CN102589447A - Micro linear displacement sensor based on two-channel grating - Google Patents
Micro linear displacement sensor based on two-channel grating Download PDFInfo
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- CN102589447A CN102589447A CN2012100610709A CN201210061070A CN102589447A CN 102589447 A CN102589447 A CN 102589447A CN 2012100610709 A CN2012100610709 A CN 2012100610709A CN 201210061070 A CN201210061070 A CN 201210061070A CN 102589447 A CN102589447 A CN 102589447A
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Abstract
The invention provides a micro linear displacement sensor based on a two-channel grating, mainly comprising a linear laser device and a receiving and focusing lens, wherein the linear laser device can generate linear laser which is focused by an emitting and focusing lens and is reflected by an object to be detected; the receiving and focusing lens receives the linear laser and focuses the laser; two regions of a first-channel grating and a second-channel grating of the two-channel grating are irradiated and transmitted by the linear laser; a first-channel photoelectric detector and a second-channel photoelectric detector for receiving the linear laser are respectively arranged corresponding to the two regions of the first-channel grating and the second-channel grating; and the output ports of the first-channel photoelectric detector and the second-channel photoelectric detector are respectively connected with the input port of a real-time signal processing circuit. The micro linear displacement sensor provided by the invention has the characteristics of simple structure, good linearity, high sensitivity, high measurement frequency, high resolution, good instantaneity and the like. The micro linear displacement sensor can be applied to online or offline detection of static features of micro-linear displacement of elements, such as a high-frequency permanent magnetic force motor and the like.
Description
Technical field
The present invention relates to a kind of small Linear displacement transducer, belong to the photoelectric sensor technical field based on dual-channel grating.
Technical background
Electromagnetic components such as high frequency permanent magnetism force motor have the frequency response height, displacement is little, power output is less and characteristics such as contour structures complicacy; Therefore it is carried out the measurement of static and dynamic performance, need to adopt to have high resolving power, high frequency sound, high sensitivity, good linearity and real-time, and be applicable to the sensor of non-contact measurement.High precision commonly used, the displacement transducer of non-contact measurement have two kinds of current vortex sensor and laser displacement sensors.
Current vortex sensor is based on eddy current effect work; The displacement measurement that can be used for metallic conductor (ferromagnetic material or nonferromagnetic material all can); Have non-contact measurement, highly sensitive, antijamming capability by force, does not receive the influence of non-magnetic conductive media like oil, greasy dirt, dust, water and steam; Reliability is high, can work in advantages such as corrosion environment.But the contour structures of elements such as permanent magnetism force motor is complicated, and its fixed part and moving component are metal, so current vortex sensor and be not suitable for the measurement of elements such as high frequency permanent magnetism force motor.
Laser displacement sensor is the transmission medium of displacement signal with laser and light path thereof, the good directionality of laser, light power stabilising, so measuring accuracy is high, and the linearity is good, good stability, and volume is little, and is applicable to non-contact measurement.The product of the laser displacement sensor of prior art such as Micro-Epsilon company and Keyence company is a photoelectric apparatus with charge-coupled device (CCD), cmos device or position sensitive detector (PSD) all; It is high to have higher Measurement Resolution and frequency; But the driving circuit complicacy of photoelectric apparatus such as high-res CCD, CMOS and cost are high, cause that the laser sensor general structure is complicated, cost is high; Simultaneously, laser displacement sensor is an after-treatment system with high speed microprocessor (MCU) or digital signal processor (DSP) and software thereof, and inevitably system's time delay has limited the real-time of sensor kinetic measurement, therefore is difficult to use in real-time measurement.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists; And provide a kind of simple in structure; The linearity is good, and is highly sensitive, and survey frequency is high; High and the good small Linear displacement transducer based on dual-channel grating of real-time of resolution, it can be applicable to the online or offline inspection of quiet dynamic perfromance of the small linear displacement of elements such as high frequency permanent magnetism force motor.
The objective of the invention is to accomplish through following technical scheme; A kind of small Linear displacement transducer based on dual-channel grating: it mainly comprises: one can take place linear laser and by an emission condenser lens assemble, by the linear laser device of testee reflection; One receives the collectiong focusing lens of said linear laser and convergence; After said collectiong focusing lens; Be provided with a passage grating and two zones of two passage gratings of supplying linear laser to shine and see through dual-channel grating respectively; Corresponding to a said passage grating and two zones of two passage gratings, be respectively arranged with the passage photodetector and the two passage photodetectors that receive linear laser, the output port of a said passage photodetector and two passage photodetectors links to each other with the input port of real time signal processing circuit respectively.
Described dual-channel grating:, be parallel to each other between light and dark striped and the width unanimity, and be divided into a passage grating and two zones of two passage gratings for it is provided with clear glass thin slice high-resolution, light and dark striped.
Said light and dark striped adopts etching method to process, and the width of single striped is less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; And when the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and to make the phase differential between the output signal of its corresponding respectively passage photodetector and two passage photodetectors be 90 °.
Described real time signal processing circuit: comprise signal conditioning circuit, counter, timing generator circuit and digital to analog converter; Signal conditioning circuit is made up of amplifying circuit and trigger circuit; Counter is made up of CPLD; Timing generator circuit is shaken by CPLD and high frequency clock and is formed; The output port of one passage photodetector and two passage photodetectors links to each other with the input port of signal conditioning circuit respectively; The output port of signal conditioning circuit links to each other with the input port of counter; The output port of counter links to each other with the data bus port of digital to analog converter, and the output port of timing generator circuit links to each other with the control port of digital-to-analog conversion device.
It is the 650nm semiconductor laser that described linear laser device adopts wavelength, and the linear laser length that this semiconductor laser takes place is 10-20mm, and width is 0.01-0.05mm.
Described semiconductor laser configurations has one can carry out real-time regulated to the light intensity that linear laser took place for it, guarantee that thereby stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
The present invention has following beneficial technical effects:
1, adopt dual-channel grating, improved the measurement resolution, have the measuring accuracy height, resolution is high, and the characteristics that the linearity is good are applicable to the measurement of small linear displacement;
2, adopt the real time signal processing circuit, shortened the processing time, have the survey frequency height, the characteristics that real-time is good;
3, the output with this sensor is connected to oscillograph, and quiet dynamic perfromance that can the small linear displacement of real-time online measuring comprises step response, sinusoidal response etc.;
4, simple in structure, cost is low, realizes easily.
Therefore the present invention can be applicable to the online or offline inspection of quiet dynamic perfromance of the small linear displacement of elements such as high frequency permanent magnetism force motor.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present invention;
Fig. 2 is the structural representation of dual-channel grating of the present invention;
Fig. 3 is the structured flowchart of real time signal processing circuit of the present invention;
Fig. 4 is the synoptic diagram of application implementation example of the present invention;
Fig. 5 is that high frequency permanent magnetism force motor step response is measured curve.
Label among the figure has: testee 1, emission condenser lens 2, linear laser device 3, collectiong focusing lens 4, dual-channel grating 5; One passage photodetector, 6, two passage photodetectors 7, real-time treatment circuit 8, signal conditioning circuit 9; Counter 10, timing generator circuit 11, digital-to-analogue are changed converter 12, signal generator 13; Power amplifier 14, sensor 15, oscillograph 16, step response curve 17.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further.
Fig. 1,2, shown in 3; The present invention mainly comprises: one can take place linear laser and by an emission condenser lens 2 assemble, by the linear laser device 3 of a testee 1 reflection; One receives the collectiong focusing lens 4 of said linear laser and convergence; After said collectiong focusing lens 4, be provided with a passage grating and two zones of two passage gratings of supplying linear laser to shine respectively and seeing through dual-channel grating 5; Corresponding to a said passage grating and two zones of two passage gratings; Be respectively arranged with the passage photodetector 6 and the two passage photodetectors 7 that receive linear laser, the output port of a said passage photodetector 6 and two passage photodetectors 7 links to each other with the input port of real time signal processing circuit 8 respectively.
The linear laser that linear laser device 3 takes place is successively after 2 convergences of emission condenser lens, testee 1 reflection, collectiong focusing lens 4 are assembled; Shine and see through a passage grating and two zones of two passage gratings of dual-channel grating 5; Receive respectively through a passage photodetector 6 and two passage photodetectors 7, the output port of a passage photodetector 6 and two passage photodetectors 7 links to each other with the input port of real time signal processing circuit 8 respectively again.
Described dual-channel grating 5: for it is provided with the clear glass thin slice of high-resolution light and dark striped; Be parallel to each other between the light and shade striped and the width unanimity; And be divided into a passage grating and two zones of two passage gratings, correspond respectively to a passage photodetector and two passage photodetectors; The processing of light and shade striped can be adopted etching method, and by present technology, the width of single striped can be less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; When the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and making the phase differential between the output signal of its corresponding respectively passage photodetector 6 and two passage photodetectors 7 is 90 °.
Described real time signal processing circuit 8: comprise signal conditioning circuit 9, counter 10, timing generator circuit 11 and digital to analog converter (D/A) 12; Signal conditioning circuit 9 is made up of amplifying circuit (not shown) and trigger circuit (not shown); Counter 10 is made up of CPLD (CPLD); Timing generator circuit 11 is shaken by CPLD (CPLD) and high frequency clock and is formed.The output port of one passage photodetector 6 and two passage photodetectors 7 links to each other with the input port of signal conditioning circuit 9 respectively; The output port of signal conditioning circuit 9 links to each other with the input port of counter 10; The output port of counter 10 links to each other with the data bus port of digital to analog converter (D/A) 12; The output port of timing generator circuit 11 links to each other with the control port of digital-to-analog conversion device (D/A) 12.The alternating signal of 9 pairs one passage photodetectors 6 of signal conditioning circuit and 7 outputs of two passage photodetectors amplifies and shaping, and phase difference output is 90 ° two-way square-wave signal a to counter 10; Counter 10 is judged the direction of motion of testee 1 according to the phase differential of two-way square-wave signal, and according to judged result square-wave signal is added, subtracts counting, exports count results to digital to analog converter (D/A) 12 then; Timing generator circuit 11 produces the control timing of digital to analog converter (D/A) 12, drives digital to analog converter (D/A) 12 and changes output, and its output voltage values is directly proportional with the displacement of testee 1.
Described linear laser device 3: adopting wavelength is the 650nm semiconductor laser; Generation length is 10-20mm, and width is the linear laser of 0.01-0.05mm, and adopts the stabilized intensity circuit that its light intensity is carried out real-time regulated; Guarantee stabilized intensity, thereby guarantee measuring accuracy.
A described passage photodetector 6, two passage photodetectors 7 and digital to analog converter (D/A) 12 all adopt short time delay, fireballing device, to guarantee the real-time of sensor.
Embodiment:
The intersection point of the optical axis of present embodiment line taking shape laser 3 and the optical axis of collectiong focusing lens 4 is 20mm to the distance L 1 of the front principal plane of collectiong focusing lens 4; The back interarea of collectiong focusing lens 4 is 200mm to the distance L 2 of imaging surface central point; Angle between the optical axis of angle between the surface normal of the optical axis of collectiong focusing lens 4 and testee 1 and dual-channel grating 5 and collectiong focusing lens 4 is 45 °; The width of the single striped of dual-channel grating 5 is 10 μ m; Effectively fringe number is 100 (50 bright fringes and 50 dark fringes); Calculating the range that can get the embodiment of the invention according to principle of work is 0.1mm, and Measurement Resolution is 0.001mm, and frequency of operation reaches 10kHz.
Shown in Figure 4, adopt the dynamic property of 15 pairs of high frequency permanent magnetism of embodiment of the invention sensor force motor to test.High frequency permanent magnetism force motor as testee 1, is installed on the tested position; The output port of signal generator 13 links to each other with the input port of power amplifier 14, and the output port of power amplifier 14 links to each other with the input port of testee 1, and output port of the present invention links to each other with oscillograph 16.The linear laser that linear laser device 3 takes place is divergent shape; After emission condenser lens 2 focuses on; Be incident on the surface of testee 1; Its reflected light is focused into the consistent linear laser of single light and shade width of fringe of live width and dual-channel grating 5 behind collectiong focusing lens 4, be radiated on the dual-channel grating 5; The signal of signal generator 13 outputs is done linear movement through the armature that power amplifier 14 amplifies rear drive testee 1; When armature motion x; Drive the linear laser deflection after reflecting; The one passage grating of the dual-channel grating 5 that shines and see through and the position of two passage gratings change thereupon, record the output of sensor 15 of the present invention with oscillograph 16; Amplitude is the step signal power input amplifier 14 of 15V; Amplify the armature movement of rear drive testee 1 through power amplifier 14; Record the step response curve 17 of tested high frequency permanent magnetism force motor 1, shown in Figure 5, the displacement of tested permanent magnetism force motor 1 is 0.06mm; The rise time of step response is about 0.35ms, and response frequency reaches 4.2kHz.
Equivalent transformation of the present invention all should be thought and falls into protection scope of the present invention.
Claims (6)
1. small Linear displacement transducer based on dual-channel grating; It is characterized in that it mainly comprises: one can take place linear laser and by an emission condenser lens (2) assemble, by the linear laser device (3) of a testee (1) reflection; One receives the collectiong focusing lens (4) of said linear laser and convergence; At said collectiong focusing lens (4) afterwards; Be provided with a passage grating and two zones of two passage gratings of supplying linear laser to shine and see through dual-channel grating (5) respectively; Corresponding to a said passage grating and two zones of two passage gratings, be respectively arranged with the passage photodetector (6) and the two passage photodetectors (7) that receive linear laser, the output port of a said passage photodetector (6) and two passage photodetectors (7) links to each other with the input port of real time signal processing circuit (8) respectively.
2. the small Linear displacement transducer based on dual-channel grating according to claim 1; It is characterized in that described dual-channel grating (5): for it is provided with clear glass thin slice high-resolution, light and dark striped; Be parallel to each other between light and dark striped and the width unanimity, and be divided into a passage grating and two zones of two passage gratings.
3. the small Linear displacement transducer based on dual-channel grating according to claim 2 is characterized in that said light and dark striped adopts etching method to process, and the width of single striped is less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; And when the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and to make the phase differential between output signals of its respectively corresponding passage photodetector (6) and two passage photodetectors (7) be 90 °.
4. the small Linear displacement transducer based on dual-channel grating according to claim 1 is characterized in that described real time signal processing circuit (8): comprise signal conditioning circuit (9), counter (10), timing generator circuit (11) and digital to analog converter (12); Signal conditioning circuit (9) is made up of amplifying circuit and trigger circuit; Counter (10) is made up of CPLD; Timing generator circuit (11) is shaken by CPLD and high frequency clock and is formed; The output port of one passage photodetector (6) and two passage photodetectors (7) links to each other with the input port of signal conditioning circuit (9) respectively; The output port of signal conditioning circuit (9) links to each other with the input port of counter (10); The output port of counter (10) links to each other with the data bus port of digital to analog converter (12), and the output port of timing generator circuit (11) links to each other with the control port of digital-to-analog conversion device (12).
5. the small Linear displacement transducer based on dual-channel grating according to claim 1; It is characterized in that it is the 650nm semiconductor laser that described linear laser device (3) adopts wavelength; The linear laser length that this semiconductor laser takes place is 10-20mm, and width is 0.01-0.05mm.
6. the small Linear displacement transducer based on dual-channel grating according to claim 5, thus it is characterized in that described semiconductor laser configurations has one can carry out real-time regulated to the light intensity that linear laser took place for it, guarantees that stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
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| CN201210061070.9A CN102589447B (en) | 2012-03-09 | 2012-03-09 | Micro linear displacement sensor based on two-channel grating |
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| CN201210061070.9A CN102589447B (en) | 2012-03-09 | 2012-03-09 | Micro linear displacement sensor based on two-channel grating |
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| CN102589447B CN102589447B (en) | 2014-01-29 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN108151673A (en) * | 2017-12-29 | 2018-06-12 | 长春禹衡光学有限公司 | A kind of photoelectronic imaging scanning means |
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN109029272A (en) * | 2018-10-24 | 2018-12-18 | 中北大学 | A kind of dual-channel grating displacement measurement method |
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| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
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2012
- 2012-03-09 CN CN201210061070.9A patent/CN102589447B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN108151673A (en) * | 2017-12-29 | 2018-06-12 | 长春禹衡光学有限公司 | A kind of photoelectronic imaging scanning means |
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN109029272A (en) * | 2018-10-24 | 2018-12-18 | 中北大学 | A kind of dual-channel grating displacement measurement method |
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