CN102560632A - 用于非平面酞菁薄膜弱外延生长的固熔体诱导层 - Google Patents
用于非平面酞菁薄膜弱外延生长的固熔体诱导层 Download PDFInfo
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- CN102560632A CN102560632A CN2010106055692A CN201010605569A CN102560632A CN 102560632 A CN102560632 A CN 102560632A CN 2010106055692 A CN2010106055692 A CN 2010106055692A CN 201010605569 A CN201010605569 A CN 201010605569A CN 102560632 A CN102560632 A CN 102560632A
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- inducing layer
- solid solution
- epitaxial growth
- solution inducing
- film
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- 230000001939 inductive effect Effects 0.000 title claims abstract description 116
- 239000006104 solid solution Substances 0.000 title claims abstract description 69
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 239000010409 thin film Substances 0.000 title claims abstract description 36
- 230000012010 growth Effects 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000010408 film Substances 0.000 claims description 75
- 238000007740 vapor deposition Methods 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 19
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 12
- 125000001153 fluoro group Chemical group F* 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 claims description 2
- -1 substituted-phenyl Chemical group 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000002052 molecular layer Substances 0.000 claims 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 46
- 229930192474 thiophene Natural products 0.000 description 23
- YRZZLAGRKZIJJI-UHFFFAOYSA-N oxyvanadium phthalocyanine Chemical compound [V+2]=O.C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 YRZZLAGRKZIJJI-UHFFFAOYSA-N 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 238000002360 preparation method Methods 0.000 description 12
- 238000000407 epitaxy Methods 0.000 description 11
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 8
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 241000209094 Oryza Species 0.000 description 4
- 235000007164 Oryza sativa Nutrition 0.000 description 4
- 235000010290 biphenyl Nutrition 0.000 description 4
- 239000004305 biphenyl Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 235000009566 rice Nutrition 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000004770 highest occupied molecular orbital Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 150000001555 benzenes Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001341 grazing-angle X-ray diffraction Methods 0.000 description 2
- 230000007773 growth pattern Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- SHGYOMYQLKACJH-UHFFFAOYSA-N 4-(4-phenylphenyl)dibenzothiophene Chemical compound c1ccc(cc1)-c1ccc(cc1)-c1cccc2c3ccccc3sc12 SHGYOMYQLKACJH-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 229910000583 Nd alloy Inorganic materials 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002464 physical blending Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/54—Organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/311—Phthalocyanine
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/655—Aromatic compounds comprising a hetero atom comprising only sulfur as heteroatom
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6576—Polycyclic condensed heteroaromatic hydrocarbons comprising only sulfur in the heteroaromatic polycondensed ring system, e.g. benzothiophene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/261—In terms of molecular thickness or light wave length
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
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- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Thin Film Transistor (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
Abstract
Description
Claims (10)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010605569.2A CN102560632B (zh) | 2010-12-21 | 2010-12-21 | 用于非平面酞菁薄膜弱外延生长的固熔体诱导层 |
EP11171083.6A EP2468930B1 (en) | 2010-12-21 | 2011-06-22 | Solid solution inducing layer for weak epitaxy growth of non-planar phthalocyanine |
US13/187,217 US8598151B2 (en) | 2010-12-21 | 2011-07-20 | Solid solution inducing layer for weak epitaxy growth of non-planar phthalocyanine |
JP2011235585A JP5743848B2 (ja) | 2010-12-21 | 2011-10-27 | 非平面フタロシアニンの弱エピタキシー成長用の固溶体誘起層 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010605569.2A CN102560632B (zh) | 2010-12-21 | 2010-12-21 | 用于非平面酞菁薄膜弱外延生长的固熔体诱导层 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102560632A true CN102560632A (zh) | 2012-07-11 |
CN102560632B CN102560632B (zh) | 2016-06-29 |
Family
ID=44674137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010605569.2A Active CN102560632B (zh) | 2010-12-21 | 2010-12-21 | 用于非平面酞菁薄膜弱外延生长的固熔体诱导层 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8598151B2 (zh) |
EP (1) | EP2468930B1 (zh) |
JP (1) | JP5743848B2 (zh) |
CN (1) | CN102560632B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105336880A (zh) * | 2015-10-23 | 2016-02-17 | 长春工业大学 | 一种基于双层诱导技术制备红荧烯薄膜的方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3664069B2 (ja) * | 1999-12-24 | 2005-06-22 | 松下電器産業株式会社 | 有機電界発光素子 |
JP2003017276A (ja) * | 2001-04-27 | 2003-01-17 | Semiconductor Energy Lab Co Ltd | 発光装置及びその作製方法 |
JP3946484B2 (ja) * | 2001-10-22 | 2007-07-18 | 独立行政法人科学技術振興機構 | 光電流増倍装置及びその増倍率制御方法 |
US6869821B2 (en) * | 2002-12-30 | 2005-03-22 | Xerox Corporation | Method for producing organic electronic devices on deposited dielectric materials |
JP4220951B2 (ja) * | 2004-09-24 | 2009-02-04 | 国立大学法人広島大学 | 新規な有機半導体化合物、その製造方法およびそれを用いた有機半導体デバイス |
US7671448B2 (en) * | 2005-03-24 | 2010-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including two organic semiconductor layers |
CN100555702C (zh) * | 2006-04-29 | 2009-10-28 | 中国科学院长春应用化学研究所 | 有机半导体晶体薄膜及弱取向外延生长制备方法和应用 |
-
2010
- 2010-12-21 CN CN201010605569.2A patent/CN102560632B/zh active Active
-
2011
- 2011-06-22 EP EP11171083.6A patent/EP2468930B1/en not_active Not-in-force
- 2011-07-20 US US13/187,217 patent/US8598151B2/en active Active
- 2011-10-27 JP JP2011235585A patent/JP5743848B2/ja active Active
Non-Patent Citations (2)
Title |
---|
JUNLIANG YANG ET AL.: "Weak epitaxy growth of organic semiconductor thin films", 《CHEM. SOC. REV.》 * |
T. SHIMADA ET AL.: "Energy-transferred photoluminescence from thiophene/phenylene oligomer thin films", 《JOURNAL OF LUMINESCENCE》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105336880A (zh) * | 2015-10-23 | 2016-02-17 | 长春工业大学 | 一种基于双层诱导技术制备红荧烯薄膜的方法 |
CN105336880B (zh) * | 2015-10-23 | 2017-09-12 | 长春工业大学 | 一种基于双层诱导技术制备红荧烯薄膜的方法 |
Also Published As
Publication number | Publication date |
---|---|
US8598151B2 (en) | 2013-12-03 |
JP2012134457A (ja) | 2012-07-12 |
JP5743848B2 (ja) | 2015-07-01 |
EP2468930A2 (en) | 2012-06-27 |
EP2468930A3 (en) | 2014-01-01 |
CN102560632B (zh) | 2016-06-29 |
EP2468930A9 (en) | 2012-08-22 |
EP2468930B1 (en) | 2016-11-23 |
US20120153265A1 (en) | 2012-06-21 |
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