CN102589488A - Optical vernier and method for detecting planeness and gradient using same - Google Patents

Optical vernier and method for detecting planeness and gradient using same Download PDF

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Publication number
CN102589488A
CN102589488A CN2012100371750A CN201210037175A CN102589488A CN 102589488 A CN102589488 A CN 102589488A CN 2012100371750 A CN2012100371750 A CN 2012100371750A CN 201210037175 A CN201210037175 A CN 201210037175A CN 102589488 A CN102589488 A CN 102589488A
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vernier
optical
optical scale
pedestal
measurement point
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CN102589488B (en
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朱俊
谢仁富
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719th Research Institute of CSIC
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719th Research Institute of CSIC
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Abstract

The invention provides an optical vernier which comprises a base and a vernier body vertically arranged at one end of the base, wherein the bottom of the base just below the vernier body is provided with a fixed bolt, two adjusting screws penetrate through the base, the base is further provided with a bubble water level, the vernier body is provided with a digital vernier in a covering way, and the digital vernier is connected with an optical target. The method for detecting the planeness and the gradient comprises the following steps of: selecting a plurality of detecting points, and recording the coordinate value of each detecting point; stably erecting and leveling a balance level, putting the optical vernier on a place to be detected, detecting the height of any one of detecting points, and setting reference height; sequentially detecting the altitude difference values of the other detecting points; and finding out three special detecting points to be defined to be highest points, wherein the plane formed by the three special detecting points is a reference plane, computing the distance between each detecting point and the reference plane, and taking a maximum value as the planeness of the plane to be detected. The optical vernier provided by the invention is high in detection precision, convenient and quick to detect, convenient to operate at an engineering site, objective and exact in the evaluation data of the planeness, and less influenced by human factors.

Description

Optical scale and use the method for its detection plane degree and degree of tilt
Technical field
The present invention relates to flatness and degree of tilt detection range, specifically is a kind of optical scale and the method for using its detection plane degree and degree of tilt.
Background technology
In various test-beds; Platform base is the basis that is used to install the precision optical machinery parts; Framework of steel reinforcement normal and civil engineering structure welds together; Be to guarantee mechanical part installation accuracy and stability, its installed surface and platform base surface should be able to fluid-tight engagement, therefore platform base surperficial flatness and levelness had certain requirement.Because platform base is mounted when civil engineering, so the flatness on platform base surface detects and must carry out at the scene with degree of tilt, and polishing in necessary plane also can only on-the-spot handwork.
Usually, the platform base flatness is detected the dull and stereotyped detection method of employing, coat red lead at seized face; Test flat plate is placed on seized, carries out appropriate to-and-fro movement, through observing and write down the distribution of seized contact point and the quantity of unit area contact point; Estimate the flatness of dull and stereotyped pedestal; The manual grinding that hockets repeatedly then detects with dull and stereotyped, meets the requirements up to flatness, measures degree of tilt with combined diagram level at last.The method not only execute-in-place is time-consuming, and can't provide objective flatness evaluating data, and it is bigger that polishing and testing result are influenced by human factor.
And advanced; When utilizing level high differentiation detection large flat workpiece planarization to spend; The discrepancy in elevation that needs each measurement point of measuring workpieces surface; Specific practice is that the scale that has scale is placed each measurement point of surface of the work respectively, with the spirit-leveling instrument leaf sight scale that sets up, obtains the discrepancy in elevation of each measurement point through scale reading.The scale that is generally used for measurement of the level is merely the common ruler of a band bubble level; Has no levelling gear; Come reading through aiming rule groove on one's body; The minimum calibration of groove is 0.5mm, and blade vertical precision and groove pointing accuracy are all very low, and then final flatness detection data precision is reduced greatly.
Summary of the invention
To the defective that exists in the prior art; The object of the present invention is to provide a kind of optical scale and use the method for its detection plane degree and degree of tilt, its measuring accuracy is high, and is convenient to operation; Be convenient to the engineering site operation; The flatness evaluating data is objective and accurate, and convenient for the polishing that meets the requirements, it is little influenced by human factor.
For reaching above purpose, the present invention provides a kind of optical scale, comprises pedestal and the blade that is vertically installed in pedestal one end; Base bottom surface under the said blade is provided with a gib screw; Pedestal runs through away from the other end of blade and is provided with two adjustment screws, and pedestal upper surface also is provided with a bubble level, and blade is arranged with digital vernier; The numeral vernier connects a geometrical clamp, and the geometrical clamp other end is provided with an optical target.
On the basis of technique scheme, said two adjustment screws are symmetrically distributed in the both sides of closing on pedestal, and the line of two adjustment screws is perpendicular to blade.
On the basis of technique scheme, said digital vernier comprises vernier and connected digital display reading unit, and the two is connected with blade through trip bolt respectively, and said vernier also is provided with fine-tuning nut.
On the basis of technique scheme, said optical target is the optical glass that has line of sight.
On the basis of technique scheme, said blade bottom is circular rod member, inserts and be articulated in said pedestal.
On the basis of technique scheme, said blade bottom fixedly is inserted in said pedestal.
Optical scale of the present invention can carry out the pedestal leveling through two adjustment screws; Therefore improved the vertical precision of blade, increased optical target simultaneously, for spirit-leveling instrument provides the aiming basis; Improve pointing accuracy; It is simple in structure, is applicable to the surperficial vertical survey of large and medium-sized flat panel workpieces, and the scene that is particularly useful for the fine structure installation work is detected.
The present invention also provides a kind of method of using above-mentioned optical scale detection plane degree and degree of tilt, comprises the steps: that S1. sets up rectangular coordinate system on to be detected of platform, chooses a plurality of measurement points, writes down the coordinate figure of each measurement point; S2. the spirit-leveling instrument steady rest is located at by the platform, and level-off; S3. optical scale is placed on to be detected, utilizes optical scale and spirit-leveling instrument to measure the height of any measurement point, and be made as altitude datum; Utilize optical scale and spirit-leveling instrument to measure the high difference between other measurement point height and the altitude datum successively; S4. after obtaining the coordinate figure and high difference of each measurement point; Find out 3 measurement points, 3 measurement points must satisfy condition simultaneously: the under that other all measurement points all constitute at these 3 measurement points, to be detected central point are within the triangle that 3 measurement points constitute; S5. said 3 measurement points are defined as to be detected peak; The plane of 3 measurement point formations is defined as reference field; Calculate the distance between other each measurement point and reference field; Get maximal value wherein as to be detected flatness, the degree of tilt of reference field and vergence direction are to be detected degree of tilt and vergence direction.
On the basis of technique scheme, among the step S1, mark intersection and orthogonal mesh lines in length and breadth at the seized face of platform, be measurement point with the mesh lines intersection point.
On the basis of technique scheme, among the step S2, the spirit-leveling instrument steady rest is located at the other 2-5m of platform place with support, transfer the spirit-leveling instrument foot screw, make spirit-leveling instrument be in horizontality, in the whole measuring process, the spirit-leveling instrument height is immutable.
On the basis of technique scheme, among the said step S3, the step that optical scale is measured said measurement point is: S301. aims at any measurement point with the gib screw of optical scale; Two adjustment screws on the adjustment optical scale pedestal; With the pedestal level-off, the digital vernier that slides then aims at the optical target center on the vernier until spirit-leveling instrument according to the indication of bubble level; And, be made as altitude datum with digital vernier reading zero setting; S302. aim at the center of each measurement point optical target according to step S301 successively, read the reading of the digital vernier in each aiming back, said reading is the high difference between each measurement point and the altitude datum.
On the basis of technique scheme, when sliding said digital vernier, finely tune through micrometer adjusting screw on it.
The present invention uses the method for above-mentioned optical scale detection plane degree and degree of tilt, and its flatness and inclination checking method precision are reliable, highly versatile, set up easy to operately, and calculating section can carry out fast processing through having worked out computer program simultaneously; Flatness as to be detected is nonconforming; Only need 3 peaks of manual grinding, remeasure the high difference of these 3 points then, the double counting process; Meet the demands up to platform face to be detected; 3 points of at every turn only polishing have significantly reduced the manual grinding workload, and the scene that can be widely used in the fine structure installation work is detected.
Description of drawings
Fig. 1 is the structural drawing of optical scale first embodiment of the present invention;
Fig. 2 is another visual angle structural drawing of Fig. 1;
Fig. 3 is the structural drawing of optical scale second embodiment of the present invention;
Fig. 4 is the method flow diagram of applied optics scale detection plane degree of the present invention and degree of tilt;
Fig. 5 is to be detected mesh lines and a measurement point distribution plan in the embodiment of the invention;
Fig. 6 is the arrangenent diagram of to be detected spirit-leveling instrument when detecting and optical scale among Fig. 5;
Fig. 7 is certain data result figure that once calculates among the present invention;
Fig. 8 is to be detected the fitted figure that computational data generates among Fig. 7.
Reference numeral:
Pedestal 1, blade 2, gib screw 3, adjustment screw 4, bubble level 5, digital vernier 6; Vernier 7, digital display reading unit 8, trip bolt 9, fine-tuning nut 10, geometrical clamp 11, optical target 12; Circular rod member 13, tested surface 14, mesh lines 15, support 16, spirit-leveling instrument 17.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is done further explain.
As depicted in figs. 1 and 2, be optical scale first embodiment of the present invention, optical scale of the present invention comprises pedestal 1 and the blade 2 that is vertically installed in this pedestal 1, the bottom surface of pedestal 1 is provided with a gib screw 3, and gib screw 3 be positioned at blade 2 under.Said pedestal 1 runs through away from the other end of blade 2 and is provided with two adjustment screws 4; Two adjustment screws 4 are symmetrically distributed in the both sides of closing on pedestal 1; The lines of two adjustment screws 4 are perpendicular to blade 2, and the upper surface of pedestal 1 also is provided with a bubble level 5, so that to the leveling of pedestal 1.
Said blade 2 tops are arranged with digital vernier 6; It can slide on blade 2; Numeral vernier 6 comprises vernier 7 and connected digital display reading unit 8; The two is connected with blade 2 through trip bolt 9 is solid respectively, can move jointly, also is provided with the position that a fine-tuning nut 10 can meticulous adjustment vernier on the vernier 6.Said digital display reading unit 8 can show the altitude reading of vernier 6 through the digital display mode behind vernier 6 desired locations.Digital display reading unit 8 connects a geometrical clamp 11, and geometrical clamp 11 other ends are provided with an optical target 12, and optical target 12 is fixed together with digital display reading unit 8, can slide with vernier 6.Optical target 12 is for having the optical glass of line of sight, and line of sight is a crosshair in the present embodiment, and its right-angled intersection position is the center of optical target.Said blade 2 bottoms are circular rod member 13, and this circle rod member 13 inserts in the pedestal 1, and is articulated in pedestal 1; Can carry out self rotating; Pedestal 1 is equipped with the mounting hole (figure does not show) of Φ 10mm in the present embodiment, is convenient to the grafting of circular rod member 13, and is convenient through rotating the direction of adjustment optical target 12.
As shown in Figure 3, be optical scale second embodiment of the present invention, itself and the first embodiment difference are that in the present embodiment, blade 2 bottoms fixedly are inserted in said pedestal 1, remainder is identical with first embodiment, repeats no more here.
When optical scale of the present invention is measured, need set up spirit-leveling instrument and leveling, optical scale is placed on surface to be measured on the measuring workpieces side; And gib screw 3 placed workpiece calibration point place; Two adjustment of turn screw 4 is according to the indication of bubble level 5, with pedestal 1 level-off.Blade 2 is installed in an end of pedestal 1, and strict vertical with the reference field of pedestal 1 through demarcating, and promptly when pedestal 1 level-off, blade 2 is in the vertical state.Digital vernier 6 then slides; The optical target 12 that has crosshair slides with it; Through fine-tuning nut 10 can the digital vernier 6 of meticulous adjustment the position; Up to the center of spirit-leveling instrument 17 aiming optical targets 12, it is locked with the position of digital vernier 6 to mix up back turn trip bolt 9, and this moment, the digital display reading unit 8 top readings that shown were the height value of measurement point.
As shown in Figure 4, the method flow diagram for applied optics scale detection plane degree of the present invention and degree of tilt comprises the steps:
S1. set up rectangular coordinate system on to be detected of platform, choose a plurality of measurement points, write down the coordinate figure of each measurement point;
S2. the spirit-leveling instrument steady rest is located at by the platform, and level-off;
S3. optical scale is placed on to be detected, utilizes optical scale and spirit-leveling instrument to measure the height of any measurement point, and be made as altitude datum; Utilize optical scale and spirit-leveling instrument to measure the high difference between other measurement point height and the altitude datum successively;
S4. after obtaining the coordinate figure and high difference of each measurement point; Find out 3 measurement points, 3 measurement points must satisfy condition simultaneously: the under that other all measurement points all constitute at these 3 measurement points, to be detected central point are within the triangle that 3 measurement points constitute;
S5. the plane that said 3 measurement points is constituted is defined as reference plane; Calculate the distance between other each measurement point and reference plane; Get maximal value wherein as to be detected flatness, the degree of tilt of reference plane and vergence direction are to be detected degree of tilt and vergence direction.
Be described in detail the method for applied optics scale detection plane degree of the present invention and degree of tilt below through specific embodiment, the steps include:
S101. as shown in Figure 5, to be detected 14 is the upper surface of a horseshoe clamp plate pedestal in the present embodiment, and horseshoe clamp plate pedestal is platform, and the framework of steel reinforcement of whole dull and stereotyped pedestal and civil engineering structure welds together.At first tested surface 14 is cleaned out through the measure such as scrape of rust cleaning, preliminary shovel; Set up coordinate system according to the tested surface center; With planing and ruler marks the mesh lines 15 of proper density at tested surface, be measurement point with mesh lines 15 intersection points, write down the coordinate figure of each measurement point.
S102. as shown in Figure 6, with support 16 spirit-leveling instrument 17 is stablized the other 2-5m of construction of platform place, in the present embodiment 3m, antenna height guarantees that no sight line is blocked between spirit-leveling instrument 17 and platform.Transfer the foot screw of spirit-leveling instrument 17, make spirit-leveling instrument 17 be in horizontality, this moment, spirit-leveling instrument 17 telescope optic axis were a horizontal line, and telescope rotates around Z-axis can scan out a surface level, and spirit-leveling instrument 17 is highly immutable in the whole measuring process.
S103. like Fig. 1 and shown in Figure 6; Optical scale is placed on to be detected 14, and the gib screw 3 of optical scale is aimed at any measurement point, two adjustment screws 4 on the pedestal 1 of adjustment scale; With pedestal 1 level-off, this moment, blade 2 was in the vertical state according to 5 indications of bubble level.Digital vernier 6 then slides; The optical target 12 that has crosshair slides with it; Through fine-tuning nut 10 can the digital vernier 6 of meticulous adjustment the position, the center of the optical target 12 on the digital vernier 6 of spirit-leveling instrument 17 aimings, turn trip bolt 9 is locked with the position of digital vernier 6.At this moment, the digital display reading unit 8 of digital vernier 6 demonstrates altitude reading, calculates for ease, and we are the reading zero setting of digital vernier 6, and is made as altitude datum, and this zero-bit is immutable in the whole measuring process.
S104. the gib screw on the pedestal 13 is aimed at each measurement point on to be detected 14 respectively; Method according to step S103; The center of optical target 12 when using spirit-leveling instrument 17 each measurement point of aiming successively; Read digital display reading unit 8 readings of the digital vernier 6 in each aiming back, said reading is the high difference between each measurement point and the altitude datum.
S105. after obtaining the coordinate figure and high difference of each measurement point, can find out 3 measurement points through calculating, these 3 measurement points must satisfy following two conditions simultaneously: the 1. under that all constitutes at these 3 measurement points of other all measurement points; 2. to be detected 14 central points are within the triangle that 3 measurement points constitute.In the present embodiment; Calculate the plane employing plane fitting method that 3 measurement points constitute; And utilize among the MATLAB " inpolygon " function to judge that central point is whether in triangle; Establishment MATLAB program is calculated any 3 points in all measurement points, finds out 1 group of 3 measurement point that satisfy above-mentioned 2 conditions simultaneously.
S106. said 3 measurement points are defined as to be detected 14 peak; The plane of 3 measurement point formations is defined as reference field; Calculate the distance between other each measurement point and reference field; Get maximal value wherein as to be detected 14 flatness, the degree of tilt of reference field and vergence direction are to be detected 14 degree of tilt and vergence direction.
As shown in Figure 7, be certain data result figure that once calculates that MATLAB generates, be one to one through ruling the actual spot of measurement position definite on measurement point position that identifies with spider among the figure and the tested surface 14.Wherein the spider of 3 band circles is the peak I in tested surface 14 measurement points, and the data of square mark are the discrepancy in elevation reading II of this measurement point under each measurement point, and the data of square mark are this measurement point and the gap III that calculates reference field on each measurement point.Get the flatness of maximal clearance value, get the degree of tilt of calculating reference field and degree of tilt and the vergence direction that vergence direction is tested surface, promptly with oblique line and tables of data vergence direction and degree of tilt have been shown among Fig. 7 as tested surface.
If to be detected 14 of this moment is undesirable, only need 3 peaks of manual grinding, remeasure the high difference of these 3 points then, the computation process of repeating step 105,106 meets the demands up to be detected 14.As shown in Figure 8, be with to be detected the fitted figure of MATLAB according to computational data generation among Fig. 7, express the face shape and the inclination situation of tested surface intuitively, can be on-the-spot manual grinding guidance is provided.Above-mentioned flatness and inclination checking method precision are reliable, highly versatile, and computer program can be handled measurement data real-time, has reduced the manual grinding workload.
The present invention is not limited to above-mentioned embodiment, for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also make some improvement and retouching, and these improvement and retouching also are regarded as within protection scope of the present invention.The content of not doing in this instructions to describe in detail belongs to this area professional and technical personnel's known prior art.

Claims (11)

1. optical scale; Comprise pedestal and be vertically installed in the blade of pedestal one end, it is characterized in that: the base bottom surface under the said blade is provided with a gib screw, and pedestal runs through away from the other end of blade and is provided with two adjustment screws; Pedestal upper surface also is provided with a bubble level; Blade is arranged with digital vernier, and digital vernier connects a geometrical clamp, and the geometrical clamp other end is provided with an optical target.
2. optical scale as claimed in claim 1 is characterized in that: two adjustment screws are symmetrically distributed in the both sides of closing on pedestal, and the line of two adjustment screws is perpendicular to blade.
3. optical scale as claimed in claim 1 is characterized in that: said digital vernier comprises vernier and connected digital display reading unit, and the two is connected with blade through trip bolt respectively, and said vernier also is provided with fine-tuning nut.
4. optical scale as claimed in claim 1 is characterized in that: said optical target is the optical glass that has line of sight.
5. like claim 1,2 or 3 described optical scales, it is characterized in that: said pedestal is inserted and be articulated in said blade bottom for circular rod member.
6. like claim 1,2 or 3 described optical scales, it is characterized in that: said blade bottom fixedly is inserted in said pedestal.
7. an application rights requires the method for 1 described optical scale detection plane degree and degree of tilt, it is characterized in that, comprises the steps:
S1. set up rectangular coordinate system on to be detected of platform, choose a plurality of measurement points, write down the coordinate figure of each measurement point;
S2. the spirit-leveling instrument steady rest is located at by the platform, and level-off;
S3. optical scale is placed on to be detected, utilizes optical scale and spirit-leveling instrument to measure the height of any measurement point, and be made as altitude datum; Utilize optical scale and spirit-leveling instrument to measure the high difference between other measurement point height and the altitude datum successively;
S4. after obtaining the coordinate figure and high difference of each measurement point; Find out 3 measurement points, 3 measurement points must satisfy condition simultaneously: the under that other all measurement points all constitute at these 3 measurement points, to be detected central point are within the triangle that 3 measurement points constitute;
S5. said 3 measurement points are defined as to be detected peak; The plane of 3 measurement point formations is defined as reference field; Calculate the distance between other each measurement point and reference field; Get maximal value wherein as to be detected flatness, the degree of tilt of reference field and vergence direction are to be detected degree of tilt and vergence direction.
8. the method for optical scale detection plane degree as claimed in claim 7 and degree of tilt is characterized in that: among the step S1, marking intersection and orthogonal mesh lines in length and breadth at the seized face of platform, is measurement point with the mesh lines intersection point.
9. the method for optical scale detection plane degree as claimed in claim 7 and degree of tilt; It is characterized in that: among the step S2; With support the spirit-leveling instrument steady rest is located at the other 2-5m of platform place, transfers the spirit-leveling instrument foot screw, make spirit-leveling instrument be in horizontality; In the whole measuring process, the spirit-leveling instrument height is immutable.
10. the method for optical scale detection plane degree as claimed in claim 7 and degree of tilt is characterized in that: among the said step S3, the step that optical scale is measured said measurement point is:
S301. the gib screw of optical scale is aimed at any measurement point; Two adjustment screws on the adjustment optical scale pedestal; With the pedestal level-off, the digital vernier that slides then aims at the optical target center on the vernier until spirit-leveling instrument according to the indication of bubble level; And, be made as altitude datum with digital vernier reading zero setting;
S302. aim at the center of each measurement point optical target according to step S301 successively, read the reading of the digital vernier in each aiming back, said reading is the high difference between each measurement point and the altitude datum.
11. the method for optical scale detection plane degree as claimed in claim 10 and degree of tilt is characterized in that: when sliding said digital vernier, finely tune through micrometer adjusting screw on it.
CN201210037175.0A 2012-02-20 2012-02-20 Optical vernier and method for detecting planeness and gradient using same Expired - Fee Related CN102589488B (en)

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CN102937435A (en) * 2012-08-07 2013-02-20 中国葛洲坝集团国际工程有限公司 Measurement method capable of accurately controlling caterpillar gate embedded part coplanarity
CN103175694A (en) * 2013-01-16 2013-06-26 吉林大学 Level height difference correction system for four-wheel aligner lifting frame of standard-type automobile
CN104034307A (en) * 2014-06-27 2014-09-10 天津二十冶建设有限公司 Rapid levelness aligning method for large-size equipment
CN105196177A (en) * 2014-05-30 2015-12-30 盛美半导体设备(上海)有限公司 Method for detecting inclination degree of wafer chuck plate
CN105529294A (en) * 2014-09-29 2016-04-27 盛美半导体设备(上海)有限公司 Horizontal adjusting device for chuck and method utilizing device to horizontally adjust chuck
CN108844502A (en) * 2018-06-22 2018-11-20 中国冶集团有限公司 A kind of device and method measuring building panel surface evenness
CN109341606A (en) * 2018-11-22 2019-02-15 武汉华星光电技术有限公司 A kind of surface flatness measuring device and method
CN110296718A (en) * 2019-08-06 2019-10-01 山西省计量科学研究院 A kind of bar code formula levelling staff detection system and detection method
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CN102937435B (en) * 2012-08-07 2015-05-13 中国葛洲坝集团国际工程有限公司 Measurement method for accurately controlling verticality and coplanarity of caterpillar gate embedded part
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