CN104317158B - A kind of mask plate, mask plate group, color membrane substrates and display device - Google Patents
A kind of mask plate, mask plate group, color membrane substrates and display device Download PDFInfo
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- CN104317158B CN104317158B CN201410645950.XA CN201410645950A CN104317158B CN 104317158 B CN104317158 B CN 104317158B CN 201410645950 A CN201410645950 A CN 201410645950A CN 104317158 B CN104317158 B CN 104317158B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
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Abstract
The present invention provides a kind of mask plate, mask plate group, color membrane substrates and display devices, it is related to display technology field, it is in irregular shape caused by with contracted position precision mark size to solve the problems, such as that color film layer positional precision mark overlaps, ensures the accuracy of obtained color blocking and black matrix relative position deviation degree.Wherein mask plate is used to form color film layer, four groups of coloured silk film layer positional precisions including being located at mask plate four corners respectively identify figure, every group of coloured silk film layer positional precision mark figure includes being mutually parallel, the horizontal arranged and color film layer positional precision mark figure of two bar shapeds that extends longitudinally, the lateral dimension of color film layer positional precision mark figure is a, and a is less than the width of a sub-pixel.
Description
Technical field
The present invention relates to display technology field more particularly to a kind of mask plate, mask plate group, color membrane substrates and display dresses
It puts.
Background technology
Color membrane substrates in display generally comprise：One glass substrate and the black matrix layer that is formed on glass substrate with
Color film layer, wherein, black matrix layer includes the black matrix for the network that multirow black matrix item is staggeredly formed with multiple row black matrix item,
Color film layer includes multiple color blockings of matrix form arrangement, and the often arrangement of row color blocking repeats list with putting in order for red, green, blue for one
Member.Under normal conditions, the edge of color blocking can be made have the overlapping of one fixed width with black matrix item, to prevent color blocking edge light leak.
At present, four groups of black matrix positional precision marks can be formed with layer in substrate four corners when forming black matrix layer, often
Group includes square black matrix positional precision mark of three spacing for a sub-pixel width, can be in substrate when forming color film layer
Four corners form four groups of coloured silk film layer positional precision marks, and every group includes side of three spacing of red, green, blue for a sub-pixel width
The color film layer positional precision of shape or frame shape identifies, and the size of color film layer positional precision mark is more than black matrix positional precision mark
Size, and color film layer positional precision mark covers or frames black matrix positional precision mark.By detecting black matrix position
Precision identifies and the extent of deviation at the midpoint of color film layer positional precision mark, detects the deviation of the relative position of black matrix and color blocking
Degree, to examine color blocking edge whether Chong Die with black matrix item.
Different face are usually respectively formed in color film layer using the processes formation such as coating, exposure, development, baking in the prior art
The color blocking of color, can profit when forming different colours color blocking since the arrangement situation of different colours color blocking in color film layer is identical
With same mask plate.
But as requirement of the people to monitor resolution is higher and higher, the width of sub-pixel is less and less, same group
Spacing between interior black matrix positional precision mark is less and less, this results in the size bigger in finally formed same group
Red, green, blue color film layer positional precision mark overlap, can not accurately obtain the relative position of color blocking and black matrix
Extent of deviation.
If the size of black matrix and color film layer positional precision mark is reduced with Pixel Dimensions, although coloured silk can be avoided
The problem of film layer positional precision mark overlapping, but undersized color film layer positional precision mark and black matrix positional precision mark
Know the shape when making to be difficult to control, can become irregular, cause color film layer positional precision mark and black matrix positional precision mark
The position coordinates of knowledge reads inaccuracy, and then can not accurately obtain the extent of deviation of the relative position of color blocking and black matrix.
The content of the invention
Based on above-mentioned present situation of the prior art, the technical problems to be solved by the invention are：A kind of mask plate is provided, is covered
Diaphragm plate group, color membrane substrates and display device are overlapped and contracted position precision mark with solving color film layer positional precision mark
The problem of positional precision mark is in irregular shape caused by size, ensures obtained color blocking and black matrix relative position deviation journey
The accuracy of degree.
In order to achieve the above objectives, the present invention adopts the following technical scheme that：
The first aspect of the present invention provides a kind of mask plate, for forming the color film layer in display device, the coloured silk film
Layer corresponds to multiple pixel units, and corresponding to each pixel unit in the coloured silk film layer has the color of transversely arranged n kind colors
Resistance, the mask plate are included respectively positioned at four groups of coloured silk film layer positional precisions mark figure of the mask plate four corners, every group of institute
It states color film layer positional precision mark figure and includes being mutually parallel, the horizontal arranged and color film layer of two bar shapeds that extends longitudinally
Positional precision identifies figure, and the lateral dimension of the coloured silk film layer positional precision mark figure is a, and a is less than the width of a sub-pixel
Degree.
Preferably, between the center line along longitudinal direction of the color film layer positional precision mark figure of two at described one angle of mask plate
Distance for e, the ratio of e and sub-pixel width is more than n.
Preferably, the mask plate further includes：The color blocking figure that matrix form positioned at the mask plate intermediate region is arranged.
Preferably, a is greater than or equal to 35 μm, and the width of a sub-pixel is less than or equal to 65 μm.
The second aspect of the present invention provides a kind of mask plate group, including：First mask plate, first mask plate be with
The upper mask plate for being used to be formed the color film layer in display device；Second mask plate, second mask plate are used to be formed
Black matrix layer in display device, four groups of black matrix positional precisions including being located at the second mask plate four corners respectively identify
Figure, black matrix positional precision mark figure described in every group include n horizontal arranged black matrix positional precision mark figures,
Spacing between the center line of two neighboring black matrix positional precision mark figure along longitudinal direction is the width of a sub-pixel, described black
The lateral dimension of matrix position precision mark figure is d, and d is less than the width of a sub-pixel；In first mask plate and institute
It states the second mask plate and corresponds to when partially overlapping of display area, the color film layer positions essence of two of first mask plate at same angle
Scale knows first in the center line of centre of figure line and the n black matrix positional precision mark figure of second mask plate
The center line of black matrix positional precision mark figure along longitudinal direction overlaps, and if two at first mask plate, one angle color film layers
Spacing between the center line of positional precision mark figure along longitudinal direction is e, then the ratio of e and sub-pixel width is more than 2n.
Preferably, second mask plate further includes：Positioned at the second mask plate intermediate region network it is black
Matrix Pattern.
Preferably, d is greater than or equal to 20 μm, and the width of a sub-pixel is less than or equal to 65 μm.
Preferably, n is equal to 3 or 4.
The third aspect of the present invention provides a kind of color membrane substrates, including：Substrate；The black matrix being formed on the substrate
Layer, the black matrix layer are formed using the second mask plate in above-described mask plate group, and the black matrix layer includes difference
Four groups of black matrix positional precisions positioned at the black matrix layer four corners identify；The color film layer being formed on the substrate, it is described
Color film layer is formed using the first mask plate in above-described mask plate group, and the coloured silk film layer includes being located at the color film respectively
Four groups of coloured silk film layer positional precisions mark of layer four corners；Wherein, the coloured silk film layer positional precision mark and described black at same angle
Matrix position precision mark arrangement situation be：Color different n color film layer positional precision mark, n black matrix position
It puts n different color film layer positional precision mark of precision mark, color transversely to arrange successively, two neighboring coloured silk film layer position
It puts between the center line of spacing and two neighboring black matrix positional precision mark along longitudinal direction between precision mark center line along longitudinal direction
Spacing be a sub-pixel width.
Preferably, between the coloured silk film layer positional precision mark and the black matrix positional precision identify at same angle most
Short distance is more than zero, has gap at same angle between two neighboring color film layer positional precision mark, two neighboring at same angle
There is gap between black matrix positional precision mark.
Preferably, n different color film layer positional precision mark of the color is respectively red color film layer position essence
Scale is known, green tint film layer positional precision mark and blue color film layer positional precision identify；Alternatively, the color is different
N color film layer positional precision mark is respectively red color film layer positional precision mark, green tint film layer positional precision mark, blueness
Color film layer positional precision mark and yellow coloured silk film layer positional precision mark；Alternatively, the n color film layer position that the color is different
It is respectively red color film layer positional precision mark, green tint film layer positional precision mark, blue color film layer position to put precision mark
Precision identifies and the color film layer positional precision mark of white.
Preferably, the black matrix layer further includes the black matrix of the network positioned at the black matrix layer intermediate region；
The coloured silk film layer further includes the color blocking of the matrix form arrangement positioned at the color film layer intermediate region.
The fourth aspect of the present invention provides a kind of display device, including above-described color membrane substrates.
Mask plate provided by the present invention, mask plate group, color membrane substrates and display device, color film layer is formed by that will be used for
Mask plate on every group of coloured silk film layer positional precision mark figure be arranged to include being mutually parallel and along column direction extension two
The color film layer positional precision mark figure of a bar shaped, since the figure for forming color film layer positional precision mark is bar shaped, bar chart
The shape of shape is easy to control, therefore the narrower and shape that color film layer positional precision mark can be set is more regular, so as to avoid
Color film layer positional precision mark overlaps the problem of in irregular shape caused by with contracted position precision mark size so that most
The coordinate of color film layer positional precision mark can be accurately read eventually, and then obtain the relative position of accurate black matrix and color blocking
Extent of deviation.
Description of the drawings
It in order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
The plane structure chart for being used to be formed the mask plate of color film layer that Fig. 1 is provided by the embodiment of the present invention；
The plane structure chart for being used to be formed the mask plate of black matrix layer that Fig. 2 is provided by the embodiment of the present invention；
First mask plate display area corresponding with the second mask plate in the mask plate group that Fig. 3 is provided by the embodiment of the present invention
Plane structure chart when partially overlapping；
Fig. 4 a~Fig. 4 d make black square during color membrane substrates for the mask plate group that is provided using the embodiment of the present invention
The step of forming process of battle array positional precision mark and color film layer positional precision mark, schemes.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, implement below in conjunction with the present invention
Attached drawing in example, is clearly and completely described the technical solution in the embodiment of the present invention.Obviously, described embodiment
Only part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field
All other embodiment that art personnel are obtained on the premise of creative work is not made belongs to the model that the present invention protects
It encloses.
An embodiment of the present invention provides a kind of mask plate, structure is as shown in Figure 1, the mask plate is used to form display device
In color film layer, color film layer corresponds to multiple pixel units, and each pixel unit is corresponded in color film layer with transversely arranged n kind face
The color blocking of color, the mask plate are included respectively positioned at four groups of coloured silk film layer positional precisions mark figure of mask plate four corners, and every group color
Film layer positional precision mark figure includes being mutually parallel, the horizontal arranged and color film layer position of two bar shapeds that extends longitudinally
Precision identifies figure 1, if the lateral dimension of color film layer positional precision mark figure 1 is a, a is less than the width of a sub-pixel.
Since color film layer positional precision mark figure is bar shaped, the shape of bar pattern is compared with original square and frame shape
It is more easy to control, even if the lateral dimension a of color film layer positional precision mark figure is dropped to very little, the color film layer position finally obtained
The shape of precision mark also can comparison rule, that is, the color film layer positional precision that is formed identifies the narrower and shape that can be set
More regular, color film layer positional precision mark overlaps and contracted position precision caused by reducing so as to avoid sub-pixel width
The problem of positional precision mark is in irregular shape caused by identifying size is that the mask plate provided using the present embodiment is formed
The coordinate of color film layer positional precision mark can accurately be read, and then ensure that the black matrix that can accurately obtain and color blocking
The extent of deviation of relative position.
In the present embodiment, if two at one angle of mask plate color film layer positional precisions mark figures 1 along longitudinal direction in
Distance between line is e, then the ratio of e and sub-pixel width is more than n, the color film layer formed with the utility mask plate
It does not overlap between positional precision mark.
The mask plate further includes：The color blocking figure 2 that matrix form positioned at mask plate intermediate region is arranged.Specifically, color blocking
Region AA where figure 2 corresponds to the display area of display device；Due to avoid color blocking edge light leak, the edge of color blocking can be with
Black matrix item overlaps, therefore the width of each color blocking figure 2 may be slightly larger than the width of a sub-pixel；If mask plate is used for
The making of the color blocking of n kind colors in same coloured silk film layer, then the spacing between adjacent color blocking figure 2 is n-1 times of a sub-pixel
Width.
In the present embodiment, for display device of the width of a sub-pixel less than or equal to 65 μm, color film layer position
Can be preferably greater than or equal to by putting the lateral dimension a of precision mark figure 1 by 35 μm, to ensure the color film layer positional precision formed
Mark is unlikely to meticulous, realizes the good control to color film layer positional precision mark shape.
It should be noted that the width of the sub-pixel described in the present embodiment refers to the lateral dimension of sub-pixel.
The embodiment of the present invention additionally provides a kind of mask plate group, which includes：First mask plate, first mask
For plate to be above-described for forming the mask plate of the color film layer in display device, structure is as shown in Figure 1；Second mask plate,
Second mask plate is used to form the black matrix layer in display device, as shown in Fig. 2, including being located at the second mask plate corner respectively
Four groups of black matrix positional precisions mark figure at place, it is a horizontal arranged that every group of black matrix positional precision mark figure includes n
Black matrix positional precision identifies figure 3, and two neighboring black matrix positional precision identifies the spacing between the center line of figure 3 along longitudinal direction
P is the width of a sub-pixel, and the lateral dimension of black matrix positional precision mark figure 3 is d, and d is less than the width of a sub-pixel
Degree；As shown in figure 3, corresponding to the part AA of display area in the first mask plate and the second mask plate corresponds to the part AA of display area
During coincidence, the center line of color film layer positional precision mark 1 line of centres of figure of two of the first mask plate is covered with second at same angle
The center line of first black matrix positional precision mark figure along longitudinal direction in the n black matrix positional precision mark figure 3 of diaphragm plate
Overlap, and if between the center line of two at one angle of the first mask plate color film layer positional precisions mark figures 1 along longitudinal direction between
Away from for e, then the ratio of e and sub-pixel width p is more than 2n, is more specifically：E/p ＞ 2n.
3 (i.e. each pixel units include 3 sub-pixels) are equal to n, and color blocking to be formed color including red
(R), exemplified by green (G) and blue (B) three kinds of colors, the process that black matrix layer and color film layer are made using above-mentioned mask plate group specifically may be used
For：The second mask plate is covered on substrate first and forms black matrix layer, the black matrix layer four corners formed are respectively provided with one group
Black matrix positional precision mark 5 as shown in fig. 4 a, the spacing that two neighboring black matrix positional precision identifies between 5 are p；Then
First mask plate is covered on substrate and forms red color resistance layer, the red color resistance layer four corners formed are respectively provided with two as schemed
Red color film layer positional precision mark 6 shown in 4b, the two spacing are two color film layer positions in same group on the first mask plate
Put the spacing e between precision mark 1；The first mask plate is transversely moved right afterwards the distance of a pixel wide p, in base
Green color blocking layer is formed on plate, the green color blocking layer four corners formed are respectively provided with two green tint film layer positions as illustrated in fig. 4 c
Precision mark 7 is put, the two spacing is e；The first mask plate is transversely moved right again afterwards the distance of a pixel wide p,
Blue color blocking layer is formed on substrate, the blue color blocking layer four corners formed are respectively provided with two blue color films as shown in figure 4d
Layer positional precision mark 8, the two spacing is e.It should be noted that this implementation is only with red color resistance layer, green color blocking layer and indigo plant
It is illustrated exemplified by the formation order of color color blocking layer, color film layer can be sequentially formed with other.
After the making of black matrix layer and color film layer is completed, the black matrix in black matrix layer and the color in color film layer need to be detected
The extent of deviation of the relative position of resistance obtains the edge of each color blocking and the overlapping cases of black matrix item, to judge color blocking week
Enclose whether light leak.Foregoing detection is by detecting black matrix positional precision mark 5 and color film layer positional precision mark 6,7 and 8
What the extent of deviation of relative position was realized.Specifically, reading the coordinate of two red color film layer positional precision marks 6, two are obtained
The midpoint of person's line of centres is detected the extent of deviation at the midpoint and the midpoint of first black matrix positional precision mark, is similarly examined
It surveys two green tint film layer positional precisions and identifies the midpoint of 7 lines of centres and the midpoint of second black matrix positional precision mark
Extent of deviation and two blue color film layer positional precisions identify the midpoint of 8 lines of centres and the 3rd black matrix positional precision identifies
The extent of deviation at 5 midpoint, so as to obtain the color film layer positional precision mark at an angle and black matrix positional precision mark
The extent of deviation of relative position similarly obtains color film layer positional precision mark and black matrix positional precision mark at its excess-three angle
The extent of deviation of the relative position of knowledge.
In the prior art, although by the way that the spacing between three black matrix positional precisions mark in same group is arranged to
Twice of sub-pixel width can eliminate the problem of color film layer positional precision mark overlaps, need not also reduce positional precision
The size of mark, but if still forming color film layer with same mask plate, just needed when making the color blocking of different colours
The distance of mobile two sub-pixels, this results in the color blocking vacancy at display area edge, therefore this mode needs two masks
Plate, one is used for forming red and blue color blocking, and another is used for forming green color blocking, so as to not only cause the increase of cost,
And the making step of color membrane substrates can be made to become complicated, in addition once for forming the damage of the mask plate of green color blocking, will lead
Cause production that can not carry out.From the process of the above-mentioned mask plate group making black matrix layer provided using the present embodiment and color film layer not
Hardly possible is found, for forming the mask plate of color film layer sub-pixel width reduction can not only be avoided to cause provided in the present embodiment
Color film layer positional precision mark overlap and reduce coloured silk film layer position caused by the size of color film layer positional precision mark figure
The problem of precision mark is in irregular shape is put, and has accomplished the color for three kinds of colors that color film layer is formed using same mask plate
Resistance avoids and makes color film layer using two mask plates, so as to save cost, simplifies the making step of color membrane substrates, disappear
Except being used for the problem of production caused by forming the mask plate damage of green color blocking can not carry out in the prior art.
In the present embodiment, the second mask plate further includes：Positioned at the black matrix of the network of the second mask plate intermediate region
Figure 4, for forming the black matrix of network.
In the present embodiment, it can be set due to the width of the color film layer positional precision mark figure 1 on the first mask plate
It is relatively narrow, therefore the mask plate group that the present embodiment is provided is more suitable for high-resolution (i.e. compared with mask plate of the prior art
The sub-pixel of narrower width) color membrane substrates making, specifically, being less than or equal to 65 μm of display for the width of sub-pixel
Device, the transverse dimension d of black matrix positional precision mark figure can be greater than or equal to 20 μm in this implementation, so that black matrix position
The size of precision mark figure is unlikely to too small, ensures the regular shape of formed black matrix positional precision mark.
The color of display device sub-pixel it is common include three kinds or four kinds, based on n in this present embodiment preferably etc.
In 3 or 4, so as to which the quantity of the black matrix positional precision mark figure 3 included at one angle of the second mask plate is also 3 or 4.
In addition, the width a of the color film layer positional precision mark figure 1 included by the first mask plate can be with black matrix position essence
The width d that scale knows figure 3 is equal, can not also wait, specifically can be according to actual conditions respective design.
It should be noted that figure included in mask plate and mask plate group that the present embodiment is provided can be shading
Region, or light-leaking area, if using negative photoresist during exposure, included figure in mask plate and mask plate group
For light-leaking area, if using positive photoresist during exposure, included figure is lightproof area in mask plate and mask plate group.
The present embodiment additionally provides a kind of color membrane substrates, including：Substrate；The black matrix layer being formed on substrate, the black square
The second mask plate in the mask plate group that battle array layer is provided using the present embodiment is formed, including being located at black matrix layer four corners respectively
Four groups of black matrix positional precisions mark；The color film layer being formed on substrate, the coloured silk film layer are covered using what the present embodiment was provided
The first mask plate in diaphragm plate group is formed, four groups of coloured silk film layer positional precisions mark including being located at color film layer four corners respectively；Such as
Shown in Fig. 4 d, the arrangement situation of coloured silk film layer positional precision mark and black matrix positional precision mark is at same angle：Color is respectively not
The different n of the color film layer positional precision mark (6,7,8) of identical n, n black matrix positional precision mark (5), color is a
Color film layer positional precision mark (6,7,8) is transversely arranged successively, during two neighboring coloured silk film layer positional precision identifies along longitudinal direction
The spacing between the center line of spacing and two neighboring black matrix positional precision mark along longitudinal direction between line is a sub-pixel
Width p.
The color membrane substrates that the present embodiment is provided are color since the mask plate group that this implementation is provided make use of to make
The extent of deviation of black matrix relative position can pass through and detect color film layer positional precision and identify in color blocking and black matrix layer in film layer
It is accurately obtained with the relative position of black matrix positional precision mark, ensure that the accuracy of the contraposition of color blocking and black matrix, improved
The yields of color membrane substrates.
In Fig. 4 d, a represents the lateral dimension (width of i.e. color film layer positional precision mark figure of color film layer positional precision mark
Degree), b represents the spacing between two neighboring color film layer positional precision mark, and c represents color film layer positional precision mark and black matrix
Beeline between positional precision mark, f represent the spacing between two neighboring black matrix positional precision mark, then a son
The width p=a+b=d+f of pixel, so as to ensure that the distance using each mobile sub-pixel width of same mask plate
It can complete the making of color film layer whole color blocking.The color film layer positional precision mark of two same colors at color one angle of film layer
Spacing between center line along longitudinal direction (i.e. two on the first mask plate included by same group of coloured silk film layer positional precision mark figure
Spacing between the center line of color film layer positional precision mark figure along longitudinal direction) e=3a+2b+2c+3d+2f, to ensure to ultimately form
Positional precision mark arrange according to shown in Fig. 3 d.
It is most short between the center line of coloured silk film layer positional precision mark and black matrix positional precision mark along longitudinal direction at same angle
Distance c can have gap (i.e. b ＞ 0), same angle at same angle more than zero between two neighboring color film layer positional precision mark
Locate that there is gap (i.e. f ＞ 0) between two neighboring black matrix positional precision mark, to ensure the accurate reading to positional precision mark
It takes.Further, b equal can also be differed with f, and the value of b and f specifically may be configured as being greater than or equal to 7 μm, to ensure to be formed
Color film layer positional precision mark between do not overlap.
The difference of the color of included sub-pixel is (such as according to the display device：Including tri- kinds of colors of R, G, B or including
R, four kinds of colors of G, B, Y (Huang) or including four kinds of colors of R, G, B, W (white)), be located at black matrix in the present embodiment at same angle
The color film layer positional precision mark of color different n that positional precision identifies the same end may respectively be red color film layer position
Precision mark, green tint film layer positional precision mark and blue color film layer positional precision mark；Or it is red color film layer position
Precision mark, green tint film layer positional precision mark, blue color film layer positional precision mark and yellow coloured silk film layer positional precision mark
Know；Or it is red color film layer positional precision mark, green tint film layer positional precision mark, blue color film layer positional precision mark
With white color film layer positional precision mark；Or the respective change according to sub-pixel colors difference, to ensure to all colours color blocking
The detection of position.
In the present embodiment, black matrix layer further includes the black matrix of the network positioned at black matrix layer intermediate region；It is above-mentioned
Color film layer further includes the color blocking of the matrix form arrangement positioned at color film layer intermediate region.
The present embodiment additionally provides a kind of display device, which includes above-mentioned color membrane substrates.Due to above-mentioned mask
The yield of plate is improved compared with the prior art, therefore the display device including above-mentioned color membrane substrates also has higher yield.
It should be noted that the display device that the present embodiment is provided can be liquid crystal panel, Electronic Paper or OLED
(Organic Light-Emitting Diode, Organic Light Emitting Diode) panel, suitable for mobile phone, tablet computer, television set,
Any product or component with display function such as display, laptop, Digital Frame, navigator.
The foregoing is merely the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, all should by the change or replacement that can be readily occurred in
It is included within the scope of the present invention.Therefore, protection scope of the present invention should using the scope of the claims as
It is accurate.
Claims (12)
1. a kind of mask plate, for forming the color film layer in display device, the coloured silk film layer corresponds to multiple pixel units, the coloured silk
Corresponding each pixel unit has the color blocking of transversely arranged n kind colors in film layer, which is characterized in that the mask plate bag
It includes respectively positioned at four groups of coloured silk film layer positional precisions mark figure of the mask plate four corners, color film layer positional precision described in every group
Mark figure includes being mutually parallel, the horizontal arranged and color film layer positional precision mark figure of two bar shapeds that extends longitudinally
Shape, the lateral dimension of the coloured silk film layer positional precision mark figure is a, and a is less than the width of a sub-pixel；Wherein n be equal to 3 or
4。
2. mask plate according to claim 1, which is characterized in that two color film layer positions at described one angle of mask plate
Distance between the center line along longitudinal direction of precision mark figure is e, and the ratio of e and sub-pixel width is more than n.
3. mask plate according to claim 1, which is characterized in that the mask plate further includes：In the mask plate
Between region matrix form arrangement color blocking figure.
4. according to claims 1 to 3 any one of them mask plate, which is characterized in that a is greater than or equal to 35 μm, a sub- picture
The width of element is less than or equal to 65 μm.
5. a kind of mask plate group, which is characterized in that including：
First mask plate, first mask plate are used to form the coloured silk in display device for Claims 1 to 4 any one of them
The mask plate of film layer；
Second mask plate, second mask plate are used to form black matrix layer in display device, including being located at described the respectively
Four groups of black matrix positional precisions mark figure of two mask plate four corners, black matrix positional precision mark figure includes described in every group
Black matrix positional precisions mark figures horizontal arranged n, two neighboring black matrix positional precision mark figure is along longitudinal direction
Spacing between center line is the width of a sub-pixel, and the lateral dimension of the black matrix positional precision mark figure is d, and d is small
In the width of a sub-pixel；
When partially overlapping of display area is corresponded in first mask plate and second mask plate, described first at same angle
N black matrix position of the center line and second mask plate of the color film layer positional precision mark centre of figure line of two of mask plate
The first black matrix positional precision mark figure center line along longitudinal direction put in precision mark figure overlaps, and if described first covering
The spacing between the center line of two color film layer positional precision mark figures along longitudinal direction at one angle of diaphragm plate is e, then e and son
The ratio of pixel wide is more than 2n.
6. mask plate group according to claim 5, which is characterized in that second mask plate further includes：Positioned at described
The black matrix figure of the network of two mask plate intermediate regions.
7. mask plate group according to claim 5 or 6, which is characterized in that d is greater than or equal to 20 μm, sub-pixel
Width is less than or equal to 65 μm.
8. a kind of color membrane substrates, which is characterized in that including：
Substrate；
The black matrix layer being formed on the substrate, the black matrix layer utilize claim 5~7 any one of them mask plate
The second mask plate in group is formed, and the black matrix layer includes being located at four groups of black matrix positions of the black matrix layer four corners respectively
Put precision mark；
The color film layer being formed on the substrate, the coloured silk film layer is using in claim 5~7 any one of them mask plate group
The first mask plate formed, the coloured silk film layer includes being located at four groups of coloured silk film layer positional precision marks of the color film layer four corners respectively
Know；
Wherein, the arrangement situation of the coloured silk film layer positional precision mark and black matrix positional precision mark is at same angle：
N different coloured silk of color different n color film layer positional precision mark, n black matrix positional precision mark, color
Film layer positional precision mark is transversely arranged successively, between the center line of two neighboring coloured silk film layer positional precision mark along longitudinal direction between
It is the width of a sub-pixel away from the spacing between two neighboring black matrix positional precision mark center line along longitudinal direction.
9. color membrane substrates according to claim 8, which is characterized in that at same angle the coloured silk film layer positional precision mark with
Beeline between the black matrix positional precision mark is more than zero, and two neighboring color film layer positional precision identifies at same angle
Between there is gap, there is gap between two neighboring black matrix positional precision mark at same angle.
10. color membrane substrates according to claim 8, which is characterized in that n different color film layer position of the color
Precision mark is respectively red color film layer positional precision mark, green tint film layer positional precision mark and blue color film layer position essence
Scale is known, and wherein n is equal to 3；Alternatively,
N different color film layer positional precision mark of the color is respectively red color film layer positional precision mark, green
Color film layer positional precision mark, blue color film layer positional precision mark and yellow coloured silk film layer positional precision mark, wherein n are equal to 4；
Alternatively,
N different color film layer positional precision mark of the color is respectively red color film layer positional precision mark, green
Color film layer positional precision mark, blue color film layer positional precision mark and the color film layer positional precision mark of white, wherein n are equal to 4.
11. color membrane substrates according to claim 8, which is characterized in that the black matrix layer is further included positioned at the black square
The black matrix of the network of battle array layer intermediate region；
The coloured silk film layer further includes the color blocking of the matrix form arrangement positioned at the color film layer intermediate region.
12. a kind of display device, which is characterized in that including claim 8~11 any one of them color membrane substrates.
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| CN104808434B (en) * | 2015-05-21 | 2019-08-02 | 合肥京东方光电科技有限公司 | Substrate, mask plate and display device, alignment method |
| CN105182680B (en) * | 2015-10-22 | 2019-12-17 | 深圳市华星光电技术有限公司 | Color resistance mask plate and using method thereof |
| CN106646997A (en) * | 2016-12-27 | 2017-05-10 | 深圳市华星光电技术有限公司 | Baffle identifier of color resistance layer manufactured through Canon photomask and use method of baffle identifier |
| CN106773526B (en) * | 2016-12-30 | 2020-09-01 | 武汉华星光电技术有限公司 | Mask, color film substrate and manufacturing method thereof |
| CN108572477B (en) | 2017-03-08 | 2021-12-07 | 福州京东方光电科技有限公司 | Color film substrate, display panel and detection method thereof |
| CN107065281B (en) | 2017-04-12 | 2020-07-03 | 深圳市华星光电技术有限公司 | Method for manufacturing color resistor |
| CN106918948B (en) * | 2017-04-12 | 2020-07-24 | 深圳市华星光电技术有限公司 | Method for manufacturing color resistor |
| CN109182964B (en) * | 2018-08-31 | 2019-11-15 | 云谷（固安）科技有限公司 | Mask plate composition method |
| CN110246989B (en) * | 2019-05-07 | 2021-04-30 | 信利半导体有限公司 | Manufacturing method of full-color OLED display |
| CN112415792B (en) * | 2020-12-09 | 2023-03-14 | 深圳市华星光电半导体显示技术有限公司 | Display panel, electronic device and method for detecting color resistance alignment accuracy |
| CN112882275B (en) * | 2021-02-05 | 2021-11-09 | 惠科股份有限公司 | Color film substrate, manufacturing method thereof and display panel |
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