CN102506925B - Two-dimensional travelling dynamic balance mechanism of precision machinery instrument - Google Patents
Two-dimensional travelling dynamic balance mechanism of precision machinery instrument Download PDFInfo
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- CN102506925B CN102506925B CN201110445996.3A CN201110445996A CN102506925B CN 102506925 B CN102506925 B CN 102506925B CN 201110445996 A CN201110445996 A CN 201110445996A CN 102506925 B CN102506925 B CN 102506925B
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Abstract
The invention discloses a two-dimensional travelling dynamic balance mechanism of a precision machinery instrument, which is characterized in that: guide rail parts in X direction, Y direction and Z direction of a three-dimensional motion working table are respectively arranged to freely move in x direction, y direction and z direction along respective rolling bearing parts, a horizontal tension rod is respectively arranged at one of symmetrical sides at the lower end of a Z-axis part of the three-dimensional motion working table, a dynamometer sensor is arranged at the end of the horizontal tension rod, one end of a sling is hung on the dynamometer sensor, the other end of the sling, bypassing a fixed pulley, is connected with a heavy hammer, the fixed pulley is hung in the center of a travelling plate by a hanging rod, the travelling plate is supported on an X-Y two-dimension rolling bearing group, therefore, the fixed pulley can move freely along the three-dimensional motion working table in an X-Y two-dimension surface. The two-dimensional travelling dynamic balance mechanism of the precision machinery instrument can ensure that a Z working table part of a measuring machine can move flexibly in the z direction and can realize the dynamic balance of the working table on each position in a movement range in the x direction and the y direction.
Description
Technical field
The present invention relates to precision machinery instrument system force balancing technique field, more specifically say a kind of dynamic balance mechanism that is applicable to three-dimensional motion worktable vertical direction.
Background technology
In the measurement component composition system of precision machinery instrument, in order to guarantee overall precision, need to obtain effective measures from structure composition and member precision two aspects, wherein structure composition is compared with importance.Each factor by analyzing influence mechanical system overall precision is known, and the dynamic force under the acting force of member, particularly motion state can impact mechanical overall precision.It makes the building block of surveying instrument system produce micrometric displacement and micro-distortion, or the dynamic balance state of whole system is damaged, and precision measurement is produced to very important measuring error, and this will be one of major influence factors for nanometer measurement instrument.
At present, in the mechanism of various precision measurement machineries forms, because the motion state of total system is different, so the force balance mechanism adopting is also different.In precision mechanical system acting force mainly contain two aspect purposes: on the one hand, for contact type measurement gauge head, need to be subject to certain dynamometry, so that gauge head contact condition is good, but can cause juxtaposition metamorphose, therefore to suitably control dynamometry P, make surface of contact stress deformation error delta s at certain limit (shown in Fig. 1); For non-contact measurement, there is no the impact of contact deformation error on the other hand, but driving force size and the mode of worktable also be there are certain requirements.Driving force size is suitable, and type of drive will need have dynamic balance feature to whole working table movement.Therefore acting force and the dynamic balance mechanism of precision machinery instrument system need comprehensive consideration in its overal system design, so that corresponding mechanism design is reasonable.
Common three coordinate measuring machine, precision length measurement instrument and various dial gauges etc., all there are the acting force and the balanced controls that are applicable to himself structural system, such as weight, spring and aerodynamic force etc., but they all have its specific applicability, and be only applicable to motion in one dimension system more.The force balancing system of common horizontal metroscope and three coordinate measuring machine of take is below example explanation.
Be illustrated in figure 2 the dynamic balance mechanism of vertical comparator, measured piece 2 is placed on instrument base 1, measures slide bar 3 G that conducted oneself with dignity
1make gauge head and measured piece Surface Contact.In order to make contact force suitable, by the gravity G of the weight 7 that can move up and down in leghole 8
2by pulley 5, make both force balance, and the contact force P that controls measured piece surface by additional adjustment block 6 within the specific limits.Because the Support Position of guide rail 4 immobilizes, so this structure applicable motion in one dimension system only.This simple dynamic balance mechanism reliable effect, application is general, but this structure can not be applicable to two and three dimensions surveying instrument.
The gravity of conventional general its Z axis of balance of three coordinate measuring machine dynamic balance mechanism, the compound force balance that balance mode has Weight type, spring, vapour-pressure type and has compensate function.Similar shown in the balanced structure of Weight type and Fig. 2, shown in Fig. 3 a and Fig. 3 b, be spring dynamic balance mechanism, the deadweight of Z axis 1 is by the pulling force institute balance of spring 2, the volume of this dynamic balance mechanism is little, applicability is good, but because spring force can not be completely constant, has limited the effective travel of Z axis.For stroke extension, can increase the compensating unit that counterbalance spring power changes.These spring dynamic balance mechanisms, the position of its acting force strong point immobilizes on Z axis, so the Z axis that is also only applicable to motion in one dimension is from gravitational equilibrium.
For two dimension or three-dimensional precision stage, the acting force of himself need to be eliminated as much as possible.Figure 4 shows that high precision Nano Coordinate Measuring Machine, owing to having adopted " 331 " topology layout of " near Zero-Abbe error ", the slotted line that is Z axis laser instrument 6, X-axis laser instrument 5 and Y-axis laser instrument 7 intersects at a point, three, the measurement face that the slotted line of the guide rail spigot surface of X, Y slide unit 3 and X-axis laser instrument 5 and Y-axis laser instrument 7 forms is coplanar, and intersection point overlaps with the face that overlaps, correspondence arranges X-axis measurement 4, Y-axis measures target mirror 8 and Z axis is measured target mirror 9.During measurement, gauge head 1 keeps motionless, and worktable 2 is done three-dimensional motion, makes measured workpiece contact triggering with gauge head and adopts a little.Measuring process meets " 331 principle ", and any point all meets " Zero-Abbe error ".
Shown in Fig. 4, worktable 2, when three-dimensional motion, need to overcome the impact of worktable 2 self gravitations during Z-direction motion, and worktable must move under the state of less driving force, so Z axis parts need dynamic balance mechanism.In addition, also will avoid because worktable 2 is when the motion of X, Y-direction, the equilibrant size of Z axis and force direction change and the measuring machine that the causes phenomenon of unbalance stress everywhere.Because the measuring accuracy of Nano Coordinate Measuring Machine is high, to form parts and kinematic accuracy thereof require also very high, so Dui QiZZhou dynamic balance mechanism to have proposed basic demand as follows:
1, equilibrant need with Z axis worktable part weight approximately equal, less to guarantee Z axis driving force;
2, the Z-direction equilibrium activity power of dynamic balance mechanism must be passed through the center of gravity of Z axis worktable part gravity, to guarantee the dirigibility of Z axis two symmetrical guide rail movements, does not have the torsional moment around Z-direction;
3, the two dimensional motion Shi， dynamic balance mechanism that Z axis worktable part is done horizontal direction need have the move about strong point of function ，Ji equilibrant mechanism of two dimension also must do two dimensional motion, can not exist because equilibrant action direction changes and cause the effect component in surface level.
But, for above-mentioned requirements, also do not have so far dependency structure to be achieved.
Summary of the invention
The present invention is the weak point for fear of existing force balancing system, and a kind of two-dimensional travelling dynamic balance mechanism of precision machinery instrument is provided, and to overcoming, causes the problem that system self-acting power cannot balance because of worktable three-dimensional motion.
The present invention is that technical solution problem adopts following technical scheme:
The feature of two-dimensional travelling dynamic balance mechanism of precision machinery instrument of the present invention is:
Three-dimensional motion worktable is set, the X-direction of described three-dimensional motion worktable, Y-direction and Z-direction track segment respectively can along roller bearing component separately x to, y to z to free movement in direction;
Lower end at three-dimensional motion worktable Z axis parts, be positioned at symmetrical both sides girt is set respectively, rod end at described girt arranges force cell, the lifting of hoist cable one end is on described force cell, the other end is walked around fixed pulley and is connected with the weight for Z axis parts gravity described in balance, with described force cell, measure in real time the size of described girt end pulling force, and by the weight of increase and decrease counterweight adjustment weight, make to be positioned at the pulling force size that two force cells of Z axis parts both sides measure and be 1/2 of Z axis component weight, the described fixed pulley of usining is as the Z axis parts dynamic balance strong point,
Described fixed pulley is suspended in a hanging stick the dull and stereotyped central authorities of moving about, described in move about flat support in X, Y two-dimensional scrolling bearing pack, make the described fixed pulley can be with the free movement of three-dimensional motion worktable in X, Y two dimensional surface, form X, the Y two dimension platform that moves about.
The design feature of two-dimensional travelling dynamic balance mechanism of precision machinery instrument of the present invention is also: the move about structure of platform of described X, Y two dimension is set to: the back up pad that is positioned at described X, Y two-dimensional scrolling bearing pack below is level and is fixedly installed on instrument base, described back up pad is that central authorities have square through hole and " return " character form structure, described hanging stick runs through the square through hole of described " returning " character form structure, and the dull and stereotyped scope of moving about in X-axis and Y direction of moving about is square through hole region.
Compared with prior art, beneficial effect of the present invention is embodied in:
The present invention utilizes the move about weight of worktable balancing a survey machine Z axis of two dimension, avoided completely because of the worktable problem that planar two dimensional motion causes Z-direction equilibrant supporting point position to change, not only can guarantee that the Z worktable part of measuring machine is in Z-direction flexible motion, the dynamic balance that can also realize worktable position in x, y direction range of movement, is embodied as:
1, when worktable is made X, Y-direction two dimensional motion, the dynamic balance strong point of Z axis also moves to guarantee that Z axis equilibrant direction overlaps with the center of gravity of Z axis all the time and the size of confining force is constant thereupon, the impact of the x producing while not existing due to working table movement, y direction component.
2, the dynamic balance weight of Z axis parts is symmetrically distributed in Z axis both sides, by being fixed on the force cell in place of girt end, measure in real time both sides pulling force size, and by the weight of increase and decrease counterweight adjustment both sides weight, make the pulling force of both sides equate and be equal in weight with Z axis with joint efforts, realized Z axis dynamic balance.
3, three-dimensional motion worktable, by the adjustment of the dull and stereotyped horizontal level that moves about, can guarantee that Z axis guide rail is stressed in vertical direction.And worktable is in surface level during two dimensional motion, can not be subject to because of the move about impact of the additional component that worktable small skew produces of two dimension.
Accompanying drawing explanation
Fig. 1 is gauge head contact force distortion schematic diagram;
Fig. 2 is hammer type force balance schematic diagram in prior art;
Fig. 3 a, Fig. 3 b are prior art medi-spring formula force balance principle figure;
Fig. 4 is Nano Coordinate Measuring Machine structure diagram in prior art;
Fig. 5 a is structural representation of the present invention;
Fig. 5 b is Z-direction weight dynamic balance schematic diagram in the present invention;
Fig. 5 c1 is the two dimension platform plan structure schematic diagram that moves about in the present invention;
Fig. 5 c2 is the two dimension main TV structure schematic diagram of platform that moves about in the present invention.
Embodiment
Referring to Fig. 5 a, Fig. 5 b, Fig. 5 c1 and Fig. 5 c2, in the present embodiment, two-dimensional travelling dynamic balance mechanism of precision machinery instrument is:
Three-dimensional motion worktable is set, the X-direction track segment 3 of worktable, Y-direction track segment 2 and Z-direction track segment respectively can along roller bearing component separately x to, y to z to free movement in direction.
Lower end at the Z axis parts 1 of three-dimensional motion worktable, be positioned at symmetrical both sides girt 5 is set respectively, rod end at girt 5 arranges force cell 9, one end lifting of hoist cable 6 is on force cell 9, the other end is walked around fixed pulley 13 and is connected with weight 8, this structure setting is the gravity that utilizes weight 8 balance Z axis parts 1, concrete grammar is: by force cell 9, measure in real time the size of girt end pulling force, and by the weight of increase and decrease counterweight 7 adjustment weights 8, the measured pulling force size of two force cells 9 that makes to be positioned at the both sides of Z axis parts 1 be three-dimensional motion worktable Z axis parts 1 weight 1/2, using the dynamic balance strong point of fixed pulley 13 as Z axis parts 1.
Fixed pulley 13 is suspended in the central authorities of the flat board 10 that moves about with a hanging stick, the flat board 10 that moves about is supported in X, Y two-dimensional scrolling bearing pack 11, the back up pad 12 of X, Y two-dimensional scrolling bearing pack 11 belows is level and is fixedly installed on instrument base 4, back up pad 12 is that central authorities have square through hole and " return " character form structure, hanging stick runs through the square through hole of " returning " character form structure, the move about scope of flat board 10 in X-axis and Y direction of moving about is square through hole region, make the fixed pulley 13 can be with worktable free movement in X, Y two dimensional surface, form X, the Y two dimension platform that moves about.
Shown in Fig. 5 a, the Z axis parts 1 of three-dimensional motion worktable can be done Z-direction motion on the rolling bearing of Y-direction track segment 2, Y-direction track segment 2 can be y to motion on the bearing of X-direction track segment 3, X-direction track segment 3 can make x to motion on the bearing of instrument base 4, had thus x, y, z to three-dimensional motion function.
In this structure, in order to make Z axis component movement steady flexibly, the weight G of Z axis parts carries out balance with weight 8, and guarantees Z axis parts dynamic balance strong point flexible motion in x, y direction with the two dimension platform that moves about.
Shown in Fig. 5 a, according to three of dynamic balance mechanism basic demands, what dynamic balance mechanism adopted is stack mechanism design, but due to the impact of foozle and Z axis worktable bearing and the pulley spindle friction force of member, is difficult to guarantee making a concerted effort by the center of Z axis parts of left and right two weight pulling force.In order to reduce as much as possible worktable Z-direction driving force F, and guarantee that the gravity G of worktable is close with the acting force 2f (G) of two weights, i.e. G ≈ f (G
1)+f (G
2), to make left and right two counterweight balance power equate, i.e. f (G simultaneously
1)=f (G
2), to realize flexible dynamic balance effect.From improving dynamic balance associated components manufacturing accuracy, be to be merely difficult to the force balance effect that reaches desirable, in the present embodiment, by being set, the two dimension platform that moves about solved well problem, in concrete enforcement, need to make to move about dull and stereotyped 10 in horizontality, to avoid producing additional horizontal component because of the dull and stereotyped inclination of moving about.
Claims (2)
1. two-dimensional travelling dynamic balance mechanism of precision machinery instrument, is characterized in that:
Three-dimensional motion worktable is set, the X-direction of described three-dimensional motion worktable, Y-direction and Z-direction track segment respectively can along roller bearing component separately x to, y to z to free movement in direction;
Lower end at three-dimensional motion worktable Z axis parts (1), be positioned at symmetrical both sides girt is set respectively, rod end at described girt arranges force cell, the lifting of hoist cable one end is on described force cell, the other end is walked around fixed pulley and is connected with the weight for Z axis parts gravity described in balance, with described force cell, measure in real time the size of described girt end pulling force, and by the weight of increase and decrease counterweight adjustment weight, make to be positioned at the pulling force size that two force cells of Z axis parts both sides measure and be 1/2 of Z axis component weight, the described fixed pulley of usining is as the Z axis parts dynamic balance strong point,
Described fixed pulley is suspended in a hanging stick the dull and stereotyped central authorities of moving about, described in move about flat support in X, Y two-dimensional scrolling bearing pack, make the described fixed pulley can be with the free movement of three-dimensional motion worktable in X, Y two dimensional surface, form X, the Y two dimension platform that moves about.
2. two-dimensional travelling dynamic balance mechanism of precision machinery instrument according to claim 1, it is characterized in that the move about structure of platform of described X, Y two dimension is set to: the back up pad that is positioned at described X, Y two-dimensional scrolling bearing pack below is level and is fixedly installed on instrument base, described back up pad is that central authorities have square through hole and " return " character form structure, described hanging stick runs through the square through hole of described " returning " character form structure, and the dull and stereotyped scope of moving about in X-axis and Y direction of moving about is square through hole region.
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| CN201110445996.3A CN102506925B (en) | 2011-12-27 | 2011-12-27 | Two-dimensional travelling dynamic balance mechanism of precision machinery instrument |
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| CN201110445996.3A CN102506925B (en) | 2011-12-27 | 2011-12-27 | Two-dimensional travelling dynamic balance mechanism of precision machinery instrument |
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| CN102506925B true CN102506925B (en) | 2014-01-15 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0553819A1 (en) * | 1992-01-30 | 1993-08-04 | Tokyo Seimitsu Co.,Ltd. | Coordinate measuring machine |
| JP2008209246A (en) * | 2007-02-27 | 2008-09-11 | Ntn Corp | Apparatus and method of measuring ball screw |
| CN101625238A (en) * | 2009-08-06 | 2010-01-13 | 浙江大学 | Automatically adjusting balance method of gage beam of flexible coordinate measuring machine and balance joint |
| CN202041196U (en) * | 2011-05-04 | 2011-11-16 | 九江精密测试技术研究所 | Portable gravitational equilibrium adjusting mechanism of coordinate measuring machine |
| CN202393403U (en) * | 2011-12-27 | 2012-08-22 | 合肥工业大学 | Two-dimensional floating force balance mechanism for precision mechanical instrument |
-
2011
- 2011-12-27 CN CN201110445996.3A patent/CN102506925B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0553819A1 (en) * | 1992-01-30 | 1993-08-04 | Tokyo Seimitsu Co.,Ltd. | Coordinate measuring machine |
| JP2008209246A (en) * | 2007-02-27 | 2008-09-11 | Ntn Corp | Apparatus and method of measuring ball screw |
| CN101625238A (en) * | 2009-08-06 | 2010-01-13 | 浙江大学 | Automatically adjusting balance method of gage beam of flexible coordinate measuring machine and balance joint |
| CN202041196U (en) * | 2011-05-04 | 2011-11-16 | 九江精密测试技术研究所 | Portable gravitational equilibrium adjusting mechanism of coordinate measuring machine |
| CN202393403U (en) * | 2011-12-27 | 2012-08-22 | 合肥工业大学 | Two-dimensional floating force balance mechanism for precision mechanical instrument |
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