CN205619887U - Micro displacement sensor is measured to increment formula in turn - Google Patents
Micro displacement sensor is measured to increment formula in turn Download PDFInfo
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- CN205619887U CN205619887U CN201620460413.2U CN201620460413U CN205619887U CN 205619887 U CN205619887 U CN 205619887U CN 201620460413 U CN201620460413 U CN 201620460413U CN 205619887 U CN205619887 U CN 205619887U
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Abstract
The utility model discloses a micro displacement sensor is measured to increment formula in turn, including between laser beam, two speculums, photoelectric detector no. 1, photoelectric detector no. 2, guide rail no. 1, guide rail no. 2 and control processing system. Utilize this sensor, constantly reflect among two speculums of a set of parallel arrangement through the laser beam, finally shine on two sets of photoelectric detector, change the interval of two speculums, can change the reflection path of laser beam promptly, , moves every photoelectric detector of group photoelectric detector response laser beam on belonging to the guide rail, control processing system obtains a detection displacement value according to photoelectric detector's sensitization mileage and the processing of sensitization direction, control processing system can survey the displacement value through this and in addition perhaps subtract the displacement value of photoelectric detector on the track drew two reflection mirror spacing after calculating true change value, the sensor has the advantages of simple structure, measure reliably, the precision is higher, easily realize batch manufacture.
Description
Technical field
This utility model relates to Technology of Precision Measurement and instrument field, replaces increment type particularly to one and measures
Micro-displacement sensor.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, at Aero-Space, commercial production, machine
Make and a lot of fields such as military science have and use widely.The metering system of displacement has a variety of, relatively
Thin tail sheep (such as less than 1cm) is generally with strain-type, inductance type, differential transformer type, eddy current type, Hall
Sensor detects, and inductosyn, grating, appearance grid, magnetic are commonly used in bigger displacement (such as larger than 1cm)
The sensing technologies such as grid are measured.Wherein grating sensor because of have easily realize digitized, precision height (divide at present
What resolution was the highest can reach nanoscale), capacity of resisting disturbance is strong, do not have artificial error in reading, easy for installation,
Use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor using grating Moire fringe principle to measure displacement.Grating is at one piece
The most parallel intensive groove on the optical glass chi of strip or metal scale, incisure density is 10～100
Lines per millimeter.The Moire fringe formed by grating has optical amplifier effect and an error average effect, thus energy
Improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to there is lifting again,
Cannot meet the demand of the highest certainty of measurement, in the urgent need to a kind of simple in construction of exploitation, precision is higher
Sensor.
Utility model content
The purpose of this utility model is: for prior art exist existing grating sensor due to photoetching work
The physical arrangement of skill limits, and causes its certainty of measurement to be difficult to there is lifting again, it is impossible to meet the highest measurement
The above-mentioned deficiency of demand of precision, it is provided that a kind of alternately increment type measures micro-displacement sensor and measuring method, should
Sensor construction is simple, it is adaptable to the measurement of testee change in displacement, measures reliable, and precision is higher, easily
In realizing batch micro operations.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of alternately increment type measures micro-displacement sensor, including laser beam, two pieces of reflecting mirrors, photodetections
Device one, photodetector two, guide rail one, guide rail two and control processing system, described photodetector one sets
On described guide rail one and can move thereon, described photodetector two is located on described guide rail two and can be
On it mobile, two pieces of described mirror parallel arrange and can relative movement, described photodetector one He
Photodetector two is arranged on one end of two pieces of described reflecting mirrors, and the relative other end arranges described laser beam,
Described laser beam incides on one of described reflecting mirror, after two pieces of described reflecting mirror alternating reflexs,
Shine described photodetector one or photodetector two sensed, described control processing system communication link
Connect described photodetector one and photodetector two, and be used for adding up described photodetector one or light electrical resistivity survey
Survey the photosensitive mileage of device two and photosensitive direction.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, by described laser
Constantly reflect among two pieces of reflecting mirrors that Shu Yi group be arranged in parallel, be finally irradiated on two groups of photodetectors,
Change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam, often organize photodetector
On the guide rail of place, mobile described photodetector senses described laser beam, and described control processing system is according to described
The photosensitive mileage of photodetector and photosensitive direction process and obtain a detection shift value, and described control processes system
The shifting on the track of described photodetector can be added or be deducted to system by this detection shift value
Dynamic distance value draws the true change value of two pieces of mirror pitch after calculating, and this sensor construction is simple,
During measurement, after fixing to one of described reflecting mirror and testee connection, there is position in described testee
When moving change, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, described instead by measurement two pieces
Penetrating the spacing changing value of mirror, can be back-calculated to obtain the shift value of described testee, it is applicable to described tested
The measurement of ohject displacement change, measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, described photodetector one is provided with the exploring block one of constant spacing, exploring block two and visits
Surveying parts three, described exploring block three is located between described exploring block one and the straight line line of exploring block two
Optional position, described photodetector two be provided with the exploring block four of constant spacing, exploring block five and visit
Surveying parts six, described exploring block six is located between described exploring block four and the straight line line of exploring block five
Optional position, described exploring block one, exploring block two, exploring block three, exploring block four, detection
Parts five and exploring block six sense described laser beam, and described control processing system is used for adding up described probe portion
Part one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense
The number of times of described laser beam and photosensitive order.
Owing to described exploring block one, exploring block two and exploring block three have fixing spacing, described detection
Parts four, exploring block five and exploring block six have fixing spacing, by described exploring block one, detection
Parts two, exploring block three, exploring block four, exploring block five and exploring block six sense described laser beam
Number of times, and judge one of reflecting mirror fortune relative to another block reflecting mirror according to the photosensitive order of exploring block
Dynamic direction, carries out plus-minus process according to the direction of motion to institute's metering number.
As a kind of increment type displacement transducer, on described photodetector one (or photodetector two)
Described exploring block one (or exploring block two or exploring block three or exploring block four or detection
Parts five or exploring block six) first sense described laser beam, then and described laser beam is next time by institute
State exploring block one (or exploring block two or exploring block three or exploring block four or exploring block
Five or exploring block six) correspondence senses and is designated as an increment number, described control processing system is according to described
Increment number and described exploring block one (or exploring block two or exploring block three or exploring block four or
Person's exploring block five or exploring block six) sensing number of times calculate obtain two pieces of described reflecting mirror relative displacements
Probe value principal part, the most described control processing system is by described photodetector one (or photodetector
Two) as host computer detector, described photodetector two (or photodetector one) is as auxiliary calculating
Detector, described laser beam is finally detected parts sensing, this exploring block and described exploring block one (or
Person's exploring block two or exploring block three or exploring block four or exploring block five or exploring block
Six) distance constitutes two pieces of described reflections as the auxiliary portion of probe value, described probe value principal part and the auxiliary portion of probe value
The probe value of mirror relative displacement, described control processing system draws two pieces according to described probe value after calculating
The true relative shift of described reflecting mirror.
Use this alternately increment type to measure micro-displacement sensor, be arranged in parallel at one group by described laser beam
Two pieces of reflecting mirrors among constantly reflect, be finally irradiated on two groups of photodetectors, change two pieces of reflecting mirrors
Spacing, i.e. can change the reflection path of described laser beam, often three exploring blocks on group photodetector
Repeatedly sensing described laser beam, described control processing system senses described laser beam according to often group exploring block
Number of times and photosensitive order and exploring block between spacing process and obtain a detection range value, this detection
Distance value is far longer than the true change value of two pieces of mirror pitch, and described control processing system can pass through this
Individual detection range value draws the true change value of two pieces of mirror pitch after calculating, this sensor construction letter
Single, during measurement, after fixing to one of described reflecting mirror and testee connection, described testee is sent out
During raw change in displacement, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, by measuring two pieces of institutes
Stating the spacing changing value of reflecting mirror, can be back-calculated to obtain the shift value of described testee, it is applicable to described
The measurement of testee change in displacement, measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Preferably, described exploring block three is located at the straight line line of described exploring block one and exploring block two
Midpoint, described exploring block six is located at the midpoint of the straight line line of described exploring block four and exploring block five.
Preferably, two pieces of reflecting mirrors are stationary mirror and mobile mirror respectively, and described mobile mirror leads to
Cross a rigid member and connect testee, mobile described testee, drive described mobile mirror, change
The reflection path of described laser beam, described control processing system according to described exploring block one, exploring block two,
Exploring block three, exploring block four, exploring block five and exploring block six sense the number of times of described laser beam with
Photosensitive order, and described exploring block one, exploring block two, exploring block three, exploring block four, spy
The relevant spacing surveying parts five and exploring block six draws a probe value, and calculates corresponding described testee
Displacement.
Use this structure to arrange, when described testee moves, drive connected described movement anti-
Penetrating mirror and produce movement simultaneously, change the spacing of described mobile mirror and stationary mirror, described movement is anti-
Penetrate the described laser beam before and after mirror is subjected to displacement and be irradiated to the reflection path on described stationary mirror not for the first time
Can change, the shift value of the most described mobile mirror of shift value of final described testee is reflected to photoelectricity
On detector, this frame mode changing described mobile mirror displacement can make described control process system
The Processing Algorithm of system is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Preferably, also including detecting reflecting mirror, described detection reflecting mirror is located at described photodetector one and light
The side of electric explorer two, reflexes to described photoelectricity for the described laser beam reflected by described stationary mirror
On detector one, or the described laser beam reflected by described mobile mirror reflexes to described photodetector
On two.
Use this structure to arrange, it is possible to make described mobile mirror during being subjected to displacement, described photoelectricity
Detector one only measures the described laser beam of described stationary mirror reflection, and described photodetector two is only measured
The described laser beam of described mobile mirror reflection, it is to avoid described laser beam occurs reflection same with direct projection at edge
Time exist cause measurement interference.
Preferably, the lasing light emitter for launching described laser beam is also included.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror,
Detection reflecting mirror, photodetector one and photodetector two are respectively positioned in described housing, form read head,
Described read head is provided with installing hole or stickers.
Using this structure to arrange, described read head is easy to the parts with described testee or geo-stationary
Adaptation, clamping or stickup, easy disassembly.
Preferably, described mobile mirror is rigidly connected at least one connector, and described connector is rigid member,
Described connector stretches out outside described read head.
Preferably, described photodetector one also includes at least one exploring block seven, described exploring block seven
It is located at the optional position between described exploring block one and the straight line line of exploring block two, described electric explorer
Two also include that at least one exploring block eight, described exploring block eight are located at described exploring block four and probe portion
Optional position between the straight line line of part five.
This structure is used to arrange, since it is desired that judge the direction of displacement of described testee, photodetector
At least need three exploring blocks could distinguish the direction of displacement of described testee, institute simultaneously during measuring
State laser beam and eventually settle at described exploring block one and this closed interval of exploring block two or described probe portion
In part four and this closed interval of exploring block five, described exploring block one or exploring block two or exploring block three
Or after exploring block four or exploring block five or exploring block six sense described laser beam for the last time, described
The inspection of small quantity that laser beam moves again does not measures needs and ignores, at described exploring block one and exploring block two
At least one complementary described exploring block seven is set between straight line line, in described exploring block four and spy
Survey and between the straight line line of parts five, at least one complementary described exploring block eight is set, it is possible to refinement institute
State exploring block one and the surveying range of exploring block two and described exploring block four and the survey of exploring block five
Amount interval, the final negligible amount of described laser beam will be less, can improve institute's displacement sensors further
Certainty of measurement.
Preferably, described exploring block one, exploring block two, exploring block three, exploring block four, detection
Parts five, exploring block six, exploring block seven and exploring block eight are a kind of photosensitive photoelectric device,
Can measure and whether there is light.
Preferably, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetection
The position of device one and photodetector two is the most adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
This utility model additionally provides a kind of alternately increment type and measures the measuring method of micro-displacement sensor, including
Displacement transducer as described in any of the above, its measuring method comprises the following steps:
A, testee is connected to described mobile mirror by a rigid member；
B, transmitting one laser beam, described laser beam is incident on described stationary mirror at a certain angle, false
If described angle of incidence is θ, described laser beam is after the continuous reflection of described stationary mirror and mobile mirror
It is irradiated on described photodetector one or photodetector two, controls processing system and control described photodetection
Device one moves on described guide rail, makes described laser beam by described exploring block one, exploring block two and detection
A sensing in parts three, or control described photodetector two and move on described guide rail two, make institute
Stating laser beam by a sensing in described exploring block four, exploring block five and exploring block six, this moves
Dynamic distance value is X；
C, mobile described testee, drive described mobile mirror to move simultaneously, the most described laser beam
Reflection path changes, and described laser beam is by the described exploring block one on described photodetector one, probe portion
Part two and exploring block three sense or by the described exploring block four on described photodetector two, probe portion
Part five and exploring block six sense, and when described testee stops mobile, described control processing system adds up institute
State exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and probe portion
Part six senses the spacing between the number of times of described laser beam and photosensitive order and each exploring block, draws described
The detection shift value Y of testee and direction of displacement；
D, described control processing system add according to the value of the detection displacement Y of its described testee drawn
Or the value deducting displacement X draws the true change value of described testee displacement after calculating.
Wherein said photodetector one is moving direction and described testee direction of displacement on described guide rail one
Identical, or described photodetector two moving direction and described testee displacement side on described guide rail two
To on the contrary, the value of the detection displacement Y of described testee is plus the value of displacement X；Described photodetection
Device one moving direction on described guide rail one is contrary with described testee direction of displacement, or or described light
Electric explorer two moving direction on described guide rail two is identical with described testee direction of displacement, described tested
The value of the detection displacement Y of object deducts the value of displacement X.
A kind of alternately increment type described in the utility model is used to measure the measuring method of micro-displacement sensor, institute
Stating mobile mirror and connect described testee by a rigid member, the position relationship of remaining part keeps constant,
Described laser beam, is then finally irradiated by multiple reflections with angle θ on described stationary mirror
On photodetector, moving photoconductor detector makes exploring block sensing thereon described sharp in orbit
This moving distance value of light beam is X, mobile described testee, the reflection path change of described laser beam,
When described testee stops mobile, described control processing system is according to described exploring block one, exploring block
Two, exploring block three, exploring block four, exploring block five and exploring block six sense described laser beam
Spacing between number of times and photosensitive order and each exploring block draws a detection shift value Y and described tested
The direction of displacement of object, this detection shift value Y is far longer than the true change value of two pieces of mirror pitch,
Described control processing system adds according to the value of the detection displacement Y of its described testee drawn or subtracts
The value going displacement X show that after calculating true change of described testee displacement is worth described quilt
Surveying the shift value of object, this measuring method is simple, reliable, easy to operate, and can improve displacement measurement
Precision, can be used for measuring the increment type change in displacement of described testee.
Preferably, carry out according to the counting sequence of described exploring block one, exploring block two and exploring block three
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block one, exploring block three and visits
Survey parts two, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is successively
For described exploring block two, exploring block three and exploring block one, then measured displacement direction is away from described solid
Determine the direction of reflecting mirror.
Preferably, carry out according to the counting sequence of described exploring block four, exploring block five and exploring block six
The judgement in measured displacement direction, if counting sequence is followed successively by described exploring block four, exploring block six and visits
Survey parts five, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is successively
For described exploring block five, exploring block six and exploring block four, then measured displacement direction is away from described solid
Determine the direction of reflecting mirror.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
1, use one described in the utility model to replace increment type and measure micro-displacement sensor, swashed by described
Light beam constantly reflects among one group of two pieces of reflecting mirror be arrangeding in parallel, is finally irradiated to two groups of photodetectors
On, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam, often organize light electrical resistivity survey
Survey mobile described photodetector on device place guide rail and sense described laser beam, described control processing system according to
The photosensitive mileage of described photodetector and photosensitive direction process and obtain a detection shift value, at described control
Described photodetector can be added or be deducted to reason system on the track by this detection shift value
Moving distance value after calculating, draw the true change value of two pieces of mirror pitch, this sensor construction letter
Single, during measurement, after fixing to one of described reflecting mirror and testee connection, described testee is sent out
During raw change in displacement, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, by measuring two pieces of institutes
Stating the spacing changing value of reflecting mirror, can be back-calculated to obtain the shift value of described testee, it is applicable to described
The measurement of testee change in displacement, measures reliable, and precision is higher, it is easy to accomplish batch micro operations；
2, use one described in the utility model to replace increment type and measure micro-displacement sensor, swashed by described
Light beam constantly reflects among one group of two pieces of reflecting mirror be arrangeding in parallel, is finally irradiated to two groups of photodetectors
On, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam, often organize photodetection
Three exploring blocks on device repeatedly sense described laser beam, and described control processing system is according to often organizing probe portion
Part senses that the spacing between the number of times of described laser beam and photosensitive order and exploring block processes and obtains a spy
Range finding distance values, this detection range value is far longer than the true change value of two pieces of mirror pitch, described control
Processing system can calculate the true change value of two pieces of mirror pitch by this detection range value, should
Sensor construction is simple, during measurement, after fixing to one of described reflecting mirror and testee connection, and institute
State testee when being subjected to displacement change, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, logical
Cross the spacing changing value measuring two pieces of described reflecting mirrors, the shift value of described testee can be back-calculated to obtain,
It is applicable to the measurement of described testee change in displacement, measures reliable, and precision is higher, it is easy to accomplish in batches
Manufacture；
3, using one described in the utility model to replace increment type and measure micro-displacement sensor, described movement is anti-
Penetrate mirror and connect described testee by a rigid member, in the case of the position relationship of remaining part, make
Described testee is subjected to displacement, and drives described mobile mirror to be subjected to displacement, and uses this structure to arrange,
When described testee moves, drive connected described mobile mirror to produce movement simultaneously, change
The spacing of described mobile mirror and stationary mirror, described mobile mirror be subjected to displacement before and after described
Laser beam is irradiated to the reflection path on described stationary mirror for the first time and will not change, final described measured object
The shift value of the most described mobile mirror of shift value of body is reflected on photodetector, and this changes institute
The frame mode stating mobile mirror displacement can make the Processing Algorithm of described control processing system simplify, with
Time simplify sensor construction, it is easy to manufacture and use；
4, use one described in the utility model to replace increment type and measure micro-displacement sensor, also include housing,
Described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and light electrical resistivity survey
Surveying device two to be respectively positioned in described housing, form read head, described read head is provided with installing hole or stickers, adopts
Arrange by this structure, described read head be easy to described testee or the members fits of geo-stationary,
Clamping or stickup, easy disassembly；
5, use one described in the utility model to replace increment type and measure micro-displacement sensor, described smooth electrical resistivity survey
Survey device one and also include that at least one exploring block seven, described exploring block seven are located at described exploring block one and visit
Surveying the optional position between the straight line line of parts two, described electric explorer two also includes at least one probe portion
Part eight, what described exploring block eight was located between described exploring block four and the straight line line of exploring block five appoints
Meaning position, uses this structure to arrange, since it is desired that judge the direction of displacement of described testee, and light electrical resistivity survey
Surveying device at least needs three exploring blocks could distinguish the direction of displacement of described testee during measuring, with
Shi Suoshu laser beam eventually settles at described exploring block one and this closed interval of exploring block two or described spy
Survey in parts four and this closed interval of exploring block five, described exploring block one or exploring block two or probe portion
After part three or exploring block four or exploring block five or exploring block six sense described laser beam for the last time,
The small quantity inspection that described laser beam moves again does not measures needs and ignores, at described exploring block one and exploring block
At least one complementary described exploring block seven is set between the straight line line of two, at described exploring block four
And at least one complementary described exploring block eight is set between the straight line line of exploring block five, it is possible to thin
Change described exploring block one and the surveying range of exploring block two and described exploring block four and exploring block five
Surveying range, the final negligible amount of described laser beam will be less, can improve described displacement sensing further
The certainty of measurement of device；
6, a kind of alternately increment type described in the utility model is used to measure the measuring method of micro-displacement sensor,
Described mobile mirror connects described testee by a rigid member, and the position relationship of remaining part keeps not
Becoming, described laser beam on described stationary mirror, then passes through multiple reflections final with angle θ
Being irradiated on photodetector, moving photoconductor detector makes an exploring block thereon sense institute in orbit
Stating this moving distance value of laser beam is X, mobile described testee, and the reflection path of described laser beam becomes
Changing, when described testee stops mobile, described control processing system is according to described exploring block one, detection
Parts two, exploring block three, exploring block four, exploring block five and exploring block six sense described laser
Spacing between the number of times of bundle and photosensitive order and each exploring block draws a detection shift value Y and described
The direction of displacement of testee, this detection shift value Y is far longer than the true change of two pieces of mirror pitch
Value, described control processing system add according to the value of the detection displacement Y of its described testee drawn or
Person deducts the value of displacement X and show that after calculating true change of described testee displacement is worth institute
Stating the shift value of testee, this measuring method is simple, reliable, easy to operate, and can improve displacement
Certainty of measurement, can be used for measuring the increment type change in displacement of described testee.
Accompanying drawing explanation
Fig. 1 is the principle side-looking that a kind of alternately increment type described in the utility model measures micro-displacement sensor
Figure；
Fig. 2 is that the structure side that a kind of alternately increment type described in the utility model measures micro-displacement sensor regards
Figure；
Fig. 3 is that a kind of alternately increment type described in the utility model measures side-looking when micro-displacement sensor is measured
Figure.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 2-stationary mirror, 3-mobile mirror, 31-connects
Part, 4-detects reflecting mirror, 5-photodetector one, 51-exploring block one, 52-exploring block two, and 53-detects
Parts three, 6-photodetector two, 61-exploring block four, 62-exploring block five, 63-exploring block six, 7-
Read head, 8-testee, 9-guide rail one, 10-guide rail two.
Detailed description of the invention
Below in conjunction with the accompanying drawings, this utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, this utility model is further elaborated.Should be appreciated that described herein specifically
Embodiment, only in order to explain this utility model, is not used to limit this utility model.
Embodiment 1
As Figure 1-3, one described in the utility model replaces increment type and measures micro-displacement sensor, including
Laser beam 11, two pieces of reflecting mirrors, photodetector 1, photodetector 26, guide rail 1, guide rails two
10 and control processing system.
Described photodetector 1 is located on described guide rail 1 and can move thereon, described photodetection
Device 26 is located on described guide rail 2 10 and can move thereon, and two pieces of described mirror parallel are arranged and energy
Enough relative movements, described photodetector 1 and photodetector 26 are arranged on two pieces of described reflecting mirrors
One end, the relative other end arranges described laser beam 11, described laser beam 11 incide one of described instead
Penetrate on mirror, after two pieces of described reflecting mirror alternating reflexs, shine described photodetector 1 or photoelectricity
Detector 26 is the most sensed, and described control processing system communicates to connect described photodetector 1 and photoelectricity
Detector 26, and for adding up described photodetector 1 or the photosensitive mileage of photodetector 26 and sense
Light direction.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, by described laser
Bundle 11 constantly reflects among one group of two pieces of reflecting mirror be arrangeding in parallel, is finally irradiated to two groups of photodetectors
On, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam 11, often organize photoelectricity
On the guide rail of detector place, mobile described photodetector senses described laser beam 11, described control processing system
Photosensitive mileage and photosensitive direction according to described photodetector process and obtain a detection shift value, described control
Described photodetector can be added or be deducted to processing system processed at described rail by this detection shift value
Moving distance value on road calculates the true change value of two pieces of mirror pitch, and this sensor construction is simple,
During measurement, after fixing to one of described reflecting mirror and testee connection, there is position in described testee
When moving change, the spacing of two pieces of described reflecting mirrors can be made accordingly to produce change, described instead by measurement two pieces
Penetrating the spacing changing value of mirror, can be back-calculated to obtain the shift value of described testee, it is applicable to described tested
The measurement of ohject displacement change, measures reliable, and precision is higher, it is easy to accomplish batch micro operations.
Described photodetector 1 is provided with the exploring block 1 of constant spacing, exploring block 2 52 and detection
Parts 3 53, described exploring block 3 53 is located at described exploring block 1 and the straight line of exploring block 2 52
Optional position between line, described photodetector 26 is provided with the exploring block 4 61 of constant spacing, visits
Surveying parts 5 62 and exploring block 6 63, described exploring block 6 63 is located at described exploring block 4 61 and visits
Surveying the optional position between the straight line line of parts 5 62, two pieces of described mirror parallel arrange and can phases
To movement, described photodetector 1 and photodetector 26 are arranged on one end of two pieces of described reflecting mirrors,
The relative other end arranges described laser beam 11, and described laser beam 11 incides on one of described reflecting mirror,
After two pieces of described reflecting mirror alternating reflexs, shine described photodetector 1 or photodetector 26,
And by described exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, spy
Surveying parts 5 62 and exploring block 6 63 sensing, described control processing system is used for adding up described exploring block
One 51, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and detection
Parts 6 63 sense the number of times of described laser beam 11 and photosensitive order.
Owing to described exploring block 1, exploring block 2 52 and exploring block 3 53 have fixing spacing,
Described exploring block 4 61, exploring block 5 62 and exploring block 6 63 have fixing spacing, by described
Exploring block 1, exploring block 2 52 and exploring block 3 53 sense the number of times of described laser beam 11, or
Exploring block 4 61, exploring block 5 62 and exploring block 6 63 described in person sense the secondary of described laser beam 11
Number, and judge one of reflecting mirror motion side relative to another block reflecting mirror according to the photosensitive order of exploring block
To, according to the direction of motion, institute's metering number is carried out plus-minus process.
As a kind of increment type displacement transducer, described photodetector 1 (or photodetector 2 6)
On described exploring block 1 (or exploring block 2 52 or exploring block 3 53 or exploring block
4 61 or exploring block 5 62 or exploring block 6 63) first sense described laser beam 11, then
Described laser beam 11 is next time by described exploring block 1 (or exploring block 2 52 or exploring block
3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63) correspondence senses note
Be an increment number, described control processing system according to described increment number and described exploring block 1 (or
Exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or
Exploring block 6 63) sensing number of times calculate obtain two pieces of described reflecting mirror relative displacements probe value principal part,
The most described control processing system using described photodetector 1 (or photodetector 2 6) as analytic accounting
Calculating detector, described photodetector 26 (or photodetector 1) is as auxiliary calculating detector, institute
State laser beam 11 and be finally detected parts sensing, this exploring block and described exploring block 1 (or detection
Parts 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or detection
Parts 6 63) distance as the auxiliary portion of probe value, described probe value principal part and the auxiliary portion of probe value constitute two pieces of institutes
Stating the probe value of reflecting mirror relative displacement, described control processing system obtains after calculating according to described probe value
Go out the true relative shift of two pieces of described reflecting mirrors.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, by described laser
Bundle 11 constantly reflects among one group of two pieces of reflecting mirror be arrangeding in parallel, is finally irradiated to two groups of photodetectors
On, change the spacing of two pieces of reflecting mirrors, i.e. can change the reflection path of described laser beam 11, often group light electrical resistivity survey
Three exploring blocks surveyed on device repeatedly sense described laser beam 11, and described control processing system is according to often organizing spy
Survey parts to sense that the spacing between the number of times of described laser beam 11 and photosensitive order and exploring block processes and obtain
One detection range value, this detection range value is far longer than the true change value of two pieces of mirror pitch, institute
State control processing system and can draw the true of two pieces of mirror pitch by this detection range value after calculating
Real change value, this sensor construction is simple, during measurement, one of described reflecting mirror is solid with testee
After fixed connection, when described testee is subjected to displacement change, the spacing of two pieces of described reflecting mirrors can be made accordingly
Produce change, by measuring the spacing changing value of two pieces of described reflecting mirrors, described measured object can be back-calculated to obtain
The shift value of body, it is applicable to the measurement of described testee change in displacement, measures reliable, and precision is higher,
It is easily achieved batch micro operations.
Embodiment 2
As Figure 1-3, one described in the utility model replaces increment type measurement micro-displacement sensor and quilt
Surveying object 8, described sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, photodetection
Device 1, photodetector 26 and control processing system.
Described testee 8 connects described mobile mirror 3, described photodetector 1 by a rigid member
It is provided with the exploring block 1 of constant spacing, exploring block 2 52 and exploring block 3 53, described probe portion
Part 3 53 is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52,
Described photodetector 26 is provided with the exploring block 4 61 of constant spacing, exploring block 5 62 and exploring block
6 63, described exploring block 6 63 is located at the straight line line of described exploring block 4 61 and exploring block 5 62
Between optional position, described stationary mirror 2 be arranged in parallel with mobile mirror 3, described mobile reflection
Mirror 3 can with the relative movement of described stationary mirror 2, described photodetector 1 and photodetector two
6 are arranged on described stationary mirror 2 and one end of mobile mirror 3, and the relative other end arranges described laser
Bundle 11, described laser beam 11 incides on described stationary mirror 2, through described mobile mirror 3 with solid
After determining reflecting mirror 2 alternating reflex, shine described photodetector 1 or photodetector 26, and by institute
State exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block
5 62 and exploring block 6 63 sensing, described control processing system be used for adding up described exploring block 1,
Exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block six
63 number of times sensing described laser beam 11 and photosensitive orders, mobile described testee 8, drive described movement
Reflecting mirror 3, changes the reflection path of described laser beam 11, and described control processing system is according to described detection
Parts 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and
Exploring block 6 63 senses number of times and described exploring block 1, the exploring block two of described laser beam 11
52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 relevant between
Away from drawing a probe value, and calculate the displacement of corresponding described testee 8.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, described mobile reflection
Mirror 3 connects described testee 8 by a rigid member, in the case of the position relationship of remaining part, makes
Described testee 8 is subjected to displacement, and drives described mobile mirror 3 to be subjected to displacement, uses this structure to set
Put, when described testee 8 moves, drive connected described mobile mirror 3 to produce shifting simultaneously
Dynamic, change the spacing of described mobile mirror 3 and stationary mirror 2, described mobile mirror 3 occurs
The reflection path that described laser beam 11 before and after displacement is irradiated on described stationary mirror 2 for the first time will not change
Becoming, the shift value of the most described mobile mirror of shift value 3 of final described testee 8 is reflected to photoelectricity
On detector, this frame mode changing the displacement of described mobile mirror 3 can make described control process
The Processing Algorithm of system is simplified, and simplifies sensor construction, it is easy to manufacture and use simultaneously.
Embodiment 3
As Figure 1-3, one described in the utility model replaces increment type measurement micro-displacement sensor and quilt
Survey object 8, described sensor include lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, photodetector 1, photodetector 26 and control processing system, also include housing
With connector 31.
Described laser beam 11 is obtained by lasing light emitter 1 transmitting, described lasing light emitter 1, stationary mirror 2, shifting
Dynamic reflecting mirror 3, detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned on described housing
In, forming read head 7, described read head 7 is provided with installing hole or stickers, and described mobile mirror 3 connects
Described connector 31, described connector 31 is rigid member, and described connector 31 stretches out outside described read head 7
Portion connect described testee 8, described photodetector 1 be provided with constant spacing exploring block 1,
Exploring block 2 52 and exploring block 3 53, described exploring block 3 53 is located at described exploring block 1 He
Optional position between the straight line line of exploring block 2 52, described photodetector 26 is provided with constant spacing
Exploring block 4 61, exploring block 5 62 and exploring block 6 63, described exploring block 6 63 is located at institute
State the optional position between the straight line line of exploring block 4 61 and exploring block 5 62, described fixation reflex
Mirror 2 be arranged in parallel with mobile mirror 3, and described mobile mirror 3 can be with described stationary mirror 2 phase
To movement, described photodetector 1 and photodetector 26 are arranged on described stationary mirror 2 and move
One end of dynamic reflecting mirror 3, the relative other end arranges described laser beam 11, and described laser beam 11 incides institute
State on stationary mirror 2, through described mobile mirror 3 and stationary mirror 2 alternating reflex, described spy
Survey reflecting mirror 4 and be located at described photodetector 1 and photodetector 26 side, described detection reflecting mirror 4
For the described laser beam 11 that described stationary mirror 2 reflects is reflexed to described photodetector 1,
And sensed by described exploring block 1, exploring block 2 52 and exploring block 3 53, or by described shifting
The described laser beam 11 of dynamic reflecting mirror 3 reflection reflexes on described photodetector 26, and by described detection
Parts 4 61, exploring block 5 62 and exploring block 6 63 sensing, described control processing system is used for adding up
Described exploring block 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, probe portion
Part 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and photosensitive order, mobile described tested
Object 8, drives described mobile mirror 3, changes the reflection path of described laser beam 11, described control
Processing system is according to described exploring block 1, exploring block 2 52, exploring block 3 53, exploring block four
61, exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and described probe portion
Part 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and spy
The relevant spacing surveying parts 6 63 draws a probe value, and calculates the displacement of corresponding described testee 8.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, also include housing,
Described lasing light emitter 1, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1
Being respectively positioned in described housing with photodetector 26, form read head 7, described read head 7 is provided with installing hole
Or stickers, use this structure to arrange, described read head 7 is easy to and described testee 8 or relative
Static members fits, clamping or stickup, easy disassembly；Described detection reflecting mirror 4 is set simultaneously, it is possible to make
Described mobile mirror 3 is during being subjected to displacement, and described photodetector 1 is only measured described fixing anti-
Penetrating the described laser beam 11 of mirror 2 reflection, it is anti-that described mobile mirror 3 only measured by described photodetector 26
The described laser beam 11 penetrated, it is to avoid described laser beam 11 occurs reflection and direct projection to exist to cause at edge simultaneously
Measure interference.
Embodiment 4
As Figure 1-3, one described in the utility model replaces increment type measurement micro-displacement sensor and quilt
Survey object 8, described sensor include lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3,
Detection reflecting mirror 4, photodetector 1, photodetector 26 and control processing system, also include housing
With connector 31.
Difference from Example 3 is, described photodetector 1 also includes at least one exploring block
Seven, described exploring block seven is located between described exploring block 1 and the straight line line of exploring block 2 52
Optional position, described electric explorer 26 also includes at least one exploring block eight, described exploring block eight
It is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62.
As a kind of preferred version of the present embodiment, between described exploring block 3 53 and exploring block 1
It is provided with a described exploring block seven, between described exploring block 3 53 and exploring block 2 52, is provided with another
Individual described exploring block seven；A described spy it is provided with between described exploring block 6 63 and exploring block 4 61
Survey parts eight, between described exploring block 6 63 and exploring block 5 62, be provided with another described exploring block
Eight.
Use one described in the utility model to replace increment type and measure micro-displacement sensor, described photodetection
Device 1 also includes that at least one exploring block seven, described exploring block seven are located at described exploring block 1 He
Optional position between the straight line line of exploring block 2 52, described electric explorer 26 also includes at least one
Exploring block eight, described exploring block eight is located at described exploring block 4 61 and the straight line of exploring block 5 62
Optional position between line, uses this structure to arrange, since it is desired that judge the position of described testee 8
Moving direction, photodetector at least needs three exploring blocks could distinguish described testee 8 during measuring
Direction of displacement, the most described laser beam 11 eventually settles at described exploring block 1 and exploring block two
In 52 these closed intervals or described exploring block 4 61 and this closed interval of exploring block 5 62, described spy
Survey parts 1 or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block five
62 or after exploring block 6 63 senses described laser beam 11 for the last time, described laser beam 11 moves again
Small quantity inspection does not measures needs and ignores, at described exploring block 1 and the straight line line of exploring block 2 52
Between at least one complementary described exploring block seven is set, at described exploring block 4 61 and exploring block
At least one complementary described exploring block eight is set between the straight line line of 5 62, it is possible to refine described spy
Survey parts 1 and the surveying range of exploring block 2 52 and described exploring block 4 61 and exploring block five
The surveying range of 62, the final negligible amount of described laser beam 11 will be less, can improve described displacement further
The certainty of measurement of sensor.
Embodiment 5
As Figure 1-3, a kind of alternately increment type described in the utility model measures the measurement of micro-displacement sensor
Method, including such as the displacement transducer in embodiment 4, its measuring method comprises the following steps:
A, testee 8 is connected to described mobile mirror 3 by a rigid member；
B, transmitting one laser beam 11, described laser beam 11 is incident on described stationary mirror at a certain angle
On 2, it is assumed that described angle of incidence is θ, described laser beam 11 is through described stationary mirror 2 and mobile reflection
Being irradiated to after the continuous reflection of mirror 3 on described photodetector 1 or photodetector 26, control processes
System controls described photodetector 1 and moves on described guide rail 9, makes described laser beam 11 by described spy
Survey a sensing in parts 1, exploring block 2 52 and exploring block 3 53, or control described light
Electric explorer 26 moves on described guide rail 2 10, make described laser beam 11 by described exploring block 4 61,
A sensing in exploring block 5 62 and exploring block 6 63, this moving distance value is X；
C, mobile described testee 8, drive described mobile mirror 3 to move, the most described laser simultaneously
The reflection path change of bundle 11, described laser beam 11 is by the described probe portion on described photodetector 1
Part 1, exploring block 2 52 and exploring block 3 53 sense or by described photodetector 26
Described exploring block 4 61, exploring block 5 62 and exploring block 6 63 sensing, described testee 8 stops
Time the most mobile, described control processing system statistics described exploring block 1, exploring block 2 52, probe portion
Part 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense described laser beam 11
Number of times and photosensitive order and each exploring block between spacing, draw the detection displacement of described testee 8
Value Y and direction of displacement；
D, described control processing system add according to the value of the detection displacement Y of its described testee 8 drawn
The value going up or deducting displacement X draws the true change value of described testee 8 displacement after calculating.
Wherein said photodetector 1 is moving direction and described testee 8 on described guide rail 1
Shifting direction is identical, or described photodetector 26 moving direction on described guide rail 2 10 is tested with described
Object 8 direction of displacement is contrary, and the value of the detection displacement Y of described testee 8 is plus the value of displacement X；
Described photodetector 1 is moving direction and described testee 8 direction of displacement phase on described guide rail 1
Instead, or or described photodetector 26 moving direction and described testee on described guide rail 2 10
8 direction of displacement are identical, and the value of the detection displacement Y of described testee 8 deducts the value of displacement X.
A kind of alternately increment type described in the utility model is used to measure the measuring method of micro-displacement sensor, institute
Stating mobile mirror 3 and connect described testee 8 by a rigid member, the position relationship of remaining part keeps not
Becoming, described laser beam 11 on described stationary mirror 2, then passes through multiple reflections with angle θ
Finally being irradiated on photodetector, moving photoconductor detector makes an exploring block sense thereon in orbit
Should described this moving distance value of laser beam 11 be X, mobile described testee 8, described laser beam 11
Reflection path changes, and when described testee 8 stops mobile, described control processing system is according to described detection
Parts 1, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and
Between exploring block 6 63 senses between the number of times of described laser beam 11 and photosensitive order and each exploring block
Away from drawing a detection shift value Y and the direction of displacement of described testee 8, this detects shift value Y
It is far longer than the true change value of two pieces of mirror pitch, the institute that described control processing system is drawn according to it
The value of the detection displacement Y stating testee 8 adds or deducts the value of displacement X and draws after calculating
The true of described testee 8 displacement changes the shift value being worth described testee 8, this measuring method
Simply, reliably, easy to operate, and displacement measurement accuracy can be improved, can be used for described testee 8
Increment type change in displacement measure.
As a kind of preferred version of the present embodiment, according to described exploring block 1, exploring block 2 52 and
The counting sequence of exploring block 3 53 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described
Exploring block 1, exploring block 3 53 and exploring block 2 52, then measured displacement direction is close to described
The direction of stationary mirror 2, if counting sequence is followed successively by described exploring block 2 52, exploring block 3 53
With exploring block 1, then measured displacement direction is the direction away from described stationary mirror 2.
As a kind of preferred version of the present embodiment, according to described exploring block 4 61, exploring block 5 62 and
The counting sequence of exploring block 6 63 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described
Exploring block 4 61, exploring block 6 63 and exploring block 5 62, then measured displacement direction is close to described
The direction of stationary mirror 2, if counting sequence is followed successively by described exploring block 5 62, exploring block 6 63
With exploring block 4 61, then measured displacement direction is the direction away from described stationary mirror 2.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All any amendment, equivalent and improvement etc. made within spirit of the present utility model and principle, all should
Within being included in protection domain of the present utility model.
Claims (10)
1. one kind replaces increment type measurement micro-displacement sensor, it is characterised in that include laser
Bundle (11), two pieces of reflecting mirrors, photodetector one (5), photodetector two (6), guide rail one (9),
Guide rail two (10) and control processing system, described guide rail one (9) is located at by described photodetector one (5)
Going up and can move thereon, the upper also energy of described guide rail two (10) is located at by described photodetector two (6)
Move thereon, two pieces of described mirror parallel arrange and can relative movement, described photoelectricity
Detector one (5) and photodetector two (6) are arranged on one end of two pieces of described reflecting mirrors, relatively
The other end described laser beam (11) is set, described laser beam (11) incides one of described
On reflecting mirror, after two pieces of described reflecting mirror alternating reflexs, shine described photodetector
One (5) or photodetector two (6) sensed, the communication connection of described control processing system is described
Photodetector one (5) and photodetector two (6), and be used for adding up described photodetector one
Or the photosensitive mileage of photodetector two (6) and photosensitive direction (5).
Displacement transducer the most according to claim 1, it is characterised in that described photoelectricity
Detector one (5) is provided with the exploring block one (51) of constant spacing, exploring block two (52) and detection
Parts three (53), described exploring block three (53) is located at described exploring block one (51) and exploring block
Optional position between the straight line line of two (52), described photodetector two (6) is provided with between fixing
Away from exploring block four (61), exploring block five (62) and exploring block six (63), described probe portion
Part six (63) is located between described exploring block four (61) and the straight line line of exploring block five (62)
Optional position, described exploring block one (51), exploring block two (52), exploring block three (53),
Exploring block four (61), exploring block five (62) and exploring block six (63) sense described laser beam
(11), described control processing system is used for adding up described exploring block one (51), exploring block two
(52), exploring block three (53), exploring block four (61), exploring block five (62) and exploring block
Six (63) number of times sensing described laser beam (11) and photosensitive orders.
Displacement transducer the most according to claim 2, it is characterised in that two pieces of reflections
Mirror is stationary mirror (2) and mobile mirror (3) respectively, and described mobile mirror (3) passes through one
Rigid member connects testee (8), mobile described testee (8), drives described mobile reflection
Mirror (3), changes the reflection path of described laser beam (11), and described control processing system is according to institute
State exploring block one (51), exploring block two (52), exploring block three (53), exploring block four (61),
Exploring block five (62) and exploring block six (63) sense the number of times of described laser beam (11) with photosensitive
Sequentially, and described exploring block one (51), exploring block two (52), exploring block three (53),
The relevant spacing of exploring block four (61), exploring block five (62) and exploring block six (63) draws one
Individual probe value, and calculate the displacement of corresponding described testee (8).
Displacement transducer the most according to claim 3, it is characterised in that also include visiting
Surveying reflecting mirror (4), described detection reflecting mirror (4) is located at described photodetector one (5) and light electrical resistivity survey
Survey device two (6) side, for described laser beam (11) reflection reflected by described stationary mirror (2)
On described photodetector one (5), or described mobile mirror (3) is reflected described swash
Light beam (11) reflexes on described photodetector two (6).
Displacement transducer the most according to claim 3, it is characterised in that also include using
In the lasing light emitter (1) launching described laser beam (11).
Displacement transducer the most according to claim 5, it is characterised in that also include shell
Body, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4),
Photodetector one (5) and photodetector two (6) are respectively positioned in described housing, form read head
(7)。
Displacement transducer the most according to claim 6, it is characterised in that described movement
Reflecting mirror (3) is rigidly connected at least one connector (31), and described connector (31) is rigid member,
It is outside that described connector (31) stretches out described read head (7).
Displacement transducer the most according to claim 2, it is characterised in that described photoelectricity
It is described that detector one (5) also includes that at least one exploring block seven, described exploring block seven are located at
Optional position between the straight line line of exploring block one (51) and exploring block two (52), described
Electric explorer two (6) also includes that at least one exploring block eight, described exploring block eight are located at institute
State the optional position between the straight line line of exploring block four (61) and exploring block five (62).
Displacement transducer the most according to claim 5, it is characterised in that described laser
Source (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), photodetector
One (5) and the position of photodetector two (6) the most adjustable.
10. according to the arbitrary described displacement transducer of claim 1-9, it is characterised in that institute
The range of displacement sensors is 0-1mm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105783740B (en) * | 2016-05-19 | 2019-02-22 | 北方民族大学 | A kind of measurement method of alternately increment type measurement micro-displacement sensor |
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