CN102540331A - Surface plasma polarization optical waveguide - Google Patents

Surface plasma polarization optical waveguide Download PDF

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CN102540331A
CN102540331A CN2012100427949A CN201210042794A CN102540331A CN 102540331 A CN102540331 A CN 102540331A CN 2012100427949 A CN2012100427949 A CN 2012100427949A CN 201210042794 A CN201210042794 A CN 201210042794A CN 102540331 A CN102540331 A CN 102540331A
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groove
optical waveguide
surface plasmon
width
doubly
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CN102540331B (en
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郑铮
卞宇生
赵欣
苏亚林
刘磊
刘建胜
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Beihang University
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Beihang University
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Abstract

The invention discloses a surface plasma polarization optical waveguide structure, wherein the cross section of the waveguide structure comprises a dielectric basal layer (1) provided with an inverted trapezia or rectangle groove, a thin metal layer (2) arranged on the dielectric basal layer and covering (3). Under appropriate structural parameters, the waveguide can support two modes, namely groove surface plasma polarization and wedge-shaped surface plasma polarization, and lower transmission loss can be maintained.

Description

A kind of surface plasmon optical waveguide
Technical field
The present invention relates to the optical waveguide technique field, be specifically related to a kind of surface plasmon optical waveguide.
Background technology
Surface plasmons is the non-electromagnetic radiation pattern that metal surface free electron and incident photon intercouple and form, and it is a kind of mixed activation attitude of local in metal and dielectric surface propagation.This pattern is present near metal and the medium interface, and its field intensity is reaching maximum at the interface, and all is exponential decay along the direction perpendicular to the interface in the both sides, interface.Surface plasmons has stronger field limited characteristic, can field energy be constrained in the zone of bulk much smaller than its free space transmission wavelength, and its character can change with the metal surface structural change.Surface plasmon wave is led the restriction that can break through diffraction limit, light field is constrained in tens nanometers even the littler scope, and produce a significant enhancement effect.At present surface plasmon optical waveguide just with its unique mould field limitation capability and can transmit the photoelectricity signal simultaneously, special advantages such as adjustable demonstrates great potential in the nanophotonics field, and at aspects such as the super-resolution imaging of nano-photon chip, modulator, coupling mechanism and switch, nano laser, breakthrough diffraction limit and biology sensors important application prospects is arranged.
The conventional surface plasmon optical waveguide structure mainly contains two types, medium/metal/metal mold and medium/medium/metal type waveguide.Wherein, medium/medium/metal type transmission loss of optical waveguide is lower, but relatively poor mould field limitation capability has restricted its application in the high integration light path; On the other hand, medium/metal/metal mold optical waveguide has very strong mould field limitation capability, but its loss is too big, causes it can't realize long transmission apart from light signal.
The present invention has then proposed a kind of novel medium/medium/metal type surface plasmon optical waveguide.Compare with traditional sucrose/medium/metal type waveguide; The medium substrate of this waveguide is not the big planar structure of semiinfinite; But have a groove that falls trapezoidal or rectangle; Its two kinds of surface plasmon mode formulas supporting have not only kept lower loss, and have littler mode field area.
Summary of the invention
The invention provides a kind of surface plasmon optical waveguide, its xsect comprise with groove the medium substrate layer, be positioned at thin metal layer and covering on the medium substrate layer; The cross sectional shape of groove is any in trapezoidal, the rectangle; The lower surface width of groove be the light signal that transmitted wavelength 0.06-0.8 doubly; And be not more than the width of the upper surface of groove; The width of the upper surface of groove be the light signal that transmitted wavelength 0.06-0.8 doubly, the depth range of groove be the light signal that transmitted wavelength 0.6-5 doubly; The thickness range of thin metal layer be the light signal that transmitted wavelength 0.006-0.06 doubly; The material of medium substrate layer and covering is same material or different materials.
The compound substance that the material of thin metal layer constitutes for any or alloy separately in the gold, silver, aluminium, copper, titanium, nickel, chromium that can produce surface plasmons or above-mentioned metal in the said optical waveguide structure.
Surface plasmon optical waveguide of the present invention has the following advantages:
The surface plasmon optical waveguide that the present invention designed can be supported flute surfaces plasma and two kinds of patterns of wedge-shaped surface plasmon simultaneously, and two kinds of patterns all have lower loss.
Institute's surface plasmon optical waveguide structure of carrying is simple, is complementary with existing processing technology.
Description of drawings
Fig. 1 is the structural representation of surface plasmon optical waveguide.Zone 1 is the medium substrate layer of with groove, and the upper and lower face width of groove is respectively w tAnd w b, the degree of depth of groove is h; Zone 2 is a thin metal layer, and its thickness is d; Zone 3 is a covering.
Fig. 2 is the structural drawing of the said surface plasmon optical waveguide of instance.The 201 upper and lower face widths for the medium substrate layer groove of with groove are respectively w tAnd w b, the degree of depth of groove is h, n sBe its refractive index; 202 is thin metal layer, n mBe its refractive index, d is its thickness; 203 is covering, n cBe its refractive index.
Fig. 3 is the distribution plan of the light field of the wavelength of transmitting optical signal flute surfaces plasmon that the said surface plasmon optical waveguide of instance is supported when being 1.55 μ m and wedge-shaped surface plasmon pattern.Fig. 3 (a) respective grooves surface plasmon mode formula, the corresponding wedge-shaped surface plasmon of Fig. 3 (b) pattern.
Fig. 4 be the wavelength of transmitting optical signal when being 1.55 μ m in the said surface plasmon optical waveguide of instance the effective mode field area of effective refractive index, transmission range and normalization of the flute surfaces plasmon pattern of transmission with width w bChange curve.
Fig. 5 be the wavelength of transmitting optical signal when being 1.55 μ m in the said surface plasmon optical waveguide of instance the effective mode field area of effective refractive index, transmission range and normalization of the wedge-shaped surface plasmon pattern of transmission with width w bChange curve.
Embodiment
The mode characteristic of surface plasma-wave is the important indicator that characterizes surface plasmon optical waveguide.Wherein the mode characteristic parameter mainly includes and imitates refractive index real part, transmission range and the effective mode field area of normalization.
Transmission range L is defined as the distance when electric field intensity decays to initial value l/e on arbitrary interface, and its expression formula is:
L＝λ/[4π/Im(n eff)] (1)
Im (n wherein Eff) be the imaginary part of pattern effective refractive index, λ is the wavelength of transmitting optical signal.
Effectively the calculation expression of mode field area is following:
A eff＝(∫∫|E(x，y)| 2dxdy) 2/∫∫|E(x，y)| 4dxdy (2)
Wherein, A EffBe effective mode field area, (x y) is the electric field of surface plasma-wave to E.The effective mode field area that the effective mode field area of normalization calculates for (2) formula and the ratio of the little hole area of diffraction limit.The area of diffraction limit aperture defines as follows:
A 0＝λ 2/4 (3)
Wherein, A 0Be the little hole area of diffraction limit, λ is the wavelength of transmitting optical signal.Therefore, the effective mode field area A of normalization is:
A＝A eff/A 0 (4)
The size of the effective mode field area of normalization characterizes the mould field limitation capability of pattern.
Instance
Fig. 2 is the structural drawing of the said surface plasmon optical waveguide of instance.201 is the medium substrate layer of with groove, n sBe its refractive index, the upper and lower face width of groove is respectively w tAnd w b, the degree of depth of groove is h; 202 is thin metal layer, n mBe its refractive index, d is its thickness; 203 is covering, n cBe its refractive index.
In this example, the wavelength of the light signal of transmission is chosen to be 1.55 μ m, and 201 and 203 material is a silicon dioxide, and its refractive index is 1.5; 202 material is a silver, and the refractive index at 1.55 mum wavelength places is 0.1453+i*11.3587.
In this example, the width w of 201 upper surfaces t=1000nm, the width w of upper surface tSpan be 200-1000nm; The degree of depth h=3000nm of groove; Thickness d=50nm of 202.
Use full vector Finite Element Method that the above-mentioned waveguiding structure in the present embodiment is carried out emulation, calculate the mould field distribution and the mode characteristic of 1.55 mum wavelength place surface plasmon mode formulas.
Fig. 3 is the distribution plan of the light field of the wavelength of transmitting optical signal flute surfaces plasmon that the said surface plasmon optical waveguide of instance is supported when being 1.55 μ m and wedge-shaped surface plasmon pattern.Fig. 3 (a) respective grooves surface plasmon mode formula, the corresponding wedge-shaped surface plasmon of Fig. 3 (b) pattern.Flute surfaces plasmon pattern mainly is distributed in " U " font groove; And there is stronger field enhancement effect at the place on groove upper surface two summits; Wedge-shaped surface plasmon pattern mainly is distributed in the lower surface of " U " font groove, and at the place, lower surface summit of groove stronger field enhancement effect is arranged.
Fig. 4 (a)-(c) be the wavelength of transmitting optical signal when being 1.55 μ m in the said surface plasmon optical waveguide of instance the effective mode field area of effective refractive index, transmission range and normalization of the flute surfaces plasmon pattern of transmission with width w bChange curve.Visible by figure, the effective refractive index of the surface plasmon mode formula of said surface plasmon optical waveguide is with width w bIncrease and reduce, the effective mode field area of transmission range and normalization is then with width w bIncrease increase afterwards earlier and reduce.In gamut, transmission range explains that the loss of flute surfaces plasmon pattern is less between 120-150 μ m, and its mode field area is littler than traditional medium/medium/metal simultaneously.
Fig. 5 (a)-(c) be the wavelength of transmitting optical signal when being 1.55 μ m in the said surface plasmon optical waveguide of instance the effective mode field area of effective refractive index, transmission range and normalization of the wedge-shaped surface plasmon pattern of transmission with width w bChange curve.Visible by figure, the effective refractive index of the surface plasmon mode formula of said surface plasmon optical waveguide is with width w bIncrease and reduce, the effective mode field area of transmission range and normalization is then with width w bIncrease and increase.In gamut, transmission range explains that wedge-shaped surface plasmon pattern has less loss between 140-160 μ m, and effectively mode field area is littler than traditional medium/medium/metal simultaneously.
What should explain at last is, more than embodiment in each accompanying drawing only in order to surface plasmon optical waveguide structure of the present invention to be described, but unrestricted.Although the present invention is specified with reference to embodiment; Those of ordinary skill in the art is to be understood that; Technical scheme of the present invention is made amendment or is equal to replacement, do not break away from the spirit and the scope of technical scheme of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.

Claims (2)

1. surface plasmon optical waveguide, its xsect comprise with groove the medium substrate layer, be positioned at thin metal layer and covering on the medium substrate layer; The cross sectional shape of groove is any in trapezoidal, the rectangle; The lower surface width of groove be the light signal that transmitted wavelength 0.06-0.8 doubly; And be not more than the width of the upper surface of groove; The width of the upper surface of groove be the light signal that transmitted wavelength 0.06-0.8 doubly, the depth range of groove be the light signal that transmitted wavelength 0.6-5 doubly; The thickness range of thin metal layer be the light signal that transmitted wavelength 0.006-0.06 doubly; The material of medium substrate layer and covering is same material or different materials.
2. optical waveguide structure according to claim 1; It is characterized in that the compound substance that the material of thin metal layer constitutes for any or alloy separately in the gold, silver, aluminium, copper, titanium, nickel, chromium that can produce surface plasmons or above-mentioned metal in the said structure.
CN201210042794.9A 2012-02-22 2012-02-22 Surface plasma polarization optical waveguide Expired - Fee Related CN102540331B (en)

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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN103116226A (en) * 2013-01-23 2013-05-22 北京大学 Submicron surface plasmon polariton beam splitter based on composite cavity structure
CN103246016A (en) * 2013-05-03 2013-08-14 中国科学院物理研究所 Method for reducing loss generated by leakage in process of transmitting surface plasmons
CN104730625A (en) * 2015-04-03 2015-06-24 北京大学 SPPs mode converter and conversion method based on asymmetric nanoscale groove structure
WO2017140137A1 (en) * 2016-02-15 2017-08-24 深圳大学 Optical switch on the basis of mim high-sensitivity spp temperature
CN108051889A (en) * 2017-12-15 2018-05-18 东南大学 A kind of slot type waveguide TE mould analyzers for mixing plasma effect auxiliary
CN112033931A (en) * 2020-09-07 2020-12-04 科竟达生物科技有限公司 Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system
CN113701666A (en) * 2021-08-30 2021-11-26 桂林电子科技大学 Super-resolution microscopic imaging system based on photonic chip

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US20110158575A1 (en) * 2009-12-30 2011-06-30 Cornell University Extraordinary light transmission apparatus and method
CN102169205A (en) * 2010-07-28 2011-08-31 北京航空航天大学 Low-loss medium loaded surface plasmon excimer optical waveguide

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103116226A (en) * 2013-01-23 2013-05-22 北京大学 Submicron surface plasmon polariton beam splitter based on composite cavity structure
CN103116226B (en) * 2013-01-23 2015-05-20 北京大学 Submicron surface plasmon polariton beam splitter based on composite cavity structure
CN103246016A (en) * 2013-05-03 2013-08-14 中国科学院物理研究所 Method for reducing loss generated by leakage in process of transmitting surface plasmons
CN104730625A (en) * 2015-04-03 2015-06-24 北京大学 SPPs mode converter and conversion method based on asymmetric nanoscale groove structure
CN104730625B (en) * 2015-04-03 2017-09-29 北京大学 SPPs mode converters and its conversion method based on asymmetric nanometer channel structure
WO2017140137A1 (en) * 2016-02-15 2017-08-24 深圳大学 Optical switch on the basis of mim high-sensitivity spp temperature
CN108051889A (en) * 2017-12-15 2018-05-18 东南大学 A kind of slot type waveguide TE mould analyzers for mixing plasma effect auxiliary
CN108051889B (en) * 2017-12-15 2019-09-03 东南大学 A kind of slot type waveguide TE mould analyzer of mixing plasma effect auxiliary
CN112033931A (en) * 2020-09-07 2020-12-04 科竟达生物科技有限公司 Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system
CN112033931B (en) * 2020-09-07 2024-04-12 科竟达生物科技有限公司 Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system
CN113701666A (en) * 2021-08-30 2021-11-26 桂林电子科技大学 Super-resolution microscopic imaging system based on photonic chip

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