CN108957039A - A kind of full-automatic IC test machine - Google Patents
A kind of full-automatic IC test machine Download PDFInfo
- Publication number
- CN108957039A CN108957039A CN201810709440.2A CN201810709440A CN108957039A CN 108957039 A CN108957039 A CN 108957039A CN 201810709440 A CN201810709440 A CN 201810709440A CN 108957039 A CN108957039 A CN 108957039A
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- China
- Prior art keywords
- adjusting
- automatic
- full
- wafer
- testing cassete
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a kind of full-automatic IC test machine, including cabinet body, L-type cabinet and test platform, the cabinet body front end is provided with several storage silos；The present invention designs rationally in structure, practicability is very high, when work, wafer is adsorbed in wafer mold platform by hand-held sucker external member, it is convenient to pick and place, it is clean pollution-free, rising adjusting air valve and decline adjusting air valve can realize that wafer mold platform rapidly enters operating position, angle regulating unit can carry out local angle adjusting, up and down adjustment unit can carry out fining and move up and down adjusting, left and right adjusting unit facilitates carry out left and right adjusting, detection efficiency can be greatly improved in multi-faceted fining adjusting, precision is promoted simultaneously, it ensure that product quality, whether the first display screen can show CCD looks after out the probe of needle card and is aligned with the solder joint of wafer, second display screen can be used to check that wafer test added and debugging software, it is flexible to operation.
Description
Technical field
The present invention relates to test device technical field, specifically a kind of full-automatic IC test machine.
Background technique
Wafer is the carrier for producing used in integrated circuits, mostly finger monocrystalline silicon wafer.Monocrystalline silicon wafer is drawn by common silica sand
Refine, be made silicon single crystal rod by dissolution, purification, distillation a series of measures, silicon single crystal rod after polishing, slice, just at
For wafer, many one sound of laughing wafers are distributed in a discoid wafer on piece, and wafer is arranged in array, and wafer is encapsulating
It needs to detect its performance before manufacturing into chip, the various functions of electronic product be unable to do without the development of integrated circuit, institute
With in order to guarantee its final performance, integrated circuit early period test with regard to particularly important, i.e., wafer detects.
Currently, when carrying out wafer detection, requiring to compare to pressure and precision since chip itself is more fragile
Height can damage wafer if test pressure is excessive, and pressure is too small, will affect test effect；Therefore it is tested to guarantee to detect
When pressure environment, it is necessary to design is able to carry out the multi-faceted stage apparatus precisely adjusted, while wafer is moved through in detection
Cheng Zhong, somebody person are taken and are detected manually, it is low to result in production efficiency, and pollute influence product to product
Quality.Therefore, those skilled in the art provide a kind of full-automatic IC test machine, to solve mentioned above in the background art ask
Topic.
Summary of the invention
The purpose of the present invention is to provide a kind of full-automatic IC test machines, to solve mentioned above in the background art ask
Topic.
To achieve the above object, the invention provides the following technical scheme:
A kind of full-automatic IC test machine, including cabinet body, L-type cabinet and test platform, the cabinet body front end are provided with several
Storage silo, the cabinet body upper end rear side are provided with L-type cabinet, and L-type cabinet front end is provided with the first display screen and second and shows
Display screen, L-type cabinet rear end are provided with maintenance door, are provided with test platform, the test platform on front side of the cabinet body upper end
Including testing cassete, L-type support and cylinder, L-type support, the L-type support upper end left side are provided on the left of the testing cassete upper end
It is provided with needle pressure adjuster, needle pressure fixing groove is provided on the right side of the L-type support upper end, is provided with cylinder in the testing cassete,
The testing cassete upper center is provided with intake valve, is provided with rising adjusting air valve on the upside of the testing cassete right end, described
It is provided with power switch in the middle part of testing cassete right end, the testing cassete front center is provided with decline adjusting air valve, on the cylinder
End connection left and right adjusting unit, left and right adjusting unit upper end is connected with up and down adjustment unit, on the up and down adjustment unit
End is provided with angle regulating unit, and the angle regulating unit upper end is provided with wafer mold platform.
As a further solution of the present invention: be set gradually from left to right on the downside of the testing cassete front end lifting key, under
It drops key and conciliates code key.
As the present invention further scheme: the cylinder by pipeline connect intake valve, rising adjusting air valve and under
Falling tone air throttle.
As further scheme of the invention: the number at least two of the storage silo.
As further scheme of the invention: first display screen and test platform number are equal, and are at least
Three.
As further scheme of the invention: the cabinet body upper end-face edge is provided with hand-held sucker external member.
Compared with prior art, the beneficial effects of the present invention are:
The present invention designs rationally in structure, and practicability is very high, when work, is adsorbed to wafer by hand-held sucker external member
In wafer mold platform, it is convenient to pick and place, clean pollution-free, and rising adjusting air valve and decline adjusting air valve can realize that wafer mold is flat
Platform rapidly enters operating position, and angle regulating unit can carry out local angle adjusting, and up and down adjustment unit can be refined
Lower mobile adjusting, left and right adjusting unit facilitate carry out left and right adjusting, and detection efficiency can be greatly improved in multi-faceted fining adjusting, together
When precision promoted, ensure that product quality, the first display screen can show CCD and look after out the probe of needle card and the solder joint of wafer
Whether it is aligned, second display screen can be used to check that wafer test added and debugging software, flexible to operation.
Detailed description of the invention
Fig. 1 faces axonometric drawing for a kind of full-automatic IC test machine.
Fig. 2 is a kind of backsight axonometric drawing of full-automatic IC test machine.
Fig. 3 is a kind of structural schematic diagram of test platform in full-automatic IC test machine.
In figure: 1- needle presses adjuster, 2- needle to press fixing groove, 3- power supply box, 4- intake valve, 5- wafer mold platform, the angle 6-
Degree adjusts unit, 7- up and down adjustment unit, 8- left and right adjusting unit, 9- power switch, 10- and rises falling tone under adjusting air valve, 11-
Air throttle, 12- lifting key, 13- decline key, 14- solution code key, 15- cabinet body, 16- storage silo, 17-L type cabinet, 18- first are shown
Screen, 19- second display screen, 20- maintenance door.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1~3, in the embodiment of the present invention, a kind of full-automatic IC test machine, including cabinet body 15,17 and of L-type cabinet
Test platform, 15 front end of cabinet body are provided with several storage silos 16, are provided with L-type cabinet 17 on rear side of 15 upper end of cabinet body,
17 front end of L-type cabinet is provided with the first display screen 18 and second display screen 19, and 17 rear end of L-type cabinet is provided with maintenance
Door 20,15 upper end of the cabinet body front side are provided with test platform, and the test platform includes testing cassete, L-type support and cylinder, institute
It states and is provided with L-type support on the left of testing cassete upper end, needle pressure adjuster 1, the L-type branch are provided on the left of the L-type support upper end
Be provided with needle pressure fixing groove 2 on the right side of frame upper end, be provided with cylinder in the testing cassete, the testing cassete upper center be provided with into
Air valve 4, the testing cassete right end upside, which is provided with, rises adjusting air valve 10, is provided with power supply in the middle part of the testing cassete right end
Switch 9, the testing cassete front center are provided with decline adjusting air valve 11, and the cylinder upper end connects left and right adjusting unit 8, institute
It states 8 upper end of left and right adjusting unit and is connected with up and down adjustment unit 7,7 upper end of up and down adjustment unit is provided with angular adjustment list
Member 6,6 upper end of angle regulating unit is provided with wafer mold platform 5.
Lifting key 12 is set gradually from left to right on the downside of the testing cassete front end, decline key 13 conciliates code key 14.
The cylinder connects intake valve 4 by pipeline, rises adjusting air valve 10 and decline adjusting air valve 11.
The number at least two of the storage silo 16.
First display screen 18 is equal with test platform number, and is at least three.
15 upper end-face edge of cabinet body is provided with hand-held sucker external member.
The working principle of the invention is:
The present invention relates to a kind of full-automatic IC test machine, when work, wafer is adsorbed to by wafer by hand-held sucker external member
In mold platform 5, it is convenient to pick and place, clean pollution-free, and wafer mold can be realized by rising adjusting air valve 10 and decline adjusting air valve 11
Platform 5 rapidly enters operating position, and angle regulating unit 6 can carry out local angle adjusting, and up and down adjustment unit 7 can carry out finely
Change moves up and down adjusting, and left and right adjusting unit 8 facilitates carry out left and right adjusting, and detection effect can be greatly improved in multi-faceted fining adjusting
Rate, while precision is promoted, and ensure that product quality, the first display screen 18 can show the probe and crystalline substance that CCD looks after out needle card
Whether the solder joint of member is aligned, and second display screen 19 can be used to check that wafer test add and debugging software, and pass through lifting key 12,
It is flexible to operation to decline key 13, storage silo 16 facilitates storage article, the maintenance of 20 fast and easy of maintenance door.
The present invention designs rationally in structure, and practicability is very high, when work, is adsorbed to wafer by hand-held sucker external member
In wafer mold platform, it is convenient to pick and place, clean pollution-free, and rising adjusting air valve and decline adjusting air valve can realize that wafer mold is flat
Platform rapidly enters operating position, and angle regulating unit can carry out local angle adjusting, and up and down adjustment unit can be refined
Lower mobile adjusting, left and right adjusting unit facilitate carry out left and right adjusting, and detection efficiency can be greatly improved in multi-faceted fining adjusting, together
When precision promoted, ensure that product quality, the first display screen can show CCD and look after out the probe of needle card and the solder joint of wafer
Whether it is aligned, second display screen can be used to check that wafer test added and debugging software, flexible to operation.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. a kind of full-automatic IC test machine, including cabinet body (15), L-type cabinet (17) and test platform, which is characterized in that the cabinet
Body (15) front end is provided with several storage silos (16), is provided with L-type cabinet (17), the L-type on rear side of cabinet body (15) upper end
Cabinet (17) front end is provided with the first display screen (18) and second display screen (19), and L-type cabinet (17) rear end is provided with inspection
Repair door (20), be provided with test platform on front side of cabinet body (15) upper end, the test platform include testing cassete, L-type support and
Cylinder, the testing cassete upper end left side are provided with L-type support, needle pressure adjuster (1) are provided on the left of the L-type support upper end,
It is provided with needle pressure fixing groove (2) on the right side of the L-type support upper end, is provided with cylinder, the testing cassete upper end in the testing cassete
Middle part is provided with intake valve (4), is provided on the upside of the testing cassete right end and is risen adjusting air valve (10), and the testing cassete is right
End middle part is provided with power switch (9), and the testing cassete front center is provided with decline adjusting air valve (11), the cylinder upper end
It connects left and right adjusting unit (8), left and right adjusting unit (8) upper end is connected with up and down adjustment unit (7), the up and down adjustment
Unit (7) upper end is provided with angle regulating unit (6), and angle regulating unit (6) upper end is provided with wafer mold platform
(5)。
2. a kind of full-automatic IC test machine according to claim 1, which is characterized in that from a left side on the downside of the testing cassete front end
Lifting key (12), decline key (13) reconciliation code key (14) are disposed with to the right side.
3. a kind of full-automatic IC test machine according to claim 1, which is characterized in that the cylinder by pipeline connect into
Air valve (4) rises adjusting air valve (10) and decline adjusting air valve (11).
4. a kind of full-automatic IC test machine according to claim 1, which is characterized in that the number of the storage silo (16) is extremely
It is less two.
5. a kind of full-automatic IC test machine according to claim 1, which is characterized in that first display screen (18) and survey
It is equal to try platform number, and is at least three.
6. a kind of full-automatic IC test machine according to claim 1, which is characterized in that cabinet body (15) upper end-face edge is set
It is equipped with hand-held sucker external member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810709440.2A CN108957039A (en) | 2018-07-02 | 2018-07-02 | A kind of full-automatic IC test machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810709440.2A CN108957039A (en) | 2018-07-02 | 2018-07-02 | A kind of full-automatic IC test machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108957039A true CN108957039A (en) | 2018-12-07 |
Family
ID=64484607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810709440.2A Pending CN108957039A (en) | 2018-07-02 | 2018-07-02 | A kind of full-automatic IC test machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108957039A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112863590A (en) * | 2021-01-26 | 2021-05-28 | 深圳市卓然电子有限公司 | Testing device for flash memory chip |
| CN112863587A (en) * | 2021-01-26 | 2021-05-28 | 深圳市卓然电子有限公司 | Method for testing flash memory chip |
-
2018
- 2018-07-02 CN CN201810709440.2A patent/CN108957039A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112863590A (en) * | 2021-01-26 | 2021-05-28 | 深圳市卓然电子有限公司 | Testing device for flash memory chip |
| CN112863587A (en) * | 2021-01-26 | 2021-05-28 | 深圳市卓然电子有限公司 | Method for testing flash memory chip |
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