CN102593033B - 凸轮式盘状物夹持装置 - Google Patents
凸轮式盘状物夹持装置 Download PDFInfo
- Publication number
- CN102593033B CN102593033B CN201210004761.5A CN201210004761A CN102593033B CN 102593033 B CN102593033 B CN 102593033B CN 201210004761 A CN201210004761 A CN 201210004761A CN 102593033 B CN102593033 B CN 102593033B
- Authority
- CN
- China
- Prior art keywords
- cam
- extension rod
- spring
- chuck
- clamping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Clamps And Clips (AREA)
- Manipulator (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210004761.5A CN102593033B (zh) | 2012-01-09 | 2012-01-09 | 凸轮式盘状物夹持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210004761.5A CN102593033B (zh) | 2012-01-09 | 2012-01-09 | 凸轮式盘状物夹持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102593033A CN102593033A (zh) | 2012-07-18 |
CN102593033B true CN102593033B (zh) | 2014-11-19 |
Family
ID=46481498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210004761.5A Expired - Fee Related CN102593033B (zh) | 2012-01-09 | 2012-01-09 | 凸轮式盘状物夹持装置 |
Country Status (1)
Country | Link |
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CN (1) | CN102593033B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106373918A (zh) * | 2016-09-30 | 2017-02-01 | 无锡宏纳科技有限公司 | 带有滑动卡位装置的晶圆夹持装置 |
CN106743199B (zh) * | 2017-01-24 | 2022-09-06 | 昕迪精密机械(东莞)有限公司 | 一种旋转输送机构 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030094824A1 (en) * | 2001-11-16 | 2003-05-22 | Applied Materials, Inc. | Wafer clamping mechanism |
CN102097352A (zh) * | 2010-07-14 | 2011-06-15 | 北京七星华创电子股份有限公司 | 盘状物固定装置 |
CN202423249U (zh) * | 2012-01-09 | 2012-09-05 | 北京七星华创电子股份有限公司 | 凸轮式盘状物夹持装置 |
-
2012
- 2012-01-09 CN CN201210004761.5A patent/CN102593033B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030094824A1 (en) * | 2001-11-16 | 2003-05-22 | Applied Materials, Inc. | Wafer clamping mechanism |
CN102097352A (zh) * | 2010-07-14 | 2011-06-15 | 北京七星华创电子股份有限公司 | 盘状物固定装置 |
CN202423249U (zh) * | 2012-01-09 | 2012-09-05 | 北京七星华创电子股份有限公司 | 凸轮式盘状物夹持装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102593033A (zh) | 2012-07-18 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIJING GUIYUAN KEDIAN MICROELECTRONICS TECHNOLOGY Free format text: FORMER OWNER: QIXINGHUACHUANG ELECTRONIC CO., LTD., BEIJING Effective date: 20150114 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100016 CHAOYANG, BEIJING TO: 100015 CHAOYANG, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20150114 Address after: 100015, No. 1 Jiuxianqiao East Road, Beijing, Chaoyang District (M2 electronic equipment factory) Patentee after: Beijing Si Yuan Electrical electronic technology limited liability company Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: Qixinghuachuang Electronic Co., Ltd., Beijing |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141119 Termination date: 20170109 |