole that outer imperial palace is little with the lathe car, and the circular platform type copper billet 12 of one of machine work and the identical tapering in circular platform type hole can fit tightly circular platform type copper billet 12 with the circular platform type hole, is connected as a single entity.Side at circular platform type copper billet 12 cuts out at least 2 notches that do not connect the center to center line, guarantee that circular platform type copper billet 12 still is indivisible integral body.Notch in be covered with the molybdenum filament 13 of a root perpendicular to big disc, compress, make molybdenum filament 13 and circular platform type copper billet 12 tight fits, increase contact area, help conduction, tin-welding seal use in the outside, the molybdenum filament 13 formation brushes that expose.Molybdenum filament 13 length of exposing will guarantee fully to contact with graphite electrode 14 (see figure 4) inwalls.With (the GT Solar International of U.S. GT Solar international corporation; Inc.) the φ 110mm * 990mm specification water-cooled copper electrode that uses on the GT-DSS450TM model vacuum furnace of producing is instance; This water-cooled copper electrode diameter foremost is 30mm, and circular diameter is φ 23mm on the circular platform type hole of setting, and following circular diameter is φ 21mm; Degree of depth 8mm, the tapering in circular platform type hole are 1: 4.By tapering is 1: 4 processing circular platform type copper billet 12, and last circular diameter is φ 23mm, and following circular diameter is φ 21mm, height 8mm.Cutting out 10～15 width that do not connect center (5mm apart from the center of circle) in the side of circular platform type copper billet 12 to center line is the 0.15mm notch; Perpendicular to the big disc molybdenum filament 13 that to be pressed into a root diameter be φ 0.17mm, because molybdenum filament 13 has certain ductility, selecting the molybdenum filament 13 of φ 0.17mm can be pressed into width is the 0.15mm notch in notch; Form tight fit; Increase contact area, tin-welding seal is used in the outside, and the molybdenum filament 13 that exposes constitutes brush.The molybdenum filament 13 that exposes is cut into taper shape, and length will guarantee fully to contact with graphite electrode 14 (see figure 4) inwalls.Molybdenum filament 13 optional diameters are φ 0.12mm～φ 0.22mm, and the respective slot width can be set to 0.10mm～0.20mm, should note tight fit during assembling.
Fig. 3 is that the molybdenum filament 13 that constitutes brush is arranged on the another kind of form on the circular platform type copper billet 12.As shown in Figure 3, the balanced aperture that diameter phi 0.18～φ 3.0mm, the degree of depth 5～7mm are set on the big disc of circular platform type copper billet 12, family of gang molybdenum filament 13 inserts aperture and fixes with soldering.
Fig. 4 is that the present invention is connected sketch map with graphite electrode.As shown in Figure 4, the rear end of deep hole copper rod 1 is equipped with water inlet pipe 10 and outlet pipe 11, through fill cycle cooling copper electrode.From the front end sleeve loading electrode fixed disk 8 of deep hole copper rod 1, fix with silver soldering or brazing; Suit bakelite insulation pallet 7, bakelite insulated bolt sleeve pipe 6, the polytetrafluoroethylene collar 3, O RunddichtringO 4, bakelite insulation gasket ring 5 successively; Insert vacuum furnace then; Pass the screw on the electrode fixed disk 8 with bolt; Be fixed on the vacuum furnace (not shown), will guarantee the insulation of copper electrode and vacuum furnace during installation.The installing electrodes terminal block 9 again; Be pressed into the circular platform type copper billet 12 of front end brushed in deep hole copper rod 1 nose circle bench-type hole, contact-making surface fits tightly, and again graphite electrode 14 is connected, screws with deep hole copper rod 1 front threads, copper nut 2 lockings.At this moment, because the elastic reaction of molybdenum filament 13 fully contacts with graphite electrode 14 inwalls, constitute another current path.At last graphite electrode 14 is connected with the graphite cake (not shown) through carbon carbon composite bolt, the water flowing energising can be used.
Still be example, result of use of the present invention is described with the water-cooled copper electrode that uses on the GT-DSS450TM model vacuum furnace.This vacuum furnace basic parameter: rated power: 165kVA, average power: about 85kVA, the 380V high-tension electricity, max line electric current: 3800A, maximum output voltage: 25V, the maximum current of each electrode of flowing through are 3800/ √ 3=2194A.In actual heavy current work, because of water-cooled copper electrode posterior segment intensity of cooling is high, its temperature is low; Size is in normal condition, and deep hole copper rod 1 front end cooling effect is poor slightly, its ambient temperature relatively also high (1000 ℃～1200 ℃); The circular platform type copper billet 12 that the circular platform type hole is pressed into is in swelling state all the time, fits tightly very much; Brush and copper electrode also are in tight fit all the time, and make it firmly be embedded in the copper electrode front end and difficult becoming flexible, thereby help conduction.
Claims (3)
1. a production polysilicon vacuum stove is used the water-cooled copper electrode; Comprise that the rear end brings out the deep hole copper rod of cooling water pipe, locking copper nut, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring, bakelite insulated bolt sleeve pipe, bakelite insulation pallet, electrode fixed disk, electrode connection plate, connecting bolt, circular platform type copper billet, brush into; It is characterized in that: on the big disc of circular platform type copper billet, brush is set; The side of this copper billet fits tightly with the circular platform type hole that deep hole copper rod front end is provided with identical tapering, is connected as a single entity.
2. a kind of production polysilicon vacuum stove according to claim 1 is used the water-cooled copper electrode, and it is characterized in that: said brush is made up of the molybdenum filament that a root is erected on the big disc of circular platform type copper billet.
3. a kind of production polysilicon vacuum stove according to claim 2 is used the water-cooled copper electrode, it is characterized in that: said molybdenum filament is vertically inlayed or is inserted on the big disc of circular platform type copper billet.
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| CN201110358056.0A CN102548061B (en) | 2011-11-14 | 2011-11-14 | Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace |
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| CN201110358056.0A CN102548061B (en) | 2011-11-14 | 2011-11-14 | Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace |
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| CN102548061A true CN102548061A (en) | 2012-07-04 |
| CN102548061B CN102548061B (en) | 2014-01-15 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105188162A (en) * | 2015-10-15 | 2015-12-23 | 交城义望铁合金有限责任公司 | Water-cooling combined electrode for DC electric furnace for producing mineral wool |
| CN106367807A (en) * | 2016-12-05 | 2017-02-01 | 晶科能源有限公司 | Polycrystalline ingot furnace and graphite electrode thereof |
| CN108358207A (en) * | 2018-05-18 | 2018-08-03 | 武汉材料保护研究所有限公司 | The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again |
| CN110346402A (en) * | 2019-06-20 | 2019-10-18 | 浙江大学 | The forceful electric power electrode assembly used under Elevated Gravity |
| CN114659820A (en) * | 2022-05-24 | 2022-06-24 | 中国飞机强度研究所 | High-temperature-resistant combined type electrode system of heating device in aerospace plane test |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105188162A (en) * | 2015-10-15 | 2015-12-23 | 交城义望铁合金有限责任公司 | Water-cooling combined electrode for DC electric furnace for producing mineral wool |
| CN106367807A (en) * | 2016-12-05 | 2017-02-01 | 晶科能源有限公司 | Polycrystalline ingot furnace and graphite electrode thereof |
| CN108358207A (en) * | 2018-05-18 | 2018-08-03 | 武汉材料保护研究所有限公司 | The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again |
| CN110346402A (en) * | 2019-06-20 | 2019-10-18 | 浙江大学 | The forceful electric power electrode assembly used under Elevated Gravity |
| CN114659820A (en) * | 2022-05-24 | 2022-06-24 | 中国飞机强度研究所 | High-temperature-resistant combined type electrode system of heating device in aerospace plane test |
| CN114659820B (en) * | 2022-05-24 | 2022-08-02 | 中国飞机强度研究所 | High-temperature-resistant combined type electrode system of heating device in aerospace plane test |
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| CN102548061B (en) | 2014-01-15 |
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Application publication date: 20120704 Assignee: Jiangxi Yongsheng Mining and Metallurgical Co., Ltd. Assignor: Xinyu Greatwall Copper Products Developing Co., Ltd. Contract record no.: 2014360000124 Denomination of invention: Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace Granted publication date: 20140115 License type: Exclusive License Record date: 20140617 |
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Assignee: Jiangxi Yongsheng Mining and Metallurgical Co., Ltd. Assignor: Xinyu Greatwall Copper Products Developing Co., Ltd. Contract record no.: 2014360000124 Date of cancellation: 20140807 |
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Granted publication date: 20140115 Termination date: 20161114 |