CN202595345U - Heating rod and water cooling electrode transition connection structure for crystal furnace - Google Patents
Heating rod and water cooling electrode transition connection structure for crystal furnace Download PDFInfo
- Publication number
- CN202595345U CN202595345U CN 201120389903 CN201120389903U CN202595345U CN 202595345 U CN202595345 U CN 202595345U CN 201120389903 CN201120389903 CN 201120389903 CN 201120389903 U CN201120389903 U CN 201120389903U CN 202595345 U CN202595345 U CN 202595345U
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- heating rod
- water cooling
- connection structure
- refractory metal
- transition connection
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Abstract
The utility model discloses a heating rod and water cooling electrode transition connection structure for a crystal furnace. The heating rod and water cooling electrode transition connection structure is characterized in that two refractory metal rods with relatively-large cross sections are respectively connected to the two ends of a heating rod, and then, the refractory metal rods are fixed on a water cooling electrode. Due to the method, the reliability of contact is ensured, the arc starting of electric clearances is avoided, and meanwhile, the thermal damage to the electrode caused by the fact that a thermal load of the high-temperature heating rod is in direct contact with the electrode is avoided; and the heating rod and water cooling electrode transition connection structure can be applicable to various low-voltage high-power tungsten-filament resistance furnaces and is typically applied to sapphire crystal growth furnaces and monocrystalline silicon crystal growth furnaces.
Description
Technical field
The utility model relates to melt seed crystal method single crystal growth apparatus, relates in particular to the transition syndeton of a kind of crystal furnace with heating rod and water cooled electrode
Technical background
Many tungsten filament heating element high temperature resistance furnaces must adopt the low-voltage and high-current mode to supply power; Many tungsten filament heating elements are parallel on two polar electrodes simultaneously; For reducing the direct contacts electrode of heater strip it is caused damage; Generally to the terminal many thin tungsten filaments of harness that adopt of tungsten filament strengthening the mode that the energising sectional area is installed on electrode again, not only installation and maintenance inconvenience of this method, and cause loose contact because of getting loose of filament around the heating wire easily.
The utility model content
In order to overcome the deficiency of above-mentioned present technology, the utility model provides a kind of heating rod two ends to connect respectively on the thicker refractory metal rod in cross section, and refractory metal rod that again will be thicker is fixed on the water cooled electrode; This method has solved the problem of installation and maintenance inconvenience, has avoided the electric clearance starting the arc and electrode cause thermal damage, has avoided causing loose contact because of getting loose of filament around the heating tungsten filament.
The utility model solves the technical scheme that its technical problem adopted: a kind of crystal furnace is with the transition syndeton of heating rod and water cooled electrode; It is characterized in that connecting respectively on the thicker refractory metal rod in cross section at the heating rod two ends, refractory metal rod that again will be thicker is fixed on the water cooled electrode.
As the further improvement of the utility model, the cross-sectional shape of said refractory metal rod can be circle or rectangle, and its sectional area is 1.8 times of the heating rod sectional area at least.
As the further improvement of the utility model, the connecting mode of said refractory metal rod and heating rod also can adopt the clamped that is threaded perhaps to connect firmly and connect.
As the further improvement of the utility model, the material of said refractory metal rod and heating rod can be tungsten or molybdenum.
The beneficial effect that the utility model produces is that metal bar and heating rod transition are connected on the water cooled electrode, guarantee to contact reliably to avoid the electric clearance starting the arc, and avoid direct the contact with electrode of thermal load of heat rod to cause the electrode cause thermal damage simultaneously; This method is convenient for installation and maintenance, has avoided causing loose contact because of getting loose of filament around the heating rod; Can be applicable to all kinds of low-voltage high-power tungsten filament resistance furnaces, typically used is sapphire crystal growth stove and single crystal silicon reactors.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the synoptic diagram of the utility model heating rod embodiment.
Fig. 2 is the synoptic diagram of the utility model metal bar.
Fig. 3 is the synoptic diagram of the utility model embodiment.
Description of reference numerals: 1. metal bar, 2. heating rod.
Embodiment
In Fig. 1,2,3, a kind of crystal furnace is processed into the outside screw shape with the transition syndeton of heating rod and water cooled electrode with heating rod (2) two ends; Again metal bar (1) one end is arranged to the mounting plane that is complementary with the electrode installation site; And on the mounting plane position, get out threaded hole; The other end is processed into the internal thread hole that the outside screw with heating rod (2) is complementary, and the sectional area of metal bar (1) is 1.8 times of heating rod (2) sectional area at least.When enforcement is installed; Earlier heating rod (2) two ends are connected to the corresponding end of two metal bars (1); Then two metal bars (1) the other end is fixed on the water cooled electrode installation site through threaded hole with the infusibility screw respectively, promptly forms heating rod and be connected with the water cooled electrode transition.
Claims (4)
1. crystal furnace is characterized in that connecting a refractory metal rod that the cross section is thicker respectively at the heating rod two ends with the transition syndeton of heating rod and water cooled electrode, and refractory metal rod that again will be thicker is fixed on the water cooled electrode.
2. crystal furnace according to claim 1 it is characterized in that the cross-sectional shape of said refractory metal rod can be circle or rectangle, and its sectional area is 1.8 times of the heating rod sectional area at least with the transition syndeton of heating rod and water cooled electrode.
3. crystal furnace according to claim 1 is with the transition syndeton of heating rod and water cooled electrode, and the connecting mode that it is characterized in that said refractory metal rod and heating rod also can adopt the clamped that is threaded perhaps to connect firmly and connect.
4. crystal furnace according to claim 1 is characterized in that with the transition syndeton of heating rod and water cooled electrode the material of said refractory metal rod and heating rod can be tungsten or molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120389903 CN202595345U (en) | 2011-10-13 | 2011-10-13 | Heating rod and water cooling electrode transition connection structure for crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120389903 CN202595345U (en) | 2011-10-13 | 2011-10-13 | Heating rod and water cooling electrode transition connection structure for crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202595345U true CN202595345U (en) | 2012-12-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120389903 Expired - Fee Related CN202595345U (en) | 2011-10-13 | 2011-10-13 | Heating rod and water cooling electrode transition connection structure for crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202595345U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112279260A (en) * | 2020-10-30 | 2021-01-29 | 广东先导稀材股份有限公司 | Preparation facilities of high-purity boron crystal and high-purity boron powder |
-
2011
- 2011-10-13 CN CN 201120389903 patent/CN202595345U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112279260A (en) * | 2020-10-30 | 2021-01-29 | 广东先导稀材股份有限公司 | Preparation facilities of high-purity boron crystal and high-purity boron powder |
| CN112279260B (en) * | 2020-10-30 | 2024-08-16 | 江苏先导微电子科技有限公司 | Preparation facilities of high-purity boron crystal and high-purity boron powder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121212 Termination date: 20151013 |
|
| EXPY | Termination of patent right or utility model |