CN102498625B - 边发射半导体激光器 - Google Patents
边发射半导体激光器 Download PDFInfo
- Publication number
- CN102498625B CN102498625B CN201080041692.4A CN201080041692A CN102498625B CN 102498625 B CN102498625 B CN 102498625B CN 201080041692 A CN201080041692 A CN 201080041692A CN 102498625 B CN102498625 B CN 102498625B
- Authority
- CN
- China
- Prior art keywords
- doped layer
- layer
- semiconductor laser
- doped
- undoped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2018—Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers
- H01S5/2031—Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers characterized by special waveguide layers, e.g. asymmetric waveguide layers or defined bandgap discontinuities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
- H01S2301/166—Single transverse or lateral mode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34313—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Geometry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009041934A DE102009041934A1 (de) | 2009-09-17 | 2009-09-17 | Kantenemittierender Halbleiterlaser |
| DE102009041934.9 | 2009-09-17 | ||
| PCT/EP2010/062812 WO2011032841A2 (de) | 2009-09-17 | 2010-09-01 | Kantenemittierender halbleiterlaser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102498625A CN102498625A (zh) | 2012-06-13 |
| CN102498625B true CN102498625B (zh) | 2014-04-23 |
Family
ID=43603423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080041692.4A Active CN102498625B (zh) | 2009-09-17 | 2010-09-01 | 边发射半导体激光器 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US8737444B2 (https=) |
| EP (1) | EP2478601B1 (https=) |
| JP (1) | JP5800815B2 (https=) |
| KR (1) | KR20120075468A (https=) |
| CN (1) | CN102498625B (https=) |
| DE (1) | DE102009041934A1 (https=) |
| TW (1) | TW201134036A (https=) |
| WO (1) | WO2011032841A2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009056387B9 (de) * | 2009-10-30 | 2020-05-07 | Osram Opto Semiconductors Gmbh | Kantenemittierender Halbleiterlaser mit einem Phasenstrukturbereich zur Selektion lateraler Lasermoden |
| JP6123427B2 (ja) * | 2013-03-29 | 2017-05-10 | 三菱電機株式会社 | 半導体レーザ装置 |
| US9705285B2 (en) * | 2014-01-31 | 2017-07-11 | Technische Universität Berlin | Device comprising a high brightness broad-area edge-emitting semiconductor laser and method of making the same |
| CN116581642B (zh) * | 2023-07-11 | 2023-11-07 | 度亘核芯光电技术(苏州)有限公司 | 半导体激光器外延结构及其制备方法、半导体激光器 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991016747A1 (en) * | 1990-04-20 | 1991-10-31 | Institutul De Fizica Atomica | High power laser diode |
| CN1778024A (zh) * | 2003-03-19 | 2006-05-24 | 布克哈姆技术公共有限公司 | 具有大的光学超晶格波导的高功率半导体激光器 |
| EP1727250A1 (en) * | 2004-03-16 | 2006-11-29 | Anritsu Corporation | Semiconductor laser couplable to single mode optical fiber at high coupling efficiency |
| US20070183469A1 (en) * | 2006-02-08 | 2007-08-09 | Samsung Electronics Co., Ltd. | Nitride based semiconductor laser diode |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04781A (ja) * | 1990-04-17 | 1992-01-06 | Mitsubishi Electric Corp | 半導体レーザの構造 |
| US6167073A (en) * | 1998-07-23 | 2000-12-26 | Wisconsin Alumni Research Foundation | High power laterally antiguided semiconductor light source with reduced transverse optical confinement |
| JP2001332814A (ja) * | 2000-05-25 | 2001-11-30 | Nec Corp | 半導体レーザ |
| KR100597532B1 (ko) * | 2001-11-05 | 2006-07-10 | 니치아 카가쿠 고교 가부시키가이샤 | 반도체 소자 |
| JP2003060301A (ja) * | 2002-06-17 | 2003-02-28 | Nec Corp | 半導体レーザ |
| US20050201439A1 (en) * | 2002-09-06 | 2005-09-15 | Mitsubishi Chemical Corporation | Semiconductor light emitting device and semiconductor light emitting device module |
| JP2006135221A (ja) * | 2004-11-09 | 2006-05-25 | Mitsubishi Electric Corp | 半導体発光素子 |
| EP2015412B1 (en) * | 2007-07-06 | 2022-03-09 | Lumentum Operations LLC | Semiconductor laser with narrow beam divergence. |
| DE102007051315B4 (de) * | 2007-09-24 | 2018-04-05 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Bauelement |
| JP5002391B2 (ja) * | 2007-09-26 | 2012-08-15 | 三菱電機株式会社 | 半導体レーザ装置 |
| JP5003527B2 (ja) * | 2008-02-22 | 2012-08-15 | 住友電気工業株式会社 | Iii族窒化物発光素子、及びiii族窒化物系半導体発光素子を作製する方法 |
-
2009
- 2009-09-17 DE DE102009041934A patent/DE102009041934A1/de not_active Withdrawn
-
2010
- 2010-09-01 EP EP10748092.3A patent/EP2478601B1/de active Active
- 2010-09-01 US US13/497,036 patent/US8737444B2/en active Active
- 2010-09-01 WO PCT/EP2010/062812 patent/WO2011032841A2/de not_active Ceased
- 2010-09-01 JP JP2012529204A patent/JP5800815B2/ja active Active
- 2010-09-01 KR KR1020127009496A patent/KR20120075468A/ko not_active Ceased
- 2010-09-01 CN CN201080041692.4A patent/CN102498625B/zh active Active
- 2010-09-02 TW TW099129617A patent/TW201134036A/zh unknown
-
2014
- 2014-03-12 US US14/206,676 patent/US8976831B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991016747A1 (en) * | 1990-04-20 | 1991-10-31 | Institutul De Fizica Atomica | High power laser diode |
| CN1778024A (zh) * | 2003-03-19 | 2006-05-24 | 布克哈姆技术公共有限公司 | 具有大的光学超晶格波导的高功率半导体激光器 |
| EP1727250A1 (en) * | 2004-03-16 | 2006-11-29 | Anritsu Corporation | Semiconductor laser couplable to single mode optical fiber at high coupling efficiency |
| US20070183469A1 (en) * | 2006-02-08 | 2007-08-09 | Samsung Electronics Co., Ltd. | Nitride based semiconductor laser diode |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2478601B1 (de) | 2017-12-06 |
| WO2011032841A2 (de) | 2011-03-24 |
| DE102009041934A1 (de) | 2011-03-24 |
| US8976831B2 (en) | 2015-03-10 |
| KR20120075468A (ko) | 2012-07-06 |
| US8737444B2 (en) | 2014-05-27 |
| TW201134036A (en) | 2011-10-01 |
| EP2478601A2 (de) | 2012-07-25 |
| JP2013505560A (ja) | 2013-02-14 |
| WO2011032841A3 (de) | 2012-03-08 |
| CN102498625A (zh) | 2012-06-13 |
| US20120263205A1 (en) | 2012-10-18 |
| US20140211821A1 (en) | 2014-07-31 |
| JP5800815B2 (ja) | 2015-10-28 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |