CN105783740B - A kind of measurement method of alternately increment type measurement micro-displacement sensor - Google Patents
A kind of measurement method of alternately increment type measurement micro-displacement sensor Download PDFInfo
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- CN105783740B CN105783740B CN201610335272.6A CN201610335272A CN105783740B CN 105783740 B CN105783740 B CN 105783740B CN 201610335272 A CN201610335272 A CN 201610335272A CN 105783740 B CN105783740 B CN 105783740B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of measurement method of alternately increment type measurement micro-displacement sensor, which includes between laser beam, two pieces of reflecting mirrors, photodetector one, photodetector two, guide rail one, guide rail two and and control processing system.With the sensor, it is constantly reflected among one group of two pieces of reflecting mirror disposed in parallel by laser beam, finally it is irradiated on two groups of photodetectors, change the spacing of two pieces of reflecting mirrors, the reflection path of laser beam can be changed, laser beam is incuded moving photodetector where every group of photodetector on guide rail, control processing system handles to obtain a detection shift value according to the photosensitive mileage and photosensitive direction of photodetector, control processing system can be added or be subtracted the true change value that photodetector moving distance value in orbit obtains two pieces of reflection mirror spacing after calculating by this detection shift value, the sensor structure is simple, measurement is reliable, precision is higher, it is easily achieved batch micro operations.
Description
Technical field
The present invention relates to Technology of Precision Measurement and instrument field, in particular to a kind of alternately increment type measures micro-displacement sensing
Device and measurement method.
Background technique
Displacement sensor is a kind of common geometry quantity sensor, in aerospace, industrial production, machine-building and army
Thing science etc. has extensive use in many fields.There are many kinds of the measurement methods of displacement, logical compared with thin tail sheep (such as less than 1cm)
Strain-type, inductance type, differential transformer type, eddy current type, Hall sensor are commonly used to detect, biggish displacement (such as larger than 1cm)
The sensing technologies such as inductosyn, grating, capacitive grating, magnetic grid are commonly used to measure.Wherein grating sensor easily realizes number because having
Change, precision high (resolution ratio is highest at present can reach nanoscale), strong antijamming capability, there is no artificial error in reading, installation side
Just, using it is reliable the advantages that, obtain increasingly extensive application in machine tooling, the detection industries such as instrument.
Grating sensor refers to the sensor using the measurement displacement of grating Moire fringe principle.Grating is in one piece of strip
Optical glass ruler or metal scale on intensive equidistant parallel groove, incisure density is 10~100 lines per millimeters.By grating shape
At Moire fringe there is optical amplifier effect and error average effect, thus measurement accuracy can be improved.
Grating sensor causes its measurement accuracy to be difficult have promotion again since the physical structure of photoetching process limits, can not
The demand for meeting higher and higher measurement accuracy, there is an urgent need to develop a kind of structure is simple, the higher sensor of precision.
Summary of the invention
It is an object of the invention to: for existing grating sensor of the existing technology due to the physics knot of photoetching process
Structure limitation, causes its measurement accuracy to be difficult have promotion again, is unable to satisfy the above-mentioned deficiency of demand of higher and higher measurement accuracy, mentions
For a kind of alternately increment type measurement micro-displacement sensor and measurement method, the sensor structure is simple, is suitable for measured object position
The measurement of variation is moved, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
To achieve the goals above, the technical solution adopted by the present invention are as follows:
A kind of alternately increment type measurement micro-displacement sensor, including laser beam, two pieces of reflecting mirrors, photodetector one, light
Electric explorer two, guide rail one, guide rail two and control processing system, the photodetector one are set on the guide rail one and can be
It moves thereon, the photodetector two is set on the guide rail two and can move on it, and two pieces of mirror parallels are set
It sets and can relatively move, one end of two pieces of reflecting mirrors is arranged in the photodetector one and photodetector two,
The laser beam is arranged in the opposite other end, and the laser beam is incident on one of reflecting mirror, described in two pieces
After reflecting mirror alternating reflex, it is emitted to the photodetector one or photodetector two and is incuded, the control processing system
System communicates to connect the photodetector one and photodetector two, and for counting the photodetector one or photodetection
The photosensitive mileage of device two and photosensitive direction.
It is flat at one group by the laser beam using a kind of alternately increment type measurement micro-displacement sensor of the present invention
It constantly reflects, is finally irradiated on two groups of photodetectors among two pieces of reflecting mirrors of row setting, changed between two pieces of reflecting mirrors
Away from the reflection path of the laser beam can be changed, in the mobile photodetector on guide rail where every group of photodetector
Incude the laser beam, the control processing system handles to obtain according to the photosensitive mileage and photosensitive direction of the photodetector
One detection shift value, the control processing system can add or subtract the photoelectricity by this detection shift value and visit
Survey the true change value that the moving distance value of device on the track obtains two pieces of reflection mirror spacing after calculating, the sensor
Structure is simple, and when measurement, after one of reflecting mirror is fixedly connected with testee, the testee is subjected to displacement
When variation, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, be become by the spacing of two pieces of reflecting mirrors of measurement
Change value can be back-calculated to obtain the shift value of the testee, and it is suitable for the measurement of the testee change in displacement, measurements
Reliably, precision is higher, it is easy to accomplish batch micro operations.
Preferably, the photodetector one is equipped with exploring block one, exploring block two and the exploring block of constant spacing
Three, the exploring block three is set to any position between the exploring block one and the straight line line of exploring block two, described
Photodetector two is equipped with exploring block four, exploring block five and the exploring block six of constant spacing, and the exploring block six is set
Any position between the exploring block four and the straight line line of exploring block five, the exploring block one, exploring block
Two, exploring block three, exploring block four, exploring block five and exploring block six incude the laser beam, the control processing system
System is for counting the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and probe portion
Part six incude the laser beam number and photosensitive sequence.
Since the exploring block one, exploring block two and exploring block three have a fixed spacing, the exploring block four,
Exploring block five and exploring block six have fixed spacing, by the exploring block one, exploring block two, exploring block three,
Exploring block four, exploring block five and exploring block six incude the number of the laser beam, and according to the photosensitive sequence of exploring block
The direction of motion for judging another piece relatively reflecting mirror of one of reflecting mirror carries out at plus-minus institute's metering number according to the direction of motion
Reason.
A kind of spy as increment type displacement sensor, on the photodetector one (or photodetector two)
Survey component one (either exploring block two or exploring block three or exploring block four or exploring block five or exploring block
Six) sense the laser beam first, then the laser beam next time by the exploring block one (or exploring block two or
Person's exploring block three or exploring block four or exploring block five or exploring block six) corresponding sense be denoted as an increment
Number, the control processing system is according to the incremental number and exploring block one (either exploring block two or the exploring block
Three or exploring block four or exploring block five or exploring block six) induction number calculate and obtain two pieces of reflecting mirrors
The probe value principal part of relative displacement, while the control processing system is by the photodetector one (or photodetector two)
As host computer detector, the photodetector two (or photodetector one) is used as auxiliary calculating detector, the laser
Beam is finally detected component induction, the exploring block and exploring block one (either exploring block two or the exploring block three
Either exploring block four or exploring block five or exploring block six) distance as the auxiliary portion of probe value, the probe value master
Portion and the auxiliary portion of probe value constitute the probe value of two pieces of reflecting mirror relative displacements, and the control processing system is according to the detection
Value obtains the true relative shift of two pieces of reflecting mirrors after calculating.
Micro-displacement sensor is measured using this alternately increment type, by the laser beam at one group two pieces disposed in parallel
It is constantly reflected among reflecting mirror, is finally irradiated on two groups of photodetectors, changes the spacing of two pieces of reflecting mirrors, i.e., can change institute
The reflection path of laser beam is stated, three exploring blocks on every group of photodetector repeatedly incude the laser beam, the control
Processing system senses the spacing between the number of the laser beam and photosensitive sequence and exploring block according to every group of exploring block
Processing obtains a detection range value, this detection range value is far longer than the true change value of two pieces of reflection mirror spacing, described
Control processing system can obtain the true change value of two pieces of reflection mirror spacing by this detection range value after calculating, should
Sensor structure is simple, when measurement, after one of reflecting mirror is fixedly connected with testee, and the testee hair
When raw change in displacement, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, pass through two pieces of reflecting mirrors of measurement
Spacing changing value can be back-calculated to obtain the shift value of the testee, and it is suitable for the surveys of the testee change in displacement
Amount, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, the exploring block three is set to the midpoint of the straight line line of the exploring block one and exploring block two,
The exploring block six is set to the midpoint of the straight line line of the exploring block four and exploring block five.
Preferably, two pieces of reflecting mirrors are stationary mirror and mobile mirror respectively, and the mobile mirror is rigid by one
Property part connect testee, the mobile testee drives the mobile mirror, changes the reflex circuit of the laser beam
Diameter, the control processing system is according to the exploring block one, exploring block two, exploring block three, exploring block four, probe portion
Part five and exploring block six incude the laser beam number and photosensitive sequence and the exploring block one, exploring block two,
Exploring block three, exploring block four, exploring block five spacing related to exploring block six obtain a probe value, and calculating pair
Answer the displacement of the testee.
Drive the mobile mirror connected to it same when the testee is mobile using this structure setting
When generate movement, change the spacing of the mobile mirror and stationary mirror, the mobile mirror is subjected to displacement front and back
The laser beam reflection path that is irradiated on the stationary mirror will not change for the first time, the final testee
Shift value, that is, mobile mirror shift value is reflected on photodetector, and this changes the mobile mirror position
The frame mode of shifting can simplify the Processing Algorithm of the control processing system, while simplify sensor structure, be easy to make
It makes and uses.
It preferably, further include detection reflecting mirror, the detection reflecting mirror is set to the photodetector one and photodetection
The side of device two, the laser beam for reflecting the stationary mirror are reflected into the photodetector one, or
The laser beam that the mobile mirror is reflected is reflected on the photodetector two.
Using this structure setting, it can make the mobile mirror during being subjected to displacement, the photodetector
One only measures the laser beam of the stationary mirror reflection, and it is anti-that the photodetector two only measures the mobile mirror
The laser beam penetrated avoids the laser beam from occurring to measure interference caused by reflection is existed simultaneously with direct projection at edge.
Preferably, further include laser source for emitting the laser beam.
As it is further preferred that further including shell, the laser source, stationary mirror, mobile mirror, detection are reflected
Mirror, photodetector one and photodetector two are respectively positioned in the shell, form reading head, and the reading head is equipped with mounting hole
Or stickers.
Using this structure setting, the reading head be convenient for the testee or opposing stationary members fits,
Clamping is pasted, easy disassembly.
Preferably, a mobile mirror rigid connection at least connector, the connector are rigid member, the company
Fitting stretches out outside the reading head.
Preferably, the photodetector one further includes at least one exploring block seven, and the exploring block seven is set to institute
Any position between exploring block one and the straight line line of exploring block two is stated, the electric explorer two further includes at least one
Exploring block eight, the exploring block eight are set to any position between the exploring block four and the straight line line of exploring block five
It sets.
Using this structure setting, since it is desired that judging the direction of displacement of the testee, photodetector is at least needed
Three exploring blocks could distinguish the direction of displacement of the testee in measurement process, while the laser beam finally stops
In the exploring block one and this closed interval of exploring block two or the exploring block four and this closed zone of exploring block five
In, the exploring block one or exploring block two or exploring block three or exploring block four or exploring block five or exploring block
After six last times sense the laser beam, the small quantity inspection that the laser beam moves again does not measure needs and ignores, described
At least one complementary described exploring block seven is set between exploring block one and the straight line line of exploring block two, described
At least one complementary described exploring block eight, Neng Gouxi are set between exploring block four and the straight line line of exploring block five
Change the surveying range of the exploring block one and exploring block two and the measurement zone of the exploring block four and exploring block five
Between, the final negligible amount of the laser beam will be smaller, can be further improved the measurement accuracy of institute's displacement sensors.
Preferably, the exploring block one, exploring block two, exploring block three, exploring block four, exploring block five, spy
Surveying component six, exploring block seven and exploring block eight is a kind of photosensitive photoelectric device, can be measured with the presence or absence of light.
Preferably, the laser source, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photoelectricity
The position of detector two is adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
The present invention also provides a kind of measurement methods of alternately increment type measurement micro-displacement sensor, including such as any of the above
The displacement sensor, measurement method the following steps are included:
A, testee is connected to the mobile mirror by a rigid member；
B, emit one laser beam, the laser beam is incident at a certain angle on the stationary mirror, it is assumed that described
Incidence angle is θ, and the laser beam is by being irradiated to the photoelectricity after the continuous reflection of the stationary mirror and mobile mirror
On detector one or photodetector two, control processing system controls the photodetector one and moves on the guide rail one,
Make the laser beam by an induction in the exploring block one, exploring block two and exploring block three, or described in control
Photodetector two moves on the guide rail two, makes the laser beam by the exploring block four, exploring block five and detection
An induction in component six, this moving distance value are X；
C, the mobile testee drives the mobile mirror while movement, while the reflex circuit of the laser beam
Diameter variation, the laser beam is by the exploring block one, exploring block two and the exploring block three on the photodetector one
Induction is incuded by the exploring block four, exploring block five and the exploring block six on the photodetector two, described
When testee stops mobile, the control processing system statistics exploring block one, exploring block two, exploring block three,
Exploring block four, exploring block five and exploring block six sense the number and photosensitive sequence and each probe portion of the laser beam
Spacing between part obtains the detection shift value Y and direction of displacement of the testee；
D, the control processing system adds or subtracts according to the value of the detection displacement Y of its testee obtained
The value of moving distance X is gone to obtain the true change value of the testee displacement after calculating.
Wherein the photodetector one moving direction on the guide rail one is identical as the testee direction of displacement,
Or the photodetector two on the guide rail two moving direction and the testee direction of displacement on the contrary, described tested
The value of the detection displacement Y of object adds the value of moving distance X；The photodetector one on the guide rail one moving direction with
The testee direction of displacement is on the contrary, the moving direction and described tested on the guide rail two of the photodetector two
Ohject displacement direction is identical, and the value of the detection displacement Y of the testee subtracts the value of moving distance X.
Using a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the mobile reflection
Mirror connects the testee by a rigid member, and the positional relationship of remaining part remains unchanged, and the laser beam is with incidence angle θ
It is incident on the stationary mirror, is then finally irradiated on photodetector by multiple reflections, moves light in orbit
Electric explorer makes an exploring block thereon incude this moving distance value of laser beam X, moves the testee,
The reflection path of the laser beam changes, and when the testee stops mobile, the control processing system is according to the detection
Component one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense the laser
Spacing between the number of beam and photosensitive sequence and each exploring block obtains a detection shift value Y and the testee
Direction of displacement, this detection shift value Y are far longer than the true change value of two pieces of reflection mirror spacing, the control processing system root
It is obtained after calculating according to the value that the value of the detection displacement Y of its testee obtained added or subtracted moving distance X
The true change value of the testee displacement obtains the shift value of the testee out, and the measurement method is simple, reliable, behaviour
Facilitate, and can be improved displacement measurement accuracy, can be used for measuring the increment type change in displacement of the testee.
Preferably, institute's location is carried out according to the counting sequence of the exploring block one, exploring block two and exploring block three
The judgement for moving direction, if counting sequence is followed successively by the exploring block one, exploring block three and exploring block two, institute's location
Moving direction is close to the direction of the stationary mirror, if counting sequence is followed successively by the exploring block two, exploring block three
With exploring block one, then measured displacement direction is the direction far from the stationary mirror.
Preferably, institute's location is carried out according to the counting sequence of the exploring block four, exploring block five and exploring block six
The judgement for moving direction, if counting sequence is followed successively by the exploring block four, exploring block six and exploring block five, institute's location
Moving direction is close to the direction of the stationary mirror, if counting sequence is followed successively by the exploring block five, exploring block six
With exploring block four, then measured displacement direction is the direction far from the stationary mirror.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam at one group
It constantly reflects, is finally irradiated on two groups of photodetectors among two pieces of reflecting mirrors disposed in parallel, change two pieces of reflecting mirrors
Spacing can change the reflection path of the laser beam, in the mobile photodetection on guide rail where every group of photodetector
Device incudes the laser beam, and the control processing system is handled according to the photosensitive mileage and photosensitive direction of the photodetector
To a detection shift value, the photoelectricity can be added or be subtracted to the control processing system by this detection shift value
The moving distance value of detector on the track obtains the true change value of two pieces of reflection mirror spacing, the sensing after calculating
Device structure is simple, and when measurement, after one of reflecting mirror is fixedly connected with testee, position occurs for the testee
When moving variation, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, by the spacing for measuring two pieces of reflecting mirrors
Changing value can be back-calculated to obtain the shift value of the testee, and it is suitable for the measurements of the testee change in displacement, survey
Amount is reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam at one group
It constantly reflects, is finally irradiated on two groups of photodetectors among two pieces of reflecting mirrors disposed in parallel, change two pieces of reflecting mirrors
Spacing can change the reflection path of the laser beam, described in three exploring blocks on every group of photodetector repeatedly incude
Laser beam, the control processing system sense number and photosensitive sequence and the spy of the laser beam according to every group of exploring block
The spacing surveyed between component handles to obtain a detection range value, this detection range value is far longer than the true of two pieces of reflection mirror spacing
Real change value, the control processing system can calculate really changing for two pieces of reflection mirror spacing by this detection range value
Variate, the sensor structure is simple, when measurement, after one of reflecting mirror is fixedly connected with testee, and the quilt
When survey object is subjected to displacement variation, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, by described in two pieces of measurement
The spacing changing value of reflecting mirror, can be back-calculated to obtain the shift value of the testee, and it is suitable for testee displacements
The measurement of variation, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations；
3, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the mobile mirror passes through one
Rigid member connects the testee, in the case where the position relationship of remaining part, is subjected to displacement the testee,
The mobile mirror is driven to be subjected to displacement, using this structure setting, when the testee is mobile, drive is connected thereto
The mobile mirror simultaneously generate movement, change the spacing of the mobile mirror and stationary mirror, the movement
The reflection path that the laser beam that reflecting mirror is subjected to displacement front and back is irradiated on the stationary mirror for the first time will not change,
Shift value, that is, mobile mirror shift value of the final testee is reflected on photodetector, and this changes
The frame mode for becoming the mobile mirror displacement can simplify the Processing Algorithm of the control processing system, simplify simultaneously
Sensor structure, easily fabricated and use；
It 4, further include shell with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the laser
Source, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photodetector two are respectively positioned on the shell
It is interior, formed reading head, the reading head be equipped with mounting hole or stickers, using this structure setting, the reading head be convenient for
The testee or opposing stationary members fits, clamping or stickup, easy disassembly；
5, with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the photodetector one is also wrapped
Include at least one exploring block seven, the exploring block seven be set to the exploring block one and exploring block two straight line line it
Between any position, the electric explorer two further includes at least one exploring block eight, and the exploring block eight is set to the spy
Any position between component four and the straight line line of exploring block five is surveyed, using this structure setting, since it is desired that judging institute
The direction of displacement of testee is stated, photodetector at least needs three exploring blocks that could distinguish described tested in measurement process
The direction of displacement of object, at the same the laser beam eventually settle at the exploring block one and this closed interval of exploring block two or
In exploring block four described in person and this closed interval of exploring block five, the exploring block one or exploring block two or exploring block
Three or after exploring block four or exploring block five or six last time of exploring block sense the laser beam, the laser beam is again
Mobile small quantity inspection does not measure needs and ignores, be arranged between the exploring block one and the straight line line of exploring block two to
A few complementary exploring block seven, be arranged between the exploring block four and the straight line line of exploring block five to
A few complementary exploring block eight, can refine the exploring block one and exploring block two surveying range and
The surveying range of the exploring block four and exploring block five, the final negligible amount of the laser beam will be smaller, can be further
Improve the measurement accuracy of institute's displacement sensors；
6, with a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the movement is anti-
It penetrates mirror and the testee is connected by a rigid member, the positional relationship of remaining part remains unchanged, and the laser beam is with incidence
Angle θ is incident on the stationary mirror, is then finally irradiated on photodetector by multiple reflections, mobile in orbit
Photodetector makes an exploring block thereon incude this moving distance value of laser beam X, the mobile measured object
Body, the reflection path variation of the laser beam, when the testee stops mobile, the control processing system is according to the spy
Survey component one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense described sharp
Spacing between the number of light beam and photosensitive sequence and each exploring block obtains a detection shift value Y and the testee
Direction of displacement, this detection shift value Y be far longer than two pieces reflection mirror spacing true change values, the control processing system
According to the value of the detection displacement Y of its testee obtained the value of moving distance X is added or subtracted after calculating
Showing that the true change value of the testee displacement obtains the shift value of the testee, the measurement method is simple, reliable,
It is easy to operate, and can be improved displacement measurement accuracy, it can be used for surveying the increment type change in displacement of the testee
Amount.
Detailed description of the invention
Fig. 1 is the schematic side view that a kind of alternately increment type of the present invention measures micro-displacement sensor；
Fig. 2 is the structural side view that a kind of alternately increment type of the present invention measures micro-displacement sensor；
Fig. 3 is side view when a kind of alternately increment type of the present invention measures micro-displacement sensor measurement.
Marked in the figure: 1- laser source, 11- laser beam, 2- stationary mirror, 3- mobile mirror, 31- connector, 4- are visited
Survey reflecting mirror, 5- photodetector one, 51- exploring block one, 52- exploring block two, 53- exploring block three, 6- photodetection
Device two, 61- exploring block four, 62- exploring block five, 63- exploring block six, 7- reading head, 8- testee, 9- guide rail one,
10- guide rail two.
Specific embodiment
With reference to the accompanying drawing, the present invention is described in detail.
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
Embodiment 1
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention, including laser beam 11,
Two pieces of reflecting mirrors, photodetector 1, photodetector 26, guide rail 1, guide rail 2 10 and control processing system.
The photodetector 1 is set on the guide rail 1 and can move on it, and the photodetector 26 is set
In that can move on the guide rail 2 10 and on it, two pieces of mirror parallels are arranged and can relatively move, the light
One end of two pieces of reflecting mirrors is arranged in electric explorer 1 and photodetector 26, and the laser is arranged in the opposite other end
Beam 11, the laser beam 11 are incident on one of reflecting mirror, after two pieces of reflecting mirror alternating reflexes, outgoing
To the photodetector 1 or photodetector 26 and incuded, the control processing system communicates to connect the photoelectricity and visits
Survey device 1 and photodetector 26, and photosensitive mileage for counting the photodetector 1 or photodetector 26 and
Photosensitive direction.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam 11 at one group
It constantly reflects, is finally irradiated on two groups of photodetectors among two pieces of reflecting mirrors disposed in parallel, change two pieces of reflecting mirrors
Spacing can change the reflection path of the laser beam 11, in the mobile photoelectricity spy on guide rail where every group of photodetector
Survey device and incude the laser beam 11, the control processing system according to the photosensitive mileage of the photodetector and photosensitive direction at
Reason obtains a detection shift value, and the control processing system can be added or be subtracted by this detection shift value described
The moving distance value of photodetector on the track calculates the true change value of two pieces of reflection mirror spacing, the sensor knot
Structure is simple, and when measurement, after one of reflecting mirror is fixedly connected with testee, the testee is subjected to displacement change
When change, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, be changed by the spacing of two pieces of reflecting mirrors of measurement
Value, can be back-calculated to obtain the shift value of the testee, it is suitable for the measurements of the testee change in displacement, and measurement can
It leans on, precision is higher, it is easy to accomplish batch micro operations.
The photodetector 1 is equipped with exploring block 1, exploring block 2 52 and the exploring block three of constant spacing
53, the exploring block 3 53 is set to any position between the exploring block 1 and the straight line line of exploring block 2 52
It sets, the photodetector 26 is equipped with exploring block 4 61, exploring block 5 62 and the exploring block 6 63 of constant spacing, institute
It states exploring block 6 63 and is set to any position between the exploring block 4 61 and the straight line line of exploring block 5 62, two pieces
The mirror parallel is arranged and can relatively move, and the photodetector 1 and photodetector 26 are arranged at two pieces
The laser beam 11 is arranged in one end of the reflecting mirror, the opposite other end, and the laser beam 11 is incident on one of described
On reflecting mirror, after two pieces of reflecting mirror alternating reflexes, it is emitted to the photodetector 1 or photodetector 26,
And it by the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and visits
It surveys component 6 63 to incude, the control processing system is for counting the exploring block 1, exploring block 2 52, exploring block
3 53, exploring block 4 61, the number of exploring block 5 62 and the induction of exploring block 6 63 laser beam 11 and photosensitive sequence.
Since the exploring block 1, exploring block 2 52 and exploring block 3 53 have fixed spacing, the detection
Component 4 61, exploring block 5 62 and exploring block 6 63 have fixed spacing, pass through the exploring block 1, exploring block
2 52 and exploring block 3 53 incude the number or the exploring block 4 61,5 62 and of exploring block of the laser beam 11
Exploring block 6 63 incudes the number of the laser beam 11, and judges one of reflecting mirror phase according to the photosensitive sequence of exploring block
To the direction of motion of another piece of reflecting mirror, plus-minus processing is carried out to institute's metering number according to the direction of motion.
It is described on the photodetector 1 (or photodetector 2 6) as a kind of increment type displacement sensor
Exploring block 1 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62
Or 63) exploring block 6 senses the laser beam 11 first, then the laser beam 11 is next time by the exploring block
One 51 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or detections
63) corresponding sense is denoted as an incremental number to component 6, and the control processing system is according to the incremental number and the probe portion
Part 1 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or spy
It surveys the induction number of component 6 63) and calculates the probe value principal part for obtaining two pieces of reflecting mirror relative displacements, while the control
Processing system regard the photodetector 1 (or photodetector 2 6) as host computer detector, the photodetector
26 (or photodetectors 1) are used as auxiliary calculating detector, the laser beam 11 finally detected component induction, the detection
Component and the exploring block 1 (either exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or spy
The distance of component 5 62 or exploring block 6 63) is surveyed as the auxiliary portion of probe value, the probe value principal part and the auxiliary portion's structure of probe value
At the probe value of two pieces of reflecting mirror relative displacements, the control processing system obtains after calculating according to the probe value
The true relative shift of two pieces of reflecting mirrors.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, by the laser beam 11 at one group
It constantly reflects, is finally irradiated on two groups of photodetectors among two pieces of reflecting mirrors disposed in parallel, change two pieces of reflecting mirrors
Spacing can change the reflection path of the laser beam 11, three exploring blocks on every group of photodetector repeatedly incude institute
State laser beam 11, the control processing system according to every group of exploring block sense the laser beam 11 number and photosensitive sequence
And the spacing between exploring block handles to obtain a detection range value, this detection range value is far longer than between two pieces of reflecting mirrors
Away from true change value, the control processing system can by this detection range value through calculating after obtain two pieces of reflecting mirrors
The true change value of spacing, the sensor structure is simple, when measurement, connects one of reflecting mirror and testee are fixed
After connecing, when the testee is subjected to displacement variation, the spacing of two pieces of reflecting mirrors can be made to generate variation accordingly, pass through survey
The spacing changing value for measuring two pieces of reflecting mirrors, can be back-calculated to obtain the shift value of the testee, it is suitable for the quilts
The measurement of ohject displacement variation is surveyed, measurement is reliable, and precision is higher, it is easy to accomplish batch micro operations.
Embodiment 2
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, photodetector 1,26 and of photodetector
Control processing system.
The testee 8 connects the mobile mirror 3 by a rigid member, and the photodetector 1 is equipped with solid
Exploring block 1, exploring block 2 52 and the exploring block 3 53 of fixed spacing, the exploring block 3 53 are set to the detection
Any position between component 1 and the straight line line of exploring block 2 52, the photodetector 26 are equipped with constant spacing
Exploring block 4 61, exploring block 5 62 and exploring block 6 63, the exploring block 6 63 be set to the exploring block four
Any position between 61 and the straight line line of exploring block 5 62, the stationary mirror 2 is parallel with mobile mirror 3 to be set
It sets, the mobile mirror 3 can be relatively moved with the stationary mirror 2, the photodetector 1 and photodetection
One end of the stationary mirror 2 and mobile mirror 3 is arranged in device 26, and the laser beam 11, institute is arranged in the opposite other end
Laser beam 11 is stated to be incident on the stationary mirror 2, after 2 alternating reflex of the mobile mirror 3 and stationary mirror,
It is emitted to the photodetector 1 or photodetector 26, and by the exploring block 1, exploring block 2 52, detection
Component 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 incude, and the control processing system is for counting
The exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and probe portion
Part 6 63 incudes the number of the laser beam 11 and photosensitive sequence, the mobile testee 8 drive the mobile mirror 3,
The reflection path of the laser beam 11 is changed, the control processing system is according to the exploring block 1, exploring block two
52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 incude the number of the laser beam 11
And the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and spy
The related spacing for surveying component 6 63 obtains a probe value, and calculates the displacement of the corresponding testee 8.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, the mobile mirror 3 passes through one
Rigid member connects the testee 8, in the case where the position relationship of remaining part, makes the testee 8 that position occur
Move, the mobile mirror 3 driven to be subjected to displacement, using this structure setting, when the testee 8 is mobile, drive with
Its described mobile mirror 3 connected generates movement simultaneously, changes the spacing of the mobile mirror 3 and stationary mirror 2,
11 first time of the laser beam that the mobile mirror 3 is subjected to displacement front and back is irradiated to the reflection on the stationary mirror 2
Path will not change, and shift value, that is, mobile mirror 3 shift value of the final testee 8 is reflected to photoelectricity spy
It surveys on device, this changes the frame mode that the mobile mirror 3 is displaced and the processing of the control processing system can be made to calculate
Method is simplified, while simplifying sensor structure, easily fabricated and use.
Embodiment 3
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser source 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector
One 5, photodetector 26 and control processing system, further include shell and connector 31.
The laser beam 11 by laser source 1 transmitting obtains, the laser source 1, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned in the shell, form reading head 7, the reading
First 7 are equipped with mounting hole or stickers, and the mobile mirror 3 connects the connector 31, and the connector 31 is rigid member, institute
It states connector 31 and stretches out testee 8 described in 7 external connection of reading head, the photodetector 1 is equipped with constant spacing
Exploring block 1, exploring block 2 52 and exploring block 3 53, the exploring block 3 53 be set to the exploring block one
Any position between 51 and the straight line line of exploring block 2 52, the photodetector 26 are equipped with the detection of constant spacing
Component 4 61, exploring block 5 62 and exploring block 6 63, the exploring block 6 63 are set to the exploring block 4 61 and visit
Any position between the straight line line of component 5 62 is surveyed, the stationary mirror 2 is arranged in parallel with mobile mirror 3, described
Mobile mirror 3 can be relatively moved with the stationary mirror 2, the photodetector 1 and photodetector 26 are set
It sets in one end of the stationary mirror 2 and mobile mirror 3, the laser beam 11, the laser is arranged in the opposite other end
Beam 11 is incident on the stationary mirror 2, by 2 alternating reflex of the mobile mirror 3 and stationary mirror, the detection
Reflecting mirror 4 is set to 26 side of the photodetector 1 and photodetector, and the detection reflecting mirror 4 is used for the fixation
The laser beam 11 that reflecting mirror 2 reflects is reflected on the photodetector 1, and by the exploring block 1, detection
Component 2 52 and exploring block 3 53 incude, or the laser beam 11 that the mobile mirror 3 reflects are reflected into described
On photodetector 26, and incuded by the exploring block 4 61, exploring block 5 62 and exploring block 6 63, the control
Processing system is for counting the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, detection
Component 5 62 and exploring block 6 63 incude the number of the laser beam 11 and photosensitive sequence, the mobile testee 8 drive
The mobile mirror 3 changes the reflection path of the laser beam 11, and the control processing system is according to the exploring block
One 51, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 incude institute
State laser beam 11 number and the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61,
The spacing related to exploring block 6 63 of exploring block 5 62 obtains a probe value, and calculates the corresponding testee 8
Displacement.
It further include shell with a kind of alternately increment type measurement micro-displacement sensor of the present invention, the laser source
1, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned on described
In shell, reading head 7 is formed, the reading head 7 is equipped with mounting hole or stickers, using this structure setting, the reading head 7
Convenient for the testee 8 or opposing stationary members fits, clamping or stickup, easy disassembly；The spy is set simultaneously
Reflecting mirror 4 is surveyed, can make the mobile mirror 3 during being subjected to displacement, the photodetector 1 only measures described solid
Determine the laser beam 11 of the reflection of reflecting mirror 2, the photodetector 26 only measures the described of the reflection of mobile mirror 3
Laser beam 11 avoids the laser beam 11 from occurring to measure interference caused by reflection is existed simultaneously with direct projection at edge.
Embodiment 4
As shown in Figure 1-3, a kind of alternately increment type measurement micro-displacement sensor of the present invention and testee 8,
The sensor includes laser source 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector
One 5, photodetector 26 and control processing system, further include shell and connector 31.
Difference from Example 3 is that the photodetector 1 further includes at least one exploring block seven, described
Exploring block seven is set to any position between the exploring block 1 and the straight line line of exploring block 2 52, the electrical resistivity survey
Surveying device 26 further includes at least one exploring block eight, and the exploring block eight is set to the exploring block 4 61 and exploring block
Any position between 5 62 straight line line.
As a kind of preferred embodiment of the present embodiment, one is equipped between the exploring block 3 53 and exploring block 1
The exploring block seven is equipped with another described exploring block seven between the exploring block 3 53 and exploring block 2 52；Institute
It states and is equipped with an exploring block eight between exploring block 6 63 and exploring block 4 61, the exploring block 6 63 and detection
Another described exploring block eight is equipped between component 5 62.
With a kind of alternately increment type measurement micro-displacement sensor of the present invention, the photodetector 1 is also wrapped
At least one exploring block seven is included, the exploring block seven is set to the exploring block 1 and the straight line of exploring block 2 52 connects
Any position between line, the electric explorer 26 further include at least one exploring block eight, and the exploring block eight is set to institute
Any position between exploring block 4 61 and the straight line line of exploring block 5 62 is stated, using this structure setting, because needing
Judge that the direction of displacement of the testee 8, photodetector at least need three exploring blocks that could distinguish in measurement process
The direction of displacement of the not described testee 8, while the laser beam 11 eventually settles at the exploring block 1 and probe portion
In this closed interval of part 2 52 or the exploring block 4 61 and this closed interval of exploring block 5 62, the exploring block one
51 or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63 it is last
After once sensing the laser beam 11, the small quantity inspection that the laser beam 11 moves again does not measure needs and ignores, in the spy
It surveys between component 1 and the straight line line of exploring block 2 52 and at least one complementary described exploring block seven is set, in institute
It states and at least one complementary described exploring block eight is set between exploring block 4 61 and the straight line line of exploring block 5 62,
The surveying range and the exploring block 4 61 and probe portion of the exploring block 1 and exploring block 2 52 can be refined
The surveying range of part 5 62, the final negligible amount of the laser beam 11 will be smaller, can be further improved institute's displacement sensors
Measurement accuracy.
Embodiment 5
As shown in Figure 1-3, a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, including
Such as the displacement sensor in embodiment 4, measurement method the following steps are included:
A, testee 8 is connected to the mobile mirror 3 by a rigid member；
B, emit one laser beam 11, the laser beam 11 is incident at a certain angle on the stationary mirror 2, it is assumed that
The incidence angle is θ, and the laser beam 11 after the continuous reflection of the stationary mirror 2 and mobile mirror 3 by being irradiated to
On the photodetector 1 or photodetector 26, control processing system controls the photodetector 1 and leads described
It is moved on rail 1, makes the laser beam 11 by one in the exploring block 1, exploring block 2 52 and exploring block 3 53
A induction, or the control photodetector 26 move on the guide rail 2 10, make the laser beam 11 by the detection
An induction in component 4 61, exploring block 5 62 and exploring block 6 63, this moving distance value are X；
C, the mobile testee 8 drives the mobile mirror 3 while movement, while the laser beam 11 is anti-
Path change is penetrated, the laser beam 11 is by the exploring block 1,2 52 and of exploring block on the photodetector 1
Exploring block 3 53 incudes or by the exploring block 4 61, exploring block 5 62 and the spy on the photodetector 26
Component 6 63 is surveyed to incude, when the testee 8 stops mobile, the control processing system statistics exploring block 1,
Exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense described sharp
Spacing between the number of light beam 11 and photosensitive sequence and each exploring block, obtain the detection shift value Y of the testee 8 with
And direction of displacement；
D, it is described control processing system according to its testee 8 obtained detection displacement Y value add or
The value for subtracting moving distance X obtains the true change value that the testee 8 is displaced after calculating.
The wherein photodetector 1 moving direction and 8 direction of displacement phase of testee on the guide rail 1
Together or the photodetector 26 on the guide rail 2 10 moving direction and 8 direction of displacement of testee on the contrary,
The value of the detection displacement Y of the testee 8 adds the value of moving distance X；The photodetector 1 is in the guide rail 1
Upper moving direction with 8 direction of displacement of testee on the contrary, the photodetector 26 moved up in the guide rail 2 10
Dynamic direction is identical as 8 direction of displacement of testee, and the value of the detection displacement Y of the testee 8 subtracts moving distance X's
Value.
With a kind of measurement method of alternately increment type measurement micro-displacement sensor of the present invention, the mobile reflection
Mirror 3 connects the testee 8 by a rigid member, and the positional relationship of remaining part remains unchanged, and the laser beam 11 is to enter
Firing angle θ is incident on the stationary mirror 2, is then finally irradiated on photodetector by multiple reflections, in orbit
Moving photoconductor detector makes an exploring block thereon incude this moving distance value of laser beam 11 X, move described in
Testee 8, the reflection path variation of the laser beam 11, when the testee 8 stops mobile, the control processing system
According to the exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and visit
Survey component 6 63 senses that the spacing between the number and photosensitive sequence and each exploring block of the laser beam 11 obtains a spy
The direction of displacement of displacement value Y and the testee 8, this detection shift value Y are far longer than two pieces of reflection mirror spacing
True change value, it is described control processing system according to its testee 8 obtained detection displacement Y value add or
The true change value that the value for subtracting moving distance X show that the testee 8 is displaced after calculating obtains the testee 8
Shift value, the measurement method is simple, reliable, easy to operate, and can be improved displacement measurement accuracy, can be used for the quilt
The increment type change in displacement for surveying object 8 measures.
As a kind of preferred embodiment of the present embodiment, according to the exploring block 1, exploring block 2 52 and probe portion
The counting sequence of part 3 53 carries out the judgement in measured displacement direction, if counting sequence is followed successively by the exploring block 1, visits
Component 3 53 and exploring block 2 52 are surveyed, then measured displacement direction is close to the direction of the stationary mirror 2, if counted suitable
Sequence is followed successively by the exploring block 2 52, exploring block 3 53 and exploring block 1, then measured displacement direction is far from described
The direction of stationary mirror 2.
As a kind of preferred embodiment of the present embodiment, according to the exploring block 4 61, exploring block 5 62 and probe portion
The counting sequence of part 6 63 carries out the judgement in measured displacement direction, if counting sequence is followed successively by the exploring block 4 61, visits
Component 6 63 and exploring block 5 62 are surveyed, then measured displacement direction is close to the direction of the stationary mirror 2, if counted suitable
Sequence is followed successively by the exploring block 5 62, exploring block 6 63 and exploring block 4 61, then measured displacement direction is far from described
The direction of stationary mirror 2.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (7)
1. a kind of measurement method of alternately increment type measurement micro-displacement sensor, passes using a kind of alternately increment type measurement micro-displacement
Sensor, the sensor include laser beam (11), two pieces of reflecting mirrors, photodetector one (5), photodetector two (6), guide rail one
(9), guide rail two (10) and control processing system, the photodetector one (5) are set on the guide rail one (9) and can be on it
Mobile, the photodetector two (6) is set on the guide rail two (10) and can move on it, two pieces of mirror parallels
It is arranged and can relatively moves, the photodetector one (5) and photodetector two (6) is arranged in two pieces of reflecting mirrors
One end, the laser beam (11) is arranged in the opposite other end, and the laser beam (11) is incident on one of reflecting mirror
On, after two pieces of reflecting mirror alternating reflexes, it is emitted to the photodetector one (5) or photodetector two (6) simultaneously
Incuded, the control processing system communicates to connect the photodetector one (5) and photodetector two (6), and for uniting
Count the photodetector one (5) or photodetector two (6) photosensitive mileage and photosensitive direction, the photodetector one
(5) exploring block one (51), exploring block two (52) and the exploring block three (53) of constant spacing, the exploring block three are equipped with
(53) it is set to any position between the exploring block one (51) and the straight line line of exploring block two (52), the photoelectricity is visited
Survey exploring block four (61), exploring block five (62) and exploring block six (63) that device two (6) are equipped with constant spacing, the detection
Component six (63) is set to any position between the exploring block four (61) and the straight line line of exploring block five (62), described
Exploring block one (51), exploring block two (52), exploring block three (53), exploring block four (61), exploring block five (62) and
Exploring block six (63) incudes the laser beam (11), the control processing system be used to count the exploring block one (51),
Exploring block two (52), exploring block three (53), exploring block four (61), exploring block five (62) and exploring block six (63) sense
Answer the laser beam (11) number and photosensitive sequence, which is characterized in that two pieces of reflecting mirrors be respectively stationary mirror (2) and move
Dynamic reflecting mirror (3), measurement method the following steps are included:
A, testee (8) is connected to the mobile mirror (3) by a rigid member；
B, emit one laser beam (11), the laser beam (11) is incident at a certain angle on the stationary mirror (2), false
If incidence angle is θ, the laser beam (11) after the continuous reflection of the stationary mirror (2) and mobile mirror (3) by shining
It is mapped on the photodetector one (5) or photodetector two (6), control processing system controls the photodetector one
(5) it is moved on the guide rail one (9), makes the laser beam (11) by the exploring block one (51), exploring block two (52)
It is moved up with an induction in exploring block three (53), or the control photodetector two (6) in the guide rail two (10)
It is dynamic, make the laser beam (11) by one in the exploring block four (61), exploring block five (62) and exploring block six (63)
A induction, this moving distance value are X；
C, the testee (8) is moved, the mobile mirror (3) is driven while being moved, while the laser beam (11)
Reflection path variation, the laser beam (11) is by the exploring block one (51) on the photodetector one (5), probe portion
Part two (52) and exploring block three (53) induction or by the photodetector two (6) the exploring block four (61),
Exploring block five (62) and exploring block six (63) induction, when the testee (8) stops mobile, the control processing system
Count the exploring block one (51), exploring block two (52), exploring block three (53), exploring block four (61), exploring block
Five (62) and exploring block six (63) sense between the number and photosensitive sequence and each exploring block of the laser beam (11)
Spacing obtains the detection shift value Y and direction of displacement of the testee (8)；
D, the value of the detection displacement Y for the testee (8) that the control processing system is obtained according to it adds or subtracts
The value of moving distance X is gone to obtain the true change value of the testee (8) displacement after calculating.
2. the measurement method of displacement sensor according to claim 1, which is characterized in that according to the exploring block one
(51), the counting sequence of exploring block two (52) and exploring block three (53) carries out the judgement in measured displacement direction, if counted
Sequence is followed successively by the exploring block one (51), exploring block three (53) and exploring block two (52), then measured displacement direction is
Close to the direction of the stationary mirror (2), if counting sequence is followed successively by the exploring block two (52), exploring block three
(53) and exploring block one (51), then measured displacement direction is the direction far from the stationary mirror (2).
3. the measurement method of displacement sensor according to claim 1, which is characterized in that according to the exploring block four
(61), the counting sequence of exploring block five (62) and exploring block six (63) carries out the judgement in measured displacement direction, if counted
Sequence is followed successively by the exploring block four (61), exploring block six (63) and exploring block five (62), then measured displacement direction is
Close to the direction of the stationary mirror (2), if counting sequence is followed successively by the exploring block five (62), exploring block six
(63) and exploring block four (61), then measured displacement direction is the direction far from the stationary mirror (2).
4. the measurement method of displacement sensor according to claim 1, which is characterized in that it further include detection reflecting mirror (4),
The detection reflecting mirror (4) is set to the photodetector one (5) and photodetector two (6) side, is used for the fixation
The laser beam (11) of reflecting mirror (2) reflection is reflected on the photodetector one (5), or by the mobile mirror
(3) laser beam (11) reflected is reflected on the photodetector two (6).
5. the measurement method of displacement sensor according to claim 1-4, which is characterized in that further include for sending out
Penetrate the laser source (1) of the laser beam (11).
6. the measurement method of displacement sensor according to claim 5, which is characterized in that it further include shell, the laser
Source (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), photodetector one (5) and photodetector two
(6) it is respectively positioned in the shell, is formed reading head (7).
7. the measurement method of displacement sensor according to claim 6, which is characterized in that the mobile mirror (3) is rigid
Property connect at least one connector (31), the connector (31) is rigid member, and the connector (31) stretches out the reading head
(7) external.
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| CN112240748A (en) * | 2020-11-17 | 2021-01-19 | 中国科学院上海微系统与信息技术研究所 | Micro-displacement mechanism with non-hermite coupling angle detection and correction device |
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Effective date of registration: 20201209 Address after: 241000 No.32 Chunjiang Road, Qingshui street, Jiujiang District, Wuhu City, Anhui Province Patentee after: Zheng Xuchun Address before: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Hongyue Information Technology Co.,Ltd. Effective date of registration: 20201209 Address after: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Hongyue Information Technology Co.,Ltd. Address before: 750021 No. 204 Wenchang North Road, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
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Effective date of registration: 20211011 Address after: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee after: Taian Zhongquan Information Technology Co.,Ltd. Address before: 241000 No. 32, Chunjiang Road, Qingshui street, Jiujiang District, Wuhu City, Anhui Province Patentee before: Zheng Xuchun Effective date of registration: 20211011 Address after: 271000 China Taishan high-end talent entrepreneurship base in the middle of Nantianmen street, development zone, Tai'an City, Shandong Province Patentee after: Taian Taishan Technology Co.,Ltd. Address before: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee before: Taian Zhongquan Information Technology Co.,Ltd. |