CN102589447B - Micro linear displacement sensor based on two-channel grating - Google Patents
Micro linear displacement sensor based on two-channel grating Download PDFInfo
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- CN102589447B CN102589447B CN201210061070.9A CN201210061070A CN102589447B CN 102589447 B CN102589447 B CN 102589447B CN 201210061070 A CN201210061070 A CN 201210061070A CN 102589447 B CN102589447 B CN 102589447B
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Abstract
The invention provides a micro linear displacement sensor based on a two-channel grating, mainly comprising a linear laser device and a receiving and focusing lens, wherein the linear laser device can generate linear laser which is focused by an emitting and focusing lens and is reflected by an object to be detected; the receiving and focusing lens receives the linear laser and focuses the laser; two regions of a first-channel grating and a second-channel grating of the two-channel grating are irradiated and transmitted by the linear laser; a first-channel photoelectric detector and a second-channel photoelectric detector for receiving the linear laser are respectively arranged corresponding to the two regions of the first-channel grating and the second-channel grating; and the output ports of the first-channel photoelectric detector and the second-channel photoelectric detector are respectively connected with the input port of a real-time signal processing circuit. The micro linear displacement sensor provided by the invention has the characteristics of simple structure, good linearity, high sensitivity, high measurement frequency, high resolution, good instantaneity and the like. The micro linear displacement sensor can be applied to online or offline detection of static features of micro-linear displacement of elements, such as a high-frequency permanent magnetic force motor and the like.
Description
Technical field
The present invention relates to a kind of micro linear displacement sensor based on dual-channel grating, belong to photoelectric sensor technical field.
Technical background
The electromagnetic components such as high frequency permanent magnetic motor have that frequency response is high, displacement is little, power output is less and the feature such as contour structures is complicated; Therefore it is carried out to the measurement of static and dynamic performance, need to adopt to there is high resolving power, high frequency sound, high sensitivity, good linearity and real-time, and be applicable to the sensor of non-contact measurement.Conventional high precision, the displacement transducer of non-contact measurement have two kinds of current vortex sensor and laser displacement sensors.
Current vortex sensor is based on eddy current effect work, the displacement measurement that can be used for metallic conductor (ferromagnetic material or nonferromagnetic material all can), there is non-contact measurement, highly sensitive, antijamming capability by force, is not subject to non-magnetic medium as the impact of oil, greasy dirt, dust, water and steam, reliability is high, can work in the advantages such as corrosion environment.But the contour structures of the elements such as permanent magnetic motor is complicated, and its fixed part and moving component are metal, so current vortex sensor be not suitable for the measurement of the elements such as high frequency permanent magnetic motor.
Laser displacement sensor be take the transmission medium that laser and light path thereof are displacement signal, the good directionality of laser, light power stabilising, so measuring accuracy is high, and the linearity is good, good stability, and volume is little, and is applicable to non-contact measurement.It is photoelectric apparatus that the laser displacement sensor of prior art all be take charge-coupled image sensor (CCD), cmos device or position sensitive detector (PSD) as the product of Micro-Epsilon company and Keyence company, there is higher Measurement Resolution and frequency high, but driving circuit complexity and the cost of the photoelectric apparatus such as high-res CCD, CMOS are high, cause that laser sensor general structure is complicated, cost is high; Meanwhile, it is after-treatment system that laser displacement sensor be take high speed microprocessor (MCU) or digital signal processor (DSP) and software thereof, and inevitably Time Delay of Systems has limited the real-time of sensor kinetic measurement, is therefore difficult to use in real-time measurement.
Summary of the invention
The object of the invention is to overcome the deficiency that prior art exists, and provide a kind of simple in structure, the linearity is good, highly sensitive, survey frequency is high, high and the good micro linear displacement sensor based on dual-channel grating of real-time of resolution, it can be applicable to the elements such as high frequency permanent magnetic motor small linear displacement quiet dynamic perfromance online or offline inspection.
The object of the invention is to complete by following technical solution, a kind of micro linear displacement sensor based on dual-channel grating: it mainly comprises: one linear laser can occur and assembled by transmitting focusing lens, linear laser device by a testee reflection, the one collectiong focusing lens that receive described linear laser and assemble, after described collectiong focusing lens, be provided with a passage grating and two regions of two passage gratings of for linear laser, irradiating respectively and see through dual-channel grating, corresponding to a described passage grating and two regions of two passage gratings, be respectively arranged with the passage photodetector and the two passage photodetectors that receive linear laser, the output port of a described passage photodetector and two passage photodetectors is connected with the input port of real time signal processing circuit respectively.
Described dual-channel grating: the clear glass thin slice of, light and dark striped high-resolution for being provided with on it, between light and dark striped, be parallel to each other and width consistent, and be divided into a passage grating and two regions of two passage gratings.
Described light and dark striped adopts etching method to process, and the width of single striped is less than 5 μ m; Between the light and shade striped of one passage grating and two passage gratings, be geographically provided with side-play amount, and when the spacing of adjacent bright fringe or adjacent dark fringe is Δ, its side-play amount is set to Δ/4, and make its respectively the phase differential between the output signal of a corresponding passage photodetector and two passage photodetectors be 90 °.
Described real time signal processing circuit: comprise signal conditioning circuit, counter, timing generator circuit and digital to analog converter; Signal conditioning circuit is comprised of amplifying circuit and trigger circuit; Counter is comprised of CPLD; Timing generator circuit is shaken and is formed by CPLD and high frequency clock; The output port of one passage photodetector and two passage photodetectors is connected with the input port of signal conditioning circuit respectively, the output port of signal conditioning circuit is connected with the input port of counter, the output port of counter is connected with the data bus port of digital to analog converter, and the output port of timing generator circuit is connected with the control port of digital-to-analog conversion device.
It is 650nm semiconductor laser that described linear laser device adopts wavelength, and the linear laser length that this semiconductor laser occurs is 10-20mm, and width is 0.01-0.05mm.
Described semiconductor laser configurations has a light intensity that can linear laser occur to it to regulate in real time, guarantee that thereby stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
The present invention has following useful technique effect:
1, adopt dual-channel grating, improved measurement resolution, have measuring accuracy high, resolution is high, and the feature that the linearity is good is applicable to the measurement of small linear displacement;
2, adopt real time signal processing circuit, shortened the processing time, there is survey frequency high, the feature that real-time is good;
3, the output of this sensor is connected to oscillograph, quiet dynamic perfromance that can the small linear displacement of real-time online measuring, comprises step response, sinusoidal response etc.;
4, simple in structure, cost is low, easily realizes.
Therefore the present invention can be applicable to the online or offline inspection of quiet dynamic perfromance of the small linear displacement of the elements such as high frequency permanent magnetic motor.
Accompanying drawing explanation
Fig. 1 is structural principle schematic diagram of the present invention;
Fig. 2 is the structural representation of dual-channel grating of the present invention;
Fig. 3 is the structured flowchart of real time signal processing circuit of the present invention;
Fig. 4 is the schematic diagram of Application Example of the present invention;
Fig. 5 is that high frequency permanent magnetic motor step response is measured curve.
Label in figure has: testee 1, transmitting focusing lens 2, linear laser device 3; collectiong focusing lens 4, dual-channel grating 5, one passage photodetectors 6; two passage photodetectors 7, real-time treatment circuit 8, signal conditioning circuit 9; counter 10, timing generator circuit 11, digital-to-analogue is changed converter 12; signal generator 13, power amplifier 14, sensor 15; oscillograph 16, step response curve 17.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1, 2, shown in 3, the present invention mainly comprises: one linear laser can occur and assembled by transmitting focusing lens 2, linear laser device 3 by testee 1 reflection, the one collectiong focusing lens 4 that receive described linear laser and assemble, after described collectiong focusing lens 4, be provided with a passage grating and two regions of two passage gratings of for linear laser, irradiating respectively and see through dual-channel grating 5, corresponding to a described passage grating and two regions of two passage gratings, be respectively arranged with the passage photodetector 6 and the two passage photodetectors 7 that receive linear laser, the output port of a described passage photodetector 6 and two passage photodetectors 7 is connected with the input port of real time signal processing circuit 8 respectively.
The linear laser that linear laser device 3 occurs is successively after 2 convergences of transmitting focusing lens, testee 1 reflection, collectiong focusing lens 4 are assembled, irradiate and see through a passage grating and two regions of two passage gratings of dual-channel grating 5, through a passage photodetector 6 and two passage photodetectors 7, receive respectively, the output port of a passage photodetector 6 and two passage photodetectors 7 is connected with the input port of real time signal processing circuit 8 respectively again.
Described dual-channel grating 5: for being provided with the clear glass thin slice of high-resolution light and dark striped on it, between light and shade striped, be parallel to each other and width consistent, and be divided into a passage grating and two regions of two passage gratings, correspond respectively to a passage photodetector and two passage photodetectors; The processing of light and shade striped can adopt etching method, and by current technique, the width of single striped can be less than 5 μ m; Between the light and shade striped of one passage grating and two passage gratings, be geographically provided with side-play amount, when the spacing of adjacent bright fringe or adjacent dark fringe is Δ, its side-play amount is set to Δ/4, make its respectively the phase differential between the output signal of a corresponding passage photodetector 6 and two passage photodetectors 7 be 90 °.
Described real time signal processing circuit 8: comprise signal conditioning circuit 9, counter 10, timing generator circuit 11 and digital to analog converter (D/A) 12; Signal conditioning circuit 9 is comprised of amplifying circuit (not shown) and trigger circuit (not shown); Counter 10 is comprised of CPLD (CPLD); Timing generator circuit 11 is shaken and is formed by CPLD (CPLD) and high frequency clock.The output port of one passage photodetector 6 and two passage photodetectors 7 is connected with the input port of signal conditioning circuit 9 respectively; The output port of signal conditioning circuit 9 is connected with the input port of counter 10; The output port of counter 10 is connected with the data bus port of digital to analog converter (D/A) 12; The output port of timing generator circuit 11 is connected with the control port of digital-to-analog conversion device (D/A) 12.The alternating signal of 9 pairs of passage photodetectors 6 of signal conditioning circuit and the output of two passage photodetectors 7 amplifies and shaping, and phase difference output is that the two-way square-wave signal of 90 ° is to counter 10; Counter 10 judges the direction of motion of testee 1 according to the phase differential of two-way square-wave signal, and according to judged result, square-wave signal is added, subtracts counting, then count results is exported to digital to analog converter (D/A) 12; Timing generator circuit 11 produces the control sequential of digital to analog converter (D/A) 12, drives digital to analog converter (D/A) 12 to change output, and its output voltage values is directly proportional to the displacement of testee 1.
Described linear laser device 3: adopting wavelength is 650nm semiconductor laser, generation length is 10-20mm, the linear laser that width is 0.01-0.05mm, and adopt stabilized intensity circuit to regulate in real time its light intensity, guarantee stabilized intensity, thereby guarantee measuring accuracy.
Described a passage photodetector 6, two passage photodetectors 7 and digital to analog converter (D/A) 12 all adopt little, the fireballing device of time delay, to guarantee the real-time of sensor.
Embodiment:
The intersection point that the present embodiment is got the optical axis of linear laser 3 and the optical axis of collectiong focusing lens 4 is 20mm to the distance L 1 of the front principal plane of collectiong focusing lens 4, the rear interarea of collectiong focusing lens 4 is 200mm to the distance L 2 of imaging surface central point, angle between angle between the surface normal of the optical axis of collectiong focusing lens 4 and testee 1 and dual-channel grating 5 and the optical axis of collectiong focusing lens 4 is 45 °, the width of the single striped of dual-channel grating 5 is 10 μ m, effectively fringe number is 100 (50 bright fringes and 50 dark fringes), the range that can be calculated the embodiment of the present invention according to principle of work is 0.1mm, Measurement Resolution is 0.001mm, frequency of operation reaches 10kHz.
Shown in Fig. 4, adopt the dynamic property of 15 pairs of high frequency permanent magnetic motors of the invention process ratio sensor to test.Using high frequency permanent magnetic motor as testee 1, be arranged on measured position; The output port of signal generator 13 is connected with the input port of power amplifier 14, and the output port of power amplifier 14 is connected with the input port of testee 1, and output port of the present invention is connected with oscillograph 16.The linear laser that linear laser device 3 occurs is divergent shape, after transmitting focusing lens 2 focus on, be incident on the surface of testee 1, its reflected light is focused into the linear laser that live width is consistent with the single light and shade width of fringe of dual-channel grating 5 after collectiong focusing lens 4, is radiated on dual-channel grating 5; The armature that the signal of signal generator 13 outputs amplifies rear drive testee 1 through power amplifier 14 is done linear movement, when armature motion x, drive the linear laser deflection after reflection, one passage grating of the dual-channel grating 5 that irradiates and see through and the position of two passage gratings change thereupon, record the output of sensor 15 of the present invention with oscillograph 16; Amplitude is the step signal input power amplifier 14 of 15V, through power amplifier 14, amplify the armature movement of rear drive testee 1, record the step response curve 17 of tested high frequency permanent magnetic motor 1, shown in Fig. 5, the displacement of tested permanent magnetic motor 1 is 0.06mm, the rise time of step response is about 0.35ms, and response frequency reaches 4.2kHz.
Equivalent transformation of the present invention all should be thought and falls into protection scope of the present invention.
Claims (4)
1. the micro linear displacement sensor based on dual-channel grating, it is characterized in that it mainly comprises: one linear laser can occur and assembled by transmitting focusing lens (2), linear laser device (3) by a testee (1) reflection, the one collectiong focusing lens (4) that receive described linear laser and assemble, at described collectiong focusing lens (4) afterwards, be provided with a passage grating and two regions of two passage gratings of for linear laser, irradiating respectively and see through dual-channel grating (5), corresponding to a described passage grating and two regions of two passage gratings, be respectively arranged with the passage photodetector (6) and the two passage photodetectors (7) that receive linear laser, the output port of a described passage photodetector (6) and two passage photodetectors (7) is connected with the input port of real time signal processing circuit (8) respectively,
Described collectiong focusing lens (4) are arranged on dual-channel grating (5) before, be incident on the lip-deep reflected light of testee (1) and after accepting condenser lens (4), be focused into the linear laser that live width is consistent with the single light and shade width of fringe of dual-channel grating (5), be radiated on dual-channel grating (5);
Described dual-channel grating (5) is for being provided with clear glass thin slice high-resolution, light and dark striped on it, between light and dark striped, be parallel to each other and width consistent, and be divided into a passage grating and two regions of two passage gratings;
Described light and dark striped adopts etching method to process, and the width of single striped is less than 5 μ
m; Between the light and shade striped of one passage grating and two passage gratings, be geographically provided with side-play amount, and when the spacing of adjacent bright fringe or adjacent dark fringe is Δ, its side-play amount is set to Δ/4, and make its respectively the phase differential between output signals of a corresponding passage photodetector (6) and two passage photodetectors (7) be 90 °.
2. according to the micro linear displacement sensor based on dual-channel grating described in claim 1, it is characterized in that described real time signal processing circuit (8): comprise signal conditioning circuit (9), counter (10), timing generator circuit (11) and digital to analog converter (12); Signal conditioning circuit (9) is comprised of amplifying circuit and trigger circuit; Counter (10) is comprised of CPLD; Timing generator circuit (11) is shaken and is formed by CPLD and high frequency clock; The output port of one passage photodetector (6) and two passage photodetectors (7) is connected with the input port of signal conditioning circuit (9) respectively, the output port of signal conditioning circuit (9) is connected with the input port of counter (10), the output port of counter (10) is connected with the data bus port of digital to analog converter (12), and the output port of timing generator circuit (11) is connected with the control port of digital-to-analog conversion device (12).
3. according to the micro linear displacement sensor based on dual-channel grating described in claim 1, it is characterized in that it is 650nm semiconductor laser that described linear laser device (3) adopts wavelength, the linear laser length that this semiconductor laser occurs is 10-20mm, and width is 0.01-0.05mm.
4. according to the micro linear displacement sensor based on dual-channel grating described in claim 3, thereby it is characterized in that described semiconductor laser configurations has a light intensity that can linear laser occur to it to regulate in real time, guarantee that stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
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| CN103438805A (en) * | 2013-08-19 | 2013-12-11 | 长春理工大学 | Refraction-amplifying optical displacement sensor |
| CN108151673B (en) * | 2017-12-29 | 2022-06-17 | 长春禹衡光学有限公司 | Photoelectric imaging scanning device |
| CN108489417B (en) * | 2018-02-11 | 2020-02-18 | 杭州电子科技大学 | Laser measuring head device with variable measuring range and curved surface measuring method thereof |
| CN108286940B (en) * | 2018-03-23 | 2020-04-07 | 杭州电子科技大学 | Multi-range integrated laser measuring head device and using method thereof |
| CN109029272B (en) * | 2018-10-24 | 2020-04-28 | 中北大学 | Double-channel grating displacement measurement method |
Citations (4)
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|---|---|---|---|---|
| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
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2012
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
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