CN108426532A - Ceramic substrate thickness detection apparatus - Google Patents
Ceramic substrate thickness detection apparatus Download PDFInfo
- Publication number
- CN108426532A CN108426532A CN201810335850.5A CN201810335850A CN108426532A CN 108426532 A CN108426532 A CN 108426532A CN 201810335850 A CN201810335850 A CN 201810335850A CN 108426532 A CN108426532 A CN 108426532A
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- Prior art keywords
- ceramic substrate
- station platform
- platform
- connecting plate
- substrate thickness
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
Present invention is disclosed a kind of ceramic substrate thickness detection apparatus, including equipment platform, it further include the load carrier for carrying ceramic substrate to be detected, testing agency for executing ceramic substrate Thickness sensitivity to be detected, and the carrying mechanism for realizing ceramic substrate grasp handling to be detected, the load carrier, testing agency and carrying mechanism are fixedly installed on the equipment platform, the load carrier includes feeding station platform, detection station platform and discharge station platform, the detection station platform is movably disposed on the equipment platform, the carrying mechanism is matched with the detection station platform, carrying of the ceramic substrate to be detected between the feeding station platform and the discharge station platform is completed jointly.High degree of automation of the present invention, detection result are good and are conducive to be promoted the total quality of ceramic substrate, specifically very high use and promotional value.
Description
Technical field
The present invention relates to a kind of detection device more particularly to a kind of ceramic substrates used in ceramic substrate production process
Thickness detection apparatus belongs to automation manufacture field.
Background technology
Ceramic substrate, also known as ceramic substrate are formed to film circuit element and outer proper element using electronic ceramics as substrate
The flaky material of one support base.
With the progress of microelectric technique, the characteristic line breadth of micro fabrication has reached submicron order, in ceramic substrate
On can integrate 106~109 or more elements, the speed of circuit work is getting faster, frequency is higher and higher, this is to ceramic substrate
Performance higher requirements are also raised.In addition, in order to comply with the development trend of product miniaturization in current industry, precise treatment,
It is also more stringent to the control of the product specifications such as size, the thickness of ceramic substrate to process enterprise.
Currently, most of processing enterprise is during the ceramic substrate that is produced to it carries out Thickness sensitivity, still
It is so to use manually-operated mode.In current detection process, it can use and arrive a kind of auxiliary detection device, this device knot
Structure is simple, is mainly made of two pieces of fixed blocks, and the gap between two pieces of fixed blocks is adjustable, and operator is by by ceramic substrate
The mode filled in gap judges whether the thickness of ceramic substrate is up to standard.If the thickness of ceramic substrate complies with standard, then can
Smoothly to be skidded off from gap.If the thickness of ceramic substrate is exceeded, then will be stuck in gap, at this point, operator
Non-compliant ceramic substrate is taken out, is put into waste material box.
Although aforesaid operations can be detected the thickness of ceramic substrate, problems are remained.First,
This detection mode fully relies on manual operation to complete, and not only detection efficiency is low, it is understood that there may be error, and to the people of enterprise
Power Resource Dependence is serious, and testing cost is high.Further, since the characteristic of ceramic substrate itself, in carrying out such detection process, pole
It is possible that will appear the case where colliding with, cause to generate the sightless crackle of naked eyes on ceramic substrate, it is serious to also result in fragment,
To seriously affect the quality of converted products.
In conclusion how to provide a kind of detection efficiency it is high, will not be to ceramic substrate thickness that product quality has an impact
Detection device just becomes those skilled in that art institute urgent problem to be solved.
Invention content
In view of the prior art, there are drawbacks described above, and the purpose of the present invention is to propose to one kind to make in ceramic substrate production process
Ceramic substrate thickness detection apparatus.
The purpose of the present invention will be achieved by the following technical programs：
A kind of ceramic substrate thickness detection apparatus, including equipment platform further include the carrying for carrying ceramic substrate to be detected
Mechanism, the testing agency for executing ceramic substrate Thickness sensitivity to be detected and for realizing ceramic substrate to be detected capture
The carrying mechanism of carrying, the load carrier, testing agency and carrying mechanism are fixedly installed on the equipment platform, institute
It includes feeding station platform, detection station platform and discharge station platform to state load carrier, and the detection station platform is movably arranged
In on the equipment platform, the carrying mechanism matches with the detection station platform, completes ceramic substrate to be detected jointly exists
Carrying between the feeding station platform and the discharge station platform.
Preferably, sliding seat is fixedly installed on the equipment platform, the detection station platform is fixedly installed on the cunning
On dynamic seat, the detection station platform is movably disposed in by the sliding seat on the equipment platform.
Preferably, the feeding station platform and discharge station platform are fixedly installed on the equipment platform, the blanking
Station platform includes certified products station platform and defect ware station platform, between the certified products station platform and the defect ware station platform
Line direction and the activity direction of the sliding seat are perpendicular.
Preferably, the bottom of the feeding station platform and the discharge station platform is both provided with lifting component, the lift
It includes lifting cylinder and supporting plate to rise component, and the lifting cylinder is fixedly installed below the equipment platform, the support
Plate is fixedly connected with the cylinder axis of the lifting cylinder, and the size of the supporting plate and the size of ceramic substrate to be detected are big
Small matching corresponds to.
Preferably, the carrying mechanism include fixing bracket, first carry component and second carry component, described first
It carries component and the second carrying component is movably disposed in by the fixing bracket on the equipment platform, institute
It states the distance between the first carrying component and the second carrying component and the active strokes of the sliding seat matches.
Preferably, the first carrying component includes the first connecting plate, the first movable base and the first crawl cylinder,
First connecting plate is fixedly installed on the fixing bracket, and first movable base is movably disposed in described first
On connecting plate, the first crawl cylinder is fixedly connected with first movable base, the cylinder axis of the first crawl cylinder
Top is fixedly installed the first crawl sucker, and the feeding station platform is located on the active path that described first captures cylinder.
Preferably, the second carrying component includes the second connecting plate, the second movable base and the second crawl cylinder,
Second connecting plate is fixedly installed on the fixing bracket, and second movable base is movably disposed in described second
On connecting plate, the second crawl cylinder is fixedly connected with second movable base, the cylinder axis of the second crawl cylinder
Top is fixedly installed the second crawl sucker, and the discharge station platform is located on the active path that described second captures cylinder.
Preferably, the setting direction of first connecting plate is parallel with the setting direction of the second connecting plate, described
The setting direction of the setting direction of first connecting plate and second connecting plate is perpendicular with the activity direction of the sliding seat.
Preferably, the testing agency includes laser detection pen and numeric display, the laser detection pen and the number
It is worth display to be electrically connected, the laser detection pen is fixedly installed on the side of the first crawl cylinder, and the numerical value is shown
Device is fixedly installed on the fixing bracket.
Preferably, further include be fixedly installed on the equipment platform, the controller for controlling each part runs, it is described
Load carrier, testing agency and the carrying mechanism are electrically connected with the controller and are controlled by it driving.
The present invention protrusion effect be：The present invention completes the Thickness sensitivity to ceramic substrate by way of automation,
Detection error that may be present during previous manual operation is avoided, ensure that the accuracy of detection, it is ensured that ceramic substrate
The consistency of specification.Meanwhile the present invention has broken away from existing detection device for artificial excessive dependence, has saved processing enterprise
Human resources reduce the testing cost of processing enterprise.In addition, invention also avoids ceramic substrates knocking in detection process
It touches, ensure that ceramic substrate will not crack and the case where fragment, improve the yields of ceramic substrate, keep away in the process
Unnecessary product loss is exempted from.Each component employed in the present invention is more mature technology, and operator can basis
Actual use needs, obtains technical scheme of the present invention by the repacking to the prior art, and equipment manufacturing costs are relatively
It is low, it has a extensive future.
In conclusion high degree of automation of the present invention, detection result are good and are conducive to be promoted the whole matter of ceramic substrate
It measures, specifically very high use and promotional value.
Just attached drawing in conjunction with the embodiments below, the embodiment of the present invention is described in further detail, so that of the invention
Technical solution is more readily understood, grasps.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention；
Wherein：1, equipment platform；2, feeding station platform；3, detection station platform；4, certified products station platform；5, defect ware station platform；
6, sliding seat；7, supporting plate；8, fixing bracket；9, the first connecting plate；10, the first movable base；11, the first crawl cylinder；12、
First crawl sucker；13, the second connecting plate；14, the second movable base；15, the second crawl cylinder；16, the second crawl sucker；
17, laser detection pen；18, numeric display.
Specific implementation mode
As shown, present invention is disclosed a kind of ceramic substrate Thickness sensitivity dresses used in ceramic substrate production process
It sets.
A kind of ceramic substrate thickness detection apparatus, including equipment platform 1 further include for carrying ceramic substrate to be detected
Load carrier, the testing agency for executing ceramic substrate Thickness sensitivity to be detected and for realizing ceramic substrate to be detected
The carrying mechanism of grasp handling, the load carrier, testing agency and carrying mechanism are fixedly installed on the equipment platform
On, the load carrier includes feeding station platform 2, detection station platform 3 and discharge station platform, and the detection station platform 3 can live
It is set to dynamicly on the equipment platform 1, the carrying mechanism matches with the detection station platform 3, it is to be detected to complete jointly
Carrying of the ceramic substrate between the feeding station platform 2 and the discharge station platform.
Sliding seat 6 is fixedly installed on the equipment platform 1, the detection station platform 3 is fixedly installed on the sliding seat 6
On, the detection station platform 3 is movably disposed in by the sliding seat 6 on the equipment platform 1.
The feeding station platform 2 and discharge station platform are fixedly installed on the equipment platform 1, the discharge station platform
Including certified products station platform 4 and defect ware station platform 5, the company between the certified products station platform 4 and the defect ware station platform 5
Line direction and the activity direction of the sliding seat 6 are perpendicular.
The bottom of the feeding station platform 2 and the discharge station platform is both provided with lifting component, the lifting component
Including lifting cylinder and supporting plate 7, the lifting cylinder is fixedly installed on 1 lower section of the equipment platform, the supporting plate 7 and
The cylinder axis of the lifting cylinder is fixedly connected, the size of the size of the supporting plate 7 and ceramic substrate to be detected
Matching corresponds to.
The carrying mechanism includes that fixing bracket 8, first carries component and the second carrying component, the first carrying group
Part and the second carrying component are movably disposed in by the fixing bracket 8 on the equipment platform 1, and described the
The distance between one carrying component and the second carrying component and the active strokes of the sliding seat 6 match.
Described first carries component captures cylinder 11, institute including the first connecting plate 9, the first movable base 10 and first
It states the first connecting plate 9 to be fixedly installed on the fixing bracket 8, first movable base 10 is movably disposed in described
On one connecting plate 9, the first crawl cylinder 11 is fixedly connected with first movable base 10, the first crawl cylinder 11
Cylinder axis top be fixedly installed the first crawl sucker 12, the feeding station platform 2 is located at described first and captures cylinder 11
On active path.
Described second carries component captures cylinder 15, institute including the second connecting plate 13, the second movable base 14 and second
It states the second connecting plate 13 to be fixedly installed on the fixing bracket 8, second movable base 14 is movably disposed in described
On second connecting plate 13, the second crawl cylinder 15 is fixedly connected with second movable base 14, the second crawl gas
The cylinder axis top of cylinder 15 is fixedly installed the second crawl sucker 16, and the discharge station platform is located at described second and captures cylinder 15
Active path on.
The setting direction of first connecting plate 9 is parallel with the setting direction of second connecting plate 13, and described first
The setting direction of the setting direction of connecting plate 9 and second connecting plate 13 is perpendicular with the activity direction of the sliding seat 6.
The testing agency includes laser detection pen 17 and numeric display 18, the laser detection pen 17 and the numerical value
Display 18 is electrically connected, and the laser detection pen 17 is fixedly installed on the side of the first crawl cylinder 11, the numerical value
Display 18 is fixedly installed on the fixing bracket 8.
The ceramic substrate thickness detection apparatus further includes being fixedly installed on the equipment platform 1, for controlling each portion
The controller of part running, the load carrier, testing agency and the carrying mechanism are electrically connected simultaneously with the controller
It is controlled by it driving.
The course of work of the present invention described briefly below, first, ceramic substrate to be detected is positioned over feeding station platform 2 by operator
On, subsequent first carrying component starts operation, and the first crawl sucker 12 takes out a piece of pottery to be detected from the feeding station platform 2
Ceramic chip, and be placed on detection station platform 3, after placement, laser detection pen 17 detects ceramic substrate to be detected
Thickness, and result is fed back into controller and numeric display 18, then described first carry component reset, the detection station
Platform 3 slides, and after sliding in place, the second carrying component starts operation, and the ceramic substrate on the detection station platform 3 is removed, if
Ceramic substrate thickness is qualified, then the ceramic substrate is positioned on certified products station platform 4, if ceramic substrate unqualified thickness lattice,
The ceramic substrate is positioned on defect ware station platform 5, then, device integral reset.
The present invention completes the Thickness sensitivity to ceramic substrate by way of automation, avoids previous manual operation mistake
Detection error that may be present in journey, ensure that the accuracy of detection, it is ensured that the consistency of ceramic substrate specification.Meanwhile this
Invention has broken away from existing detection device for artificial excessive dependence, has saved the human resources of processing enterprise, has reduced processing
The testing cost of enterprise.In addition, invention also avoids ceramic substrates colliding in detection process, ensure that ceramic substrate not
It can crack in the process and the case where fragment, improve the yields of ceramic substrate, avoid unnecessary product damage
Consumption.Each component employed in the present invention is more mature technology, operator can according to it is actual using needs, pass through
Technical scheme of the present invention is obtained to the repacking of the prior art, equipment manufacturing costs are relatively low, have a extensive future.
In conclusion high degree of automation of the present invention, detection result are good and are conducive to be promoted the whole matter of ceramic substrate
It measures, specifically very high use and promotional value.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case of without departing substantially from spirit and essential characteristics of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Profit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent requirements of the claims
Variation is included within the present invention, and any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (10)
1. a kind of ceramic substrate thickness detection apparatus, including equipment platform（1）, it is characterised in that：Further include to be checked for carrying
Survey the load carrier of ceramic substrate, the testing agency for executing ceramic substrate Thickness sensitivity to be detected and for realizing waiting for
The carrying mechanism of ceramic substrate grasp handling is detected, the load carrier, testing agency and carrying mechanism are fixedly installed on
On the equipment platform, the load carrier includes feeding station platform（2）, detection station platform（3）And discharge station platform, it is described
Detection station platform（3）It is movably disposed in the equipment platform（1）On, the carrying mechanism and the detection station platform（3）
It matches, complete ceramic substrate to be detected jointly in the feeding station platform（2）With the carrying between the discharge station platform.
2. ceramic substrate thickness detection apparatus according to claim 1, it is characterised in that：The equipment platform（1）It is upper solid
Surely it is provided with sliding seat（6）, the detection station platform（3）It is fixedly installed on the sliding seat（6）On, the detection station platform
（3）By the sliding seat（6）It is movably disposed in the equipment platform（1）On.
3. ceramic substrate thickness detection apparatus according to claim 2, it is characterised in that：The feeding station platform（2）And
Discharge station platform is fixedly installed on the equipment platform（1）On, the discharge station platform includes certified products station platform（4）And it is residual
Substandard products station platform（5）, the certified products station platform（4）With the defect ware station platform（5）Between line direction and the cunning
Dynamic seat（6）Activity direction it is perpendicular.
4. ceramic substrate thickness detection apparatus according to claim 1, it is characterised in that：The feeding station platform（2）With
And the bottom of the discharge station platform is both provided with lifting component, the lifting component includes lifting cylinder and supporting plate（7）,
The lifting cylinder is fixedly installed on the equipment platform（1）Lower section, the supporting plate（7）With the cylinder axis of the lifting cylinder
It is fixedly connected, the supporting plate（7）Size it is corresponding with the matching of the size of ceramic substrate to be detected.
5. ceramic substrate thickness detection apparatus according to claim 2, it is characterised in that：The carrying mechanism includes fixing
Holder（8）, first carry component and second carry component, it is described first carrying component and it is described second carrying component borrow
Help the fixing bracket（8）It is movably disposed in the equipment platform（1）On, described first carries component and described second
Carry the distance between component and the sliding seat（6）Active strokes match.
6. ceramic substrate thickness detection apparatus according to claim 5, it is characterised in that：Described first, which carries component, includes
First connecting plate（9）, the first movable base（10）And first crawl cylinder（11）, first connecting plate（9）Fixed setting
In the fixing bracket（8）On, first movable base（10）It is movably disposed in first connecting plate（9）On, institute
State the first crawl cylinder（11）With first movable base（10）It is fixedly connected, the first crawl cylinder（11）Cylinder axis
Top is fixedly installed the first crawl sucker（12）, the feeding station platform（2）Positioned at the first crawl cylinder（11）Work
On dynamic path.
7. ceramic substrate thickness detection apparatus according to claim 6, it is characterised in that：Described second, which carries component, includes
Second connecting plate（13）, the second movable base（14）And second crawl cylinder（15）, second connecting plate（13）Fixation is set
It is placed in the fixing bracket（8）On, second movable base（14）It is movably disposed in second connecting plate（13）On,
The second crawl cylinder（15）With second movable base（14）It is fixedly connected, the second crawl cylinder（15）Cylinder
Axis top is fixedly installed the second crawl sucker（16）, the discharge station platform is positioned at the second crawl cylinder（15）Activity
On path.
8. ceramic substrate thickness detection apparatus according to claim 7, it is characterised in that：First connecting plate（9）'s
Setting direction and second connecting plate（13）Setting direction it is parallel, first connecting plate（9）Setting direction and institute
State the second connecting plate（13）Setting direction with the sliding seat（6）Activity direction it is perpendicular.
9. ceramic substrate thickness detection apparatus according to claim 6, it is characterised in that：The testing agency includes laser
Detect pen（17）With numeric display（18）, the laser detection pen（17）With the numeric display（18）It is electrically connected, institute
State laser detection pen（17）It is fixedly installed on the first crawl cylinder（11）Side, the numeric display（18）Fixation is set
It is placed in the fixing bracket（8）On.
10. ceramic substrate thickness detection apparatus according to claim 1, it is characterised in that：Further include being fixedly installed on institute
State equipment platform（1）The upper, controller for controlling each part runs, the load carrier, testing agency and the carrying
Mechanism is electrically connected with the controller and is controlled by it driving.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810335850.5A CN108426532A (en) | 2018-04-16 | 2018-04-16 | Ceramic substrate thickness detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810335850.5A CN108426532A (en) | 2018-04-16 | 2018-04-16 | Ceramic substrate thickness detection apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN108426532A true CN108426532A (en) | 2018-08-21 |
Family
ID=63161102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810335850.5A Pending CN108426532A (en) | 2018-04-16 | 2018-04-16 | Ceramic substrate thickness detection apparatus |
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| Country | Link |
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| CN (1) | CN108426532A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109513622A (en) * | 2018-12-27 | 2019-03-26 | 苏州精濑光电有限公司 | A kind of detection device of substrate |
| CN110233127A (en) * | 2019-04-30 | 2019-09-13 | 上海隐冠半导体技术有限公司 | Plates connection device and method and the silicon wafer membrane thickness measuring system for using the device |
| CN111504249A (en) * | 2020-05-19 | 2020-08-07 | 盐城工业职业技术学院 | Ceramic substrate flatness detector |
| CN111578889A (en) * | 2020-05-19 | 2020-08-25 | 盐城工业职业技术学院 | Method for detecting parallelism of circular or square ceramic substrate |
| CN110233127B (en) * | 2019-04-30 | 2024-05-24 | 上海隐冠半导体技术有限公司 | Slice body handover device and method and silicon slice film thickness measurement system adopting same |
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| JPH0749216A (en) * | 1993-08-03 | 1995-02-21 | Kubota Corp | Collar thickness measuring method for cylinder liner |
| CN202230033U (en) * | 2011-10-08 | 2012-05-23 | 苏州赛琅泰克高技术陶瓷有限公司 | Detecting system for laser holes of ceramic substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109513622A (en) * | 2018-12-27 | 2019-03-26 | 苏州精濑光电有限公司 | A kind of detection device of substrate |
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| CN110233127A (en) * | 2019-04-30 | 2019-09-13 | 上海隐冠半导体技术有限公司 | Plates connection device and method and the silicon wafer membrane thickness measuring system for using the device |
| CN110233127B (en) * | 2019-04-30 | 2024-05-24 | 上海隐冠半导体技术有限公司 | Slice body handover device and method and silicon slice film thickness measurement system adopting same |
| CN111504249A (en) * | 2020-05-19 | 2020-08-07 | 盐城工业职业技术学院 | Ceramic substrate flatness detector |
| CN111578889A (en) * | 2020-05-19 | 2020-08-25 | 盐城工业职业技术学院 | Method for detecting parallelism of circular or square ceramic substrate |
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Application publication date: 20180821 |
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