CN102540386A - Elastic supporting device for moving mirror - Google Patents
Elastic supporting device for moving mirror Download PDFInfo
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- CN102540386A CN102540386A CN2012100262734A CN201210026273A CN102540386A CN 102540386 A CN102540386 A CN 102540386A CN 2012100262734 A CN2012100262734 A CN 2012100262734A CN 201210026273 A CN201210026273 A CN 201210026273A CN 102540386 A CN102540386 A CN 102540386A
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- elastic support
- eyeglass
- support
- elastic
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Abstract
The invention provides an elastic supporting device for a moving mirror, which comprises a lens frame (1), a first elastic support (2K), second to fifteenth elastic supports (3K-16K), a lens (200) and a pressing ring (300). A round hole (500) is arranged on the lens frame (1), three steps serving as three rigid supporting points of the lens (200) are designed on a base (400) and are respectively a first rigid supporting point (A), a second rigid supporting point (B) and a third rigid supporting point (C), and five elastic supports are evenly arranged between every two rigid supporting points. The elastic supporting device for the moving mirror can uninstall gravity of the lens and release gravity deformation in the lens to ensure planarity of the lens and improve imaging quality.
Description
Technical field
The present invention relates to the field of eyeglass resiliency supported, be specifically related to a kind of index glass resilient supporting unit, it is the installation and the adjustment of object lens eyeglass in a kind of litho machine, also can be used in the enterprise production installation and measuring and debugging to workpiece.
Background technology
In projection mask aligner, when its picture element during near diffraction limit, the irregularity degree that the object lens eyeglass is trickle all can exert an adverse impact to picture element.Eyeglass is installed in the lens frame; Since lens frame can not be processed smooth fully; Eyeglass does not make eyeglass be in unsettled place with lens frame with regard to having because of not contacting, like this, and after object lens are debug completion; The lens surface in these unsettled places will depressed deformation occur because of receiving gravity effect in long-term use, causes the objective system image quality to descend.Therefore, need the gravity of eyeglass be discharged, reduce the gravity deformation of eyeglass; Guarantee the flatness of lens surface; Improve image quality, this shows that the support to eyeglass is crucial, for this reason; We have designed a kind of index glass resilient supporting unit, to solve the gravity deformation problem of eyeglass.
Summary of the invention
The technical matters that the present invention will solve is: a kind of index glass resilient supporting unit is provided; Make index glass in long-term use, can not produce depressed deformation because of the effect of gravity; Guarantee the flatness of lens surface, guaranteed that picture element and focal plane are stable, guaranteed photoetching quality.
The technical solution adopted for the present invention to solve the technical problems is: a kind of index glass resilient supporting unit, and this device comprises: lens frame, first elastic support, the second to the 15 elastic support, eyeglass, trim ring; Lens frame has a circular hole; And three equally distributed steps are arranged on base as three rigid support points to eyeglass; Be respectively first rigid support point, second rigid support point, the 3rd rigid support point; Lay five elastic supports uniformly between per two rigid supports, first elastic support, second elastic support, the 3rd elastic support, the 4th elastic support, the 5th elastic support both have been installed between the first rigid support point and the second rigid support point; The 6th elastic support, the 7th elastic support, the 8th elastic support, the 9th elastic support, the tenth elastic support are installed between the second rigid support point and the 3rd rigid support point; Between the 3rd rigid support point and the first rigid support point, the 11 elastic support, the 12 elastic support, the 13 elastic support, the 14 elastic support, the 15 elastic support are installed; One spring contact is all arranged on each elastic support, be respectively first spring contact, second spring contact ..., the 15 spring contact; Eyeglass is installed on three rigid support points in the circular hole of lens frame; Trim ring is placed in the eyeglass top again; Elastic support is installed on the base of the lens frame below the eyeglass; Make first spring contact to the, 15 spring contacts on first elastic support to the, 15 elastic supports can below eyeglass, withstand eyeglass, eyeglass carried out support upwards, trim ring be placed in eyeglass in the circular hole above.
The contact of said elastic support is processed by resilient material.
Principle of the present invention is:
This device has used elastic principle, and the strong point is made elastic support, and making the eyeglass and the strong point is Elastic Contact; Like this, no matter how eyeglass becomes, elastic support points all can remain and the eyeglass excellent contact; Make eyeglass bracing frame all arranged all the time, so that gravity is unloaded as support.
The invention has the beneficial effects as follows:
Because eyeglass contacts with the strong point closely, makes the gravity of eyeglass obtain good release, has prevented the depressed deformation of eyeglass effectively, has guaranteed the flatness of lens surface, has guaranteed image quality.
Description of drawings
Fig. 1 is a vertical view of the present invention;
Fig. 2 is a cut-open view of the present invention;
Fig. 3 is the flexible supporting frames vertical view;
Fig. 4 is the flexible supporting frames side view;
Fig. 5 is a schematic bottom view of the present invention;
Fig. 6 is a trim ring vertical view of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
As shown in Figure 1, this device is made up of lens frame 1, the first elastic support 2K, the second to the 15 elastic support 3K-16K, eyeglass 200, trim ring 300.Lens frame 1 has a circular hole 500; And on base 400, be designed with three equally distributed steps as three rigid support points to eyeglass 200; Be respectively the first rigid support point A, the second rigid support point B, the 3rd rigid support point C; Lay five elastic supports uniformly between per two rigid supports, the first elastic support 2K, the second elastic support 3K, the 3rd elastic support 4K, the 4th elastic support 5K, the 5th elastic support 6K both have been installed between the first rigid support point A and the second rigid support point B; The 6th elastic support 7K, the 7th elastic support 8K, the 8th elastic support 9K, the 9th elastic support 10K, the tenth elastic support 11K are installed between the second rigid support point B and the 3rd rigid support point C; Between the 3rd rigid support point C and the first rigid support point A, the 11 elastic support 12K, the 12 elastic support 13K, the 13 elastic support 14K, the 14 elastic support 15K, the 15 elastic support 16K are installed.One spring contact is all arranged on each elastic support, be respectively first spring contact 2, second spring contact 3 ..., the 15 spring contact 16.Three rigid support point A, B, C that eyeglass 200 is installed in the circular hole 500 of lens frame 1 are last; Trim ring 300 is placed in eyeglass 200 tops again; Elastic support is installed on the base 400 of lens frame 1 of eyeglass 200 belows; Make first spring contact the 2 to the 15 spring contact 16 on the first elastic support 2K to the, the 15 elastic support 16K can below eyeglass 200, withstand eyeglass 200, eyeglass 200 is carried out support upwards.
Like Fig. 2,3,4, shown in 5, since all identical from the first elastic support 2K to the, 15 their structures of elastic support 16K and principle of work, be that example is set forth just here with the first elastic support 2K.Have first counterbore 24, second counterbore 25 on the base 400 of lens frame 1; Have first mounting hole 22, second mounting hole 23 on the pedestal 21 of the first elastic support 2K; Pass first, second mounting hole 22,23 on the first elastic support 2K with first mounting screw 26, second mounting screw 27; Be screwed in first, second counterbore 24,25 on the base 400 of lens frame 1; The first elastic support 2K is fixed on the base 400 of lens frame 1, makes first spring contact 2 below eyeglass 200, withstand eyeglass 200.Other elastic supports are the same, and the like.
After eyeglass 200 is placed into lens frame 1; By the first rigid support point A on the lens frame 1, the second rigid support point B, the 3rd rigid support point C eyeglass 200 is carried out rigid support; And the 16 pairs of eyeglasses of first spring contact the 2 to the 15 spring contact 200 on the first elastic support 2K to the, the 15 elastic support 16K carry out resiliency supported upwards; Screw in the circular hole 500 of lens frame 1 through screw thread D by trim ring 300 afterwards, above eyeglass 200, eyeglass 200 is compressed downwards.Because the contact of elastic support is processed by resilient material; Easy damaged eyeglass 200 not when therefore they contact with eyeglass 200, and, when eyeglass 200 deforms; It can be along with the distortion of eyeglass 200; Carry out the position adjustment automatically up and down, remain the holder of eyeglass 200 is held up, reduce the deformation that eyeglass 200 causes because of gravity.
The part that the present invention does not set forth in detail belongs to techniques well known.
Claims (2)
1. index glass resilient supporting unit, it is characterized in that: this device comprises: lens frame (1), first elastic support (2K), the second to the 15 elastic support (3K-16K), eyeglass (200), trim ring (300); Lens frame (1) has a circular hole (500); And three equally distributed steps are arranged on base (400) as three rigid support points to eyeglass (200); Be respectively first rigid support point (A), second rigid support point (B), the 3rd rigid support point (C); Lay five elastic supports uniformly between per two rigid supports, first elastic support (2K), second elastic support (3K), the 3rd elastic support (4K), the 4th elastic support (5K), the 5th elastic support (6K) both have been installed between first rigid support point (A) and second rigid support point (B); The 6th elastic support (7K), the 7th elastic support (8K), the 8th elastic support (9K), the 9th elastic support (10K), the tenth elastic support (11K) are installed between second rigid support point (B) and the 3rd rigid support point (C); Between the 3rd rigid support point (C) and first rigid support point (A), the 11 elastic support (12K), the 12 elastic support (13K), the 13 elastic support (14K), the 14 elastic support (15K), the 15 elastic support (16K) are installed; One spring contact is all arranged on each elastic support, be respectively first spring contact (2), second spring contact (3) ..., the 15 spring contact (16); Eyeglass (200) is installed on three the rigid support points (A, B, C) in the circular hole (500) of lens frame (1); Trim ring (300) is placed in eyeglass (200) top again; Elastic support is installed on the base (400) of the lens frame (1) below the eyeglass (200); Make first elastic support (2K) can below eyeglass (200), withstand eyeglass (200) to the 15 spring contact (16) to first spring contact (2) on the 15 elastic support (16K); Eyeglass (200) is carried out support upwards, trim ring (300) be placed in the interior eyeglass of circular hole (500) (200) above.
2. a kind of index glass resilient supporting unit according to claim 1, it is characterized in that: the contact of said elastic support is processed by resilient material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210026273.4A CN102540386B (en) | 2012-02-07 | 2012-02-07 | Elastic supporting device for moving mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210026273.4A CN102540386B (en) | 2012-02-07 | 2012-02-07 | Elastic supporting device for moving mirror |
Publications (2)
| Publication Number | Publication Date |
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| CN102540386A true CN102540386A (en) | 2012-07-04 |
| CN102540386B CN102540386B (en) | 2013-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210026273.4A Expired - Fee Related CN102540386B (en) | 2012-02-07 | 2012-02-07 | Elastic supporting device for moving mirror |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854597A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | High-precision supporting structure of optical element in photo-etching objective lens |
| CN103278907A (en) * | 2013-05-28 | 2013-09-04 | 中国科学院光电技术研究所 | Axial unloading device for index mirror |
| CN103901571A (en) * | 2014-02-13 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Flexible supporting device and method for non-vertical placing of large transmission-reflection type lens |
| CN104914549A (en) * | 2015-05-28 | 2015-09-16 | 北京空间机电研究所 | Reflector support structure based on space unlocking |
| JP2016085409A (en) * | 2014-10-28 | 2016-05-19 | オリンパス株式会社 | Lens holding frame, lens assembly and assembly method of lens assembly |
| CN107329225A (en) * | 2016-04-29 | 2017-11-07 | 上海微电子装备（集团）股份有限公司 | Edge-on microscope group and its installation method |
| CN110471152A (en) * | 2018-05-09 | 2019-11-19 | 深圳光峰科技股份有限公司 | Optical elements immobilizing structure and Lens assembly and illumination testing apparatus |
| JP2021510841A (en) * | 2018-01-15 | 2021-04-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Projection exposure equipment and adjustment method for semiconductor lithography with improved component adjustment |
| CN113917645A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Lens elastic supporting device |
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2012
- 2012-02-07 CN CN201210026273.4A patent/CN102540386B/en not_active Expired - Fee Related
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854597A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | High-precision supporting structure of optical element in photo-etching objective lens |
| CN103278907A (en) * | 2013-05-28 | 2013-09-04 | 中国科学院光电技术研究所 | Axial unloading device for index mirror |
| CN103901571A (en) * | 2014-02-13 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Flexible supporting device and method for non-vertical placing of large transmission-reflection type lens |
| CN103901571B (en) * | 2014-02-13 | 2016-03-09 | 中国科学院上海光学精密机械研究所 | The flexible support device of the non-perpendicular placement of large-scale Transflective eyeglass and method for supporting |
| US10261334B2 (en) | 2014-10-28 | 2019-04-16 | Olympus Corporation | Lens holding frame, lens assembly, and method of assembling the same |
| JP2016085409A (en) * | 2014-10-28 | 2016-05-19 | オリンパス株式会社 | Lens holding frame, lens assembly and assembly method of lens assembly |
| CN104914549A (en) * | 2015-05-28 | 2015-09-16 | 北京空间机电研究所 | Reflector support structure based on space unlocking |
| CN107329225A (en) * | 2016-04-29 | 2017-11-07 | 上海微电子装备（集团）股份有限公司 | Edge-on microscope group and its installation method |
| CN107329225B (en) * | 2016-04-29 | 2020-06-16 | 上海微电子装备（集团）股份有限公司 | Side standing lens group and mounting method thereof |
| JP2021510841A (en) * | 2018-01-15 | 2021-04-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Projection exposure equipment and adjustment method for semiconductor lithography with improved component adjustment |
| JP7288447B2 (en) | 2018-01-15 | 2023-06-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Projection exposure apparatus and adjustment method for semiconductor lithography with improved component adjustment |
| CN110471152A (en) * | 2018-05-09 | 2019-11-19 | 深圳光峰科技股份有限公司 | Optical elements immobilizing structure and Lens assembly and illumination testing apparatus |
| CN113917645A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Lens elastic supporting device |
| CN113917645B (en) * | 2021-11-01 | 2023-03-31 | 中国科学院光电技术研究所 | Lens elastic supporting device |
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| CN102540386B (en) | 2013-09-18 |
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Granted publication date: 20130918 Termination date: 20210207 |