CN102560426A - 自动循环等离子气相沉积系统 - Google Patents
自动循环等离子气相沉积系统 Download PDFInfo
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- CN102560426A CN102560426A CN2012100359621A CN201210035962A CN102560426A CN 102560426 A CN102560426 A CN 102560426A CN 2012100359621 A CN2012100359621 A CN 2012100359621A CN 201210035962 A CN201210035962 A CN 201210035962A CN 102560426 A CN102560426 A CN 102560426A
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CN201210035962.1A CN102560426B (zh) | 2012-02-16 | 2012-02-16 | 自动循环等离子气相沉积系统 |
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CN102560426A true CN102560426A (zh) | 2012-07-11 |
CN102560426B CN102560426B (zh) | 2014-05-21 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102808165A (zh) * | 2012-08-09 | 2012-12-05 | 北京七星华创电子股份有限公司 | 粉尘吸附器 |
CN106939399A (zh) * | 2016-01-04 | 2017-07-11 | 中国兵器工业第五九研究所 | 一种用于双操作间的自动化热喷涂装置 |
CN107723677A (zh) * | 2017-09-05 | 2018-02-23 | 汪会平 | 一种金属板的镀膜方法与设备 |
CN115449772A (zh) * | 2022-08-22 | 2022-12-09 | 秦皇岛精和智能装备有限公司 | 一种适用于黑匣子的镀膜防护工艺及其设备 |
WO2023178949A1 (zh) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | 一种连续式ald镀膜设备的腔体结构 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6302372B1 (en) * | 1998-12-11 | 2001-10-16 | Beybold Systems Gmbh | Gate valve |
JP2001289333A (ja) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | 2つの真空室を分離するための真空バルブ |
CN201648512U (zh) * | 2010-03-24 | 2010-11-24 | 深圳森丰真空镀膜有限公司 | 连续真空镀膜装置 |
CN201801582U (zh) * | 2010-09-14 | 2011-04-20 | 普乐新能源(蚌埠)有限公司 | 磁控溅射真空镀膜机组 |
CN201804896U (zh) * | 2010-05-06 | 2011-04-20 | 吉林庆达新能源电力股份有限公司 | 等离子体化学气相沉积连续生产装置 |
CN202808940U (zh) * | 2012-02-16 | 2013-03-20 | 肇庆市腾胜真空技术工程有限公司 | 自动循环等离子气相沉积系统 |
-
2012
- 2012-02-16 CN CN201210035962.1A patent/CN102560426B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6302372B1 (en) * | 1998-12-11 | 2001-10-16 | Beybold Systems Gmbh | Gate valve |
JP2001289333A (ja) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | 2つの真空室を分離するための真空バルブ |
CN201648512U (zh) * | 2010-03-24 | 2010-11-24 | 深圳森丰真空镀膜有限公司 | 连续真空镀膜装置 |
CN201804896U (zh) * | 2010-05-06 | 2011-04-20 | 吉林庆达新能源电力股份有限公司 | 等离子体化学气相沉积连续生产装置 |
CN201801582U (zh) * | 2010-09-14 | 2011-04-20 | 普乐新能源(蚌埠)有限公司 | 磁控溅射真空镀膜机组 |
CN202808940U (zh) * | 2012-02-16 | 2013-03-20 | 肇庆市腾胜真空技术工程有限公司 | 自动循环等离子气相沉积系统 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102808165A (zh) * | 2012-08-09 | 2012-12-05 | 北京七星华创电子股份有限公司 | 粉尘吸附器 |
CN106939399A (zh) * | 2016-01-04 | 2017-07-11 | 中国兵器工业第五九研究所 | 一种用于双操作间的自动化热喷涂装置 |
CN106939399B (zh) * | 2016-01-04 | 2019-04-09 | 中国兵器工业第五九研究所 | 一种用于双操作间的自动化热喷涂装置 |
CN107723677A (zh) * | 2017-09-05 | 2018-02-23 | 汪会平 | 一种金属板的镀膜方法与设备 |
WO2023178949A1 (zh) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | 一种连续式ald镀膜设备的腔体结构 |
CN115449772A (zh) * | 2022-08-22 | 2022-12-09 | 秦皇岛精和智能装备有限公司 | 一种适用于黑匣子的镀膜防护工艺及其设备 |
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CN102560426B (zh) | 2014-05-21 |
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