CN205808349U - A kind of Novel symmetrical small-range displacement transducer - Google Patents
A kind of Novel symmetrical small-range displacement transducer Download PDFInfo
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- CN205808349U CN205808349U CN201620685399.6U CN201620685399U CN205808349U CN 205808349 U CN205808349 U CN 205808349U CN 201620685399 U CN201620685399 U CN 201620685399U CN 205808349 U CN205808349 U CN 205808349U
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- mirror
- laser beam
- mobile
- photodetector
- displacement transducer
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Abstract
The utility model discloses a kind of Novel symmetrical small-range displacement transducer, including laser beam, stationary mirror, mobile mirror, double mirror, photodetector and processing system.Use this sensor, laser beam be divided into two bundles and reflex to corresponding side respectively photodetector on a position, change stationary mirror and the spacing of mobile mirror, i.e. can change the reflection path of laser beam, finally it is irradiated to another position on the photodetector of correspondence, processing system obtains two groups of detection range values according to these two groups of different two position calculation, these two groups of detection range values are far longer than the true change value of stationary mirror and mobile mirror spacing, processing system can calculate the true change value of stationary mirror and mobile mirror spacing by the meansigma methods of these two groups of detection range values, this sensor construction is simple, it is applicable to testee displacement continually varying measure, measure reliable, precision is higher, it is easily achieved batch micro operations.
Description
Technical field
This utility model relates to a kind of Technology of Precision Measurement and instrument field, particularly to a kind of Novel symmetrical small-range
Displacement transducer.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, in Aero-Space, commercial production, machine-building and army
A lot of field such as thing science has and uses widely.The metering system of displacement has a variety of, and relatively thin tail sheep (such as less than 1cm) leads to
Conventional strain-type, inductance type, differential transformer type, eddy current type, Hall element detect, bigger displacement (such as larger than 1cm)
The sensing technologies such as conventional inductosyn, grating, appearance grid, magnetic grid are measured.Wherein grating sensor easily realizes numeral because having
Change, precision high (current resolution the highest can reach nanoscale), capacity of resisting disturbance is strong, do not have artificial error in reading, installation side
Just, use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor using grating Moire fringe principle to measure displacement.Grating is in a block length bar shaped
Optical glass chi or metal scale on the most parallel intensive groove, incisure density is 10～100 lines per millimeters.By grating shape
The Moire fringe become has optical amplifier effect and error average effect, thus can improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to there is lifting again, it is impossible to
Meet the demand of the highest certainty of measurement, in the urgent need to a kind of simple in construction of exploitation, the higher sensor of precision.
Utility model content
The purpose of this utility model is to overcome the existing grating sensor in the presence of prior art due to photoetching process
Physical arrangement limit, cause its certainty of measurement to be difficult to there is lifting again, it is impossible to meet in the demand of the highest certainty of measurement
State deficiency, it is provided that a kind of Novel symmetrical small-range displacement transducer, this sensor construction is simple, it is adaptable to testee displacement
Continually varying is measured, and measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
In order to realize above-mentioned utility model purpose, this utility model provides techniques below scheme:
A kind of Novel symmetrical small-range displacement transducer, including be arrangeding in parallel and the adjustable stationary mirror of spacing and shifting
Dynamic reflecting mirror and processing system, described stationary mirror and mobile mirror two ends are symmetrical arranged two photodetectors, institute
Stating and be provided with double mirror between stationary mirror and mobile mirror, described stationary mirror is provided with through hole, through described logical
The one laser beam in hole incides described double mirror, is separated into the two described laser beams of bundle after being reflected by described double mirror, and two
Shu Suoshu laser beam incides on described stationary mirror, after described stationary mirror and mobile mirror alternating reflex,
Shining on photodetector described in corresponding side sensed respectively, described processing system is used for processing each described photodetection
Device receives the positional information of the described laser beam of correspondence.
Wherein, described double mirror uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) to form.
Using a kind of Novel symmetrical small-range displacement transducer described in the utility model, described laser beam is by described double
It is divided into two bundle laser beams after reflecting mirror reflection and reflexes to a position on the described photodetector of corresponding side respectively, changing
Described stationary mirror and the spacing of mobile mirror, i.e. can change the reflection path of described laser beam, finally be irradiated to correspondence
Described photodetector on another position, described processing system obtains two groups according to these two groups of different two position calculation
Detection range value, these two groups of detection range values are far longer than the true change of described stationary mirror and mobile mirror spacing
Value, described processing system can calculate two groups of shift values of described mobile mirror by these two groups of detection range values and make even
Average, and using this meansigma methods as the shift value of described testee, this sensor construction is simple, it is adaptable to testee displacement
Continually varying is measured, and measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, the range of institute's displacement sensors is 0-1um.
Preferably, described mobile mirror connects testee, mobile described testee, drives described mobile reflection
Mirror, changes the reflection path of the two described laser beams of bundle, and described processing system is often restrainted according to before and after described mobile mirror displacement
The spacing of described laser beam two sensed positions on corresponding described photodetector respectively, calculates described mobile reflection
Two groups of shift values of mirror are also averaged, and using this meansigma methods as the shift value of described testee.
Preferably, described photodetector uses a kind of photoelectric device to light spot position sensitivity, can measure light
The rectangle device of the one-dimensional coordinate of point.Such as, photodetector may select one-dimensional linear photodetector and (is called for short one-dimensional
PSD), it is possible to be chosen to two dimensional surface photodetector (abbreviation Two-dimensional PSD).
Preferably, institute's displacement sensors also includes the lasing light emitter for launching described laser beam, and described lasing light emitter is positioned at
Described stationary mirror side.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror, double mirror
Being respectively positioned in described housing with two photodetectors, form read head, described read head is provided with installing hole or stickers.
Use this structure to arrange, described read head be easy to described testee or the members fits of geo-stationary,
Clamping or stickup, easy disassembly.
Preferably, described mobile mirror connects at least one connector, and described connector is rigid member, described connector
Stretch out outside described read head.
Preferably, described lasing light emitter, stationary mirror, mobile mirror, double mirror and the position of two photodetectors
Put the most adjustable.
Preferably, described laser beam path is perpendicular to described stationary mirror and incides through described through hole described double anti-
Penetrate on mirror.
This utility model additionally provides the measuring method of a kind of Novel symmetrical small-range displacement transducer, more than such as
Arbitrary described New Displacement Transducer, it is characterised in that its measuring method comprises the following steps:
A, described mobile mirror is connected on testee；
B, described laser beam incide on described double mirror through described through hole, formed two bundles from described laser
Bundle, every Shu Suoshu laser beam incides on described stationary mirror respectively, it is assumed that two angle of incidence restrainting described laser beam are respectively θ
And γ, every Shu Suoshu laser beam is irradiated to described in correspondence after the continuous reflection of described stationary mirror and mobile mirror
Position one on photodetector；
C, mobile described testee, driving described mobile mirror, displacement value is X, the most corresponding described laser
The reflection path change of bundle, when described testee stops mobile, corresponding described laser beam incides the described photoelectricity of correspondence
Position two on detector；
D, described processing system, according to position one described in two groups and distance values Y of position two and the value of Y ', calculate described
The value of two groups of corresponding displacement value X and X ' of mobile mirror is also averaged, and i.e. obtains the displacement of described testee
The value of value X.
Use the measuring method of a kind of Novel symmetrical small-range displacement transducer described in the utility model, described movement
Reflecting mirror connects described testee, and the position relationship of remaining part keeps constant, and a branch of described laser beam is incident on described double
Being divided into the two described laser beams of bundle on reflecting mirror, then the two described laser beams of bundle are respectively radiated to the institute of correspondence by multiple reflections
Stating position one on photodetector, mobile described testee obtains described displacement value X, the reflex circuit of every Shu Suoshu laser beam
Footpath changes, when described testee stops mobile, and position on every Shu Suoshu laser beam irradiation to corresponding described photodetector
Two, described processing system, according to two groups of described positions of different two one and described distance values Y of position two and the value of Y ', calculates
Obtain the value of displacement value X described in two groups of described testee and average, and using this meansigma methods as described measured object
The shift value of body, simultaneously in described step c, the reflection path of described laser beam carrys out flyback on described photodetector continuously
Dynamic, described photodetector detects sweeping interval, when described testee stops mobile, even if described laser beam before and after displacement
The outgoing beam being irradiated on described photodetector is parallel, and described processing system still can be visited according to described photodetector
The described sweeping interval measured, calculates the value of the described displacement value X of described mobile mirror, the institute of the most described testee
Rheme moves the value of value X, and this measuring method is simple, reliable, easy to operate, and can improve displacement measurement accuracy, can be used for
Described testee displacement is disposably changed or the measurement of continuous increment type change in displacement.
Preferably, in described step b or step c, the position of each described photodetector can be passed through with length
The incidence angle θ (γ) of corresponding described laser beam calculates and obtains so that every Shu Suoshu laser beam is at described stationary mirror edge
In the range of the reflection light of point is incident on the described photodetector measurement of correspondence, obtain described position one or described position two,
Direct light is incident on outside described photodetector measurement scope, it is assumed that described stationary mirror and symmetrically arranged two described light
The distance of electric explorer is L, and the length of the most described photodetector is equal to 2 × L/tan θ (2 × L/tan γ), for ensureing institute
State stationary mirror marginal point reflection light be incident on correspondence described photodetector measure in the range of, direct light is incident on right
Outside the described photodetector measurement scope answered, i.e. with described stationary mirror for symmetrical described photodetector to incident illumination
Reflection direction carries out micrometric displacement.
Preferably, in described step b, use the described double mirror that reflection angle is consistent, a branch of of its will be incided
Described laser beam reflexes to two described incidence angle θs and the value phase of γ of the two described laser beams of bundle on described stationary mirror
Deng.
Preferably, when each described mobile mirror displacement value X in described step c keeps fixed value, if needed
Will corresponding to described position one and distance values Y (Y ') of position two the biggest, by entering of each described laser beam in described step b
Penetrate the length that angle, θ (γ) is turned down or increased all described stationary mirrors and mobile mirror.
Adopting in this way, the value of described incidence angle θ (γ) is the least or reflecting mirror (includes described stationary mirror and shifting
Dynamic reflecting mirror) length is the longest, and the probe value of the described displacement value X obtained, the magnification level of the most described distance values Y (Y ') is more
Greatly, described processing system is higher according to the precision of the value of the calculated described displacement value X of value of described distance values Y (Y ').
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
1, using a kind of Novel symmetrical small-range displacement transducer described in the utility model, described laser beam is described
It is divided into two bundle laser beams after double mirror reflection and reflexes to a position on the described photodetector of corresponding side respectively, changing
Becoming the spacing of described stationary mirror and mobile mirror, i.e. can change the reflection path of described laser beam, it is right to be finally irradiated to
Another position on the described photodetector answered, described processing system obtains two according to these two groups of different two position calculation
Group detection range value, these two groups of detection range values are far longer than the true change of described stationary mirror and mobile mirror spacing
Value, described processing system can calculate two groups of shift values of described mobile mirror by these two groups of detection range values and make even
Average, and using this meansigma methods as the shift value of described testee, this sensor construction is simple, it is adaptable to testee displacement
Continually varying is measured, and measures reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, use a kind of Novel symmetrical small-range displacement transducer described in the utility model, also include housing, described
Lasing light emitter, stationary mirror, mobile mirror, double mirror and two photodetectors are respectively positioned in described housing, are formed and read
Several heads, described read head is provided with installing hole or stickers, uses this structure to arrange, and described read head is easy to and described measured object
Body or the members fits of geo-stationary, clamping or stickup, easy disassembly；
3, the measuring method of a kind of Novel symmetrical small-range displacement transducer described in the utility model, described shifting are used
Dynamic reflecting mirror connects described testee, and the position relationship of remaining part keeps constant, and a branch of described laser beam is incident on described
Being divided into the two described laser beams of bundle on double mirror, then the two described laser beams of bundle are respectively radiated to correspondence by multiple reflections
Position one on described photodetector, mobile described testee obtains described displacement value X, the reflection of every Shu Suoshu laser beam
Path change, when described testee stops mobile, every Shu Suoshu laser beam irradiation is upper to corresponding described photodetector
Putting two, described processing system is according to two groups of described positions of different two one and described distance values Y of position two and the value of Y ', meter
Calculate the value of displacement value X described in obtaining two groups of described testee and average, and using this meansigma methods as described tested
The shift value of object, simultaneously in described step c, the reflection path of described laser beam on described photodetector the most back and forth
Sweeping, described photodetector detects sweeping interval, when described testee stops mobile, even if described laser before and after displacement
The outgoing beam that bundle is irradiated on described photodetector is parallel, and described processing system still can be according to described photodetector
The described sweeping interval detected, calculates the value of the described displacement value X of described mobile mirror, the most described testee
The value of described displacement value X, this measuring method is simple, reliable, easy to operate, and can improve displacement measurement accuracy, available
In described testee displacement disposably being changed or the measurement of continuous increment type change in displacement；
4, the measuring method of a kind of Novel symmetrical small-range displacement transducer described in the utility model is used, described
The value of incidence angle θ described in step b (γ) is the least or reflecting mirror (including described stationary mirror and mobile mirror) length
The longest, the probe value of the described displacement value X obtained, the magnification level of the most described distance values Y (Y ') is the biggest, described processing system
The precision of the value of the calculated described displacement value X of value according to described distance values Y (Y ') is higher.
Accompanying drawing explanation
Fig. 1 is the principle schematic of a kind of Novel symmetrical small-range displacement transducer described in the utility model；
Fig. 2 is the partial enlarged drawing of Fig. 1；
Fig. 3 is the structural representation of a kind of Novel symmetrical small-range displacement transducer described in the utility model；
Fig. 4 is schematic diagram during a kind of Novel symmetrical small-range displacement sensor described in the utility model；
Fig. 5 is a kind of Novel symmetrical small-range displacement transducer photoelectric probe position described in the utility model and length
The schematic diagram of degree.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 111-position one, 112-position two, 2-stationary mirror, 21-leads to
Hole, 3-mobile mirror, 31-connector, 4-photodetector, 5-read head, 6-testee, 7-double mirror.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, this utility model is described in further detail.But should be by this
It is interpreted as that the scope of the above-mentioned theme of this utility model is only limitted to below example, all is realized based on this utility model content
Technology belongs to scope of the present utility model.
Embodiment 1
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer described in the utility model, set including parallel
Put and the adjustable stationary mirror of spacing 2 and mobile mirror 3 and processing system.
Described stationary mirror 2 and mobile mirror 3 two ends are symmetrical arranged two photodetectors 4, described fixation reflex
Being provided with double mirror 7 between mirror 2 and mobile mirror 3, described stationary mirror 2 is provided with through hole 21, through described through hole 21
One laser beam 11 incide described double mirror 7, be separated into the two described laser beams of bundle after being reflected by described double mirror 7
11, two restraint described laser beam 11 incides on described stationary mirror 2, hands over through described stationary mirror 2 and mobile mirror 3
After reflection, shining on photodetector 4 described in corresponding side sensed respectively, described processing system is used for processing each institute
State the positional information that photodetector 4 receives the described laser beam 11 of correspondence.
Wherein, described double mirror 7 uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) to form.
Using a kind of Novel symmetrical small-range displacement transducer described in the utility model, described laser beam 11 is described
It is divided into two bundle laser beams 11 after double mirror 7 reflection and reflexes to a position on the described photodetector 4 of corresponding side respectively
Put, change described stationary mirror 2 and the spacing of mobile mirror 3, i.e. can change the reflection path of described laser beam 11, finally
Being irradiated to another position on the described photodetector 4 of correspondence, described processing system is according to these two groups of different two positions
Being calculated two groups of detection range values, these two groups of detection range values are far longer than between described stationary mirror 2 and mobile mirror 3
Away from true change value, described processing system can calculate the two of described mobile mirror 2 by these two groups of detection range values
Group shift value is also averaged, and using this meansigma methods as the shift value of described testee, this sensor construction is simple, is suitable for
Measuring in testee displacement continually varying, measure reliable, precision is higher, it is easy to accomplish batch micro operations.
Embodiment 2
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer described in the utility model and measured object
Body 6, described sensor includes be arrangeding in parallel and the adjustable stationary mirror of spacing 2 and mobile mirror 3, processing system and shell
Body.
The present embodiment institute displacement sensors also includes the lasing light emitter 1 for launching described laser beam 11, described fixing anti-
Penetrate mirror 2 and mobile mirror 3 two ends be symmetrical arranged two photodetectors 4, described stationary mirror 2 and mobile mirror 3 it
Between be provided with double mirror 7, described lasing light emitter 1 is positioned at described stationary mirror 2 side, and described stationary mirror 2 is provided with through hole
21, the one laser beam 11 through described through hole 21 incides described double mirror 7, and described double mirror 7 uses existing structure,
I.e. there are two reflecting mirrors (primary mirror, secondary mirror) to form, after being reflected by described double mirror 7, are separated into the two described laser beams of bundle 11, two
Shu Suoshu laser beam 11 incides on described stationary mirror 2, the most anti-through described stationary mirror 2 and mobile mirror 3
After penetrating, shining on photodetector 4 described in corresponding side sensed respectively, described processing system is used for processing each described light
Electric explorer 4 receives the positional information of the described laser beam 11 of correspondence, described lasing light emitter 1, stationary mirror 2, mobile reflection
Mirror 3, double mirror 7 and two photodetectors 4 are respectively positioned in described housing, form read head 5, and described read head 5 is provided with peace
Dress hole or stickers, described mobile mirror 3 connects a connector 31, and described connector 31 is rigid member, described connector
31 stretch out described read head 5 outside and connect described testee 6, and mobile described testee 6 drives described mobile mirror
3, change the reflection path of each described laser beam 11 of correspondence, described processing system is according to the displacement of described mobile mirror 3
Front and back the spacing of every Shu Suoshu laser beam 11 two sensed positions on corresponding described photodetector 4 respectively, calculates
Two groups of shift values of described mobile mirror 3 are also averaged, and using this meansigma methods as the shift value of described testee 6.
The position of each described photodetector 4 can be calculated by the incidence angle θ (γ) of described laser beam 11 with length
Obtain so that described laser beam 11 is incident on described photodetector 4 at the reflection light of described stationary mirror 2 marginal point and measures
In the range of, obtaining described position 1 or described position 2 112, direct light is incident on described photodetector 4 and measures scope
Outward, as shown in Figure 4, wherein incidence angle θ is equal to angle of incidence γ, and described stationary mirror 2 with the distance of described photodetector 4 is
L, the length of the most described photodetector 4 is equal to 2 × L/tan θ, for ensureing that the reflection light of described stationary mirror 2 marginal point enters
Penetrating in the range of described photodetector 4 is measured, direct light is incident on described photodetector 4 and measures outside scope, i.e. with described
The described photodetector 4 that stationary mirror 2 is symmetrical carries out micrometric displacement to incident illumination reflection direction.
Use a kind of Novel symmetrical small-range displacement transducer described in the utility model, also include housing, described sharp
Light source 1, stationary mirror 2, mobile mirror 3, double mirror 7 and two photodetectors 4 are respectively positioned in described housing, are formed
Read head 5, described read head 5 is provided with installing hole or stickers, uses this structure to arrange, and described read head 5 is easy to described
Testee 6 or the members fits of geo-stationary, clamping or stickup, easy disassembly.
Embodiment 3
As Figure 1-5, a kind of Novel symmetrical small-range displacement transducer described in the utility model, set including parallel
Put and the adjustable stationary mirror of spacing 2 and mobile mirror 3 and processing system.
Being with the difference of embodiment 1, the center of described stationary mirror 2 is provided with through hole 21, it may be assumed that
Described stationary mirror 2 and mobile mirror 3 two ends are symmetrical arranged two photodetectors 4, described fixation reflex
Being provided with double mirror 7 between mirror 2 and mobile mirror 3, described stationary mirror 2 designs with mobile mirror 3 Parallel Symmetric, institute
The center stating stationary mirror 2 is provided with through hole 21, and the one laser beam 11 through described through hole 21 incides described double
Reflecting mirror 7, is separated into the two described laser beams of bundle 11 after being reflected by described double mirror 7, two restraint described laser beam 11 incides institute
State on stationary mirror 2, after described stationary mirror 2 and mobile mirror 3 alternating reflex, shine corresponding side respectively
On described photodetector 4 sensed, described processing system for process each described photodetector 4 receive correspondence institute
State the positional information of laser beam 11.
Wherein, described double mirror 7 uses existing structure, i.e. has two reflecting mirrors (primary mirror, secondary mirror) to form.
Using a kind of Novel symmetrical small-range displacement transducer described in the utility model, described laser beam 11 is described
It is divided into two bundle laser beams 11 after double mirror 7 reflection and reflexes to a position on the described photodetector 4 of corresponding side respectively
Put, change described stationary mirror 2 and the spacing of mobile mirror 3, i.e. can change the reflection path of described laser beam 11, finally
Being irradiated to another position on the described photodetector 4 of correspondence, described processing system is according to these two groups of different two positions
Being calculated two groups of detection range values, these two groups of detection range values are far longer than between described stationary mirror 2 and mobile mirror 3
Away from true change value, described processing system can calculate the two of described mobile mirror 2 by these two groups of detection range values
Group shift value is also averaged, and using this meansigma methods as the shift value of described testee, this sensor construction is simple, is suitable for
Measuring in testee displacement continually varying, measure reliable, precision is higher, it is easy to accomplish batch micro operations.
Embodiment 4
As Figure 1-5, the measuring method of a kind of Novel symmetrical small-range displacement transducer described in the utility model,
Including the Novel symmetrical small-range displacement transducer as described in as arbitrary in embodiment 2 or 3, its measuring method comprises the following steps:
A, described mobile mirror 3 is connected on testee 6；
B, described laser beam 11 incide on described double mirror 7 through described through hole 21, formed two bundles from described in
Laser beam 11, every Shu Suoshu laser beam 11 incides on described stationary mirror 2 respectively, it is assumed that two restraint entering of described laser beam 11
Firing angle is respectively θ and γ, and every Shu Suoshu laser beam 11 is after the continuous reflection of described stationary mirror 2 and mobile mirror 3
It is irradiated to position 1 on the described photodetector 4 of correspondence；
C, mobile described testee 6, drive described mobile mirror 3, and displacement value is X, and the most corresponding is described sharp
The reflection path change of light beam 11, when described testee 6 stops mobile, corresponding described laser beam 11 incides the institute of correspondence
State position 2 112 on photodetector 4；
D, described processing system, according to position 1 described in two groups and distance values Y of position 2 112 and the value of Y ', calculate
Go out the value of two groups of corresponding displacement value X and X ' of described mobile mirror 3 and average, i.e. obtaining described testee 6
The value of displacement value X.
As a preferred version of the present embodiment, in described step b or step c, each described photodetector 4
Position and length can be calculated by the incidence angle θ (γ) of corresponding described laser beam 11 and obtain so that often Shu Suoshu laser
Bundle 11, in the range of the reflection light of described stationary mirror 2 marginal point is incident on described photodetector 4 measurement of correspondence, obtains
Described position one or described position two, direct light is incident on described photodetector 4 and measures outside scope, it is assumed that described fixing anti-
The distance penetrating mirror 2 and symmetrically arranged two described photodetectors 4 is L, and the length of the most described photodetector 4 is equal to 2
× L/tan θ (2 × L/tan γ), for ensureing that the reflection light of described stationary mirror 2 marginal point is incident on the described photoelectricity of correspondence
In the range of detector 4 is measured, direct light is incident on the described photodetector 4 of correspondence and measures outside scope, i.e. with described fixing anti-
Penetrate the described photodetector 4 that mirror 2 is symmetrical and carry out micrometric displacement to incident illumination reflection direction.
As a preferred version of the present embodiment, in described step b, use the described bireflectance that reflection angle is consistent
Mirror 7, reflexes to a branch of described laser beam 11 inciding it two on described stationary mirror 2 and restraints the two of described laser beams 11
The value of individual described incidence angle θ and γ is equal.
As a preferred version of the present embodiment, when each described mobile mirror 3 displacement value in described step c
When X keeps fixed value, if distance values Y (Y ') of the described position 1 of needs correspondence and position 2 112 is the biggest, by described
The incident angle θ (γ) of each described laser beam 11 in step b turns down or increases all described stationary mirrors 2 with mobile
The length of reflecting mirror 3, adopts in this way, and the value of described incidence angle θ (γ) is the least or reflecting mirror (includes described fixation reflex
Mirror 2 and mobile mirror 3) length is the longest, the probe value of the described displacement value X obtained, the amplification of the most described distance values Y (Y ')
Degree is the biggest, and described processing system is according to the precision of the value of the calculated described displacement value X of value of described distance values Y (Y ')
Higher.
Use the measuring method of a kind of Novel symmetrical small-range displacement transducer described in the utility model, described movement
Reflecting mirror 3 connects described testee 6, and the position relationship of remaining part keeps constant, and a branch of described laser beam 11 is incident on institute
Stating and be divided into the two described laser beams of bundle 11 on double mirror 7, then the two described laser beams of bundle 11 are irradiated respectively by multiple reflections
Position 1 on corresponding described photodetector 4, mobile described testee 6 obtains described displacement value X, often restraints institute
Stating the reflection path change of laser beam 11, when described testee 6 stops mobile, every Shu Suoshu laser beam 11 is irradiated to correspondence
Position 2 112 on described photodetector 4, described processing system is according to two groups of described positions of different two 1 and position
Described distance values Y of 2 112 and the value of Y ', be calculated the value of displacement value X described in two groups of described testee 6 and make even
Average, and using this meansigma methods as the shift value of described testee 6, simultaneously in described step c, described laser beam 11 anti-
Rays footpath sweeps on described photodetector 4 continuously back and forth, and described photodetector 4 detects sweeping interval, described tested
When object 6 stops mobile, even if described laser beam 11 is irradiated to the outgoing beam on described photodetector 4 and puts down before and after displacement
OK, the described sweeping interval that described processing system still can detect according to described photodetector 4, calculate described movement
The value of the described displacement value X of reflecting mirror 3, the value of the described displacement value X of the most described testee 6, this measuring method is simple,
Reliably, easy to operate, and displacement measurement accuracy can be improved, can be used for the displacement of described testee 6 is disposably changed or
The measurement of increment type change in displacement continuously.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all at this
Any amendment, equivalent and the improvement etc. made within the spirit of utility model and principle, should be included in this utility model
Protection domain within.
Claims (10)
1. a Novel symmetrical small-range displacement transducer, it is characterised in that include be arrangeding in parallel and spacing is adjustable fixing
Reflecting mirror (2) and mobile mirror (3) and processing system, described stationary mirror (2) and mobile mirror (3) two ends are symmetrical
Two photodetectors (4) are set, between described stationary mirror (2) and mobile mirror (3), are provided with double mirror (7), institute
Stating stationary mirror (2) and be provided with through hole (21), the one laser beam (11) through described through hole (21) incides described double anti-
Penetrating mirror (7), be separated into the described laser beam of two bundle (11) after being reflected by described double mirror (7), two restraint described laser beam (11) enters
It is mapped on described stationary mirror (2), after described stationary mirror (2) and mobile mirror (3) alternating reflex, goes out respectively
Being mapped to photodetector (4) described in corresponding side upper sensed, described processing system is used for processing each described photodetector
(4) positional information of the described laser beam (11) of correspondence is received.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1, it is characterised in that described movement is anti-
Penetrate mirror (3) and connect testee (6), mobile described testee (6), drive described mobile mirror (3), change two bundle institutes
Stating the reflection path of laser beam (11), described processing system is according to Shu Suoshu laser every before and after described mobile mirror (3) displacement
The spacing of bundle (11) two sensed positions on corresponding described photodetector (4) respectively, calculates described mobile reflection
Two groups of shift values of mirror (3) are also averaged, and using this meansigma methods as the shift value of described testee (6).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 2, it is characterised in that also include for
Launching the lasing light emitter (1) of described laser beam (11), described lasing light emitter (1) is positioned at described stationary mirror (2) side.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 3, it is characterised in that also include shell
Body, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), double mirror (7) and two photodetectors (4) are equal
It is positioned at described housing, forms read head (5).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 4, it is characterised in that described movement is anti-
Penetrating mirror (3) and connect at least one connector (31), described connector (31) is rigid member, and described connector (31) stretches out described reading
Several (5) are outside.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 4, it is characterised in that described lasing light emitter
(1), the position of stationary mirror (2), mobile mirror (3), double mirror (7) and two photodetectors (4) is the most adjustable.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1, it is characterised in that described laser beam
(11) path orthogonal incides on described double mirror (7) in described stationary mirror (2) and through described through hole (21).
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1, it is characterised in that each described light
The position of electric explorer (4) can be calculated by the angle of incidence of described laser beam (11) with length and obtain so that described laser beam
(11) in the range of the reflection light at described stationary mirror (2) marginal point is incident on described photodetector (4) measurement, direct light
It is incident on outside described photodetector (4) measurement scope.
A kind of Novel symmetrical small-range displacement transducer the most according to claim 1, it is characterised in that each described light
Electric explorer (4) uses a kind of photoelectric device to light spot position sensitivity, can measure one-dimensional coordinate rectangular of luminous point
Shape device.
10. according to the arbitrary described a kind of Novel symmetrical small-range displacement transducer of claim 1-9, it is characterised in that should
The range of displacement transducer is 0-1um.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620685399.6U CN205808349U (en) | 2016-07-04 | 2016-07-04 | A kind of Novel symmetrical small-range displacement transducer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620685399.6U CN205808349U (en) | 2016-07-04 | 2016-07-04 | A kind of Novel symmetrical small-range displacement transducer |
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| CN205808349U true CN205808349U (en) | 2016-12-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910537A (en) * | 2016-07-04 | 2016-08-31 | 北方民族大学 | Novel symmetric small measurement range displacement sensor and measuring method |
-
2016
- 2016-07-04 CN CN201620685399.6U patent/CN205808349U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910537A (en) * | 2016-07-04 | 2016-08-31 | 北方民族大学 | Novel symmetric small measurement range displacement sensor and measuring method |
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