CN102498625B - 边发射半导体激光器 - Google Patents

边发射半导体激光器 Download PDF

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Publication number
CN102498625B
CN102498625B CN201080041692.4A CN201080041692A CN102498625B CN 102498625 B CN102498625 B CN 102498625B CN 201080041692 A CN201080041692 A CN 201080041692A CN 102498625 B CN102498625 B CN 102498625B
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doped layer
layer
semiconductor laser
doped
undoped
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CN201080041692.4A
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English (en)
Chinese (zh)
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CN102498625A (zh
Inventor
阿尔瓦罗·戈麦斯-伊格莱西亚斯
京特·格伦宁格
克里斯蒂安·劳尔
哈拉尔德·柯尼希
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Ams Osram International GmbH
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Osram Opto Semiconductors GmbH
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/2004Confining in the direction perpendicular to the layer structure
    • H01S5/2018Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers
    • H01S5/2031Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers characterized by special waveguide layers, e.g. asymmetric waveguide layers or defined bandgap discontinuities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00Functional characteristics
    • H01S2301/16Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00Functional characteristics
    • H01S2301/16Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
    • H01S2301/166Single transverse or lateral mode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/34Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34313Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Geometry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
CN201080041692.4A 2009-09-17 2010-09-01 边发射半导体激光器 Active CN102498625B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009041934A DE102009041934A1 (de) 2009-09-17 2009-09-17 Kantenemittierender Halbleiterlaser
DE102009041934.9 2009-09-17
PCT/EP2010/062812 WO2011032841A2 (de) 2009-09-17 2010-09-01 Kantenemittierender halbleiterlaser

Publications (2)

Publication Number Publication Date
CN102498625A CN102498625A (zh) 2012-06-13
CN102498625B true CN102498625B (zh) 2014-04-23

Family

ID=43603423

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080041692.4A Active CN102498625B (zh) 2009-09-17 2010-09-01 边发射半导体激光器

Country Status (8)

Country Link
US (2) US8737444B2 (https=)
EP (1) EP2478601B1 (https=)
JP (1) JP5800815B2 (https=)
KR (1) KR20120075468A (https=)
CN (1) CN102498625B (https=)
DE (1) DE102009041934A1 (https=)
TW (1) TW201134036A (https=)
WO (1) WO2011032841A2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009056387B9 (de) * 2009-10-30 2020-05-07 Osram Opto Semiconductors Gmbh Kantenemittierender Halbleiterlaser mit einem Phasenstrukturbereich zur Selektion lateraler Lasermoden
JP6123427B2 (ja) * 2013-03-29 2017-05-10 三菱電機株式会社 半導体レーザ装置
US9705285B2 (en) * 2014-01-31 2017-07-11 Technische Universität Berlin Device comprising a high brightness broad-area edge-emitting semiconductor laser and method of making the same
CN116581642B (zh) * 2023-07-11 2023-11-07 度亘核芯光电技术(苏州)有限公司 半导体激光器外延结构及其制备方法、半导体激光器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016747A1 (en) * 1990-04-20 1991-10-31 Institutul De Fizica Atomica High power laser diode
CN1778024A (zh) * 2003-03-19 2006-05-24 布克哈姆技术公共有限公司 具有大的光学超晶格波导的高功率半导体激光器
EP1727250A1 (en) * 2004-03-16 2006-11-29 Anritsu Corporation Semiconductor laser couplable to single mode optical fiber at high coupling efficiency
US20070183469A1 (en) * 2006-02-08 2007-08-09 Samsung Electronics Co., Ltd. Nitride based semiconductor laser diode

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04781A (ja) * 1990-04-17 1992-01-06 Mitsubishi Electric Corp 半導体レーザの構造
US6167073A (en) * 1998-07-23 2000-12-26 Wisconsin Alumni Research Foundation High power laterally antiguided semiconductor light source with reduced transverse optical confinement
JP2001332814A (ja) * 2000-05-25 2001-11-30 Nec Corp 半導体レーザ
KR100597532B1 (ko) * 2001-11-05 2006-07-10 니치아 카가쿠 고교 가부시키가이샤 반도체 소자
JP2003060301A (ja) * 2002-06-17 2003-02-28 Nec Corp 半導体レーザ
US20050201439A1 (en) * 2002-09-06 2005-09-15 Mitsubishi Chemical Corporation Semiconductor light emitting device and semiconductor light emitting device module
JP2006135221A (ja) * 2004-11-09 2006-05-25 Mitsubishi Electric Corp 半導体発光素子
EP2015412B1 (en) * 2007-07-06 2022-03-09 Lumentum Operations LLC Semiconductor laser with narrow beam divergence.
DE102007051315B4 (de) * 2007-09-24 2018-04-05 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Bauelement
JP5002391B2 (ja) * 2007-09-26 2012-08-15 三菱電機株式会社 半導体レーザ装置
JP5003527B2 (ja) * 2008-02-22 2012-08-15 住友電気工業株式会社 Iii族窒化物発光素子、及びiii族窒化物系半導体発光素子を作製する方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016747A1 (en) * 1990-04-20 1991-10-31 Institutul De Fizica Atomica High power laser diode
CN1778024A (zh) * 2003-03-19 2006-05-24 布克哈姆技术公共有限公司 具有大的光学超晶格波导的高功率半导体激光器
EP1727250A1 (en) * 2004-03-16 2006-11-29 Anritsu Corporation Semiconductor laser couplable to single mode optical fiber at high coupling efficiency
US20070183469A1 (en) * 2006-02-08 2007-08-09 Samsung Electronics Co., Ltd. Nitride based semiconductor laser diode

Also Published As

Publication number Publication date
EP2478601B1 (de) 2017-12-06
WO2011032841A2 (de) 2011-03-24
DE102009041934A1 (de) 2011-03-24
US8976831B2 (en) 2015-03-10
KR20120075468A (ko) 2012-07-06
US8737444B2 (en) 2014-05-27
TW201134036A (en) 2011-10-01
EP2478601A2 (de) 2012-07-25
JP2013505560A (ja) 2013-02-14
WO2011032841A3 (de) 2012-03-08
CN102498625A (zh) 2012-06-13
US20120263205A1 (en) 2012-10-18
US20140211821A1 (en) 2014-07-31
JP5800815B2 (ja) 2015-10-28

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