CN102554292A - Target machining tool - Google Patents
Target machining tool Download PDFInfo
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- CN102554292A CN102554292A CN201210034144XA CN201210034144A CN102554292A CN 102554292 A CN102554292 A CN 102554292A CN 201210034144X A CN201210034144X A CN 201210034144XA CN 201210034144 A CN201210034144 A CN 201210034144A CN 102554292 A CN102554292 A CN 102554292A
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Abstract
The invention provides a target machining tool, which comprises a cutter for machining a V-shaped water channel on a target. The cutter comprises a blade and a cutter handle connected with the blade, and the relief angle of the blade is determined by the V-shaped water channel. The invention further provides a substrate for positioning and clamping the target in cutting, the substrate comprises a target bearing area and a fixing area, the target bearing area is positioned at the center of the substrate, the fixing area is positioned at the edge of the substrate and used for fixing the substrate on a cutting machine, and a cutting positioning portion is arranged in the target bearing area. By increasing the relief angle of the cutter, the cutter cannot rub a machined surface when machining the V-shaped water channel for the round target, the substrate is used for reasonably positioning and clamping the round copper-manganese alloy target when the round target is cut, positioning precision is improved, and dimensional accuracy of the target is finally ensured.
Description
The application is to be on December 23rd, 2010 applying date, and application number is 201010603094.3, and denomination of invention is divided an application for the Chinese invention patent application of " a kind of target processing instrument ".
Technical field
The present invention relates to field of semiconductor technology, particularly a kind of instrument of target processing.
Background technology
In field of semiconductor technology, target material assembly is to be combined and constituted by target that meets sputtering performance and the backboard with certain intensity.Wherein, said target can be processed by many materials, and for example, metal materials such as copper, aluminium, titanium also can be processed by alloy material, for example, and copper alloy, cupromanganese etc.Wherein cupromanganese is the alloy material that target is made in a kind of commonly used being used to.
In making the target process, it is a very important link that target is processed.In the prior art, generally be said cupromanganese target to be comprised grinding out, carves machining such as tank through finish turning lathe.Wherein, employed cutter generally includes anterior angle and relief angle on the existing finish turning lathe, said anterior angle decision cutter sharpness; Relief angle decision cutter and workpiece friction; For the intensity that makes blade is not weakened, common relief angle less (generally about 15 degree) is in the time of so not only can preventing the lathe running; The influence that cutter stability is produced because shake excessive, and can prolong service life of cutter upper knife edge.But, when using the less cutter of relief angle on target, to process the V-arrangement tank, be easy to be ground to the machined surface of target, cause damaged products, therefore be difficult to sink size processing is put in place.
In addition, existing because the target of full circle can't be positioned in the sputter reaction vessel usually fully, carry out plasma sputtering technology.Therefore, before making tank, cut out identical at least three the sector structure targets of geomery from blank material earlier usually, and then said fan-shaped target is carried out tank processing; Then at least three sector structure targets are put into container one by one, be spliced into the target of full circle.But can produce two problems like this: on the one hand; Owing to be that the tank of said at least three sector structure targets is processed respectively; Therefore when they being spliced into a full circle target, possibly can not cooperate fully because of the error on some sizes between said each tank; On the other hand, also possibly can not cooperate fully between said each sector structure target owing to the error on the marginal dimension.
In sum, can find that these problems produce certain influence for precision, the efficient of target processing, technical scheme solves these problems but also do not have preferably at present.
Summary of the invention
The problem that the present invention solves provides a kind of target machining tool, makes that the tank on the said target can time processing put in place under the full circle state; Treat that said tank and other each dimensioned put in place accurately cutting apart of the back said target of assurance.
For addressing the above problem, the invention provides a kind of target machining tool, comprise cutter; Be used for processing V-type tank on target, said cutter comprises blade and the handle of a knife that is connected with blade, and the relief angle of said blade is determined by V-type tank angle; V-type tank angle is big more; Relief angle is more little, and V-type tank angle is more little, and relief angle is big more.
Preferably, said V-type tank angle is 60 when spending, and said blade relief is 30 degree.
Preferably, the size of said blade is determined by sink size.
Preferably, said blade and said handle of a knife are formed in one.
Preferably, be connected through connector between said blade and the said handle of a knife.
Preferably, said connector is bolt and screw or screw or draw-in groove and buckle.
Preferably, the material of said blade is a carbide alloy wolfram steel, and the material of handle of a knife is No. 45 steel.
On the other hand, the present invention also provides a kind of target machining tool, comprising: substrate, and said substrate comprises target supporting region and fixed area; Said target supporting region is positioned at the substrate center zone; Said fixed area is positioned at substrate edge region, is used for substrate is fixed in cutting machine; Also comprise the cutting location division in the said target supporting region.
Preferably, said cutting location division is a hollow, comprises an intercommunicating pore and at least three troughs.
Preferably, said intercommunicating pore is positioned at the substrate mid portion, and said trough is stretched out by the intercommunicating pore periphery, is interconnected between said intercommunicating pore and the said trough.
Preferably, the extended line of the center line of said each trough intersects at the center of said intercommunicating pore.
Preferably, the angle between adjacent two troughs all equates.
Preferably, said trough is shaped as rectangle or rhombus.
Preferably, said intercommunicating pore be shaped as square or circular.
Preferably, also comprise several bearing parts in the said target supporting region, it is used for fixing said target.
Preferably, said bearing part is screwed hole and bolt combination, or the bolts and nuts combination.
Preferably, also comprise an alignment pin in the said target supporting region, said alignment pin be used to prevent said target in the location of target supporting region mistake.
Preferably, said fixed area is made up of several locating holes at said substrate edges place, is used for said substrate is fixed in cutting machine.
Preferably, said cutting machine is the wire cutting machine platform of being careful.
Compared with prior art, the present invention has the following advantages:
At first,, make the blade relief of said cutter increase to 30 degree, can not run into the surface that has processed when making the V-arrangement tank of its said target under processing full circle state through repacking traditional lathe cutter.The relief angle of wherein said blade is by the decision of V-type tank angle, and V-type tank angle is big more, and relief angle is more little, and V-type tank angle is more little, and relief angle is big more.
On the other hand, come the said full circle target of clamping through designing a kind of substrate, wherein said substrate comprises target supporting region and fixed area; Said target supporting region is positioned at the substrate center zone; Said fixed area is positioned at substrate edge region, is used for substrate is fixed in cutting machine; Also comprise the cutting location division in the said target supporting region.Can said full circle target be fixed on the cutting machine through said substrate, and corresponding cutting location division is set on said substrate, make said full circle target can cut into the target of required form structure.
Description of drawings
Fig. 1 is an employed tool structures sketch map in a kind of target machining tool according to the invention;
Fig. 2 is the Facad structure sketch map of employed substrate in a kind of target machining tool according to the invention;
Fig. 3 is that the said a kind of target machining tool of the application of the invention is accomplished the design sketch after the said full circle target processing.
The specific embodiment
The inventor finds existing target to be added man-hour; The tool clearance of employed finish turning lathe generally less (usually about 15 degree); Though can prevent like this to shake when excessive the influence of cutter stability, also can prolong the service life of blade simultaneously when lathe.But, when using this cutter to process the tank on the target,, may be ground to the surface that has processed because the relief angle of cutter is less.Especially when the bottom position of processing V-arrangement tank, near the flume wall of will dawdling, thus cause the damage of target.Therefore, when using the less cutter of relief angle, usually be difficult to the processing of the sink size on the said target is put in place.On the other hand, because the target of full circle can't be positioned in the sputter reaction vessel usually fully, carry out plasma sputtering technology.Therefore, before making tank, cut out identical at least three the sector structure targets of geomery from blank material earlier usually, and then said fan-shaped target is carried out tank processing; Then at least three sector structure targets are put into container one by one, be spliced into the target of full circle.But,, therefore when they being spliced into a full circle target, possibly can not cooperate fully because of the error on some sizes between said each tank owing to be that the tank of said at least three sector structure targets is processed respectively; Also possibly can not cooperate fully between said in addition each sector structure target owing to the error on the marginal dimension.
To above-mentioned these problems, the invention provides a kind of target machining tool that is used for, comprise cutter, be used for processing V-type tank on target, said cutter comprises blade and the handle of a knife that is connected with blade.On the basis of existing cutter, make the surface that said cutter can not rub and process when the processing V-type tank through the relief angle of grinding big said blade.On the other hand, a substrate that is used for the said target of clamping is provided also, said substrate comprises target supporting region and fixed area; Said target supporting region is positioned at the substrate center zone; Said fixed area is positioned at substrate edge region, is used for substrate is fixed in cutting machine.Further, also comprise the cutting location division in the said target supporting region, it can make cutting machine cut said full circle target exactly according to demand.In sum; The described a kind of target machining tool of the application of the invention; Can realize the V-type tank time processing on the full circle target is put in place, improve production efficiency, simultaneously through substrate of the present invention can be when said full circle target be cut positioning and clamping reasonably.
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, does detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Need to prove; Target described in the embodiments described herein is to be that example is described with the cupromanganese target; In practical application, target machining tool of the present invention also can be applied to the target of other materials, for example albronze target etc.; This does not influence essence of the present invention, does not repeat them here.
It will be appreciated by those skilled in the art that usually the machining of target is accomplished through lathe.Particularly; Said work flow is roughly following: at first with said target clamping to be processed on the chuck of lathe; Adjust the position of cutter then, utilize the feed box on the said lathe to make blade be fed into suitable Working position, then start lathe said target is processed.In the present invention, said process mainly is a processing V-type tank on said full circle target, and wherein said each V-type tank is positioned at the surface of said full circle target, and is donut with said full circle target.
Further, the cutter that the present invention uses is on the basis of existing cutter, to improve, and mainly is through the blade relief mill of said cutter is big, makes it when the said V-type tank of processing, can not be ground to the surface that has processed.For example, when the bottom of said cutter processing V-type tank, the relief angle that increases blade can prevent the rub sidewall of said V-type tank of said cutter.
Embodiment one: particularly, and with reference to cutter structure sketch map used in the present invention as shown in Figure 1.As shown in Figure 1, said cutter mainly is made up of handle of a knife 11 and blade 12, and said handle of a knife 11 can be processed by No. 45 steel (about carbonaceous component 0.45%), and said blade 12 can be processed by carbide alloy wolfram steel.Further, the connected mode between wherein said blade 12 and the said handle of a knife 11 can have various ways.For example, said blade 12 can be integrated with said handle of a knife 11; Again for example, said blade 12 can be connected with said handle of a knife 11 through connector.Particularly, in an optimal way of present embodiment, for example said blade 12 can be connected with said handle of a knife 11 through screw.Again for example, said blade 12 can also be secured on the said handle of a knife 11 through bolt and the screw that is complementary with it.Again for example, can also be through a draw-in groove be set on said handle of a knife 11, and provide the buckle that is complementary that said blade 12 is fixed on the said handle of a knife 11.Said blade 12 preferably is fixed on the front end of said handle of a knife 11, and the size of the tank that can process as required of the size of said blade 12 decides.Further, grind the blade relief of said cutter, for example can come the blade relief of the said cutter of grinding through the knife sharpener of special use through adopting existing method from knife milling tool.Wherein, said relief angle promptly is the angle between said blade 12 and cutting plane, and the relief angle of common said cutter is less, generally about 15 degree.It will be appreciated by those skilled in the art that if increase the relief angle of said cutter then the intensity of blade 12 cutting edges reduces.Therefore in practical application, the blade relief size of said cutter need be adjusted to a suitable angle, can either satisfy in process, and said cutter can not be ground to the surface that has processed on the target, can guarantee the intensity of blade 12 cutting edges simultaneously again.In an optimal way of present embodiment; As shown in Figure 3; Comprise several V-type tanks 311 on the said full circle target 3; Wherein said each V-type tank 311 is donut with said full circle target 3, and the opening angle of said V-type tank 311 is 60 degree, and 311 of said V-type tanks also are provided with several circular holes 312.It will be appreciated by those skilled in the art that because the V-type tank angle of the said target of actual needs is set at 60 degree, therefore in this enforcements, the relief angle of the blade 12 of said cutter is increased to 30 degree (being that β 30 spends among Fig. 1).Find through practical operation, when said blade relief is 30 can reach when spending and prevent the rub effect of machined surface of cutter.
Further, when using cutter to process the V-type tank on the target, the size of the blade relief of said cutter is by the decision of V-type tank angle, and V-type tank angle is big more, and the relief angle of said blade is more little; V-type tank angle is more little, and the relief angle of said blade is big more.Those skilled in the art can come correspondingly to change the size of said relief angle to the V-type tank of different openings angle on the target to be processed, but also must consider the factors such as intensity of said cutter knife simultaneously.
In addition, can also process other each sizes of said target through said cutter.Particularly, for example, can cut the surplus of said target, make it meet the size of actual demand through said cutter.Again for example, can also carry out other machining operations such as grinding out, side cut to said target material surface through said cutter, this does not influence essence of the present invention, does not repeat them here.。
Embodiment two: according to embodiment one, use cutter shown in Figure 1, and can put in place to the V-type tank on the said full circle target and other each dimensioned.Further, re-use substrate of the present invention the target of said full circle is carried out the clamping location, thereby be convenient to follow-up cutting said target.
Particularly, with reference to the Facad structure sketch map of substrate shown in Figure 2.Particularly, as shown in Figure 2, the front of said substrate 2 comprises fixed area 21 and target supporting region 22.Wherein said fixed area 21 is formed (being three among Fig. 2) by several locating holes, is used for said substrate 2 is fixed in cutting machine (Fig. 2 is not shown).It will be appreciated by those skilled in the art that in practical application, can confirm the right processing position, play table through make the table appearance with the high accuracy contact then, then said substrate 2 is fixed on the cutting machine processing platform with pressing plate through said locating hole.Said target supporting region 22 is positioned at the middle section of said substrate 2, comprises several bearing points, alignment pin 222 and cutting location division 223.Wherein, those skilled in the art can provide the connector that is complementary with said bearing point to fix said target.Preferably, as shown in Figure 2, said bearing point is several screwed holes 221 (being six), correspondingly shown in Fig. 2, can provide the screw that is complementary with said screwed hole 221 to cooperate said screwed hole 221 to be used for fixing said target.Said alignment pin 222 be used to prevent said target in the location of target supporting region mistake; For example when the comparatively complicated target of processing interior shape; For preventing said target orientation angle mistake, on a certain certain location, can prevent the location of mistake of target through using said alignment pin 222.
Further; Since need the target of said full circle be cut into the identical sector structure target of three plate shape sizes in the present invention, therefore in the present embodiment, as shown in Figure 2; Said cutting location division 223 is a hollow, and promptly said cutting location division 223 is through said substrate 2.Particularly, said cutting location division 223 comprises an intercommunicating pore and three troughs.Wherein said intercommunicating pore is a circular port, is positioned at the mid portion of said substrate 2, and said trough is a rectangular opening, and is stretched out by said intercommunicating pore periphery, and and said intercommunicating pore between be interconnected.Further, the extended line of the center line of said three troughs intersects at the center of said intercommunicating pore, and the angle between said adjacent two troughs equates (said in the present embodiment angle is 120 degree).Further, shown in Figure 2 is the Facad structure of said substrate, and the structure of said substrate 2 is corresponding with its Facad structure; And said substrate has certain thickness; Said one-tenth-value thickness 1/10 can be set according to the actual requirements, and this does not influence essence of the present invention, does not repeat them here.
Then; When using substrate as shown in Figure 2 to come the said full circle target of clamping; At first said substrate 2 is placed on the said target, and make said target be positioned at the target supporting region 22 of said substrate 2, further; Make the corresponding placement of screwed hole on several screwed holes 221 (being illustrated in figure 2 as six said screwed holes) and the said cupromanganese target on the said target supporting region 22, cooperate with it through the screw that uses with said screwed hole 221 is complementary then to fix said target.Then, through fixed area 21 on the said substrate 2 said substrate 2 is fixed on the corresponding cutting machine, as shown in Figure 2, said fixed area 21 comprises three locating holes that are positioned at said substrate 2 edges.Need to prove; In embodiment of the present invention; Said cutting machine is the wire cutting machine of being careful; The wherein said wire cutting machine of being careful is through the wire electric discharge that the molybdenum filament electrode produces said target to be cut, and its concrete operation principle can not repeat them here with reference to description relevant in the prior art.
Further, accomplish the design sketch after the said full circle target processing with reference to the instrument of the said a kind of target processing of the application of the invention as shown in Figure 3.Particularly; At first; Through after using cutter as shown in Figure 1 that said full circle target is processed on the lathe, as shown in Figure 3, comprise several V-type tanks 311 on the said full circle target 3; Wherein said each V-type tank 311 is donut with said full circle target 3, and the opening angle of said V-type tank 311 is 60 degree.Can also process several circular holes 312 that is positioned at 311 of said V-type tanks through said cutter; Those skilled in the art can also be according to the concrete designing requirement to said target; Use cutter according to the invention that said target is carried out various processing technologys, do not repeat them here.
Then, carry out reasonably positioning and clamping through 2 pairs of said targets 3 of substrate as shown in Figure 2 again, its concrete clamping process can not repeat them here with reference to figure 2 described embodiments.Further, behind the clamping of accomplishing said target 3, the present invention cuts said full circle target 3 through the method for the silk thread cutting of being careful.In cutting process, the midline position of three rectangular openings that the said silk thread cutting of being careful is the wire electric discharge that produces through the molybdenum filament electrode on the cutting location division 223 of said substrate 2 cuts said full circle target 3.The most said full circle target 3 cuts into the identical three fan-shaped cupromanganese targets of size dimension; Sector structure target 31 as shown in Figure 3, sector structure target 32 and sector structure target 33, the central angle of wherein said three fan-shaped targets are 120 degree.
In the variant of said embodiment two, the cutting location division 223 on the said substrate 2 is not limited to shape as shown in Figure 2.For example, said intercommunicating pore can also be a square opening, and said trough can also be a diamond hole, and this does not influence essence of the present invention, does not repeat them here.Again for example; To the described embodiment of Fig. 2; Said cutting location division also can only be made up of three troughs (supposing that said trough is a rectangle), and the center line of wherein said three troughs is compared to the center of said substrate, and the angle between said adjacent two troughs is 120 degree.Through using such cutting location division also can realize of the present invention the full circle target being cut into three sector structure targets that size dimension is identical, the central angle of wherein said sector structure target is 120 degree.
Further, can also change the shape and structure of cutting location division on the said substrate according to different target split requirements.For example; When need with said full circle target cut into central angle be 90 the degree the sector structure target time; Correspondingly; Said cutting location division can be made up of four troughs, and the center line of wherein said four troughs is compared to the center of said substrate, and the angle of any adjacent two center lines of said four troughs is 90 degree.Again for example; When need with said full circle target cut into central angle be 60 the degree the sector structure target time; Correspondingly; Said cutting location division can be made up of six troughs, and the center line of wherein said six troughs is compared to the center of said substrate, and the angle of any adjacent two center lines of said six troughs is 60 degree.It will be appreciated by those skilled in the art that similar like this variant does not influence essence of the present invention, does not repeat them here.
Though the present invention with preferred embodiment openly as above; But it is not to be used for limiting the present invention; Any those skilled in the art are not breaking away from the spirit and scope of the present invention; Can utilize the method and the technology contents of above-mentioned announcement that technical scheme of the present invention is made possible change and modification, therefore, every content that does not break away from technical scheme of the present invention; To any simple modification, equivalent variations and modification that above embodiment did, all belong to the protection domain of technical scheme of the present invention according to technical spirit of the present invention.
Claims (12)
1. a target machining tool is characterized in that, comprising: substrate, and said substrate comprises target supporting region and fixed area; Said target supporting region is positioned at the substrate center zone; Said fixed area is positioned at substrate edge region, is used for substrate is fixed in cutting machine; Also comprise the cutting location division in the said target supporting region.
2. according to the said target machining tool of claim 1, it is characterized in that said cutting location division is a hollow, comprise an intercommunicating pore and at least three troughs.
3. according to the said target machining tool of claim 2, it is characterized in that said intercommunicating pore is positioned at the substrate mid portion, said trough is stretched out by the intercommunicating pore periphery, is interconnected between said intercommunicating pore and the said trough.
4. according to the said target machining tool of claim 3, it is characterized in that the extended line of the center line of said each trough intersects at the center of said intercommunicating pore.
5. according to the said target machining tool of claim 4, it is characterized in that the angle between adjacent two troughs all equates.
6. according to the said target machining tool of claim 5, it is characterized in that, said trough be shaped as rectangle or rhombus.
7. according to the said target machining tool of claim 4, it is characterized in that being shaped as of said intercommunicating pore is square or circular.
8. according to the said target machining tool of claim 1, it is characterized in that also comprise several bearing parts in the said target supporting region, it is used for fixing said target.
9. said according to Claim 8 target machining tool is characterized in that said bearing part is screwed hole and bolt combination, or the bolts and nuts combination.
10. according to the said target machining tool of claim 1, it is characterized in that, also comprise in the said target supporting region alignment pin, said alignment pin be used to prevent said target in the location of target supporting region mistake.
11., it is characterized in that said fixed area is made up of several locating holes at said substrate edges place according to the said target machining tool of claim 1, be used for said substrate is fixed in cutting machine.
12., it is characterized in that said cutting machine is the wire cutting machine platform of being careful according to the said target machining tool of claim 1.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210034144.XA CN102554292B (en) | 2010-12-23 | 2010-12-23 | Target machining tool |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210034144.XA CN102554292B (en) | 2010-12-23 | 2010-12-23 | Target machining tool |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010603094.3A Division CN102091796B (en) | 2010-12-23 | 2010-12-23 | Target processing tool |
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| CN102554292A true CN102554292A (en) | 2012-07-11 |
| CN102554292B CN102554292B (en) | 2014-03-12 |
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| CN201210034144.XA Active CN102554292B (en) | 2010-12-23 | 2010-12-23 | Target machining tool |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110549077A (en) * | 2019-09-05 | 2019-12-10 | 成都宏明双新科技股份有限公司 | Processing method for cutting small round hole with inner diameter of 0.2mm by slow-speed wire |
| CN112238272A (en) * | 2020-10-19 | 2021-01-19 | 重庆清平机械有限责任公司 | Special-shaped thin-wall fan-shaped part machining control process |
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| CN112238272A (en) * | 2020-10-19 | 2021-01-19 | 重庆清平机械有限责任公司 | Special-shaped thin-wall fan-shaped part machining control process |
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| CN102554292B (en) | 2014-03-12 |
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