CN102506925A - Two-dimensional travelling dynamic balance mechanism of precision machinery instrument - Google Patents
Two-dimensional travelling dynamic balance mechanism of precision machinery instrument Download PDFInfo
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- CN102506925A CN102506925A CN2011104459963A CN201110445996A CN102506925A CN 102506925 A CN102506925 A CN 102506925A CN 2011104459963 A CN2011104459963 A CN 2011104459963A CN 201110445996 A CN201110445996 A CN 201110445996A CN 102506925 A CN102506925 A CN 102506925A
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- 238000005096 rolling process Methods 0.000 claims abstract description 6
- 230000009182 swimming Effects 0.000 claims abstract 5
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Abstract
本发明公开了一种精密机械仪器二维游动力平衡机构，其特征是设置三维运动工作台的X向、Y向和Z向导轨部件分别可沿各自的滚动轴承部件在x向、y向和z向方向上自由运动；在三维运动工作台Z轴部件的下端、位于对称的两侧分别设置水平拉杆，水平拉杆杆端设置测力传感器，吊索一端提吊在测力传感器上，另一端绕过定滑轮与重锤相连，定滑轮以悬杆悬吊在游动平板的中央，游动平板支撑在X、Y二维滚动轴承组上，使定滑轮可在X、Y二维平面内随三维运动工作台自由运动。本发明不仅可以保证测量机的Z工作台部件在z向灵活运动，还可以实现工作台在x、y方向运动范围内各位置处的力平衡。
The invention discloses a two-dimensional swimming power balance mechanism of a precision mechanical instrument, which is characterized in that the X-direction, Y-direction and Z-direction guide rail parts of the three-dimensional motion workbench can be respectively arranged along the respective rolling bearing parts in the x-direction, y-direction and z-direction Free movement in the direction; the lower end of the Z-axis component of the three-dimensional motion workbench and the symmetrical two sides are respectively provided with horizontal tie rods, and a load cell is installed at the end of the horizontal pull rod. One end of the sling is lifted on the load cell. The fixed pulley is connected with the weight, and the fixed pulley is suspended in the center of the movable plate by a suspension rod. The movable plate is supported on the X, Y two-dimensional rolling bearing group, so that the fixed pulley can move along the three-dimensional plane in the X, Y two-dimensional plane. Motion table free movement. The invention can not only ensure the flexible movement of the Z workbench parts of the measuring machine in the z direction, but also realize the force balance at each position of the workbench in the movement range of the x and y directions.
Description
Technical field
The present invention relates to precision optical machinery instrument system dynamic balance technical field, a kind of dynamic balance mechanism that is applicable to three-dimensional motion worktable vertical direction more specifically says so.
Background technology
In the measurement component composition system of precision optical machinery instrument, in order to guarantee overall precision, need obtain effective measures from structure composition and member precision two aspects, wherein the structure composition is than importance.Each factor through analyzing influence mechanical system overall precision can be known, the dynamic force under the acting force of member, the particularly motion state can impact the overall precision of machinery.It makes the building block of surveying instrument system produce micrometric displacement and little distortion, or the dynamic balance state of total system is damaged, and precision measurement is produced very important measuring error, and this will be one of major influence factors for the nanoscale surveying instrument.
At present, in the mechanism of various precision measurement machineries forms, because the motion state of total system is different, so the force balance mechanism that adopts is also different.Purposes aspect acting force mainly contains two in precision mechanical system: on the one hand; Need receive certain dynamometry for the contact type measurement gauge head; So that the gauge head contact condition is good; But can cause juxtaposition metamorphose, therefore will suitably control dynamometry P, make surface of contact stress deformation error delta s in certain limit (shown in Figure 1); For non-contact measurement, do not have the influence of juxtaposition metamorphose error on the other hand, but the driving force size and the mode of worktable also had certain requirement.The driving force size is suitable, and type of drive will need have the dynamic balance characteristics to whole working table movement.Therefore the acting force of precision optical machinery instrument system and dynamic balance mechanism need to consider in its overal system design comprehensively, so that corresponding mechanism design is reasonable.
Common three coordinate measuring machine, precision length measurement appearance and various dial gauges etc.; The acting force and the balanced controls that are applicable to himself structural system are all arranged; For example weight, spring and aerodynamic force etc., but they all have its specific applicability, and also many are applicable to the motion in one dimension system.Dynamic balance system with common horizontal metroscope and three coordinate measuring machine is the example explanation below.
Be illustrated in figure 2 as the dynamic balance mechanism of vertical comparator, measured piece 2 places on the instrument base 1, measures slide bar 3 G that conducted oneself with dignity
1Gauge head is contacted with the measured piece surface.In order to make contact force suitable, by the gravity G of the weight 7 that can move up and down in the leghole 8
2Make both force balance through pulley 5, and the contact force P that controls the measured piece surface by additional adjustment piece 6 within the specific limits.Because the Support Position of guide rail 4 immobilizes, so this structure only is suitable for the motion in one dimension system.This simple dynamic balance mechanism reliable effect is used generally, but this structure can not be applicable to the two and three dimensions surveying instrument.
The gravity of general its Z axle of balance of three coordinate measuring machine dynamic balance mechanism commonly used, the combined type dynamic balance that balance mode has Weight type, spring, vapour-pressure type and has compensate function.The balanced structure of Weight type and shown in Figure 2 similar is spring dynamic balance mechanism shown in Fig. 3 a and Fig. 3 b, the deadweight of Z axle 1 is by the pulling force institute balance of spring 2; The volume of this dynamic balance mechanism is little; Applicability is good, but because spring force can not be constant fully, has limited the effective travel of Z axle.In order to enlarge stroke, can increase the compensating unit that counterbalance spring power changes.These spring dynamic balance mechanisms, the position of its acting force strong point immobilizes on the Z axle, so the Z axle that also is only applicable to motion in one dimension is from gravitational equilibrium.
For two dimension or three-dimensional precision stage, the acting force of himself needs to eliminate as much as possible.Shown in Figure 4 is the high precision Nano Coordinate Measuring Machine; Owing to adopted " 331 " topology layout of " near Zero-Abbe error "; The slotted line that is Z axle laser instrument 6, X axle laser instrument 5 and Y axle laser instrument 7 intersects at a point; Three coplanes of measurement face that the slotted line of the guide rail spigot surface of X, Y slide unit 3 and X axle laser instrument 5 and Y axle laser instrument 7 constitutes, and intersection point overlaps with overlapping face, correspondence are provided with that the X axle measures 4, the Y axle is measured target mirror 8 and Z axle measurement target mirror 9.During measurement, gauge head 1 keeps motionless, and worktable 2 is done three-dimensional motion, makes measured workpiece contact the completion triggering with gauge head and adopts a little.Measuring process meets " 331 principle ", and promptly measuring point all satisfies " Zero-Abbe error " arbitrarily.
Shown in Figure 4, worktable 2 need overcome the influence of worktable 2 self gravitations during the Z-direction motion when three-dimensional motion, and worktable must move under the state of less driving force, so the Z spindle unit needs dynamic balance mechanism.In addition, also to avoid because of worktable 2 at X, Y during to motion, Z shaft balancing power size and force direction change and the measuring machine that the causes phenomenon of unbalance stress everywhere.Because the measuring accuracy of Nano Coordinate Measuring Machine is high, also very high to forming the requirement of parts and kinematic accuracy thereof, it is following therefore its Z axle dynamic balance mechanism have been proposed basic demand:
1, equilibrant needs and Z axle worktable part weight approximately equal, and is less to guarantee Z axle driving force;
2, must to guarantee the dirigibility of Z axle two symmetrical guide rail movements, there be the torsional moment around Z-direction in the Z of dynamic balance mechanism through the center of gravity of Z axle worktable part gravity to equilibrium activity power;
When 3, Z axle worktable part was done the two dimensional motion of horizontal direction, dynamic balance mechanism need have the two dimension function of moving about, and promptly the strong point of equilibrant mechanism also must be done two dimensional motion, can not exist because of the equilibrant action direction changes to cause the effect component in the surface level.
But,, also do not have dependency structure to be achieved so far for above-mentioned requirements.
Summary of the invention
The present invention is the weak point for fear of existing dynamic balance system, and a kind of precision optical machinery instrument two dimension strength of moving balanced controls are provided, and causes the problem that system's self-acting power can't balance in the hope of overcoming because of the worktable three-dimensional motion.
The present invention adopts following technical scheme for the technical solution problem:
The characteristics of precision optical machinery instrument two dimension strength of moving balanced controls of the present invention are:
The three-dimensional motion worktable is set, the X of said three-dimensional motion worktable to, Y to Z to track segment respectively can along separately roller bearing component x to, y to z free movement on direction;
In the lower end of three-dimensional motion worktable Z spindle unit, the both sides that are positioned at symmetry are provided with girt respectively; Rod end at said girt is provided with force cell; Hoist cable one end lifting is on said force cell; The other end is walked around fixed pulley and is linked to each other with the weight that is used for the said Z spindle unit of balance gravity, measures the size of said girt end pulling force in real time with said force cell, and passes through the weight of increase and decrease counterweight adjustment weight; Making the pulling force size of two force cells measurements that are positioned at Z spindle unit both sides be 1/2 of Z spindle unit weight, is as the Z spindle unit dynamic balance strong point with said fixed pulley;
Said fixed pulley is suspended in the dull and stereotyped central authorities of moving about with a hanging stick, and the said flat support of moving about makes the said fixed pulley can be with the free movement of three-dimensional motion worktable in X, Y two dimensional surface on X, Y two-dimensional scrolling bearing pack, constitutes X, the Y two dimension platform that moves about.
The design feature of precision optical machinery instrument of the present invention two dimension strength of moving balanced controls also is: the move about structure of platform of said X, Y two dimension is set to: the back up pad that is positioned at said X, Y two-dimensional scrolling bearing pack below is horizontal fixed and is arranged on the instrument base; Said back up pad is that central authorities have square through hole and " return " the font structure; Said hanging stick runs through the square through hole of said " returning " font structure, and the dull and stereotyped scope of moving about on X axle and Y direction of moving about is the square through hole region.
Compared with prior art, beneficial effect of the present invention is embodied in:
The present invention utilizes the move about weight of worktable balancing a survey machine Z axle of two dimension; Avoided fully because of the worktable two dimensional motion problem that causes Z to change planar to the equilibrant supporting point position; The Z worktable part that not only can guarantee measuring machine at Z to flexible motion; Can also realize the dynamic balance of worktable position in x, y direction range of movement, be embodied as:
1, when worktable is done X, Y to two dimensional motion; The dynamic balance strong point of Z axle also movement therewith to guarantee Z spindle balance force direction and overlap with the center of gravity of Z axle all the time and confining force big or small constant, the x that produces when not existing, the influence of y direction component owing to working table movement.
2, the dynamic balance weight of Z spindle unit is symmetrically distributed in Z axle both sides; Measure both sides pulling force size in real time through the force cell on the throne that is fixed in the girt end; And through increasing and decreasing the weight of counterweight adjustment both sides weight; The pulling force of both sides is equated and be equal in weight with the Z axle with joint efforts, realized Z axle dynamic balance.
3, the three-dimensional motion worktable can guarantee the stressed vertical direction that is in of Z axis rail through the adjustment of the dull and stereotyped horizontal level that moves about.And worktable is in surface level during two dimensional motion, can not receive because of the move about influence of the additional component that the worktable small skew produces of two dimension.
Description of drawings
Fig. 1 is gauge head contact force distortion synoptic diagram;
Fig. 2 is Weight type force balance principle figure in the prior art;
Fig. 3 a, Fig. 3 b are prior art medi-spring formula force balance principle figure;
Fig. 4 is a Nano Coordinate Measuring Machine structure diagram in the prior art;
Fig. 5 a is a structural representation of the present invention;
Fig. 5 b for Z among the present invention to weight dynamic balance synoptic diagram;
Fig. 5 c1 is the platform plan structure synoptic diagram that moves about of two dimension among the present invention;
Fig. 5 c2 is the platform master TV structure synoptic diagram that moves about of two dimension among the present invention.
Embodiment
Referring to Fig. 5 a, Fig. 5 b, Fig. 5 c1 and Fig. 5 c2, precision optical machinery instrument two dimension strength of moving balanced controls are in the present embodiment:
The three-dimensional motion worktable is set, the X of worktable to track segment 3, Y to track segment 2 and Z to track segment respectively can along separately roller bearing component x to, y to z free movement on direction.
In the lower end of the Z of three-dimensional motion worktable spindle unit 1, the both sides that are positioned at symmetry are provided with girt 5 respectively; Rod end at girt 5 is provided with force cell 9; One end lifting of hoist cable 6 is on force cell 9; The other end is walked around fixed pulley 13 and is linked to each other with weight 8; This structure setting is the gravity that utilizes weight 8 balance Z spindle units 1, and concrete grammar is: measure the size of girt end pulling force in real time by force cell 9, and pass through the weight of increase and decrease counterweight 7 adjustment weights 8; Make two force cells, the 9 measured pulling force sizes of the both sides that are positioned at Z spindle unit 1 be the three-dimensional motion worktable Z spindle unit 1 weight 1/2, with the dynamic balance strong point of fixed pulley 13 as Z spindle unit 1.
Fixed pulley 13 is suspended in the central authorities of the flat board 10 that moves about with a hanging stick; The flat board 10 that moves about is supported on X, the Y two-dimensional scrolling bearing pack 11; The back up pad 12 of X, Y two-dimensional scrolling bearing pack 11 belows is horizontal fixed and is arranged on the instrument base 4; Back up pad 12 is that central authorities have square through hole and " return " the font structure, and hanging stick runs through the square through hole of " returning " font structure, and dull and stereotyped 10 the scopes of moving about on X axle and Y direction of moving about are the square through hole region; Make the fixed pulley 13 can be, constitute X, the Y two dimension platform that moves about with the worktable free movement in X, Y two dimensional surface.
Shown in Fig. 5 a; The Z spindle unit 1 of three-dimensional motion worktable can be Z to motion at Y on the rolling bearing of track segment 2; Y can be y to motion to track segment 2 at X on the bearing of track segment 3; X can make x to motion to track segment 3 on the bearing of instrument base 4, had thus x, y, z to the three-dimensional motion function.
In this structure, in order to make Z spindle unit motion flexibly steadily, the weight G of Z spindle unit carries out balance with weight 8, and guarantees Z spindle unit dynamic balance strong point flexible motion on x, y direction with the two dimension platform that moves about.
Shown in Fig. 5 a; According to three basic demands to dynamic balance mechanism; What dynamic balance mechanism adopted is the stack mechanism design, but because the foozle of member and the influence of Z axle worktable bearing and pulley spindle friction force, two weight pulling force makes a concerted effort through the center of Z spindle unit about being difficult to guarantee.In order to reduce worktable Z as much as possible, and guarantee that the acting force 2f (G) of gravity G and two weights of worktable is close, i.e. G ≈ f (G to driving force F
1)+f (G
2), the double hammer equilibrant in the left and right sides is equated, i.e. f (G
1)=f (G
2), to realize flexible dynamic balance effect.Be to be difficult to the force balance effect that reaches desirable merely from improving dynamic balance associated components manufacturing accuracy; Through being set, the two dimension platform that moves about solved problem well in the present embodiment; Need make the flat board 10 that moves about be in horizontality in the practical implementation, to avoid producing additional horizontal component because of the dull and stereotyped inclination of moving about.
Claims (2)
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110445996.3A CN102506925B (en) | 2011-12-27 | 2011-12-27 | Two-dimensional swimming force balance mechanism for precision mechanical instruments |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110445996.3A CN102506925B (en) | 2011-12-27 | 2011-12-27 | Two-dimensional swimming force balance mechanism for precision mechanical instruments |
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| CN102506925A true CN102506925A (en) | 2012-06-20 |
| CN102506925B CN102506925B (en) | 2014-01-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114589597A (en) * | 2022-02-18 | 2022-06-07 | 业成科技（成都）有限公司 | Pressure control device, glue removing device and display device manufacturing system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0553819A1 (en) * | 1992-01-30 | 1993-08-04 | Tokyo Seimitsu Co.,Ltd. | Coordinate measuring machine |
| JP2008209246A (en) * | 2007-02-27 | 2008-09-11 | Ntn Corp | Ball screw measuring device and measuring method thereof |
| CN101625238A (en) * | 2009-08-06 | 2010-01-13 | 浙江大学 | Automatically adjusting balance method of gage beam of flexible coordinate measuring machine and balance joint |
| CN202041196U (en) * | 2011-05-04 | 2011-11-16 | 九江精密测试技术研究所 | Portable gravitational equilibrium adjusting mechanism of coordinate measuring machine |
| CN202393403U (en) * | 2011-12-27 | 2012-08-22 | 合肥工业大学 | Two-dimensional floating force balance mechanism for precision mechanical instrument |
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2011
- 2011-12-27 CN CN201110445996.3A patent/CN102506925B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0553819A1 (en) * | 1992-01-30 | 1993-08-04 | Tokyo Seimitsu Co.,Ltd. | Coordinate measuring machine |
| JP2008209246A (en) * | 2007-02-27 | 2008-09-11 | Ntn Corp | Ball screw measuring device and measuring method thereof |
| CN101625238A (en) * | 2009-08-06 | 2010-01-13 | 浙江大学 | Automatically adjusting balance method of gage beam of flexible coordinate measuring machine and balance joint |
| CN202041196U (en) * | 2011-05-04 | 2011-11-16 | 九江精密测试技术研究所 | Portable gravitational equilibrium adjusting mechanism of coordinate measuring machine |
| CN202393403U (en) * | 2011-12-27 | 2012-08-22 | 合肥工业大学 | Two-dimensional floating force balance mechanism for precision mechanical instrument |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114589597A (en) * | 2022-02-18 | 2022-06-07 | 业成科技（成都）有限公司 | Pressure control device, glue removing device and display device manufacturing system |
| CN114589597B (en) * | 2022-02-18 | 2023-06-27 | 业成科技（成都）有限公司 | Pressure control device, glue removing device and display device manufacturing system |
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