CN205619888U - Increment formula is journey displacement sensor in a small amount - Google Patents
Increment formula is journey displacement sensor in a small amount Download PDFInfo
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- CN205619888U CN205619888U CN201620460586.4U CN201620460586U CN205619888U CN 205619888 U CN205619888 U CN 205619888U CN 201620460586 U CN201620460586 U CN 201620460586U CN 205619888 U CN205619888 U CN 205619888U
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Abstract
The utility model discloses an increment formula is journey displacement sensor in a small amount, this sensor include between laser beam, two speculums, distributed photoelectric detector and processing system. Utilize this sensor, through laser beam constantly reflection between two speculums of a set of parallel arrangement, finally shine on the distributed photoelectric detector, change the interval of two speculums, can change the reflection path of laser beam promptly, detection device no. 1 on the distributing type photoelectric detector, detection device no. 2 and detection device no. 3 respond to the laser beam many times, processing system obtains a detection value according to number of times and the processing of the interval between detection device that detection device received the laser beam, this detection value is greater than two reflection mirror spacing's true change value, processing system can calculate two reflection mirror spacing's true change value through this detection value, the sensor has the advantages of simple structure, be applicable to and surveyed the measurement that displacement of object changes, measure reliably, the precision is higher, easily realize batch manufacture.
Description
Technical field
This utility model relates to Technology of Precision Measurement and instrument field, particularly to a kind of increment type small-range position
Displacement sensor.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, at Aero-Space, commercial production, machine
Make and a lot of fields such as military science have and use widely.The metering system of displacement has a variety of, relatively
Thin tail sheep (such as less than 1cm) is generally with strain-type, inductance type, differential transformer type, eddy current type, Hall
Sensor detects, and inductosyn, grating, appearance grid, magnetic are commonly used in bigger displacement (such as larger than 1cm)
The sensing technologies such as grid are measured.Wherein grating sensor because of have easily realize digitized, precision height (divide at present
What resolution was the highest can reach nanoscale), capacity of resisting disturbance is strong, do not have artificial error in reading, easy for installation,
Use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor using grating Moire fringe principle to measure displacement.Grating is at one piece
The most parallel intensive groove on the optical glass chi of strip or metal scale, incisure density is 10～100
Lines per millimeter.The Moire fringe formed by grating has optical amplifier effect and an error average effect, thus energy
Improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to there is lifting again,
Cannot meet the demand of the highest certainty of measurement, in the urgent need to a kind of simple in construction of exploitation, precision is higher
Sensor.
Utility model content
Utility model purpose of the present utility model is: for prior art exist existing grating sensor by
Physical arrangement in photoetching process limits, and causes its certainty of measurement to be difficult to there is lifting again, it is impossible to meet increasingly
The above-mentioned deficiency of demand of high certainty of measurement, it is provided that a kind of increment type small-range displacement transducer and measuring method,
This sensor construction is simple, it is adaptable to the measurement of testee change in displacement, measures reliable, and precision is higher,
It is easily achieved batch micro operations.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of increment type small-range displacement transducer, including laser beam, two pieces of reflecting mirrors, distributed smooth electrical resistivity surveys
Surveying device and processing system, described distributed photodetector is provided with the exploring block one of constant spacing, probe portion
Part two and exploring block three, described exploring block three is located at described exploring block one and the straight line of exploring block two
Optional position between line, two pieces of described mirror parallel arrange and can relative movement, described laser
Bundle and distributed photodetector are oppositely arranged on two pieces of described reflecting mirror two ends, and described laser beam incides it
In on one piece of described reflecting mirror, after two pieces of described reflecting mirror alternating reflexs, shine described distributed light
Electric explorer, and sensed by described exploring block one, exploring block two and exploring block three, described process is
System is used for calculating the described exploring block one of process, exploring block two and exploring block three and receives described laser beam
Number of times and photosensitive order.
Owing to described exploring block one, exploring block two and exploring block three have fixing spacing, by described
Exploring block one, exploring block two and exploring block three sense the number of times of described laser beam, and according to probe portion
The photosensitive order of part judges one of reflecting mirror direction of displacement relative to another block reflecting mirror, according to the direction of motion
Institute's metering number is carried out plus-minus process, and described processing system can calculate the inswept described detection of described laser beam
Parts one, exploring block two and the direction of motion of exploring block three and move distance, described move distance is i.e.
Described processing system is by described exploring block one, exploring block two and the photosensitive counting how many times of exploring block three
Obtain with described fixing spacing, and the change value of corresponding two pieces of described reflecting mirror distances.
Use a kind of increment type small-range displacement transducer described in the utility model, existed by described laser beam
Constantly reflect among one group of two pieces of reflecting mirror be arrangeding in parallel, be finally irradiated to described distributed photodetector
On, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam, described distributed light
Described exploring block one, exploring block two and exploring block on electric explorer sense described laser more than three time
Bundle, described processing system receives described according to described exploring block one, exploring block two and exploring block three
Described spacing between the number of times of laser beam and photosensitive order and exploring block processes and obtains a detection range
Value, this detection range value is far longer than the true change value of two pieces of mirror pitch, described processing system energy
Enough true change values being calculated two pieces of mirror pitch by this detection range value, this sensor construction
Simply, during measurement, after fixing to one of described reflecting mirror and testee connection, described testee
When being subjected to displacement change, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, by measuring two pieces
The spacing changing value of described reflecting mirror, can be back-calculated to obtain the shift value of described testee, and it is applicable to institute
Stating the measurement of testee change in displacement, measure reliable, precision is higher, it is easy to accomplish batch micro operations.
Preferably, described exploring block three is located at the straight line line of described exploring block one and exploring block two
Midpoint.
Preferably, two pieces of reflecting mirrors are stationary mirror and mobile mirror respectively, and described mobile mirror leads to
Cross a rigid member and connect testee, mobile described testee, drive described mobile mirror, change
The reflection path of described laser beam, described processing system is according to described exploring block one, exploring block two and visits
Survey parts three and receive number of times and described exploring block one, exploring block two and the probe portion of described laser beam
The described spacing of part three, draws the displacement of described testee.
Use this structure to arrange, when described testee moves, drive connected described movement anti-
Penetrating mirror and produce movement simultaneously, change the spacing of described mobile mirror and stationary mirror, described movement is anti-
Penetrate the described laser beam before and after mirror is subjected to displacement and be irradiated to the reflection path on described stationary mirror for the first time
Will not change, the shift value of the most described mobile mirror of shift value of final described testee is reflected to institute
Stating on distributed photodetector, this frame mode changing described mobile mirror displacement can make institute
The Processing Algorithm stating processing system is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Preferably, also including detecting reflecting mirror, described distributed photodetector is located at by described detection reflecting mirror
Side, reflexes to described distributed photodetector for the described laser beam reflected by described stationary mirror
On.
Use this structure to arrange, it is possible to make described mobile mirror during being subjected to displacement, by described shifting
Dynamic reflecting mirror reflexes to the luminous reflectance of described detection reflecting mirror and goes out, and described distributed photodetector is only measured
The described laser beam of described stationary mirror reflection, it is to avoid described laser beam occurs reflection same with direct projection at edge
Time exist cause measurement interference.
Preferably, the lasing light emitter for launching described laser beam is also included.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror,
Detection reflecting mirror and distributed photodetector are respectively positioned in described housing, form read head, described read head
It is provided with installing hole or stickers.
Using this structure to arrange, described read head is easy to the parts with described testee or geo-stationary
Adaptation, clamping or stickup, easy disassembly.
Preferably, described mobile mirror is rigidly connected at least one connector, and described connector is rigid member,
Described connector stretches out outside described read head.
Preferably, described distributed photodetector also includes at least one exploring block four, described probe portion
Part four is located at the optional position between described exploring block one and the straight line line of exploring block two.
This structure is used to arrange, since it is desired that judge the direction of displacement of described testee, described distributed
Photodetector at least needs three exploring blocks could distinguish the displacement of described testee during measuring
Direction, the most described laser beam eventually settles at described exploring block one and this closed interval of exploring block two
In, described exploring block one or exploring block two or exploring block three sense described laser beam for the last time
After, the small quantity inspection that described laser beam moves again does not measures needs and ignores, in described exploring block one and detection
At least one complementary described exploring block four is set between the straight line line of parts two, it is possible to refinement is described
Exploring block one and the surveying range of exploring block two, the final negligible amount of described laser beam will be less, permissible
Improve the certainty of measurement of institute's displacement sensors further.
Preferably, the described exploring block one on described distributed photodetector, exploring block two, detection
Parts three and exploring block four use a kind of photoelectric device to light spot position sensitivity, can measure luminous point
The wire device of one-dimensional coordinate.
Preferably, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror and distributed light
The position of electric explorer is the most adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
This utility model additionally provides the measuring method of a kind of increment type small-range displacement transducer, including such as with
Upper arbitrary described displacement transducer, its measuring method comprises the following steps:
A, testee is connected to described mobile mirror by a rigid member；
B, transmitting one laser beam, described laser beam is incident on described stationary mirror at a certain angle,
Assume that described angle of incidence is θ, the most anti-through described stationary mirror and mobile mirror of described laser beam
It is irradiated to after penetrating on described distributed photodetector；
C, mobile described testee, drive described mobile mirror to move simultaneously, and displacement value is X,
The reflection path change of the most described laser beam, described laser beam is by the institute on described distributed photodetector
State exploring block one, exploring block two and exploring block three sensing, described exploring block one and exploring block three
Distance values be Y, the distance values of described exploring block three and exploring block two is Z, and described testee stops
Time the most mobile, described processing system calculating processes described exploring block one, exploring block two and exploring block three
Sense the number of times of described laser beam and photosensitive order and Y value or Z value, draw described testee
The value of described displacement value X and direction of displacement.
Use the measuring method of a kind of increment type small-range displacement transducer described in the utility model, described shifting
Dynamic reflecting mirror connects described testee by a rigid member, and the position relationship of remaining part keeps constant, institute
State laser beam with angle θ on described stationary mirror, be then finally irradiated to by multiple reflections
On described distributed photodetector, mobile described testee obtains described displacement value X, described laser
The reflection path change of bundle, when described testee stops mobile, described exploring block one, exploring block two
Sensing described laser beam for more than three time with exploring block, described processing system is according to described exploring block one, detection
Parts two and exploring block three sense at the number of times of described laser beam and photosensitive order and Y value or Z value
Reason obtains a detection range value and the direction of displacement of described testee, and this detection range value is the biggest
In the value of the described displacement value X of two pieces of mirror pitch, described processing system can by this detection away from
Distance values calculates the value of the described displacement value X of two pieces of mirror pitch, and this measuring method is simple, reliable,
Easy to operate, and displacement measurement accuracy can be improved, can be used for the increment type displacement to described testee
Change measures.
As it is further preferred that described distance values Y is equal to described distance values Z.
Preferably, carry out according to the counting sequence of described exploring block one, exploring block two and exploring block three
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block one, exploring block three and visits
Survey parts two, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is successively
For described exploring block two, exploring block three and exploring block one, then measured displacement direction is away from described solid
Determine the direction of reflecting mirror.
Preferably, in described step c, set between described exploring block one and the straight line line of exploring block two
There is at least one exploring block four.
Preferably, the incident angle θ of the described laser beam in described step b turned down or increase described solid
Determine the length of reflecting mirror and mobile mirror, displacement measurement accuracy can be improved.
Adopting in this way, the value of described incidence angle θ is the least or described stationary mirror and mobile mirror
Length the longest, described exploring block one, exploring block two and exploring block three sense described laser beam time
Number is the most, and described processing system processes the value of the described displacement value X obtained according to described detection range value
Precision is higher.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
1, a kind of increment type small-range displacement transducer described in the utility model is used, by described laser
Constantly reflect among two pieces of reflecting mirrors that Shu Yi group be arranged in parallel, be finally irradiated to described distributed smooth electrical resistivity survey
Survey on device, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam, described distribution
Described exploring block one, exploring block two and more than three sensing of exploring block on formula photodetector are described sharp
Light beam, described processing system receives institute according to described exploring block one, exploring block two and exploring block three
State the described spacing between the number of times of laser beam and photosensitive order and exploring block process obtain a detection away from
Distance values, this detection range value is far longer than the true change value of two pieces of mirror pitch, described processing system
Can be calculated the true change value of two pieces of mirror pitch by this detection range value, this sensor is tied
Structure is simple, during measurement, after fixing to one of described reflecting mirror and testee connection, and described measured object
When body is subjected to displacement change, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, by measuring two
The spacing changing value of reflecting mirror described in block, can be back-calculated to obtain the shift value of described testee, and it is applicable to
The measurement of described testee change in displacement, measures reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, a kind of increment type small-range displacement transducer described in the utility model is used, described mobile reflection
Mirror connects described testee by a rigid member, in the case of the position relationship of remaining part, makes institute
State testee to be subjected to displacement, drive described mobile mirror to be subjected to displacement, use this structure to arrange,
When described testee moves, drive connected described mobile mirror to produce movement simultaneously, change
The spacing of described mobile mirror and stationary mirror, described mobile mirror be subjected to displacement before and after described swash
Light beam is irradiated to the reflection path on described stationary mirror for the first time and will not change, final described testee
The shift value of the most described mobile mirror of shift value be reflected on described distributed photodetector, this
Only changing the frame mode of described mobile mirror displacement can make the Processing Algorithm of described processing system simple
Change, simplify sensor construction, it is easy to manufacture and use simultaneously；
3, use a kind of increment type small-range displacement transducer described in the utility model, also include housing,
Described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror and the equal position of distributed photodetector
In described housing, forming read head, described read head is provided with installing hole or stickers, uses this structure
Arranging, described read head is easy to and described testee or the members fits of geo-stationary, clamping or stickup,
Easy disassembly；
4, a kind of increment type small-range displacement transducer described in the utility model, described distributed photoelectricity are used
Detector also includes that at least one exploring block four, described exploring block four are located at described exploring block one and visit
Survey the optional position between the straight line line of parts two, use this structure to arrange, since it is desired that judge described
The direction of displacement of testee, described distributed photodetector at least needs three exploring blocks measuring
During distinguish the direction of displacement of described testee, the most described laser beam eventually settles at described probe portion
In part one and this closed interval of exploring block two, described exploring block one or exploring block two or exploring block three
After sensing described laser beam for the last time, the small quantity inspection that described laser beam moves again does not measures needs and ignores,
At least one complementary described spy is set between described exploring block one and the straight line line of exploring block two
Surveying parts four, it is possible to refine described exploring block one and the surveying range of exploring block two, described laser beam is
Whole negligible amount will be less, can improve the certainty of measurement of institute's displacement sensors further；
5, the measuring method of a kind of increment type small-range displacement transducer described in the utility model, institute are used
Stating mobile mirror and connect described testee by a rigid member, the position relationship of remaining part keeps not
Becoming, described laser beam on described stationary mirror, then passes through multiple reflections final with angle θ
Being irradiated on described distributed photodetector, mobile described testee obtains described displacement value X, institute
State the reflection path change of laser beam, when described testee stops mobile, described exploring block one, detection
Parts two and exploring block sense described laser beam for more than three time, and described processing system is according to described exploring block
One, exploring block two and exploring block three sense the number of times of described laser beam and photosensitive order and Y value or
Z value processes and obtains a detection range value and the direction of displacement of described testee, this detection range value
Being far longer than the value of the described displacement value X of two pieces of mirror pitch, described processing system can pass through this
Detection range value calculates the value of the described displacement value X of two pieces of mirror pitch, this measuring method letter
Single, reliable, easy to operate, and displacement measurement accuracy can be improved, can be used for described testee
Increment type change in displacement measures；
6, the measuring method of a kind of increment type small-range displacement transducer described in the utility model is used, in institute
State that the value of incidence angle θ described in step b is the least or the length of described stationary mirror and mobile mirror more
Long, the number of times that described exploring block one, exploring block two and exploring block three sense described laser beam is the most,
Described processing system processes the precision of the value of the described displacement value X obtained more according to described detection range value
High.
Accompanying drawing explanation
Fig. 1 is the schematic side view of a kind of increment type small-range displacement transducer described in the utility model；
Fig. 2 is the structural side view of a kind of increment type small-range displacement transducer described in the utility model；
Fig. 3 is side view during a kind of increment type small-range displacement sensor described in the utility model.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 2-stationary mirror, 3-mobile mirror, 31-connects
Part, 4-detects reflecting mirror, the distributed photodetector of 5-, 51-exploring block one, 52-exploring block two, 53-
Exploring block three, 6-read head, 7-testee.
Detailed description of the invention
Below in conjunction with the accompanying drawings, this utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, this utility model is further elaborated.Should be appreciated that described herein specifically
Embodiment, only in order to explain this utility model, is not used to limit this utility model.
Embodiment 1
As Figure 1-3, a kind of increment type small-range displacement transducer described in the utility model, including swashing
11, two pieces of reflecting mirrors of light beam, distributed photodetector 5 and processing system.
Described distributed photodetector 5 is provided with the exploring block 1 of constant spacing, exploring block 2 52
With exploring block 3 53, described exploring block 3 53 is located at described exploring block 1 and exploring block two
Optional position between the straight line line of 52, two pieces of described mirror parallel arrange and can relative movement,
Described laser beam 11 is oppositely arranged on two pieces of described reflecting mirror two ends with distributed photodetector 5, described
Laser beam 11 incides on one of described reflecting mirror, after two pieces of described reflecting mirror alternating reflexs,
Shine described distributed photodetector 5, and by described exploring block 1, exploring block 2 52 and
Exploring block 3 53 senses, and described processing system is used for calculating process described exploring block 1, probe portion
Part 2 52 and exploring block 3 53 receive the number of times of described laser beam 11 and photosensitive order.
Use a kind of increment type small-range displacement transducer described in the utility model, by described laser beam 11
Constantly reflect among one group of two pieces of reflecting mirror be arrangeding in parallel, be finally irradiated to described distributed photodetection
On device 5, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam 11, described
Described exploring block 1, exploring block 2 52 and exploring block 3 53 on distributed photodetector 5
Repeatedly sensing described laser beam 11, described processing system is according to described exploring block 1, exploring block two
52 and exploring block 3 53 receive between the number of times of described laser beam 11 and photosensitive order and exploring block
Described spacing processes and obtains a detection range value, and this detection range value is far longer than two pieces of mirror pitch
True change value, described processing system can be calculated between two pieces of reflecting mirrors by this detection range value
Away from true change value, this sensor construction is simple, during measurement, by one of described reflecting mirror with tested
After the fixing connection of object, when described testee is subjected to displacement change, two pieces of described reflecting mirrors can be made accordingly
Spacing produce change, by measuring the spacing changing value of two pieces of described reflecting mirrors, can be back-calculated to obtain described
The shift value of testee, it is applicable to the measurement of described testee change in displacement, measures reliable, precision
Higher, it is easy to accomplish batch micro operations.
Embodiment 2
As Figure 1-3, a kind of increment type small-range displacement transducer described in the utility model and tested
Object 7, described sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, distributed light
Electric explorer 5 and processing system.
Described testee 7 connects described mobile mirror 3, described distributed smooth electrical resistivity survey by a rigid member
Survey device 5 and be provided with the exploring block 1 of constant spacing, exploring block 2 52 and exploring block 3 53, described
What exploring block 3 53 was located between described exploring block 1 and the straight line line of exploring block 2 52 appoints
Meaning position, described stationary mirror 2 be arranged in parallel with mobile mirror 3, and described mobile mirror 3 can
With the relative movement of described stationary mirror 2, described laser beam 11 is relative with distributed photodetector 5 to be set
Putting at described stationary mirror 2 and mobile mirror 3 two ends, described laser beam 11 incides described fixing
On reflecting mirror 2, after described mobile mirror 3 and stationary mirror 2 alternating reflex, shine described
Distributed photodetector 5, and by described exploring block 1, exploring block 2 52 and exploring block three
53 sensings, described processing system is used for calculating the described exploring block 1 of process, exploring block 2 52 and visiting
Survey parts 3 53 and receive the number of times of described laser beam 11 and photosensitive order, move described testee 7,
Drive described mobile mirror 3, change the reflection path of described laser beam 11, described processing system according to
Described exploring block 1, exploring block 2 52 and exploring block 3 53 receive described laser beam 11
Described spacing between number of times and photosensitive order and exploring block, draws the displacement of described testee 7.
Use a kind of increment type small-range displacement transducer described in the utility model, described mobile mirror 3
Connect described testee 7 by a rigid member, in the case of the position relationship of remaining part, make institute
State testee 7 to be subjected to displacement, drive described mobile mirror 3 to be subjected to displacement, use this structure to arrange,
When described testee 7 moves, drive connected described mobile mirror 3 to produce movement simultaneously,
Changing the spacing of described mobile mirror 3 and stationary mirror 2, described mobile mirror 3 is subjected to displacement
The reflection path that described laser beam 11 front and back is irradiated on described stationary mirror 2 for the first time will not change,
The shift value of the most described mobile mirror of shift value 3 of final described testee 7 is reflected to described distribution
On formula photodetector 5, this frame mode changing described mobile mirror displacement 3 can make described
The Processing Algorithm of processing system is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Embodiment 3
As Figure 1-3, a kind of increment type small-range displacement transducer described in the utility model and tested
Object 7, described sensor include lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, distributed photodetector 5 and processing system, also include housing and connector 31.
Described laser beam 11 is obtained by lasing light emitter 1 transmitting, described lasing light emitter 1, stationary mirror 2, shifting
Dynamic reflecting mirror 3, connector 31, detection reflecting mirror 4 and distributed photodetector 5 are respectively positioned on described housing
In, forming read head 6, described read head 6 is provided with installing hole or stickers, and described mobile mirror 3 is even
Connecing described connector 31, described connector 31 is rigid member, and described connector 31 stretches out described read head 6
Testee 7 described in external connection, described distributed photodetector 5 is provided with the exploring block of constant spacing
1 and, exploring block 2 52 and exploring block 3 53, described exploring block 3 53 is located at described detection
Optional position between the straight line line of parts 1 and exploring block 2 52, described stationary mirror 2 with
Mobile mirror 3 be arranged in parallel, described mobile mirror 3 can with the relative movement of described stationary mirror 2,
Described laser beam 11 and distributed photodetector 5 are oppositely arranged on described stationary mirror 2 and move anti-
Penetrating mirror 3 two ends, described laser beam 11 incides on described stationary mirror 2, through described mobile reflection
Mirror 3 and stationary mirror 2 alternating reflex, described distributed photodetector is located at by described detection reflecting mirror 4
5 sides, described detection reflecting mirror 4 is for reflecting the described laser beam 11 that described stationary mirror 2 reflects
On described distributed photodetector 5, and by described exploring block 1, exploring block 2 52 and spy
Surveying parts 3 53 sensing, described processing system is used for calculating process described exploring block 1, exploring block
2 52 and exploring block 3 53 receive the number of times of described laser beam 11 and photosensitive order, mobile described quilt
Survey object 7, drive described mobile mirror 3, change the reflection path of described laser beam 11, described place
Reason system receives described sharp according to described exploring block 1, exploring block 2 52 and exploring block 3 53
Described spacing between the number of times of light beam 11 and photosensitive order and exploring block, draws described testee 7
Displacement.
Use a kind of increment type small-range displacement transducer described in the utility model, also include housing, described
Lasing light emitter 1, stationary mirror 2, mobile mirror 3, connector 31, detection reflecting mirror 4 and distributed
Photodetector 5 is respectively positioned in described housing, formed read head 6, described read head 6 be provided with installing hole or
Stickers, uses this structure to arrange, and described read head 6 is easy to and described testee 7 or relative quiet
Members fits, clamping or stickup only, easy disassembly；Described detection reflecting mirror 4 is set simultaneously, it is possible to make
Described mobile mirror 3, during being subjected to displacement, is reflexed to described detection anti-by described mobile mirror 3
The luminous reflectance penetrating mirror 4 is gone out, and described distributed photodetector 5 is only measured described stationary mirror 2 and reflected
Described laser beam 11, it is to avoid described laser beam 11 occurs reflection and direct projection to exist to cause at edge simultaneously
Measure interference.
Embodiment 4
As Figure 1-3, a kind of increment type small-range displacement transducer described in the utility model and tested
Object 7, described sensor include lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, distributed photodetector 5 and processing system, also include housing and connector 31.
Difference from Example 3 is, described distributed photodetector 5 also includes that at least one detects
Parts four, described exploring block four is located at the straight line line of described exploring block 1 and exploring block 2 52
Between optional position.
As a kind of preferred version of the present embodiment, between described exploring block 3 53 and exploring block 1
It is provided with a described exploring block four, between described exploring block 3 53 and exploring block 2 52, is provided with another
Individual described exploring block four.
Use a kind of increment type small-range displacement transducer described in the utility model, described distributed smooth electrical resistivity survey
Survey device 5 and also include that at least one exploring block four, described exploring block four are located at described exploring block 1 He
Optional position between the straight line line of exploring block 2 52, uses this structure to arrange, since it is desired that judge
The direction of displacement of described testee 7, described distributed photodetector 5 at least needs three exploring blocks
Can distinguish the direction of displacement of described testee 7 during measuring, the most described laser beam 11 finally stops
In described exploring block 1 and this closed interval of exploring block 2 52, described exploring block 1 or spy
After survey parts 2 52 or exploring block 3 53 sense described laser beam 11 for the last time, described laser beam 11
The small quantity inspection moved again does not measures needs and ignores, at described exploring block 1 and exploring block 2 52
At least one complementary described exploring block four is set between straight line line, it is possible to refine described exploring block
One 51 and the surveying range of exploring block 2 52, the final negligible amount of described laser beam 11 will be less, permissible
Improve the certainty of measurement of institute's displacement sensors further.
Embodiment 5
As Figure 1-3, the measurement side of a kind of increment type small-range displacement transducer described in the utility model
Method, including such as the displacement transducer in embodiment 4, its measuring method comprises the following steps:
A, testee 7 is connected to described mobile mirror 3 by a rigid member；
B, transmitting one laser beam 11, described laser beam 11 is incident on described stationary mirror at a certain angle
On 2, it is assumed that described angle of incidence is θ, described laser beam 11 is through described stationary mirror 2 and mobile reflection
It is irradiated to after the continuous reflection of mirror 3 on described distributed photodetector 5；
C, mobile described testee 7, drive described mobile mirror 3 to move simultaneously, and displacement value is X,
The reflection path change of the most described laser beam 11, described laser beam 11 is by described distributed photodetector
Described exploring block 1, exploring block 2 52 and exploring block 3 53 sensing, described probe portion on 5
The distance values of part 1 and exploring block 3 53 is Y, described exploring block 3 53 and exploring block 2 52
Distance values be Z, when described testee 7 stops mobile, described processing system calculating processes described detection
Parts 1, exploring block 2 52 and exploring block 3 53 sense number of times and the sense of described laser beam 11
Light order and Y value or Z value, draw value and the position of the described displacement value X of described testee 7
Move direction.
Counting sequence according to described exploring block 1, exploring block 2 52 and exploring block 3 53 is carried out
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block 1, exploring block three
53 and exploring block 2 52, then measured displacement direction is the direction close to described stationary mirror 2, if
Counting sequence is followed successively by described exploring block 2 52, exploring block 3 53 and exploring block 1, then surveyed
Direction of displacement is the direction away from described stationary mirror 2.
Use the measuring method of a kind of increment type small-range displacement transducer described in the utility model, described shifting
Dynamic reflecting mirror 3 connects described testee 7 by a rigid member, and the position relationship of remaining part keeps constant,
Described laser beam 11 with angle θ on described stationary mirror 2, then by multiple reflections
Being irradiated to eventually on described distributed photodetector 5, mobile described testee 7 obtains described displacement value
X, the reflection path change of described laser beam 11, when described testee 7 stops mobile, described probe portion
Part 1, exploring block 2 52 and exploring block sense described laser beam 11, described process for more than 3 53 time
System senses described laser according to described exploring block 1, exploring block 2 52 and exploring block 3 53
The number of times of bundle 11 and photosensitive order and Y value or Z value process and obtain a detection range value and described quilt
Surveying the direction of displacement of object 7, this detection range value is far longer than the described displacement of two pieces of mirror pitch
The value of value X, described processing system can calculate two pieces of mirror pitch by this detection range value
The value of described displacement value X, this measuring method is simple, reliable, easy to operate, and can improve displacement
Certainty of measurement, can be used for measuring the increment type change in displacement of described testee 7.
As the further preferred version of the present embodiment, described distance values Y is equal to described distance values Z.
As a kind of preferred version of the present embodiment, by the incidence of the described laser beam 11 in described step b
Angle, θ is turned down or increases described stationary mirror 2 and the length of mobile mirror 3, can improve displacement
Certainty of measurement.
Use the measuring method of a kind of increment type small-range displacement transducer described in the utility model, described
The value of incidence angle θ described in step b is the least or the length of described stationary mirror 2 and mobile mirror 3
The longest, described exploring block 1, exploring block 2 52 and exploring block 3 53 sense described laser beam 11
Number of times the most, described processing system processes the described displacement value X obtained according to described detection range value
The precision of value is higher.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All any amendment, equivalent and improvement etc. made within spirit of the present utility model and principle, all should
Within being included in protection domain of the present utility model.
Claims (10)
1. an increment type small-range displacement transducer, it is characterised in that include laser beam (11),
Two pieces of reflecting mirrors, distributed photodetector (5) and processing system, described distributed smooth electrical resistivity survey
Survey device (5) and be provided with the exploring block one (51) of constant spacing, exploring block two (52) and exploring block
Three (53), described exploring block three (53) is located at described exploring block one (51) and exploring block two
(52) the optional position between straight line line, two pieces of described mirror parallel arrange and can
Relative movement, described laser beam (11) and distributed photodetector (5) are oppositely arranged on two pieces of institutes
Stating reflecting mirror two ends, described laser beam (11) incides on one of described reflecting mirror, passes through
After two pieces of described reflecting mirror alternating reflexs, shine described distributed photodetector (5), and
Sensed by described exploring block one (51), exploring block two (52) and exploring block three (53), described
Processing system is used for calculating the described exploring block one (51) of process, exploring block two (52) and detection
Parts three (53) receive the number of times of described laser beam (11) and photosensitive order.
A kind of increment type small-range displacement transducer the most according to claim 1, it is special
Levying and be, two pieces of reflecting mirrors are stationary mirror (2) and mobile mirror (3), described shifting respectively
Dynamic reflecting mirror (3) connects testee (7) by a rigid member, moves described testee (7),
Drive described mobile mirror (3), change the reflection path of described laser beam (11), described place
Reason system is according to described exploring block one (51), exploring block two (52) and exploring block three (53)
Receive number of times and described exploring block one (51), the exploring block two of described laser beam (11)
(52) and the described spacing of exploring block three (53), the displacement of described testee (7) is drawn.
A kind of increment type small-range displacement transducer the most according to claim 2, it is special
Levying and be, also include detecting reflecting mirror (4), described detection reflecting mirror (4) is located at described distributed
Photodetector (5) side, for the described laser beam (11) reflected by described stationary mirror (2)
Reflex on described distributed photodetector (5).
A kind of increment type small-range displacement transducer the most according to claim 3, it is special
Levy and be, also include the lasing light emitter (1) for launching described laser beam (11).
A kind of increment type small-range displacement transducer the most according to claim 4, it is special
Levy and be, also include housing, described lasing light emitter (1), stationary mirror (2), mobile mirror
(3), detect reflecting mirror (4) and distributed photodetector (5) is respectively positioned in described housing, formation
Read head (6).
A kind of increment type small-range displacement transducer the most according to claim 5, it is special
Levying and be, described mobile mirror (3) is rigidly connected at least one connector (31), described connection
Part (31) is rigid member, and it is outside that described connector (31) stretches out described read head (6).
A kind of increment type small-range displacement transducer the most according to claim 1, it is special
Levying and be, described distributed photodetector (5) also includes at least one exploring block four, institute
State exploring block four and be located at described exploring block one (51) and the straight line line of exploring block two (52)
Between optional position.
A kind of increment type small-range displacement transducer the most according to claim 7, it is special
Levy and be, described exploring block one (51), exploring block two (52), exploring block three (53) and spy
Surveying parts four is a kind of photoelectric device to light spot position sensitivity, can measure the one-dimensional seat of luminous point
Target wire device.
A kind of increment type small-range displacement transducer the most according to claim 4, it is special
Levy and be, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), detection reflection
The position of mirror (4) and distributed photodetector (5) is the most adjustable.
10. according to the arbitrary described a kind of increment type small-range displacement transducer of claim 1-9,
It is characterized in that, the range of institute's displacement sensors is 0-1mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620460586.4U CN205619888U (en) | 2016-05-19 | 2016-05-19 | Increment formula is journey displacement sensor in a small amount |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620460586.4U CN205619888U (en) | 2016-05-19 | 2016-05-19 | Increment formula is journey displacement sensor in a small amount |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783738A (en) * | 2016-05-19 | 2016-07-20 | 北方民族大学 | Incremental type small-measurement-range displacement sensor and measurement method |
| CN110146899A (en) * | 2019-05-28 | 2019-08-20 | 许灵男 | A kind of terminal radar barrier sensory perceptual system |
-
2016
- 2016-05-19 CN CN201620460586.4U patent/CN205619888U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783738A (en) * | 2016-05-19 | 2016-07-20 | 北方民族大学 | Incremental type small-measurement-range displacement sensor and measurement method |
| CN105783738B (en) * | 2016-05-19 | 2019-02-15 | 北方民族大学 | A kind of measurement method of increment type small-range displacement sensor |
| CN110146899A (en) * | 2019-05-28 | 2019-08-20 | 许灵男 | A kind of terminal radar barrier sensory perceptual system |
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Granted publication date: 20161005 Termination date: 20210519 |