CN102569951A - Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line - Google Patents
Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line Download PDFInfo
- Publication number
- CN102569951A CN102569951A CN2012100321215A CN201210032121A CN102569951A CN 102569951 A CN102569951 A CN 102569951A CN 2012100321215 A CN2012100321215 A CN 2012100321215A CN 201210032121 A CN201210032121 A CN 201210032121A CN 102569951 A CN102569951 A CN 102569951A
- Authority
- CN
- China
- Prior art keywords
- mems
- stub
- phase shifter
- transmission line
- interdigital capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Abstract
The invention discloses a micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on a left-handed transmission line, and particularly relates to an MEMS load line type 2-bit phase shifter in order to solve the problems of small phase shift amount and large switching quantity of MEMS switches in the 2-bit phase shifter. A microstrip line comprises a ground plate, a base and a signal wire, wherein a metal layer is covered on the ground plate; the signal wire is fixed on the upper surface of the base and positioned at a middle position of the base along the width direction, and is divided into four sections, and each two adjacent sections are electrically connected with each other through a phase-shifting unit; the phase-shifting unit comprises stub lines, an interdigital capacitor, MEMS switches and a cylindrical metal through hole; and a stub line and an MEMS switch are arranged at two ends of the interdigital capacitor respectively, one end of the stub line is connected with the center of one end of the interdigital capacitor, and a cube contact point is arranged in the middle of the lower surface of a bridge of the MEMS switch and is suspended above the stub line. The MEMS load line type 2-bit phase shifter is used for controlling phase changes of signals.
Description
Technical field
The present invention relates to a kind of MEMS load line style 2 bit phase shifter, particularly a kind of MEMS load line style 2 bit phase shifter based on left hand transmission line.
Background technology
Phase shifter is used for the phase change of control signal, is the basic element of character of wireless communication system, is the key component that formation phased array radar, microwave and millimeter wave connect transceiver.According to the difference of signal delay mechanism, can be divided into reflection line style phase shifter, switching wiring phase shifter and load line style phase shifter.Wherein, load line style phase shifter is to control the phase difference under the different loads situation through the adjustment load impedance value.At present, traditional phase shifter is generally realized based on PIN diode, EFT switch or Ferrite Material.Along with the development of information technology, the operating frequency of communication systems such as mobile communication, satellite communication constantly raises.Traditional phase shifter can not satisfy the performance index of communication system to the device increasingly stringent well owing to there is the shortcoming that size is big, power consumption is high.
MEMS (MEMS) is a kind of novel multidisciplinary interleaving techniques that developed recently gets up, and relates to multiple subjects such as microelectronics, mechanics, materialogy, mechanics, optics, calorifics.Its manufacturing process through adopting microelectric technique and micro-processing technology to combine produces various excellent performances and cheap microelectronic device.Compare with traditional P IN diode, EFT switch, mems switch has advantages such as the loss of insertion is low, isolation is high, the linearity is high, working band is wide, and shortcoming is that reliability is low, and working life is short.If mems switch is applied to the design of phase shifter, will makes phase shifter lower loss all arranged at any frequency place.In addition,, can be integrated on the chip piece, make product integrated and microminiaturized, reduce cost significantly and reduced size with other devices because mems switch has better compatibility.From delivering document, the quantity of the mems switch of 2 MEMS phase shifters uses of report is more at present.For example, 2 distributed MEMS phase shifters making of people such as Univ Michigan-Ann Arbor USA Juo-Jung Hung need 24 mems switches.The reliability that this can reduce the MEMS phase shifter undoubtedly shortens its working life.So there be the little problem many of mems switch phase-shift phase in 2 present MEMS phase shifters with number of switches.
Summary of the invention
The objective of the invention is provides a kind of MEMS load line style 2 bit phase shifter based on left hand transmission line in order to solve the little problem many with number of switches of mems switch phase-shift phase in 2 MEMS phase shifters.
MEMS load line style 2 bit phase shifter based on left hand transmission line of the present invention, it comprises microstrip line and three groups of phase-shifting units; Microstrip line comprises ground plate, substrate and the holding wire that is coated with metal level; Holding wire is fixed on the upper surface of substrate; And be positioned at the centre position of substrate broad ways, holding wire is divided into four sections, realizes electric connection through a phase-shifting unit between every adjacent two sections;
Phase-shifting unit comprises stub, interdigital capacitor, mems switch and cylindrical metal via hole; Stub and interdigital capacitor constitute the construction unit of left hand transmission line;
The two ends of interdigital capacitor are provided with a stub and a mems switch respectively; One end of stub is connected with the center of an end of interdigital capacitor; The other end of stub is connected with ground plate through a cylindrical metal via hole, and stub is vertical with the interdigital capacitor coplane;
The mems switch two ends are separately fixed at the both sides of corresponding stub; The position that the mems switch two ends are connected with substrate is the anchor district, and each anchor district all is provided with a cylindrical metal via hole, and said cylindrical metal via hole is connected mems switch one end with ground plate; The bridge of said mems switch is suspended in the top of stub; The centre of this bridge lower surface is provided with the cube contact point, this cube contact point be positioned at stub directly over, gapped between said cube contact point and the stub.
The stub that the invention has the advantages that every group of phase-shifting unit employing interdigital capacitor and 1 pair of via hole ground connection is respectively as series capacitance and shunt inductance; Constructed the periodic structure unit of left hand transmission line; Load mems switch on the stub of the ground connection of transmission line leftward, utilize its left hand characteristic and backward wave characteristic, increase the caused phase-shift phase of single mems switch; And then reduce the usage quantity of mems switch, help to improve the reliability of MEMS phase shifter; Break off simultaneously through mems switch, the perhaps closed simultaneously load impedance value of adjusting left hand transmission line, one group of phase-shifting unit can be realized 90 ° of phase shifts at the 25GHz place; Three groups of phase-shifting unit cascades regularly just can have 4 kinds of phase shifting states at the 25GHz place, are respectively 0 °, 90 °, 180 ° and 270 °, have promptly realized the function of 2 bit phase shifter; In addition, this phase shifter is at the 25GHz place, and the insertion loss under 4 kinds of phase shifting states is superior to-2.1dB, and return loss is less than-10dB.In sum, the MEMS phase shifter based on left hand transmission line of the present invention has the advantage that size is little, loss is low, phase shifting accuracy is high and number of switches is few.
Description of drawings
Fig. 1 is a vertical view of the present invention.
Fig. 2 is a perspective view of the present invention.
Fig. 3 is a phase-shifting unit structural representation of the present invention.
Fig. 4 is the vertical view of mems switch of the present invention structural representation when closed.
Fig. 5 is the front view of mems switch of the present invention structural representation when closed.
Fig. 6 is the phase characteristic curve of phase shifter of the present invention; Wherein, Curve A is represented the phase characteristic curve of phase shifter when 3 pairs of mems switches are all closed; Curve B representes when the 1st pair and the 2nd pair of mems switch closure, the phase characteristic curve of phase shifter when the 3rd pair of mems switch breaks off, and curve C is represented the phase characteristic curve of phase shifter when the 1st pair of mems switch closure, the 2nd pair and the 3rd pair of mems switch disconnection, and curve D is represented the phase characteristic curve of phase shifter when 3 pairs of mems switches all break off.
Fig. 7 is the insertion loss and the return loss plot sketch map of phase shifter; Wherein, Four indicated curves of E are represented the insertion damage curve sketch map of phase shifter of the present invention under four kinds of situation shown in Figure 6 respectively, and four indicated curves of F are represented the return loss plot sketch map of phase shifter of the present invention under four kinds of situation shown in Figure 6 respectively.
Embodiment
Embodiment one: combine Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5 that this execution mode is described, described MEMS load line style 2 bit phase shifter of this execution mode based on left hand transmission line, it comprises microstrip line 1 and three groups of phase-shifting units 2; Microstrip line 1 comprises ground plate 1-1, substrate 1-2 and the holding wire 1-3 that is coated with metal level; Holding wire 1-3 is fixed on the upper surface of substrate 1-2; And be positioned at the centre position of substrate 1-2 broad ways; Holding wire 1-3 is divided into four sections, realizes electric connection through a phase-shifting unit 2 between every adjacent two sections;
Phase-shifting unit 2 comprises stub 2-1, interdigital capacitor 2-2, mems switch 2-3 and cylindrical metal via hole 2-4; Stub 2-1 and interdigital capacitor 2-2 constitute the construction unit of left hand transmission line;
The two ends of interdigital capacitor 2-2 are provided with a stub 2-1 and a mems switch 2-3 respectively; The end of stub 2-1 is connected with the center of the end of interdigital capacitor 2-2; The other end of stub 2-1 is connected with ground plate 1-1 through a cylindrical metal via hole 2-4, and stub 2-1 is vertical with interdigital capacitor 2-2 coplane;
The mems switch two ends are separately fixed at the both sides of corresponding stub 2-1; The position that the mems switch two ends are connected with substrate 1-2 is the anchor district; Each anchor district all is provided with a cylindrical metal via hole 2-4; Said cylindrical metal via hole 2-4 is connected mems switch one end with ground plate 1-1, the bridge 2-3-1 of said mems switch 2-3 is suspended in the top of stub 2-1, and the centre of this bridge 2-3-1 lower surface is provided with cube contact point 2-3-2; This cube contact point 2-3-2 be positioned at stub 2-1 directly over, gapped between said cube contact point 2-3-2 and the stub 2-1.
The stub 3-1 of every group of phase-shifting unit employing interdigital capacitor 3-2 and 1 pair of via hole ground connection has constructed the periodic structure unit of left hand transmission line respectively as series capacitance and shunt inductance.According to the operation principle of load line style phase shifter, change the length of ground connection stub 3-1 through mems switch 3-3, thereby accurately control the phase difference under the different loads situation, realized the function of phase shift.
This 1 couple of stub 3-1 is connected with the metal ground plate of substrate through cylindrical metal via hole technology, constitutes shunt inductance.When mems switch 3-3 is applied driving DC voltage; Mems switch 3-3 is owing to receive the downward closure of electrostatic force; Make the cube contact point 3-3-2 of mems switch 3-3 contact with the stub 3-1 of ground connection; Thereby change the load impedance value of left hand transmission line through the length of adjustment ground connection stub, reach the effect of phase shift.
Embodiment two: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is that the centre distance of adjacent single phase-shifting unit 2 is 800 μ m.
Embodiment three: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is, the length of phase shifter is that 3.0mm, width are 1.8mm, highly are 0.234mm.
Embodiment four: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is; The width of the holding wire 1-3 of microstrip line 1 and thickness are respectively 200 μ m and 2 μ m, and the material of the holding wire 1-3 of microstrip line 1 is gold or copper.
Embodiment five: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is, the thickness of said ground plate 1-1 is 2 μ m, and the material of said metal level is gold or copper.
Embodiment six: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is, it is 11.9 material silicon that substrate 1-2 adopts dielectric constant, and thickness is 230 μ m.
Embodiment seven: combine Fig. 3 that this execution mode is described; What described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is; The interdigital capacitor 2-2 of phase-shifting unit 2 is staggered by 10 bonding jumpers and constitutes, and the length of every bonding jumper is 188 μ m, and wide is 11 μ m; Thickness is 2 μ m, and the mutual spacing of bonding jumper is 10 μ m; An end that puts in order to the bonding jumper of odd number is connected with the holding wire 1-3 of the microstrip line 1 of interdigital capacitor one side, and the spacing of the holding wire 1-3 of the microstrip line 1 of the other end and interdigital capacitor opposite side is 2 μ m; The spacing that puts in order to the holding wire 1-3 of the microstrip line 1 of bonding jumper one end interdigital capacitor one side of even number is 2 μ m, and the other end is connected with the holding wire 1-3 of the microstrip line 1 of interdigital capacitor opposite side; The material of bonding jumper is gold or copper.
Embodiment eight: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is, the length of the stub 2-1 of phase-shifting unit 2 is 320 μ m, and width is 10 μ m, and thickness is 2 μ m; The material of stub is gold or copper.
Embodiment nine: what described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is, the internal diameter of cylindrical metal via hole 2-4 is 30 μ m, and the material of cylindrical metal via hole 2-4 is gold or copper.
Embodiment ten: combine Fig. 4 and Fig. 5 that this execution mode is described; What described MEMS load line style 2 bit phase shifter based on left hand transmission line of this execution mode and embodiment one were different is; The air line distance of the center of the cube contact point 2-3-2 of mems switch 2-3 and the end of stub 2-1 equals 30 μ m, and the end of said stub 2-1 is an end that is connected with interdigital capacitor 2-2; The length of bridge 2-3-1 is 100 μ m, and width is 20 μ m, and thickness is 2 μ m; The length of cube contact point 2-3-1 is 4 μ m, and width is 4 μ m, and thickness is 2 μ m; Gap between cube contact point 2-3-1 and the stub 2-1 is 2 μ m.
Operation principle of the present invention is: at the 25GHz place, for every group of phase-shifting unit, 1 pair of mems switch breaks off and closed two states of while simultaneously, realizes 90 ° phase shift.When 3 pairs of mems switches all broke off, phase place was-76.3 °; When the 1st pair of mems switch closure, the 2nd pair and the 3rd pair of mems switch broke off, phase place was 12.4 °; The 1st pair and the 2nd pair of mems switch closure, when the 3rd pair of mems switch breaks off, phase place is 105.1 °; When 3 pairs of mems switches were all closed, phase place was 195.5 °.At the 25GHz place, the insertion loss under these 4 kinds of situation is superior to-2.1dB, and return loss is lower than-10dB.Therefore, 4 kinds of phase shifting states are respectively 0 °, 90 °, 180 ° and 270 °, are 2 bit phase shifter.
The structure of MEMS load line style 2 bit phase shifter based on left hand transmission line of the present invention is not limited to the described concrete structure of above-mentioned each embodiment, can also be the reasonable combination of the described technical characterictic of above-mentioned each execution mode.
Claims (10)
1. based on MEMS load line style 2 bit phase shifter of left hand transmission line, it comprises microstrip line (1) and three groups of phase-shifting units (2); Microstrip line (1) comprises ground plate (1-1), substrate (1-2) and the holding wire (1-3) that is coated with metal level; Holding wire (1-3) is fixed on the upper surface of substrate (1-2); And be positioned at the centre position of substrate (1-2) broad ways; Holding wire (1-3) is divided into four sections, realizes electric connection through a phase-shifting unit (2) between every adjacent two sections; It is characterized in that,
Phase-shifting unit (2) comprises stub (2-1), interdigital capacitor (2-2), mems switch (2-3) and cylindrical metal via hole (2-4); Stub (2-1) and interdigital capacitor (2-2) constitute the construction unit of left hand transmission line;
The two ends of interdigital capacitor (2-2) are provided with a stub (2-1) and a mems switch (2-3) respectively; One end of stub (2-1) is connected with the center of an end of interdigital capacitor (2-2); The other end of stub (2-1) is connected with ground plate (1-1) through a cylindrical metal via hole (2-4), and stub (2-1) is vertical with interdigital capacitor (2-2) coplane;
The mems switch two ends are separately fixed at the both sides of corresponding stub (2-1); The position that the mems switch two ends are connected with substrate (1-2) is the anchor district; Each anchor district all is provided with a cylindrical metal via hole (2-4); Said cylindrical metal via hole (2-4) is connected mems switch one end with ground plate (1-1), the bridge (2-3-1) of said mems switch (2-3) is suspended in the top of stub (2-1), and the centre of this bridge (2-3-1) lower surface is provided with cube contact point (2-3-2); This cube contact point (2-3-2) be positioned at stub (2-1) directly over, gapped between said cube contact point (2-3-2) and the stub (2-1).
2. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1 is characterized in that the centre distance of adjacent single phase-shifting unit (2) is 800 μ m.
3. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1, the length that it is characterized in that phase shifter are that 3.0mm, width are 1.8mm and highly are 0.234mm.
4. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1; It is characterized in that it being that the width and the thickness of holding wire (1-3) of microstrip line (1) is respectively 200 μ m and 2 μ m, the material of the holding wire (1-3) of microstrip line (1) is gold or copper.
5. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1 is characterized in that the thickness of said ground plate (1-1) is 2 μ m, and the material of said metal level is gold or copper.
6. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1 is characterized in that, substrate (1-2) employing dielectric constant is 11.9 material silicon, and thickness is 230 μ m.
7. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1; It is characterized in that; The interdigital capacitor (2-2) of phase-shifting unit (2) is staggered by 10 bonding jumpers and constitutes, and the length of every bonding jumper is 188 μ m, and wide is 11 μ m; Thickness is 2 μ m, and the mutual spacing of bonding jumper is 10 μ m; An end that puts in order to the bonding jumper of odd number is connected with the holding wire (1-3) of the microstrip line (1) of interdigital capacitor one side, and the spacing of the holding wire (1-3) of the microstrip line (1) of the other end and interdigital capacitor opposite side is 2 μ m; The spacing that puts in order to the holding wire (1-3) of the microstrip line (1) of bonding jumper one end of even number and interdigital capacitor one side is 2 μ m, and the other end is connected with the holding wire (1-3) of the microstrip line (1) of interdigital capacitor opposite side; The material of bonding jumper is gold or copper.
8. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1, the length that it is characterized in that the stub (2-1) of phase-shifting unit (2) is 320 μ m, and width is 10 μ m, and thickness is 2 μ m; The material of stub (2-1) is gold or copper.
9. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1 is characterized in that the internal diameter of cylindrical metal via hole (2-4) is 30 μ m, and the material of cylindrical metal via hole (2-4) is gold or copper.
10. MEMS load line style 2 bit phase shifter based on left hand transmission line according to claim 1; It is characterized in that; The air line distance of the center of the cube contact point (2-3-2) of mems switch (2-3) and an end of stub (2-1) equals 30 μ m, and an end of said stub (2-1) is an end that is connected with interdigital capacitor (2-2); The length of bridge (2-3-1) is 100 μ m, and width is 20 μ m, and thickness is 2 μ m; The length of cube contact point (2-3-1) is 4 μ m, and width is 4 μ m, and thickness is 2 μ m; Gap between cube contact point (2-3-1) and the stub (2-1) is 2 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100321215A CN102569951A (en) | 2012-02-14 | 2012-02-14 | Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100321215A CN102569951A (en) | 2012-02-14 | 2012-02-14 | Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102569951A true CN102569951A (en) | 2012-07-11 |
Family
ID=46414798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100321215A Pending CN102569951A (en) | 2012-02-14 | 2012-02-14 | Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102569951A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241735A (en) * | 2013-06-20 | 2014-12-24 | 成都国腾电子技术股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| WO2021102956A1 (en) * | 2019-11-29 | 2021-06-03 | 京东方科技集团股份有限公司 | Phase shifter and manufacturing method and driving method therefor, and electronic device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6208222B1 (en) * | 1999-05-13 | 2001-03-27 | Lucent Technologies Inc. | Electromechanical phase shifter for a microstrip microwave transmission line |
| CN1521889A (en) * | 2003-02-12 | 2004-08-18 | Lg电子有限公司 | Multi-bit phase shifter and manufacturing method thereof |
| CN201153148Y (en) * | 2007-11-28 | 2008-11-19 | 中国科学技术大学 | Microwave phase shift device based on plane type micro-strip transmission line |
-
2012
- 2012-02-14 CN CN2012100321215A patent/CN102569951A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6208222B1 (en) * | 1999-05-13 | 2001-03-27 | Lucent Technologies Inc. | Electromechanical phase shifter for a microstrip microwave transmission line |
| CN1521889A (en) * | 2003-02-12 | 2004-08-18 | Lg电子有限公司 | Multi-bit phase shifter and manufacturing method thereof |
| CN201153148Y (en) * | 2007-11-28 | 2008-11-19 | 中国科学技术大学 | Microwave phase shift device based on plane type micro-strip transmission line |
Non-Patent Citations (1)
| Title |
|---|
| JIA-HUI FU: "The research of Left-handed Coplanar-waveguide transmission line", 《MICROWAVE CONFERENCE, 2009. APMC 2009. ASIA PACIFIC 》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241735A (en) * | 2013-06-20 | 2014-12-24 | 成都国腾电子技术股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| CN104241735B (en) * | 2013-06-20 | 2017-05-10 | 成都振芯科技股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| WO2021102956A1 (en) * | 2019-11-29 | 2021-06-03 | 京东方科技集团股份有限公司 | Phase shifter and manufacturing method and driving method therefor, and electronic device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW554564B (en) | Multi-bit phase shifters using MEM RF switches | |
| CN102065632B (en) | Electromagnetic bandgap structure and printed circuit board comprising the same | |
| CN201623242U (en) | Microwave and millimeter wave multi-stub load line phase shifter | |
| CN106785250B (en) | Five bit distribution of spiral based on radio-frequency micro electromechanical switch declines electromechanical phase shifter | |
| CN101197460B (en) | Microwave phase shifter based on plane type left hand microstrip transmission line | |
| CN104091990A (en) | Multiple-substrate integrated waveguide filtering power divider | |
| US20220238974A1 (en) | Phase shifter and antenna device | |
| CN114497929B (en) | Phase shifter | |
| CN102356440A (en) | Variable capacitance module and matching circuit module | |
| CN102509816B (en) | Switch linear phase shifter based on micro electro mechanical system (MEMS) capacitance and inductance phase shifting unit | |
| CN101507043A (en) | Transmission line | |
| CN101159345A (en) | Millimeter wave MEMS phase shifter of sawtooth shape coplane wave-guide structure | |
| CN102569951A (en) | Micro electronic mechanical system (MEMS) load line type 2-bit phase shifter based on left-handed transmission line | |
| JP2007533211A (en) | Small broadband switching filter bank | |
| CN100524940C (en) | Switching wiring phase shifter | |
| CN201153148Y (en) | Microwave phase shift device based on plane type micro-strip transmission line | |
| CN100511827C (en) | Ferroelectric thin-membrane phase shifter, and method for detecting and optimizing reflection characteristics | |
| CN204167446U (en) | The integrated waveguide dual mode filter of line of rabbet joint disturbance | |
| CN101276950A (en) | Phase shifter of millimeter wave microelectromechanical system with rectangle bridge coplanar waveguide structure | |
| US7821353B2 (en) | Directional coupler | |
| CN207993780U (en) | High-power RF mems switch device based on contact point distribution | |
| CN101572334B (en) | Distributed MEMS phase shifter based on MAM capacitor | |
| CN103094656A (en) | Substrate integrated waveguide (SIW) bridge | |
| CN114300821A (en) | Phase shifter and antenna | |
| Sengar et al. | Design of 3-bit digital DMTL phase shifter for C-to Ku-band applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120711 |