CN102570291A - 一种传导制冷型高功率半导体激光器及其制备方法 - Google Patents
一种传导制冷型高功率半导体激光器及其制备方法 Download PDFInfo
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- CN102570291A CN102570291A CN2011104534004A CN201110453400A CN102570291A CN 102570291 A CN102570291 A CN 102570291A CN 2011104534004 A CN2011104534004 A CN 2011104534004A CN 201110453400 A CN201110453400 A CN 201110453400A CN 102570291 A CN102570291 A CN 102570291A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 110
- 238000001816 cooling Methods 0.000 title claims abstract description 49
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- 230000005855 radiation Effects 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 17
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- 230000007774 longterm Effects 0.000 abstract 1
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02407—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0235—Method for mounting laser chips
- H01S5/02355—Fixing laser chips on mounts
- H01S5/0237—Fixing laser chips on mounts by soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02469—Passive cooling, e.g. where heat is removed by the housing as a whole or by a heat pipe without any active cooling element like a TEC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4018—Lasers electrically in series
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4043—Edge-emitting structures with vertically stacked active layers
- H01S5/405—Two-dimensional arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Semiconductor Lasers (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
Claims (9)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110453400.4A CN102570291B (zh) | 2011-12-20 | 2011-12-20 | 一种传导制冷型高功率半导体激光器及其制备方法 |
PCT/CN2012/085031 WO2013091459A1 (zh) | 2011-12-20 | 2012-11-22 | 一种传导制冷型高功率半导体激光器及其制备方法 |
US14/367,372 US9031105B2 (en) | 2011-12-20 | 2012-11-22 | Conduction cooled high power semiconductor laser and method for fabricating the same |
JP2014547688A JP2015505163A (ja) | 2011-12-20 | 2012-11-22 | 伝導冷却型高出力半導体レーザーおよびその製造方法 |
EP12859302.7A EP2797186A4 (en) | 2011-12-20 | 2012-11-22 | LINE-COOLED HIGH-PERFORMANCE SEMICONDUCTOR LASER AND MANUFACTURING METHOD THEREFOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110453400.4A CN102570291B (zh) | 2011-12-20 | 2011-12-20 | 一种传导制冷型高功率半导体激光器及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102570291A true CN102570291A (zh) | 2012-07-11 |
CN102570291B CN102570291B (zh) | 2014-10-08 |
Family
ID=46415046
Family Applications (1)
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CN201110453400.4A Active CN102570291B (zh) | 2011-12-20 | 2011-12-20 | 一种传导制冷型高功率半导体激光器及其制备方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9031105B2 (zh) |
EP (1) | EP2797186A4 (zh) |
JP (1) | JP2015505163A (zh) |
CN (1) | CN102570291B (zh) |
WO (1) | WO2013091459A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013091459A1 (zh) * | 2011-12-20 | 2013-06-27 | 西安炬光科技有限公司 | 一种传导制冷型高功率半导体激光器及其制备方法 |
CN103532006A (zh) * | 2013-10-21 | 2014-01-22 | 重庆航伟光电科技有限公司 | 一种半导体激光器 |
CN104836112A (zh) * | 2015-04-17 | 2015-08-12 | 中国科学院苏州生物医学工程技术研究所 | 一种单管半导体激光器串联结构的绝缘散热装置 |
CN105182548A (zh) * | 2015-10-30 | 2015-12-23 | 山东华光光电子有限公司 | 一种便于光纤整形的高性能半导体激光器及其封装方法 |
CN108336640A (zh) * | 2017-01-20 | 2018-07-27 | 山东华光光电子股份有限公司 | 一种高功率半导体激光器及其制备方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11160855B2 (en) * | 2014-01-21 | 2021-11-02 | Pfizer Inc. | Immunogenic compositions comprising conjugated capsular saccharide antigens and uses thereof |
CN109244825B (zh) * | 2018-09-26 | 2020-04-17 | 华南师范大学 | 带有散热结构的边发射半导体激光器及其制备方法 |
CN115494896B (zh) * | 2022-11-17 | 2023-03-14 | 清华大学合肥公共安全研究院 | 一种激光器的升温控制方法、装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201927886U (zh) * | 2010-06-11 | 2011-08-10 | 西安炬光科技有限公司 | 一种可替换芯片的水平阵列大功率半导体激光器 |
CN102255236A (zh) * | 2011-05-18 | 2011-11-23 | 西安炬光科技有限公司 | 一种高功率半导体激光器线路封装结构及制备方法 |
CN202503191U (zh) * | 2011-12-20 | 2012-10-24 | 西安炬光科技有限公司 | 一种传导冷却型高功率半导体激光器 |
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US4393393A (en) * | 1979-08-13 | 1983-07-12 | Mcdonnell Douglas Corporation | Laser diode with double sided heat sink |
US5099488A (en) * | 1991-03-27 | 1992-03-24 | Spectra Diode Laboratories, Inc. | Ribbed submounts for two dimensional stacked laser array |
US5305344A (en) * | 1993-04-29 | 1994-04-19 | Opto Power Corporation | Laser diode array |
US5764675A (en) * | 1994-06-30 | 1998-06-09 | Juhala; Roland E. | Diode laser array |
JP3816194B2 (ja) * | 1996-11-22 | 2006-08-30 | ファナック株式会社 | 冷却装置、光源装置、面発光装置、およびその製造方法 |
JPH11296005A (ja) * | 1998-04-15 | 1999-10-29 | Sumitomo Electric Ind Ltd | 加熱定着装置 |
US5913108A (en) * | 1998-04-30 | 1999-06-15 | Cutting Edge Optronics, Inc. | Laser diode packaging |
US6424667B1 (en) * | 1998-12-04 | 2002-07-23 | Jds Uniphase Corporation | Solder and material designs to improve resistance to cycling fatigue in laser diode stacks |
US6636538B1 (en) * | 1999-03-29 | 2003-10-21 | Cutting Edge Optronics, Inc. | Laser diode packaging |
CA2284946A1 (en) * | 1999-10-04 | 2001-04-04 | Institut National D'optique | Laser diode array assembly made from a ridged monolithic substrate |
JP2003037074A (ja) * | 2001-07-26 | 2003-02-07 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2005085824A (ja) * | 2003-09-04 | 2005-03-31 | Fanuc Ltd | 冷却装置、その製造方法および半導体レーザ装置 |
JP4037815B2 (ja) * | 2003-09-29 | 2008-01-23 | オムロンレーザーフロント株式会社 | レーザダイオードモジュール、レーザ装置、及びレーザ加工装置 |
JP2005234464A (ja) * | 2004-02-23 | 2005-09-02 | Tdk Corp | 光トランシーバ及びこれに用いる光モジュール |
US7515346B2 (en) * | 2006-07-18 | 2009-04-07 | Coherent, Inc. | High power and high brightness diode-laser array for material processing applications |
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CN201199606Y (zh) * | 2008-01-30 | 2009-02-25 | 深圳世纪晶源光子技术有限公司 | 半导体激光器的封装结构 |
JP4645655B2 (ja) * | 2008-02-04 | 2011-03-09 | 富士ゼロックス株式会社 | 光伝送モジュール |
JP2010151794A (ja) * | 2008-11-27 | 2010-07-08 | Panasonic Corp | 電子部品試験装置 |
JP5428485B2 (ja) * | 2009-04-22 | 2014-02-26 | 富士ゼロックス株式会社 | 面発光型半導体レーザ素子のバーンイン方法およびそのプログラム |
JP2011134947A (ja) * | 2009-12-25 | 2011-07-07 | Toyota Central R&D Labs Inc | 横型半導体装置 |
CN102570291B (zh) | 2011-12-20 | 2014-10-08 | 西安炬光科技有限公司 | 一种传导制冷型高功率半导体激光器及其制备方法 |
-
2011
- 2011-12-20 CN CN201110453400.4A patent/CN102570291B/zh active Active
-
2012
- 2012-11-22 US US14/367,372 patent/US9031105B2/en active Active
- 2012-11-22 EP EP12859302.7A patent/EP2797186A4/en not_active Withdrawn
- 2012-11-22 WO PCT/CN2012/085031 patent/WO2013091459A1/zh active Application Filing
- 2012-11-22 JP JP2014547688A patent/JP2015505163A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201927886U (zh) * | 2010-06-11 | 2011-08-10 | 西安炬光科技有限公司 | 一种可替换芯片的水平阵列大功率半导体激光器 |
CN102255236A (zh) * | 2011-05-18 | 2011-11-23 | 西安炬光科技有限公司 | 一种高功率半导体激光器线路封装结构及制备方法 |
CN202503191U (zh) * | 2011-12-20 | 2012-10-24 | 西安炬光科技有限公司 | 一种传导冷却型高功率半导体激光器 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013091459A1 (zh) * | 2011-12-20 | 2013-06-27 | 西安炬光科技有限公司 | 一种传导制冷型高功率半导体激光器及其制备方法 |
US9031105B2 (en) | 2011-12-20 | 2015-05-12 | Xi'an Focuslight Technologies, Co., Ltd. | Conduction cooled high power semiconductor laser and method for fabricating the same |
CN103532006A (zh) * | 2013-10-21 | 2014-01-22 | 重庆航伟光电科技有限公司 | 一种半导体激光器 |
CN104836112A (zh) * | 2015-04-17 | 2015-08-12 | 中国科学院苏州生物医学工程技术研究所 | 一种单管半导体激光器串联结构的绝缘散热装置 |
CN104836112B (zh) * | 2015-04-17 | 2018-07-10 | 中国科学院苏州生物医学工程技术研究所 | 一种单管半导体激光器串联结构的绝缘散热装置 |
CN105182548A (zh) * | 2015-10-30 | 2015-12-23 | 山东华光光电子有限公司 | 一种便于光纤整形的高性能半导体激光器及其封装方法 |
CN108336640A (zh) * | 2017-01-20 | 2018-07-27 | 山东华光光电子股份有限公司 | 一种高功率半导体激光器及其制备方法 |
CN108336640B (zh) * | 2017-01-20 | 2024-02-09 | 山东华光光电子股份有限公司 | 一种高功率半导体激光器及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2015505163A (ja) | 2015-02-16 |
US9031105B2 (en) | 2015-05-12 |
US20150030044A1 (en) | 2015-01-29 |
WO2013091459A1 (zh) | 2013-06-27 |
EP2797186A4 (en) | 2015-08-12 |
CN102570291B (zh) | 2014-10-08 |
EP2797186A1 (en) | 2014-10-29 |
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Address after: 710119 high tech Zone, Shaanxi, Xi'an new industrial park information Avenue, building 17, building three, floor 10 Patentee after: FOCUSLIGHT TECHNOLOGIES INC. Address before: 710119 high tech Zone, Shaanxi, Xi'an new industrial park information Avenue, building 17, building three, floor 10 Patentee before: Xi'an Focuslight Technology Co., Ltd. |
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Denomination of invention: Conduction cooling type high-power semiconductor laser and preparation method thereof Effective date of registration: 20170922 Granted publication date: 20141008 Pledgee: Shaanxi SME financing Company limited by guarantee Pledgor: FOCUSLIGHT TECHNOLOGIES INC. Registration number: 2017610000107 |
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Denomination of invention: Conduction cooling type high-power semiconductor laser and preparation method thereof Effective date of registration: 20181106 Granted publication date: 20141008 Pledgee: Shaanxi SME financing Company limited by guarantee Pledgor: FOCUSLIGHT TECHNOLOGIES INC. Registration number: 2018610000181 |
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