CN102554292B - Target machining tool - Google Patents
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- CN102554292B CN102554292B CN201210034144.XA CN201210034144A CN102554292B CN 102554292 B CN102554292 B CN 102554292B CN 201210034144 A CN201210034144 A CN 201210034144A CN 102554292 B CN102554292 B CN 102554292B
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Abstract
The invention provides a target machining tool, which comprises a cutter for machining a V-shaped water channel on a target. The cutter comprises a blade and a cutter handle connected with the blade, and the relief angle of the blade is determined by the V-shaped water channel. The invention further provides a substrate for positioning and clamping the target in cutting, the substrate comprises a target bearing area and a fixing area, the target bearing area is positioned at the center of the substrate, the fixing area is positioned at the edge of the substrate and used for fixing the substrate on a cutting machine, and a cutting positioning portion is arranged in the target bearing area. By increasing the relief angle of the cutter, the cutter cannot rub a machined surface when machining the V-shaped water channel for the round target, the substrate is used for reasonably positioning and clamping the round copper-manganese alloy target when the round target is cut, positioning precision is improved, and dimensional accuracy of the target is finally ensured.
Description
The application is to be on December 23rd, 2010 applying date, and application number is 201010603094.3, the dividing an application of the Chinese invention patent application that denomination of invention is " a kind of target processing instrument ".
Technical field
The present invention relates to field of semiconductor technology, particularly a kind of instrument of target processing.
Background technology
In field of semiconductor technology, target material assembly is combined and form with the backboard with some strength by the target that meets sputtering performance.Wherein, described target can be made by many materials, and for example, the metal materials such as copper, aluminium, titanium, also can be made by alloy material, for example, and copper alloy, cupromanganese etc.Wherein cupromanganese is a kind of conventional for making the alloy material of target.
In making target process, it is a very important link that target is processed.In the prior art, be generally by finish turning lathe, described cupromanganese target to be comprised grinding out, carves the machinings such as tank.Wherein, the cutter using on existing finish turning lathe generally includes anterior angle and relief angle, described anterior angle determines Knite sharpness, relief angle determines cutter and friction of workpiece, in order to make the intensity of blade not weakened, common relief angle less (generally in 15 degree left and right), in the time of so not only can preventing lathe running, because shake impact excessive and that cutter stability is produced, and can extend the service life of cutter upper knife edge.But, when using the less cutter of relief angle to process V-arrangement tank on target, be easy to be ground to the machined surface of target, cause damaged products, be therefore difficult to sink size processing to put in place.
In addition, the existing target due to full circle cannot be positioned in sputter reaction vessel conventionally completely, carries out plasma sputtering technique.Therefore, conventionally before manufacturing tank, first from blank material, cut out identical at least three the sector structure targets of geomery, and then described fan-shaped target is carried out to tank processing; Then at least three sector structure targets are put into container one by one, be spliced into the target of full circle.But can produce like this two problems: on the one hand, owing to being that tank to described at least three sector structure targets is processed respectively, therefore when they are spliced into a full circle target, between described each tank, may can not coordinate completely because of the error in some sizes; On the other hand, between described each sector structure target, also may can not coordinate completely due to the error on marginal dimension.
In sum, can find that these problems produce certain impact for precision, the efficiency of target processing, but also not have at present good technical scheme to solve these problems.
Summary of the invention
The problem that the present invention solves is to provide a kind of target machining tool, and the tank on described target can time processing be put in place under full circle state; After putting in place, described tank and other each dimensioned guarantee the Accurate Segmentation of described target.
For addressing the above problem, the invention provides a kind of target machining tool, comprise cutter, for processing V-shaped tank on target, described cutter comprises blade and the handle of a knife being connected with blade, and the relief angle of described blade is determined by V-type tank angle, V-type tank angle is larger, relief angle is less, and V-type tank angle is less, and relief angle is larger.
Preferably, described V-type tank angle is 60 while spending, and described blade relief is 30 degree.
Preferably, the size of described blade is determined by sink size.
Preferably, described blade and described handle of a knife are formed in one.
Preferably, between described blade and described handle of a knife, by connector, be connected.
Preferably, described connector is bolt and screw or screw or draw-in groove and buckle.
Preferably, the material of described blade is carbide alloy wolfram steel, and the material of handle of a knife is No. 45 steel.
On the other hand, the present invention also provides a kind of target machining tool, comprising: substrate, and described substrate comprises target supporting region and fixed area; Described target supporting region is positioned at substrate center region; Described fixed area is positioned at substrate edge region, for substrate is fixed on to cutting machine; In described target supporting region, also comprise cutting location division.
Preferably, described cutting location division is hollow, comprises an intercommunicating pore and at least three troughs.
Preferably, described intercommunicating pore is positioned at substrate mid portion, and described trough is stretched out by intercommunicating pore periphery, between described intercommunicating pore and described trough, is interconnected.
Preferably, the extended line of the center line of described each trough intersects at the center of described intercommunicating pore.
Preferably, the angle between adjacent two troughs all equates.
Preferably, described trough is shaped as rectangle or rhombus.
Preferably, described intercommunicating pore be shaped as square or circular.
Preferably, in described target supporting region, also comprise several bearing parts, it is for fixing described target.
Preferably, described bearing part is screwed hole and bolt combination, or bolts and nuts combination.
Preferably, also comprise an alignment pin in described target supporting region, described alignment pin is for preventing that described target is in the location of target supporting region mistake.
Preferably, described fixed area consists of several locating holes at described substrate edges place, for described substrate is fixed on to cutting machine.
Preferably, described cutting machine is slow feeding linear cutting platform.
Compared with prior art, the present invention has the following advantages:
First, by reequiping existing lathe tools, make the blade relief of described cutter increase to 30 degree, while making the V-arrangement tank of its described target under processing full circle state, can not encounter the surface having processed.The relief angle of wherein said blade determines by V-type tank angle, and V-type tank angle is larger, and relief angle is less, and V-type tank angle is less, and relief angle is larger.
On the other hand, by designing a kind of substrate, carry out full circle target described in clamping, wherein said substrate comprises target supporting region and fixed area; Described target supporting region is positioned at substrate center region; Described fixed area is positioned at substrate edge region, for substrate is fixed on to cutting machine; In described target supporting region, also comprise cutting location division.By described substrate, described full circle target can be fixed on cutting machine, and corresponding cutting location division is set on described substrate, make described full circle target can cut into the target of required form structure.
Accompanying drawing explanation
Fig. 1 is the structural representation of the cutter that uses in a kind of target machining tool of the present invention;
Fig. 2 is the Facad structure schematic diagram of the substrate that uses in a kind of target machining tool of the present invention;
Fig. 3 is that a kind of target machining tool completes the design sketch after described full circle target processing described in the application of the invention.
The specific embodiment
Inventor finds, existing, target is added to man-hour, the tool clearance generally less (conventionally in 15 degree left and right) of the finish turning lathe using, although can prevent from like this shaking the impact on cutter stability when excessive when lathe, also can extend the service life of blade simultaneously.But, during tank on using this tool sharpening target, because the relief angle of cutter is less, may be ground to the surface having processed.Especially when the bottom position of processing V-arrangement tank, near the flume wall of will dawdling, thus cause the damage of target.Therefore,, when using the less cutter of relief angle, be usually difficult to the sink size processing on described target to put in place.On the other hand, because the target of full circle cannot be positioned in sputter reaction vessel conventionally completely, carry out plasma sputtering technique.Therefore, conventionally before manufacturing tank, first from blank material, cut out identical at least three the sector structure targets of geomery, and then described fan-shaped target is carried out to tank processing; Then at least three sector structure targets are put into container one by one, be spliced into the target of full circle.But, owing to being that tank to described at least three sector structure targets is processed respectively, therefore, when they are spliced into a full circle target, between described each tank, may can not coordinate completely because of the error in some sizes; In addition between described each sector structure target, also may can not coordinate completely due to the error on marginal dimension.
For above-mentioned these problems, the invention provides and a kind ofly for target machining tool, comprise cutter, for processing V-shaped tank on target, described cutter comprises blade and the handle of a knife being connected with blade.On the basis of existing cutter, the surface that makes described cutter can not rub and process when the processing V-shaped tank by grinding the relief angle of large described blade.On the other hand, also provide a substrate for target described in clamping, described substrate comprises target supporting region and fixed area; Described target supporting region is positioned at substrate center region; Described fixed area is positioned at substrate edge region, for substrate is fixed on to cutting machine.Further, also comprise cutting location division in described target supporting region, it can make cutting machine cut exactly described full circle target according to demand.In sum, a kind of target machining tool described in the application of the invention, can realize the V-type tank time processing on full circle target is put in place, improve production efficiency, simultaneously by substrate of the present invention can be when described full circle target be cut positioning and clamping reasonably.
For above-mentioned purpose of the present invention, feature and advantage can more be become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
It should be noted that, target described in embodiments described herein is to take cupromanganese target to be described as example, in actual applications, target machining tool of the present invention also can be applied to the target of other materials, such as albronze target etc., this does not affect essence of the present invention, does not repeat them here.
It will be appreciated by those skilled in the art that conventionally the machining of target is completed by lathe.Particularly, described work flow is roughly as follows: first by described target clamping to be processed on the chuck of lathe, then adjust the position of cutter, utilize the feed box on described lathe to make blade be fed into suitable Working position, then start lathe described target is processed.In the present invention, described process is mainly processing V-shaped tank on described full circle target, and wherein said each V-type tank is positioned at the surface of described full circle target, and is donut with described full circle target.
Further, the cutter that the present invention uses is to improve on the basis of existing cutter, is mainly by the blade relief mill of described cutter is large, makes it when the described V-type tank of processing, can not be ground to the surface having processed.For example, when the bottom of described tool sharpening V-type tank, the relief angle that increases blade can prevent the rub sidewall of described V-type tank of described cutter.
Embodiment mono-: particularly, and with reference to cutter structure schematic diagram used in the present invention as shown in Figure 1.As shown in Figure 1, described cutter mainly consists of handle of a knife 11 and blade 12, and described handle of a knife 11 can be made by No. 45 steel (carbonaceous component 0.45% left and right), and described blade 12 can be made by carbide alloy wolfram steel.Further, the connected mode between wherein said blade 12 and described handle of a knife 11 can have various ways.For example, described blade 12 and described handle of a knife 11 can be integrated; Again for example, described blade 12 can be connected with described handle of a knife 11 by connector.Particularly, in an optimal way of the present embodiment, for example described blade 12 can be connected with described handle of a knife 11 by screw.Again for example, described blade 12 can also be secured on described handle of a knife 11 by bolt and the screw matching with it.Again for example, can also be by a draw-in groove is set on described handle of a knife 11, and provide the buckle matching that described blade 12 is fixed on described handle of a knife 11.Described blade 12 is preferably fixed on the front end of described handle of a knife 11, and the size of the tank that can process as required of the size of described blade 12 decides.Further, by adopting the method for existing autogenous grinding cutter to grind the blade relief of described cutter, for example, can carry out by special-purpose knife sharpener the blade relief of cutter described in grinding.Wherein, described relief angle is the angle between described blade 12 and cutting plane, and the relief angle of common described cutter is less, generally in 15 degree left and right.It will be appreciated by those skilled in the art that if increase the relief angle of described cutter, the strength decreased of blade 12 cutting edges.Therefore in actual applications, the blade relief size of described cutter need to be adjusted to a suitable angle, can either meet in process, and described cutter can not be ground to the surface having processed on target, can guarantee the intensity of blade 12 cutting edges again simultaneously.In an optimal way of the present embodiment, as shown in Figure 3, on described full circle target 3, comprise several V-type tanks 311, wherein said each V-type tank 311 is donut with described full circle target 3, and the opening angle of described V-type tank 311 is 60 degree, 311 of described V-type tanks are also provided with several circular holes 312.It will be appreciated by those skilled in the art that the V-type tank angle due to target described in actual needs is set as 60 degree, therefore the relief angle of the blade of described cutter 12 is increased to 30 degree (being that in Fig. 1, β is 30 degree) in this enforcement.By practical operation, find, when described blade relief is 30 can reach while spending and prevent the rub effect of machined surface of cutter.
Further, during V-type tank on using tool sharpening target, the size of the blade relief of described cutter determines by V-type tank angle, and V-type tank angle is larger, and the relief angle of described blade is less; V-type tank angle is less, and the relief angle of described blade is larger.Those skilled in the art can correspondingly change for the V-type tank of different openings angle on target to be processed the size of described relief angle, but also must consider the factors such as intensity of described cutter knife simultaneously.
In addition by described cutter, can also process other each sizes of described target.Particularly, for example, can by described cutter, cut the surplus of described target, make the size of its realistic demand.Again for example, can also by described cutter, to described target material surface, carry out other machining operations such as grinding out, trimming, this does not affect essence of the present invention, does not repeat them here.。
Embodiment bis-: described in embodiment mono-, use the cutter shown in Fig. 1, can put in place to the V-type tank on described full circle target and other each dimensioned.Further, re-use substrate of the present invention the target of described full circle is carried out to clamping location, thereby be convenient to the follow-up cutting to described target.
Particularly, with reference to the Facad structure schematic diagram of the substrate shown in figure 2.Particularly, as shown in Figure 2, the front of described substrate 2 comprises fixed area 21 and target supporting region 22.Wherein said fixed area 21 is to form (in Fig. 2, being three) by several locating holes, for described substrate 2 is fixed on to cutting machine (Fig. 2 is not shown).It will be appreciated by those skilled in the art that in actual applications, can determine correct Working position by described locating hole, then by make table instrument with high accuracy contact, play table, then with pressing plate, described substrate 2 is fixed on cutting machine processing platform.Described target supporting region 22 is positioned at the middle section of described substrate 2, comprises several bearing points, alignment pin 222 and cutting location division 223.Wherein, those skilled in the art can provide the connector matching with described bearing point to fix described target.Preferably, as shown in Figure 2, described bearing point is several screwed holes 221 (being six), correspondingly shown in Fig. 2, can provide the screw matching with described screwed hole 221 to coordinate described screwed hole 221 for fixing described target.Described alignment pin 222 is for preventing that described target is in the location of target supporting region mistake, for example, when the comparatively complicated target of processing interior shape, for preventing described target orientation angle mistake, can be by prevent the location of mistake of target with described alignment pin 222 on a certain specific position.
Further, owing to needing that in the present invention the target of described full circle is cut into the identical sector structure target of three plate shape sizes, therefore in the present embodiment, as shown in Figure 2, described cutting location division 223 is hollow, and described cutting location division 223 is through described substrate 2.Particularly, described cutting location division 223 comprises an intercommunicating pore and three troughs.Wherein said intercommunicating pore is circular port, is positioned at the mid portion of described substrate 2, and described trough is rectangular opening, and is stretched out by described intercommunicating pore periphery, and and described intercommunicating pore between be interconnected.Further, the extended line of the center line of described three troughs intersects at the center of described intercommunicating pore, and the angle between described adjacent two troughs equates (described angle is 120 degree in the present embodiment).Further, shown in Fig. 2 is the Facad structure of described substrate, and the structure of described substrate 2 is corresponding with its Facad structure, and described substrate has certain thickness, described one-tenth-value thickness 1/10 can be set according to the actual requirements, and this does not affect essence of the present invention, does not repeat them here.
Then, when carry out clamping with substrate as shown in Figure 2 described in during full circle target, first described substrate 2 is placed on described target, and make described target be positioned at the target supporting region 22 of described substrate 2, further, make several screwed holes 221 (being illustrated in figure 2 six described screwed holes) on described target supporting region 22 and the corresponding placement of screwed hole on described cupromanganese target, then by using the screw matching with described screwed hole 221 to coordinate with it, fix described target.Then, by fixed area 21 on described substrate 2, described substrate 2 is fixed on corresponding cutting machine, as shown in Figure 2, described fixed area 21 comprises three locating holes that are positioned at described substrate 2 edges.It should be noted that, in embodiment of the present invention, described cutting machine is slow feeding linear cutting, wherein said slow feeding linear cutting is that the wire electric discharge producing by molybdenum filament electrode cuts described target, its concrete operation principle can, with reference to description relevant in prior art, not repeat them here.
Further, the instrument with reference to a kind of target processing described in the application of the invention as shown in Figure 3 completes the design sketch after described full circle target processing.Particularly, first, after on lathe, use cutter is as shown in Figure 1 processed described full circle target, as shown in Figure 3, on described full circle target 3, comprise several V-type tanks 311, wherein said each V-type tank 311 is donut with described full circle target 3, and the opening angle of described V-type tank 311 is 60 degree.The circular hole 312 that can also be positioned at 311 of described V-type tanks to several by described cutter is processed, those skilled in the art can also be according to the specific design requirement to described target, use cutter of the present invention to carry out various processing technologys to described target, do not repeat them here.
Then, then carry out reasonably positioning and clamping by 2 pairs of described targets 3 of substrate as shown in Figure 2, its concrete clamping process can, with reference to the described embodiment of figure 2, not repeat them here.Further, after completing the clamping of described target 3, the present invention cuts described full circle target 3 by the method for the silk thread cutting of being careful.In cutting process, described in be careful that to be the wire electric discharge that produces by molybdenum filament electrode cut described full circle target 3 along the midline position of three rectangular openings on the cutting location division 223 of described substrate 2 for silk thread cutting.The most described full circle target 3 cuts into the identical three fan-shaped cupromanganese targets of size dimension, sector structure target 31, sector structure target 32 and sector structure target 33 as shown in Figure 3, the central angle of wherein said three fan-shaped targets is 120 degree.
One at described embodiment bis-changes in example, and the cutting location division 223 on described substrate 2 is not limited to shape as shown in Figure 2.For example, described intercommunicating pore can also be square opening, and described trough can also be diamond hole, and this does not affect essence of the present invention, does not repeat them here.Again for example, for the embodiment described in Fig. 2, described cutting location division also can only be comprised of three troughs (supposing that described trough is rectangle), and the center line of wherein said three troughs is compared to the center of described substrate, and the angle between described adjacent two troughs is 120 degree.By using such cutting location division also can realize, of the present invention full circle target is cut into three sector structure targets that size dimension is identical, the central angle of wherein said sector structure target is 120 degree.
Further, can also change the shape and structure that cuts location division on described substrate according to different target split requirements.For example, in the time described full circle target need to being cut into central angle and is the sector structure target of 90 degree, correspondingly, described cutting location division can be comprised of four troughs, the center line of wherein said four troughs is compared to the center of described substrate, and the angle of two center lines of arbitrary neighborhood of described four troughs is 90 degree.Again for example, in the time described full circle target need to being cut into central angle and is the sector structure target of 60 degree, correspondingly, described cutting location division can be comprised of six troughs, the center line of wherein said six troughs is compared to the center of described substrate, and the angle of two center lines of arbitrary neighborhood of described six troughs is 60 degree.It will be appreciated by those skilled in the art that similar like this variation example does not affect essence of the present invention, does not repeat them here.
Although the present invention with preferred embodiment openly as above; but it is not for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can utilize method and the technology contents of above-mentioned announcement to make possible change and modification to technical solution of the present invention; therefore; every content that does not depart from technical solution of the present invention; any simple modification, equivalent variations and the modification above embodiment done according to technical spirit of the present invention, all belong to the protection domain of technical solution of the present invention.
Claims (10)
1. a target machining tool, is characterized in that, comprising: substrate, and described substrate comprises target supporting region and fixed area; Described target supporting region is positioned at substrate center region; Described fixed area is positioned at substrate edge region, for substrate is fixed on to cutting machine; In described target supporting region, also comprise cutting location division;
Described cutting location division is hollow, comprises an intercommunicating pore and at least three troughs;
Between described intercommunicating pore and described trough, be interconnected;
Described intercommunicating pore is positioned at substrate mid portion, and described trough is stretched out by intercommunicating pore periphery;
Described target machining tool coordinates with described cutting machine after putting in place for the tank processing on full circle target, and full circle target is cut into at least three sector structure targets along described trough.
2. target machining tool according to claim 1, is characterized in that, the extended line of the center line of described each trough intersects at the center of described intercommunicating pore.
3. target machining tool according to claim 2, is characterized in that, the angle between adjacent two troughs all equates.
4. target machining tool according to claim 3, is characterized in that, described trough be shaped as rectangle or rhombus.
5. target machining tool according to claim 1, is characterized in that, being shaped as of described intercommunicating pore is square or circular.
6. target machining tool according to claim 1, is characterized in that, in described target supporting region, also comprises several bearing parts, and it is for fixing described target.
7. target machining tool according to claim 6, is characterized in that, described bearing part is screwed hole and bolt combination, or bolts and nuts combination.
8. target machining tool according to claim 1, is characterized in that, also comprises an alignment pin in described target supporting region, and described alignment pin is for preventing that described target is in the location of target supporting region mistake.
9. target machining tool according to claim 1, is characterized in that, described fixed area consists of several locating holes at described substrate edges place, for described substrate is fixed on to cutting machine.
10. target machining tool according to claim 1, is characterized in that, described cutting machine is slow feeding linear cutting platform.
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| CN201210034144.XA CN102554292B (en) | 2010-12-23 | 2010-12-23 | Target machining tool |
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| CN201210034144.XA CN102554292B (en) | 2010-12-23 | 2010-12-23 | Target machining tool |
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| CN201010603094.3A Division CN102091796B (en) | 2010-12-23 | 2010-12-23 | Target processing tool |
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| CN102554292B true CN102554292B (en) | 2014-03-12 |
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| CN110549077A (en) * | 2019-09-05 | 2019-12-10 | 成都宏明双新科技股份有限公司 | Processing method for cutting small round hole with inner diameter of 0.2mm by slow-speed wire |
| CN112238272B (en) * | 2020-10-19 | 2023-05-02 | 重庆清平机械有限责任公司 | Machining control process for special-shaped thin-wall fan-shaped part |
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| JPH0767651B2 (en) * | 1987-01-26 | 1995-07-26 | 三菱電機株式会社 | Cutting work removal device |
| US4841126A (en) * | 1987-12-28 | 1989-06-20 | Mcwilliams Machinery Sales, Division Of Bridgeport Machines Inc. | Rotary table wire EDM machine |
| JP2002292526A (en) * | 2001-03-30 | 2002-10-08 | Aichi Steel Works Ltd | Jig for wire cut electric discharging machining |
| CN200998824Y (en) * | 2006-06-05 | 2008-01-02 | 王少卿 | Wire-cutting multifunctional magnetic clamp |
| CN201455472U (en) * | 2009-06-19 | 2010-05-12 | 广州市金钟汽车零件制造有限公司 | Line cutting special-purpose clamp for inclination equant machining |
| CN201446416U (en) * | 2009-06-26 | 2010-05-05 | 常州市风机制造有限公司 | Three-blade impeller keyway machining tool |
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Address after: 315400 Ningbo City, Yuyao Province Economic Development Zone, state science and Technology Industrial Park Road, No. 198, No. Patentee after: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Address before: 315400 Ningbo City, Yuyao Province Economic Development Zone, state science and Technology Industrial Park Road, No. 198, No. Patentee before: Ningbo Jiangfeng Electronic Materials Co., Ltd. |