CN102540553A - Color filtering substrate with scale structure and manufacturing method of color filtering substrate - Google Patents
Color filtering substrate with scale structure and manufacturing method of color filtering substrate Download PDFInfo
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- CN102540553A CN102540553A CN2010106221461A CN201010622146A CN102540553A CN 102540553 A CN102540553 A CN 102540553A CN 2010106221461 A CN2010106221461 A CN 2010106221461A CN 201010622146 A CN201010622146 A CN 201010622146A CN 102540553 A CN102540553 A CN 102540553A
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Abstract
The invention provides a color filtering substrate and a manufacturing method thereof. In order to avoid offset of overlap regions of shading pattern layers and color filtering layers due to bending of exposure masking plates, overlap quantities of the shading pattern layers and the color filtering layers need to be monitored, a special large-sized online microscopic length measuring instrument is required in the prior art and is unfavorable for online control, and simultaneously, cost is increased. A plurality of lines of horizontal scale shading pattern layers, a plurality of lines of horizontal scale color filtering layers, a plurality of rows of vertical scale shading pattern layers and a plurality of rows of vertical scale color shading layers are additionally arranged in a non-display region of a transparent glass substrate. During practical production, the shading layers and the filtering layers which have scale effects can lead manufacturers to directly, simply and conveniently see and confirm overlap offset of the shading pattern layers and the color filtering layers, accordingly, registration precision of the shading pattern layers and the color filtering layers can be quickly, conveniently and economically controlled and adjusted, and the quality of the color filtering substrate is improved.
Description
Technical field
The present invention relates to the display panels field; Relate in particular to the structure and the manufacturing approach thereof of colored optical filtering substrates in the display panels; Specifically, relate to the monitoring of lap between the shielding pattern layer (BM layer) and chromatic filter layer (RGB layer) in process of production.
Background technology
In recent years, liquid crystal display is not only at information communication device, even also obtained rapidly in the general electrical equipment popularizing.The critical piece of liquid crystal display is a display panels; Colored optical filtering substrates wherein is to one of very important critical component of display quality, and its structure generally comprises transparent glass substrate, shielding pattern layer, chromatic filter layer, common electrode layer and spacer etc.Wherein chromatic filter layer requires to have certain lap between the two technically when covering the open area of shielding pattern layer.Its structure sees also shown in Figure 1, and Fig. 1 shows a dot structure.As shown in the figure; Shielding pattern layer 101 has an open area 102; Chromatic filter layer 103 (this chromatic filter layer is one of red filter layer, blue color filter layer or green filter layer) covers on this open area 102, and with shielding pattern layer 101 certain lap is arranged around it.
The method that on transparent glass substrate, forms shielding pattern layer and chromatic filter layer adopts the pigment dispersing method of photoresistance coating usually; Promptly at first liquid photoresistance is coated on glass baseplate surface; Then through having the exposure mask plate of given pattern; Use the close induction type exposure machine to make public, form preset pattern through development and bake process again.Fig. 2 schematically shows this exposure process.
Along with the continuous development of LCD industry, the size of colored optical filtering substrates constantly increases, and therefore, the exposure mask board size that correspondingly in exposure process, uses also can increase thereupon.When the size of colored optical filtering substrates increases to G5 (being 1100*1300cm) and when above; Mask plate can produce crooked (bending) inevitably owing to gravity during exposure, causes the interior skewness of exposure back graph line breadth, causes the skew of shielding pattern layer and chromatic filter layer overlapping region; Cause colour element ox horn (Tuno) skewness; Perhaps PS height tolerance squints (lap of light-shielding pattern and chromatic filter layer is 0) when serious, also can produce light leak.
For fear of the generation of above problem, improve the quality of colored optical filtering substrates product, in the colored optical filtering substrates actual production process, need the lap of monitoring shielding pattern layer and chromatic filter layer, and in time make adjustment according to its drift condition.Usually use micro-horizontal metroscope to measure above-mentioned lap in the prior art, promptly measure the position at shielding pattern layer edge and chromatic filter layer edge respectively, through calculating its overlapping side-play amount.This traditional mode need take a long time, and needs to buy special-purpose large-scale online micro-horizontal metroscope, is unfavorable for that On-line Control has also increased cost simultaneously.
Summary of the invention
Based on the problems referred to above that exist in the background technology; The object of the present invention is to provide a kind of colored optical filtering substrates; On substrate, be formed with the scale structure of the overlapping side-play amount of confirming shielding pattern layer and chromatic filter layer; Can make the fabricator through directly visual and confirm the overlapping side-play amount of shielding pattern layer and chromatic filter layer easily through this scale structure; Thereby fast, convenient and control and adjust the fit precision of shielding pattern layer and chromatic filter layer economically, improve the quality of color optical filtering substrate.
The present invention also provides a kind of above-mentioned manufacturing approach with colored optical filtering substrates of scale structure of making simultaneously.
According to above-mentioned purpose, the present invention provides a kind of colored optical filtering substrates, comprising:
Transparent glass substrate;
Shielding pattern layer is positioned on the viewing area of said transparent glass substrate, and said shielding pattern layer has the open area;
Chromatic filter layer is positioned on the open area of said shielding pattern layer, and with said light-shielding pattern ply;
Multiple row horizontal ruler shielding pattern layer, along continuous straight runs are distributed in equidistant from distance on the non-display area of said transparent glass substrate, and said horizontal ruler shielding pattern layer has the open area;
Multiple row horizontal ruler chromatic filter layer is covered in respectively on the open area of the said horizontal ruler shielding pattern layer of multiple row with the level interval that does not wait between the said horizontal ruler chromatic filter layer of multiple row;
Multirow Vertical surveyors' staff shielding pattern layer vertically is distributed on the non-display area of transparent glass substrate with equidistant from distance, and said Vertical surveyors' staff shielding pattern layer has the open area;
Multirow Vertical surveyors' staff chromatic filter layer, the said Vertical surveyors' staff chromatic filter layer of multirow is covered in respectively on the open area of the said Vertical surveyors' staff shielding pattern layer of multirow with different vertical intervals.
In described colored optical filtering substrates, the width of said horizontal ruler chromatic filter layer is less than the width of the open area of said horizontal ruler shielding pattern layer; The height of said Vertical surveyors' staff chromatic filter layer is less than the height of the open area of said Vertical surveyors' staff shielding pattern layer.
In described colored optical filtering substrates, the width of the said horizontal ruler chromatic filter layer of multiple row equates; The height of the said Vertical surveyors' staff chromatic filter layer of multirow equates.
In described colored optical filtering substrates; Leave the gap between the left and right sides of the limit, the left and right sides of said horizontal ruler chromatic filter layer and the open area of said horizontal ruler shielding pattern layer; Wherein the gap between the left and right sides of limit, the left and right sides and the open area of said horizontal ruler shielding pattern layer of the said horizontal ruler chromatic filter layer of row equates, is called the horizontal reference pattern and is listed as; Spacing P between the adjacent said horizontal ruler chromatic filter layer of said horizontal reference pattern row both sides
WaterAs shown in the formula: P (n)
Water=P
Water 0+ (| n|-1) A, wherein n is the row number of said horizontal ruler chromatic filter layer, A is the minimum level side-play amount, P
Water 0Be minimum spacing, P (n)
WaterIt is the spacing between n row and the n-1 row horizontal reference pattern; The row of the said horizontal ruler chromatic filter layer in said horizontal reference pattern row left side number are by being respectively-1 ,-2 ,-3 with distance from said horizontal reference pattern row ..., the row of the said horizontal ruler chromatic filter layer on said horizontal reference pattern row right side number are by being respectively 1,2,3 with distance from said horizontal reference pattern row
The dual-side up and down of said Vertical surveyors' staff chromatic filter layer and the open area of said Vertical surveyors' staff shielding pattern layer leave the gap up and down between the both sides; Wherein the dual-side up and down of the said Vertical surveyors' staff chromatic filter layer of delegation equates with the gap between the both sides up and down of the open area of said Vertical surveyors' staff shielding pattern layer; It is capable to be called the vertical reference pattern, the spacing P between the adjacent said Vertical surveyors' staff chromatic filter layer of the capable both sides of said vertical reference pattern
Hang downAs shown in the formula: P (m)
Hang down=P
Hang down 0+ (| m|-1) B wherein m be the row number of said Vertical surveyors' staff chromatic filter layer, B is the minimum vertical side-play amount, P
Hang down 0Be minimum spacing, P (m)
Hang downIt is the spacing between the capable and capable horizontal reference pattern of m-1 of m; The row of the said Vertical surveyors' staff chromatic filter layer of the capable upside of said vertical reference pattern number by be respectively-1 ,-2 ,-3 from the capable distance of said vertical reference pattern ..., the row of the said Vertical surveyors' staff chromatic filter layer of the capable downside of said vertical reference pattern number by be respectively 1,2,3 from the capable distance of said vertical reference pattern ...
In described colored optical filtering substrates, the scope of said minimum level side-play amount and said minimum vertical side-play amount is 0.3-0.7 μ m.
At described colored optical filtering substrates, said minimum level side-play amount and said minimum vertical side-play amount are 0.5 μ m.
In described colored optical filtering substrates, the columns of said horizontal ruler shielding pattern layer is between the 20-30 row; The line number of said Vertical surveyors' staff shielding pattern layer is between 20-30 is capable.
According to above-mentioned purpose, the present invention also provides a kind of colored optical filtering substrates manufacturing approach, comprises the steps:
One transparent glass substrate is provided;
On the viewing area of said transparent glass substrate, form shielding pattern layer, along continuous straight runs forms multiple row horizontal ruler shielding pattern layer and vertically forms multirow Vertical surveyors' staff shielding pattern layer with equidistant from distance with equidistant from distance on the non-display area of said transparent glass substrate; Said shielding pattern layer, said horizontal ruler shielding pattern layer and said Vertical surveyors' staff shielding pattern layer all have the open area; And
On the open area of said shielding pattern layer, form chromatic filter layer, and with said light-shielding pattern ply; On the open area of the said horizontal ruler shielding pattern layer of multiple row, form the horizontal ruler chromatic filter layer, and the level interval between the said horizontal ruler chromatic filter layer of multiple row is not waited; On the open area of the said Vertical surveyors' staff shielding pattern layer of multirow, form the Vertical surveyors' staff chromatic filter layer, and the vertical interval between the multirow Vertical surveyors' staff chromatic filter layer is not waited.
In the manufacturing approach of described colored optical filtering substrates, the width of said horizontal ruler chromatic filter layer is less than the width of the open area of said horizontal ruler shielding pattern layer; The height of said Vertical surveyors' staff chromatic filter layer is less than the height of the open area of said Vertical surveyors' staff shielding pattern layer.
In the manufacturing approach of described colored optical filtering substrates, the width of the said horizontal ruler chromatic filter layer of multiple row equates; The height of the said Vertical surveyors' staff chromatic filter layer of multirow equates.
In the manufacturing approach of described colored optical filtering substrates; Leave the gap between the left and right sides of the limit, the left and right sides of said horizontal ruler chromatic filter layer and the open area of said horizontal ruler shielding pattern layer; Wherein the gap between the left and right sides of limit, the left and right sides and the open area of said horizontal ruler shielding pattern layer of the said horizontal ruler chromatic filter layer of row equates, is called the horizontal reference pattern and is listed as; Spacing P between the adjacent said horizontal ruler chromatic filter layer of said horizontal reference pattern row both sides
WaterAs shown in the formula: P (n)
Water=P
Water 0+ (| n|-1) A, wherein n is the row number of said horizontal ruler chromatic filter layer, A is the minimum level side-play amount, P
Water 0Be minimum spacing, P (n)
WaterIt is the spacing between n row and the n-1 row horizontal reference pattern; The row of the said horizontal ruler chromatic filter layer in said horizontal reference pattern row left side number are by being respectively-1 ,-2 ,-3 with distance from said horizontal reference pattern row ..., the row of the said horizontal ruler chromatic filter layer on said horizontal reference pattern row right side number are by being respectively 1,2,3 with distance from said horizontal reference pattern row
The dual-side up and down of said Vertical surveyors' staff chromatic filter layer and the open area of said Vertical surveyors' staff shielding pattern layer leave the gap up and down between the both sides; Wherein the dual-side up and down of the said Vertical surveyors' staff chromatic filter layer of delegation equates with the gap between the both sides up and down of the open area of said Vertical surveyors' staff shielding pattern layer; It is capable to be called the vertical reference pattern, the spacing P between the adjacent said Vertical surveyors' staff chromatic filter layer of the capable both sides of said vertical reference pattern
Hang downAs shown in the formula: P (m)
Hang down=P
Hang down 0+ (| m|-1) B wherein m be the row number of said Vertical surveyors' staff chromatic filter layer, B is the minimum vertical side-play amount, P
Hang down 0Be minimum spacing, P (m)
Hang downIt is the spacing between the capable and capable horizontal reference pattern of m-1 of m; The row of the said Vertical surveyors' staff chromatic filter layer of the capable upside of said vertical reference pattern number by be respectively-1 ,-2 ,-3 from the capable distance of said vertical reference pattern ..., the row of the said Vertical surveyors' staff chromatic filter layer of the capable downside of said vertical reference pattern number by be respectively 1,2,3 from the capable distance of said vertical reference pattern ...
In the manufacturing approach of described colored optical filtering substrates, the scope of said minimum level side-play amount and said minimum vertical side-play amount is 0.3-0.7 μ m.
In the manufacturing approach of described colored optical filtering substrates, said minimum level side-play amount and said minimum vertical side-play amount are 0.5 μ m.
In the manufacturing approach of described colored optical filtering substrates, the columns of said horizontal ruler shielding pattern layer is between the 20-30 row; The line number of said Vertical surveyors' staff shielding pattern layer is between 20-30 is capable.
Description of drawings
Fig. 1 schematically shows the structure of shielding pattern layer and chromatic filter layer in traditional colored optical filtering substrates;
Fig. 2 adopts photoresistance coating pigment dispersion method to form the synoptic diagram of shielding pattern layer and chromatic filter layer;
Fig. 3 is the synoptic diagram of colored optical filtering substrates of the present invention;
Fig. 4 is the synoptic diagram of the scale structure on the non-display area in the colored optical filtering substrates of the present invention;
Fig. 5 is the design sketch of occurred level skew in the process that forms shielding pattern layer and chromatic filter layer of the present invention;
Fig. 6 is the synoptic diagram of the another kind of scale structure on the non-display area in the colored optical filtering substrates of the present invention;
Fig. 7 is the design sketch that vertical shift takes place in the process that forms shielding pattern layer and chromatic filter layer of the present invention.
Embodiment
Below will combine accompanying drawing, describe embodiments of the invention in detail.But, should be appreciated that the embodiment shown in following is for making technical thought of the present invention specialize illustrating of carrying out, be not to refer in particular to the present invention.Do not break away from the technical thought shown in the scope of patented claim of the present invention, all can be applied in comparably on the various version.
Fig. 3 schematically shows the synoptic diagram of colored optical filtering substrates on the whole.As shown in Figure 3, according to the size of the display panel that finally cuts into, the monoblock colored optical filtering substrates includes a plurality of viewing areas 301, outside viewing area 301, all is non-display area.In the present invention; The structure that in viewing area 301, forms shielding pattern layer and chromatic filter layer is still identical with conventional art; But in non-display area 302, the present invention has done improvement, promptly in the non-display area 302 of colored optical filtering substrates, forms scale structure of the present invention.To combine Fig. 4-Fig. 7 to describe scale structure and formation method that the present invention forms below in non-display area 302.
See also Fig. 4, Fig. 4 shows a kind of scale structure on the non-display area in the colored optical filtering substrates of the present invention partly.As shown in Figure 4; On the non-display area 302 of colored optical filtering substrates shown in Figure 3; Along continuous straight runs forms multiple row horizontal ruler shielding pattern layer 401 earlier; Spacing between the adjacent level scale shielding pattern layer 401 equates that every row horizontal ruler shielding pattern layer 401 can comprise at least more than the delegation usually.In the partial schematic diagram of Fig. 4, show the triplex row shielding pattern layer, but should be appreciated that this only is an example, concrete line number can change as required.The columns of horizontal ruler shielding pattern layer 401 can be decided according to the size of colored optical filtering substrates, generally gets the 20-30 row, on other position, repeats this group horizontal ruler shielding pattern layer then.The multiple row horizontal ruler shielding pattern layer 401 that forms has an open area 402.
Form (covering) horizontal ruler chromatic filter layer 403 respectively in the open area 402 of horizontal ruler shielding pattern layer then, the level interval between the multiple row horizontal ruler chromatic filter layer does not wait.As shown in Figure 4, on middle row (row number be 0), the side-play amount of the horizontal ruler chromatic filter layer 403 of formation is zero; On row (row number be-1) in its left side, the side-play amount of the horizontal ruler chromatic filter layer 403 of formation is for bearing a unit (to unit of left avertence); On the left side secondary series of middle row (row number be-2, not shown), the side-play amount of the horizontal ruler chromatic filter layer 403 of formation is for bearing two units; Then and the like.In like manner, on row (row number be+1) on a middle row right side, the side-play amount of the horizontal ruler chromatic filter layer 403 of formation is a positive unit (to unit of right avertence); On the right side secondary series of middle row (row number be+2, not shown), the side-play amount of the horizontal ruler chromatic filter layer 403 of formation is positive two units; Then and the like.In other words, the level interval between the multiple row horizontal ruler chromatic filter layer is different.
Usually, for colour liquid crystal display device, generally comprise red (R), blue (B), green (G) three coloured pixels; Therefore, in vertical direction, on first row of the 0th row (middle row); Form horizontal ruler red filter layer 403R, on second row, form horizontal ruler blue color filter layer 403B; On the third line, form the green filter layer 403G of horizontal ruler; Cycle repeats successively then.Certainly; Because the horizontal ruler chromatic filter layer 403 that in non-display area, forms is not to be used for showing in final products; And only as the overlapping side-play amount of testing (supervision) shielding pattern layer and chromatic filter layer in the manufacturing process, therefore, in other embodiment; All horizontal ruler chromatic filter layers can adopt the filter layer with a kind of color, and can not influence effect of the present invention.
See also Fig. 4 again, as shown in Figure 4, generally the width with horizontal ruler chromatic filter layer 403 is made into the width less than the open area 402 of horizontal ruler shielding pattern layer, and the width of every row horizontal ruler chromatic filter layer 403 equates, to make things convenient for visualization.
As shown in Figure 4; Leave gap a1 and a2 between the left and right sides of the limit, the left and right sides of horizontal ruler chromatic filter layer 403 and the open area 402 of horizontal ruler shielding pattern layer; The limit, the left and right sides of the horizontal ruler chromatic filter layer of middle row (row number be 0) equates (being a1=a2) with gap between the left and right sides of the open area 402 of corresponding horizontal scale shielding pattern layer, and we are referred to as the horizontal reference pattern and are listed as.Spacing P between the adjacent level scale chromatic filter layer of horizontal reference pattern row both sides
WaterCan obtain according to following formula:
P (n)
Water=P
Water 0+ (| n|-1) A,
Wherein n is the row number of horizontal ruler chromatic filter layer, and A is the minimum level side-play amount, P
Water 0Be minimum spacing, P (n)
WaterIt is the spacing between n row and the n-1 row horizontal reference pattern; The row of the horizontal ruler chromatic filter layer in horizontal reference pattern row left side number are respectively-1 ,-2 ,-3 by the distance with dried up flat reference pattern row ..., the row of the horizontal ruler chromatic filter layer on horizontal reference pattern row right side number are respectively 1,2,3 by the distance with dried up flat reference pattern row
The selection of the unit of above-mentioned minimum spacing and minimum level side-play amount look supervision side-play amount precision and decide, the minimum level side-play amount is generally selected between 0.3-0.7 μ m, in a preferred embodiment of the present invention, this unit confirms as 0.5 μ m.
See also Fig. 5, Fig. 5 shows the design sketch that skew has taken place in the process that forms shielding pattern layer and chromatic filter layer.As shown in Figure 5, the 0th row are skew not in the former design, and the product after accomplishing the 0th list generation skew left; The situation that skew does not take place appears at the 1st and lists; Therefore, can draw in view of the above, the skew left of a unit has taken place in the product after the completion.Can in time adjust the position of exposure mask plate and exposure machine as benchmark, eliminate this horizontal-shift.If the situation that takes place to squint appears at the 2nd and lists, then can draw, the skew left of two units has taken place in the product after the completion, by that analogy.Observe for convenient,, above every row horizontal ruler shielding pattern layer (or below), form cue mark, in the present embodiment, adopted and row number identical cue mark like Fig. 4 and shown in Figure 5.
Equally, see also Fig. 6, Fig. 6 shows the another kind of scale structure on the non-display area in the colored optical filtering substrates of the present invention partly.As shown in Figure 6; On the non-display area 302 of colored optical filtering substrates shown in Figure 3; Vertically form multirow Vertical surveyors' staff shielding pattern layer 601 earlier; Spacing between the adjacent Vertical surveyors' staff shielding pattern layer 601 equates that every capable Vertical surveyors' staff shielding pattern layer 601 can comprise more than at least one row usually.In the partial schematic diagram of Fig. 6, show three row shielding pattern layer, but should be appreciated that this only is an example, concrete columns can change as required.The line number of Vertical surveyors' staff shielding pattern layer 601 can be decided according to the size of colored optical filtering substrates, and it is capable generally to get 20-30, on other position, repeats this group horizontal ruler shielding pattern layer then.The multirow Vertical surveyors' staff shielding pattern layer 601 that forms has an open area 602.
Form (covering) Vertical surveyors' staff chromatic filter layer 603 respectively in the open area 602 of Vertical surveyors' staff shielding pattern layer then, the vertical interval between the multirow Vertical surveyors' staff chromatic filter layer does not wait.As shown in Figure 6, on middle row (capable number is 0), the side-play amount of the Vertical surveyors' staff chromatic filter layer 603 of formation is zero; In the delegation of side (capable number is-1), the side-play amount of the Vertical surveyors' staff chromatic filter layer 603 of formation is a negative unit (to an inclined to one side unit) above that; On the upside of middle row second row (row number be-2, not shown), the side-play amount of the Vertical surveyors' staff chromatic filter layer 603 of formation is for bearing two units; Then and the like.In like manner, in delegation's (capable number is+1) of middle row downside, the side-play amount of the Vertical surveyors' staff chromatic filter layer 603 of formation is a positive unit (unit of downward bias); On the downside of middle row second row (row number be+2, not shown), the side-play amount of the Vertical surveyors' staff chromatic filter layer 603 of formation is positive two units; Then and the like.In other words, the vertical interval between the multirow Vertical surveyors' staff chromatic filter layer is different.
Usually, for colour liquid crystal display device, generally comprise red (R), blue (B), green (G) three coloured pixels; Therefore, in the horizontal direction, first of the 0th row (middle row) lists; Form Vertical surveyors' staff red filter layer 603R, on secondary series, form Vertical surveyors' staff blue color filter layer 603B; List the 3rd, form the green filter layer 603G of Vertical surveyors' staff; Cycle repeats successively then.Certainly; Because the Vertical surveyors' staff chromatic filter layer 603 that in non-display area, forms is not to be used for showing in final products; And only as the overlapping side-play amount of testing (supervision) shielding pattern layer and chromatic filter layer in the manufacturing process, therefore, in other embodiment; All Vertical surveyors' staff chromatic filter layers can adopt the filter layer with a kind of color, and can not influence effect of the present invention.
See also Fig. 6 again, as shown in Figure 6, generally the width with Vertical surveyors' staff chromatic filter layer 603 is made into the width less than the open area 602 of Vertical surveyors' staff shielding pattern layer, and the width of every capable horizontal ruler chromatic filter layer 603 equates, to make things convenient for visualization.
As shown in Figure 6; The dual-side up and down of Vertical surveyors' staff chromatic filter layer 603 and the open area 402 of Vertical surveyors' staff shielding pattern layer leave gap b1 and b2 up and down between the both sides; The dual-side up and down of the Vertical surveyors' staff chromatic filter layer of middle row (capable number is 0) equates (being b1=b2) with the gap between the both sides up and down of the open area 602 of corresponding Vertical surveyors' staff shielding pattern layer, and it is capable that we are referred to as the vertical reference pattern.Spacing P between the adjacent Vertical surveyors' staff chromatic filter layer of the capable both sides of vertical reference pattern
Hang downCan obtain according to following formula:
P (m)
Hang down=P
Hang down 0+ (| m|-1) B
Wherein, m is the row number of Vertical surveyors' staff chromatic filter layer, and B is the minimum vertical side-play amount, P
Hang down 0Be minimum spacing, P (m)
Hang downIt is the spacing between the capable and capable horizontal reference pattern of m-1 of m; The row of the Vertical surveyors' staff chromatic filter layer of the capable upside of vertical reference pattern number by be respectively-1 ,-2 ,-3 from the capable distance of vertical reference pattern ..., the row of the Vertical surveyors' staff chromatic filter layer of the capable downside of vertical reference pattern number by be respectively 1,2,3 from the capable distance of vertical reference pattern ...
The selection of the unit of above-mentioned minimum spacing and minimum vertical side-play amount look supervision side-play amount precision and decide, the minimum vertical side-play amount is generally selected between 0.3-0.7 μ m, in a preferred embodiment of the present invention, this unit confirms as 0.5 μ m.
See also Fig. 7, Fig. 7 shows the design sketch that skew has taken place in the process that forms shielding pattern layer and chromatic filter layer.As shown in Figure 7, the 0th row is not squint in the former design, and the skew left that the product after accomplishing takes place on the 0th row; The situation that skew does not take place appears on the 1st row; Therefore, can draw in view of the above, the downward skew of a unit has taken place in the product after the completion.Can in time adjust the position of exposure mask plate and exposure machine as benchmark, eliminate this vertical shift.Do not appear on the 2nd row if the situation of skew takes place, then can draw, the downward skew of two units has taken place in the product after the completion, by that analogy.Observe for convenient,,, form cue mark, in the present embodiment, adopted and row number identical cue mark at the left (or right-hand) of every capable Vertical surveyors' staff shielding pattern layer like Fig. 6 and shown in Figure 7.
Claims (14)
1. colored optical filtering substrates comprises:
Transparent glass substrate;
Shielding pattern layer is positioned on the viewing area of said transparent glass substrate, and said shielding pattern layer has the open area;
Chromatic filter layer is positioned on the open area of said shielding pattern layer, and with said light-shielding pattern ply;
Multiple row horizontal ruler shielding pattern layer, along continuous straight runs are distributed in equidistant from distance on the non-display area of said transparent glass substrate, and said horizontal ruler shielding pattern layer has the open area;
Multiple row horizontal ruler chromatic filter layer is covered in respectively on the open area of the said horizontal ruler shielding pattern layer of multiple row with the level interval that does not wait between the said horizontal ruler chromatic filter layer of multiple row;
Multirow Vertical surveyors' staff shielding pattern layer vertically is distributed on the non-display area of transparent glass substrate with equidistant from distance, and said Vertical surveyors' staff shielding pattern layer has the open area;
Multirow Vertical surveyors' staff chromatic filter layer, the said Vertical surveyors' staff chromatic filter layer of multirow is covered in respectively on the open area of the said Vertical surveyors' staff shielding pattern layer of multirow with different vertical intervals.
2. colored optical filtering substrates as claimed in claim 1 is characterized in that the width of said horizontal ruler chromatic filter layer is less than the width of the open area of said horizontal ruler shielding pattern layer; The height of said Vertical surveyors' staff chromatic filter layer is less than the height of the open area of said Vertical surveyors' staff shielding pattern layer.
3. colored optical filtering substrates as claimed in claim 1 is characterized in that, the width of the said horizontal ruler chromatic filter layer of multiple row equates; The height of the said Vertical surveyors' staff chromatic filter layer of multirow equates.
4. like claim 1,2, one of 3 described colored optical filtering substrates, it is characterized in that,
Leave the gap between the left and right sides of the limit, the left and right sides of said horizontal ruler chromatic filter layer and the open area of said horizontal ruler shielding pattern layer; Wherein the gap between the left and right sides of limit, the left and right sides and the open area of said horizontal ruler shielding pattern layer of the said horizontal ruler chromatic filter layer of row equates, is called the horizontal reference pattern and is listed as; Spacing P between the adjacent said horizontal ruler chromatic filter layer of said horizontal reference pattern row both sides
WaterAs shown in the formula: P (n)
Water=P
Water 0+ (| n|-1) A, wherein n is the row number of said horizontal ruler chromatic filter layer, A is the minimum level side-play amount, P
Water 0Be minimum spacing, P (n)
WaterIt is the spacing between n row and the n-1 row horizontal reference pattern; The row of the said horizontal ruler chromatic filter layer in said horizontal reference pattern row left side number are by being respectively-1 ,-2 ,-3 with distance from said horizontal reference pattern row ..., the row of the said horizontal ruler chromatic filter layer on said horizontal reference pattern row right side number are by being respectively 1,2,3 with distance from said horizontal reference pattern row
The dual-side up and down of said Vertical surveyors' staff chromatic filter layer and the open area of said Vertical surveyors' staff shielding pattern layer leave the gap up and down between the both sides; Wherein the dual-side up and down of the said Vertical surveyors' staff chromatic filter layer of delegation equates with the gap between the both sides up and down of the open area of said Vertical surveyors' staff shielding pattern layer; It is capable to be called the vertical reference pattern, the spacing P between the adjacent said Vertical surveyors' staff chromatic filter layer of the capable both sides of said vertical reference pattern
Hang downAs shown in the formula: P (m)
Hang down=P
Hang down 0+ (| m|-1) B wherein m be the row number of said Vertical surveyors' staff chromatic filter layer, B is the minimum vertical side-play amount, P
Hang down 0Be minimum spacing, P (m)
Hang downIt is the spacing between the capable and capable horizontal reference pattern of m-1 of m; The row of the said Vertical surveyors' staff chromatic filter layer of the capable upside of said vertical reference pattern number by be respectively-1 ,-2 ,-3 from the capable distance of said vertical reference pattern ..., the row of the said Vertical surveyors' staff chromatic filter layer of the capable downside of said vertical reference pattern number by be respectively 1,2,3 from the capable distance of said vertical reference pattern ...
5. colored optical filtering substrates as claimed in claim 4 is characterized in that, the scope of said minimum level side-play amount and said minimum vertical side-play amount is 0.3-0.7 μ m.
6. colored optical filtering substrates as claimed in claim 5 is characterized in that, said minimum level side-play amount and said minimum vertical side-play amount are 0.5 μ m.
7. like claim 1 or 5 described colored optical filtering substrates, it is characterized in that the columns of said horizontal ruler shielding pattern layer is between the 20-30 row; The line number of said Vertical surveyors' staff shielding pattern layer is between 20-30 is capable.
8. a colored optical filtering substrates manufacturing approach comprises the steps:
One transparent glass substrate is provided;
On the viewing area of said transparent glass substrate, form shielding pattern layer, along continuous straight runs forms multiple row horizontal ruler shielding pattern layer and vertically forms multirow Vertical surveyors' staff shielding pattern layer with equidistant from distance with equidistant from distance on the non-display area of said transparent glass substrate; Said shielding pattern layer, said horizontal ruler shielding pattern layer and said Vertical surveyors' staff shielding pattern layer all have the open area; And
On the open area of said shielding pattern layer, form chromatic filter layer, and with said light-shielding pattern ply; On the open area of the said horizontal ruler shielding pattern layer of multiple row, form the horizontal ruler chromatic filter layer, and the level interval between the said horizontal ruler chromatic filter layer of multiple row is not waited; On the open area of the said Vertical surveyors' staff shielding pattern layer of multirow, form the Vertical surveyors' staff chromatic filter layer, and the vertical interval between the multirow Vertical surveyors' staff chromatic filter layer is not waited.
9. the manufacturing approach of colored optical filtering substrates as claimed in claim 8 is characterized in that, the width of said horizontal ruler chromatic filter layer is less than the width of the open area of said horizontal ruler shielding pattern layer; The height of said Vertical surveyors' staff chromatic filter layer is less than the height of the open area of said Vertical surveyors' staff shielding pattern layer.
10. the manufacturing approach of colored optical filtering substrates as claimed in claim 8 is characterized in that, the width of the said horizontal ruler chromatic filter layer of multiple row equates; The height of the said Vertical surveyors' staff chromatic filter layer of multirow equates.
11. the manufacturing approach like claim 8,9, one of 10 described colored optical filtering substrates is characterized in that,
Leave the gap between the left and right sides of the limit, the left and right sides of said horizontal ruler chromatic filter layer and the open area of said horizontal ruler shielding pattern layer; Wherein the gap between the left and right sides of limit, the left and right sides and the open area of said horizontal ruler shielding pattern layer of the said horizontal ruler chromatic filter layer of row equates, is called the horizontal reference pattern and is listed as; Spacing P between the adjacent said horizontal ruler chromatic filter layer of said horizontal reference pattern row both sides
WaterAs shown in the formula: P (n)
Water=P
Water 0+ (| n|-1) A, wherein n is the row number of said horizontal ruler chromatic filter layer, A is the minimum level side-play amount, P
Water 0Be minimum spacing, P (n)
WaterIt is the spacing between n row and the n-1 row horizontal reference pattern; The row of the said horizontal ruler chromatic filter layer in said horizontal reference pattern row left side number are by being respectively-1 ,-2 ,-3 with distance from said horizontal reference pattern row ..., the row of the said horizontal ruler chromatic filter layer on said horizontal reference pattern row right side number are by being respectively 1,2,3 with distance from said horizontal reference pattern row
The dual-side up and down of said Vertical surveyors' staff chromatic filter layer and the open area of said Vertical surveyors' staff shielding pattern layer leave the gap up and down between the both sides; Wherein the dual-side up and down of the said Vertical surveyors' staff chromatic filter layer of delegation equates with the gap between the both sides up and down of the open area of said Vertical surveyors' staff shielding pattern layer; It is capable to be called the vertical reference pattern, the spacing P between the adjacent said Vertical surveyors' staff chromatic filter layer of the capable both sides of said vertical reference pattern
Hang downAs shown in the formula: P (m)
Hang down=P
Hang down 0+ (| m|-1) B wherein m be the row number of said Vertical surveyors' staff chromatic filter layer, B is the minimum vertical side-play amount, P
Hang down 0Be minimum spacing, P (m)
Hang downIt is the spacing between the capable and capable horizontal reference pattern of m-1 of m; The row of the said Vertical surveyors' staff chromatic filter layer of the capable upside of said vertical reference pattern number by be respectively-1 ,-2 ,-3 from the capable distance of said vertical reference pattern ..., the row of the said Vertical surveyors' staff chromatic filter layer of the capable downside of said vertical reference pattern number by be respectively 1,2,3 from the capable distance of said vertical reference pattern ...
12. the manufacturing approach of colored optical filtering substrates as claimed in claim 11 is characterized in that, the scope of said minimum level side-play amount and said minimum vertical side-play amount is 0.3-0.7 μ m.
13. the manufacturing approach of colored optical filtering substrates as claimed in claim 12 is characterized in that, said minimum level side-play amount and said minimum vertical side-play amount are 0.5 μ m.
14. the manufacturing approach like claim 8 or 12 described colored optical filtering substrates is characterized in that, the columns of said horizontal ruler shielding pattern layer is between the 20-30 row; The line number of said Vertical surveyors' staff shielding pattern layer is between 20-30 is capable.
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| CN102998901A (en) * | 2012-12-12 | 2013-03-27 | 中国科学院合肥物质科学研究院 | Preparation method of SU-8 nanofluid channel of integrated scale |
| WO2015043021A1 (en) * | 2013-09-26 | 2015-04-02 | 深圳市华星光电技术有限公司 | Method for measuring width of color filter unit and method for manufacturing liquid crystal panel |
| CN105607308A (en) * | 2015-12-24 | 2016-05-25 | 南京中电熊猫液晶显示科技有限公司 | Measurement scale, manufacturing method and using method |
| CN108241230A (en) * | 2016-12-23 | 2018-07-03 | 上海仪电显示材料有限公司 | The production method of colored optical filtering substrates |
| CN109445170A (en) * | 2018-12-29 | 2019-03-08 | 成都中电熊猫显示科技有限公司 | Color membrane substrates and its manufacturing method and liquid crystal display panel, display device |
| CN111258105A (en) * | 2018-11-30 | 2020-06-09 | 上海仪电显示材料有限公司 | Color filter substrate and testing method |
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| CN102998901A (en) * | 2012-12-12 | 2013-03-27 | 中国科学院合肥物质科学研究院 | Preparation method of SU-8 nanofluid channel of integrated scale |
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| CN105607308A (en) * | 2015-12-24 | 2016-05-25 | 南京中电熊猫液晶显示科技有限公司 | Measurement scale, manufacturing method and using method |
| CN105607308B (en) * | 2015-12-24 | 2019-01-04 | 南京中电熊猫液晶显示科技有限公司 | A kind of surveyors' staff and manufacturing method and application method |
| CN108241230A (en) * | 2016-12-23 | 2018-07-03 | 上海仪电显示材料有限公司 | The production method of colored optical filtering substrates |
| CN111258105A (en) * | 2018-11-30 | 2020-06-09 | 上海仪电显示材料有限公司 | Color filter substrate and testing method |
| CN109445170A (en) * | 2018-12-29 | 2019-03-08 | 成都中电熊猫显示科技有限公司 | Color membrane substrates and its manufacturing method and liquid crystal display panel, display device |
| CN109445170B (en) * | 2018-12-29 | 2020-02-14 | 成都中电熊猫显示科技有限公司 | Color film substrate and manufacturing method thereof, liquid crystal display panel and display device |
| WO2020143494A1 (en) * | 2019-01-11 | 2020-07-16 | 惠科股份有限公司 | Color filter module, fabrication method therefor and display panel |
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Application publication date: 20120704 |