CN102548061B - Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace - Google Patents
Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace Download PDFInfo
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- CN102548061B CN102548061B CN201110358056.0A CN201110358056A CN102548061B CN 102548061 B CN102548061 B CN 102548061B CN 201110358056 A CN201110358056 A CN 201110358056A CN 102548061 B CN102548061 B CN 102548061B
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Abstract
The invention relates to polycrystalline silicon production equipment of the photovoltaic industry and discloses a water-cooling copper electrode for producing a polycrystalline silicon vacuum furnace. The water-cooling copper electrode for producing the polycrystalline silicon vacuum furnace comprises a deep-hole copper rod provided with a cooling water inlet-outlet pipe at the rear end, a circular truncated cone shaped copper block and an electric brush and is characterized in that the electric brush is arranged on the large round surface of the circular truncated cone shaped copper block, the lateral side of the copper block and the front end of the deep-hole copper rod are provided with circular truncated cone shaped holes with same taper and are adhered tightly and connected integrally. The water-cooling copper electrode changes a single connecting mode adopted between an existing water-cooling copper electrode and a graphite electrode conduct through threads and is fully contacted with the inner wall of the graphite electrode through a molybdenum wire serving as the electric brush, thereby greatly increasing the contact area between two electrodes and prolonging the service life of the water-cooling copper electrode.
Description
Technical field
The present invention relates to photovoltaic industry production of polysilicon equipment, relate in particular to a kind of production polycrystalline silicon vacuum furnace water-cooled copper electrode.
Background technology
In photovoltaic industry, polysilicon is very important intermediate products in silicon product industrial chain, is the primary raw material of manufacturing silicon polished, solar cell and HIGH-PURITY SILICON goods.Polycrystalline silicon ingot casting vacuum furnace is the equipment for casting large-scale polycrystal silicon ingot, and it is after silicon material high-temperature fusion, to pass through directional solidification condensation-crystallization, makes it form the consistent silicon ingot in crystal orientation, thereby reaches the requirement of solar cell to silicon chip quality.The principle of directional solidification casting polycrystalline silicon is: after packing silica crucible into polycrystalline silicon material, be placed on the graphite block that thermal conductivity is very strong (being oriented solidified blocks), after closing burner hearth, vacuumize, connect heater power source after silicon material melts completely, heat-insulation cage slowly up promotes, the lower surface that exposes the oriented solidified blocks being supported by lower furnace chamber, the heat radiation discharging during by the crystallization of silicon material by oriented solidified blocks to the water-cooled inwall of lower furnace chamber, thereby in the silicon material in crucible, form a vertical temperature gradient.This temperature gradient makes the silicon material in crucible start to solidify from bottom, from melt bottom, starts growth to top, after all silicon material all solidify, after silicon ingot is annealed, cooling, comes out of the stove and completes whole ingot casting process.The effect of water-cooled copper electrode is by copper electrode, to import large electric current into graphite electrode to heat graphite cake again, makes its heating, by thermal radiation, heats silicon material.Between existing water-cooled copper electrode and graphite electrode with being threaded, copper nut locking.This connected mode greatest drawback is to only have a kind of connected mode, complete in screw thread conduction between two electrodes, and be that line contact (illustrates: copper nut is that face contacts with graphite electrode, but with copper rod still for line contacts), even some place is a contact, when larger electric current flows through this place, because contact area is less, resistance is excessive, Ci position produces a large amount of heats, temperature is sharply raise, use after a period of time, two electrodes are often because ablation is bonded together, damage connecting thread, affecting electric current passes through, must blowing out overhaul replacing, cause copper electrode and graphite electrode short useful life, production cost is high.
Summary of the invention
A kind of production polycrystalline silicon vacuum furnace water-cooled copper electrode that the object of this invention is to provide long service life.
In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is: a kind of production polycrystalline silicon vacuum furnace water-cooled copper electrode, the deep hole copper rod that comprises rear end band turnover cooling water pipe, locking copper nut, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring, bakelite insulated bolt sleeve pipe, bakelite insulation pallet, electrode fixed disk, electrode connection plate, connecting bolt, circular platform type copper billet, brush, it is characterized in that: on the large disc of circular platform type copper billet, brush is set, the side of this copper billet fits tightly with the circular platform type hole that deep hole copper rod front end arranges identical tapering, be connected as a single entity.
Described brush is comprised of the molybdenum filament being erected at one by one on the large disc of circular platform type copper billet.
Described molybdenum filament is vertically inlayed or is inserted on the large disc of circular platform type copper billet.
Use when of the present invention, in the rear end of deep hole copper rod, be installed into water pipe and outlet pipe, from front end suit electrode fixed disk, with silver soldering or brazing, fix; Be set with successively bakelite insulation pallet, bakelite insulated bolt sleeve pipe, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring, then insert vacuum furnace, with bolt, through the screw on electrode fixed disk, be fixed on vacuum furnace, then installing electrodes terminal block; The circular platform type copper billet that is pressed into front end band brush in deep hole copper rod nose circle bench-type hole, contact-making surface fits tightly, then graphite electrode is connected, is screwed with deep hole copper rod front threads, copper nut locking.Now, because the elastic reaction of molybdenum filament fully contacts with graphite electrode inwall, form another current path.Finally graphite electrode is connected with graphite cake by carbon carbon composite bolt, water flowing energising can be used.
The present invention compared with prior art, its advantage is by circular platform type copper billet is set, and on the large disc of circular platform type copper billet, brush is set, then the circular platform type hole that with deep hole copper rod front end identical tapering is set fits tightly, the contact of formation face, and the molybdenum filament that plays brush effect fully contacts with graphite electrode inwall, greatly increase the contact area between two electrodes.According to Current calculation formula I=U/R, R=ρ L/S, can release:
I＝US/ρL
In formula: U is voltage, unit volt (V)
R is resistance, unit ohm (Ω .)
ρ is the resistivity of material, and unit is ohm meter (Ω .m).
L is length, and unit is rice (m)
S is sectional area, and unit is a square metre (m
2)
Conclusion: the long-pending relation being directly proportional of electric current and conductive wire cross-section, conductive wire cross-section is long-pending larger, allows the electric current that passes through larger.The present invention has overcome the deficiencies in the prior art, most of electric current imports graphite electrode by brush, greatly alleviated the load of threaded line contact conduction between two electrodes, reduced heating starting the arc probability, because molybdenum filament has high temperature resistant (2610 ℃ of fusing points), good conductivity, flexible, thereby improved water-cooled copper electrode life.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention
Fig. 2 is that B of the present invention is to structural representation
Fig. 3 is that B of the present invention is to another kind of structural representation
Fig. 4 is the present invention and graphite electrode connection diagram
Embodiment
As shown in Figure 1 and Figure 2, the front end of deep hole copper rod 1 goes out a circular platform type hole that outer imperial palace is little with lathe car, and the circular platform type copper billet 12 of one of machine work and the identical tapering in circular platform type hole, can fit tightly with circular platform type hole circular platform type copper billet 12, is connected as a single entity.In circular platform type copper billet 12 side, to center line, cut out at least 2 notches that do not connect center, guarantee that circular platform type copper billet 12 is still indivisible integral body.Notch in perpendicular to large disc, be covered with molybdenum filament 13 one by one, compress, make molybdenum filament 13 and circular platform type copper billet 12 tight fits, enlarge active surface, is conducive to conduction, outside tin-welding seal, the molybdenum filament 13 formation brushes that expose.Molybdenum filament 13 length of exposing will guarantee fully to contact with graphite electrode 14 (seeing Fig. 4) inwall.With (the GT Solar International of U.S. GT Solar international corporation, Inc.) the φ 110mm * 990mm specification water-cooled copper electrode using on the GT-DSS450TM model vacuum furnace of producing is example, this water-cooled copper electrode diameter is foremost 30mm, on the circular platform type hole arranging, circular diameter is φ 23mm, lower circular diameter is φ 21mm, degree of depth 8mm, the tapering in circular platform type hole is 1: 4.By tapering, be 1: 4 processing circular platform type copper billet 12, upper circular diameter is φ 23mm, and lower circular diameter is φ 21mm, height 8mm.In circular platform type copper billet 12 side, to center line, cutting out 10～15 width that do not connect center (apart from center of circle 5mm) is 0.15mm notch, in notch, perpendicular to large disc, being pressed into diameter is one by one the molybdenum filament 13 of φ 0.17mm, because molybdenum filament 13 has certain ductility, it is 0.15mm notch that the molybdenum filament 13 of selection φ 0.17mm can be pressed into width, form tight fit, enlarge active surface, outside tin-welding seal, the molybdenum filament 13 exposing forms brush.The molybdenum filament 13 exposing is cut into taper shape, and length will guarantee fully to contact with graphite electrode 14 (seeing Fig. 4) inwall.The optional diameter of molybdenum filament 13 is φ 0.12mm～φ 0.22mm, and respective slot width can be set to 0.10mm～0.20mm, during assembling, should note tight fit.
Fig. 3 is that the molybdenum filament 13 that forms brush is arranged on the another kind of form on circular platform type copper billet 12.As shown in Figure 3, the balanced aperture that diameter phi 0.18～φ 3.0mm, the degree of depth 5～7mm are set on the large disc of circular platform type copper billet 12, family of gang molybdenum filament 13 inserts aperture and fixes with soldering.
Fig. 4 is the present invention and graphite electrode connection diagram.As shown in Figure 4, the rear end of deep hole copper rod 1 is provided with water inlet pipe 10 and outlet pipe 11, by the cooling copper electrode of fill cycle.From the front end sleeve loading electrode fixed disk 8 of deep hole copper rod 1, with silver soldering or brazing, fix; Be set with successively bakelite insulation pallet 7, bakelite insulated bolt sleeve pipe 6, the polytetrafluoroethylene collar 3, O RunddichtringO 4, bakelite insulation gasket ring 5, then insert vacuum furnace, with bolt, pass the screw on electrode fixed disk 8, be fixed on vacuum furnace (not shown), during installation, will guarantee copper electrode and vacuum furnace insulation.Installing electrodes terminal block 9 again; The circular platform type copper billet 12 that is pressed into front end band brush in deep hole copper rod 1 nose circle bench-type hole, contact-making surface fits tightly, then graphite electrode 14 is connected, is screwed with deep hole copper rod 1 front threads, copper nut 2 lockings.Now, because the elastic reaction of molybdenum filament 13 fully contacts with graphite electrode 14 inwalls, form another current path.Finally graphite electrode 14 is connected with graphite cake (not shown) by carbon carbon composite bolt, water flowing energising can be used.
The water-cooled copper electrode using on GT-DSS450TM model vacuum furnace of still take is example, and result of use of the present invention is described.This vacuum furnace basic parameter: rated power: 165kVA, average power: about 85kVA, 380V high-tension electricity, max line electric current: 3800A, maximum output voltage: 25V, the maximum current of each electrode of flowing through is 3800/ √ 3=2194A.In actual heavy current work, because water-cooled copper electrode posterior segment intensity of cooling is high, its temperature is low, and size is in normal condition, and deep hole copper rod 1 front end cooling effect is slightly poor, its ambient temperature is high (1000 ℃～1200 ℃) relatively also, and the circular platform type copper billet 12 that circular platform type hole is pressed into, all the time in swelling state, fit tightly very much, brush and copper electrode be also all the time in tight fit, and make it firmly be embedded in copper electrode front end and be difficult for loosening, thereby be conducive to conduction.
Claims (3)
1. produce polycrystalline silicon vacuum furnace water-cooled copper electrode for one kind, the copper rod that comprises rear end band turnover cooling water pipe, electrode fixed disk, bakelite insulation pallet, the polytetrafluoroethylene collar, O RunddichtringO, bakelite insulation gasket ring, bakelite insulated bolt sleeve pipe, locking copper nut, electrode connection plate, connecting bolt, described copper rod is set with electrode fixed disk, with silver soldering or brazing, fix, electrode fixed disk is arranged in bakelite insulation pallet, on its face, use successively from the inside to the outside the polytetrafluoroethylene collar, O RunddichtringO, the sealing of bakelite insulation gasket ring, in installing hole, be provided with bakelite insulated bolt sleeve pipe, in described copper rod front threads, be provided with locking copper nut, rear portion is provided with electrode connection plate, it is characterized in that: also comprise circular platform type copper billet, brush, on the large disc of circular platform type copper billet, brush is set, the side of this copper billet fits tightly with the circular platform type hole that copper rod front end face arranges identical tapering, is connected as a single entity.
2. a kind of production polycrystalline silicon vacuum furnace water-cooled copper electrode according to claim 1, is characterized in that: described brush is comprised of the molybdenum filament being erected at one by one on the large disc of circular platform type copper billet.
3. a kind of production polycrystalline silicon vacuum furnace water-cooled copper electrode according to claim 2, is characterized in that: described molybdenum filament is vertically inlayed or is inserted on the large disc of circular platform type copper billet.
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| CN201110358056.0A CN102548061B (en) | 2011-11-14 | 2011-11-14 | Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace |
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| CN201110358056.0A CN102548061B (en) | 2011-11-14 | 2011-11-14 | Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace |
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| CN102548061A CN102548061A (en) | 2012-07-04 |
| CN102548061B true CN102548061B (en) | 2014-01-15 |
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| CN105188162A (en) * | 2015-10-15 | 2015-12-23 | 交城义望铁合金有限责任公司 | Water-cooling combined electrode for DC electric furnace for producing mineral wool |
| CN106367807A (en) * | 2016-12-05 | 2017-02-01 | 晶科能源有限公司 | Polycrystalline ingot furnace and graphite electrode thereof |
| CN108358207A (en) * | 2018-05-18 | 2018-08-03 | 武汉材料保护研究所有限公司 | The method that refining polycrystalline silicon reducing furnace electrode damage part is repaired again |
| CN110346402A (en) * | 2019-06-20 | 2019-10-18 | 浙江大学 | The forceful electric power electrode assembly used under Elevated Gravity |
| CN114659820B (en) * | 2022-05-24 | 2022-08-02 | 中国飞机强度研究所 | High-temperature-resistant combined type electrode system of heating device in aerospace plane test |
Citations (3)
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| CN101440519A (en) * | 2008-12-11 | 2009-05-27 | 上海森松环境技术工程有限公司 | Silicon core electrode for polysilicon reducing furnace |
| CN101565184A (en) * | 2009-05-22 | 2009-10-28 | 宜昌南玻硅材料有限公司 | Electrode sealing method in hydrogen furnace device for polysilicon production and device thereof |
| CN202323113U (en) * | 2011-11-14 | 2012-07-11 | 新余市长城铜产品开发有限公司 | Water-cooling copper electrode for producing poly-silicon vacuum furnaces |
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| JP5481886B2 (en) * | 2008-03-27 | 2014-04-23 | 三菱マテリアル株式会社 | Polycrystalline silicon production equipment |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101440519A (en) * | 2008-12-11 | 2009-05-27 | 上海森松环境技术工程有限公司 | Silicon core electrode for polysilicon reducing furnace |
| CN101565184A (en) * | 2009-05-22 | 2009-10-28 | 宜昌南玻硅材料有限公司 | Electrode sealing method in hydrogen furnace device for polysilicon production and device thereof |
| CN202323113U (en) * | 2011-11-14 | 2012-07-11 | 新余市长城铜产品开发有限公司 | Water-cooling copper electrode for producing poly-silicon vacuum furnaces |
Non-Patent Citations (2)
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| 直流电弧炉技术特性述评;高崇;《冶金设备》;20000228;第21卷(第1期);第30-32页 * |
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Application publication date: 20120704 Assignee: Jiangxi Yongsheng Mining and Metallurgical Co., Ltd. Assignor: Xinyu Greatwall Copper Products Developing Co., Ltd. Contract record no.: 2014360000124 Denomination of invention: Water-cooling copper electrode for producing polycrystalline silicon vacuum furnace Granted publication date: 20140115 License type: Exclusive License Record date: 20140617 |
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Assignee: Jiangxi Yongsheng Mining and Metallurgical Co., Ltd. Assignor: Xinyu Greatwall Copper Products Developing Co., Ltd. Contract record no.: 2014360000124 Date of cancellation: 20140807 |
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