CN102498387A - 高速、高解析度、三维太阳能电池检查系统 - Google Patents

高速、高解析度、三维太阳能电池检查系统 Download PDF

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Publication number
CN102498387A
CN102498387A CN2010800418027A CN201080041802A CN102498387A CN 102498387 A CN102498387 A CN 102498387A CN 2010800418027 A CN2010800418027 A CN 2010800418027A CN 201080041802 A CN201080041802 A CN 201080041802A CN 102498387 A CN102498387 A CN 102498387A
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CN
China
Prior art keywords
workpiece
images
inspection system
illumination
camera array
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Pending
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CN2010800418027A
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English (en)
Chinese (zh)
Inventor
卡尔·E·豪根
蒂莫西·A·什昆尼斯
保罗·R·豪根
史蒂文·K·凯斯（死亡）
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Cyberoptics Corp
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Cyberoptics Corp
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Publication date
Application filed by Cyberoptics Corp filed Critical Cyberoptics Corp
Publication of CN102498387A publication Critical patent/CN102498387A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN2010800418027A 2009-09-22 2010-09-21 高速、高解析度、三维太阳能电池检查系统 Pending CN102498387A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24461609P 2009-09-22 2009-09-22
US24467109P 2009-09-22 2009-09-22
US61/244,671 2009-09-22
US61/244,616 2009-09-22
PCT/US2010/049619 WO2011037905A1 (en) 2009-09-22 2010-09-21 High speed, high resolution, three dimensional solar cell inspection system

Publications (1)

Publication Number Publication Date
CN102498387A true CN102498387A (zh) 2012-06-13

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201080042290.6A Expired - Fee Related CN102656444B (zh) 2009-09-22 2010-09-21 具有照相机阵列和紧凑一体式照明装置的高速光学检查系统
CN2010800418027A Pending CN102498387A (zh) 2009-09-22 2010-09-21 高速、高解析度、三维太阳能电池检查系统

Family Applications Before (1)

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CN201080042290.6A Expired - Fee Related CN102656444B (zh) 2009-09-22 2010-09-21 具有照相机阵列和紧凑一体式照明装置的高速光学检查系统

Country Status (5)

Country Link
JP (2) JP5809628B2 (enExample)
KR (1) KR20120084738A (enExample)
CN (2) CN102656444B (enExample)
DE (1) DE112010003742T5 (enExample)
WO (2) WO2011037903A1 (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104937367A (zh) * 2013-01-17 2015-09-23 赛博光学公司 用于电路板的三维成像的多照相机传感器
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
CN109000566A (zh) * 2018-08-15 2018-12-14 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
CN111060516A (zh) * 2019-12-10 2020-04-24 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
CN113287001A (zh) * 2019-01-14 2021-08-20 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN113380661A (zh) * 2020-03-09 2021-09-10 捷进科技有限公司 芯片贴装装置及半导体器件的制造方法
TWI826990B (zh) * 2021-03-31 2023-12-21 大陸商深圳中科飛測科技股份有限公司 一種檢測設備及檢測方法
US12510474B2 (en) 2021-03-31 2025-12-30 Skyverse Technology Co., Ltd. Detection device, detection apparatus and detection method

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US20120133920A1 (en) * 2009-09-22 2012-05-31 Skunes Timothy A High speed, high resolution, three dimensional printed circuit board inspection system
CN102253051A (zh) * 2011-05-03 2011-11-23 3i系统公司 一种线扫描探测器检测太阳能电池片缺陷的系统
CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
KR101351000B1 (ko) * 2013-04-10 2014-01-15 주식회사 미루시스템즈 복수 개의 검사 모드를 가지는 인라인 카메라 검사 장치
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
EP3140639A4 (en) * 2014-05-05 2018-01-31 Arconic Inc. Apparatus and methods for weld measurement
KR102025038B1 (ko) * 2014-09-11 2019-09-24 사이버옵틱스 코포레이션 3-차원 형상측정에서 복수 카메라 및 광원으로부터의 포인트 클라우드 병합
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
WO2017172819A1 (en) * 2016-03-30 2017-10-05 Optical Wavefront Laboratories, Llc Multiple camera microscope imaging with patterned illumination
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
US20190320145A1 (en) * 2017-02-02 2019-10-17 Ismeca Semiconductor Holding Sa Assembly and method for inspecting components
JP6584454B2 (ja) 2017-06-14 2019-10-02 キヤノン株式会社 画像処理装置及び方法
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
KR20200137003A (ko) * 2018-03-30 2020-12-08 구라시키 보세키 가부시키가이샤 선형물의 3차원 계측 장치, 및, 선형물의 3차원 계측 방법
KR102856352B1 (ko) * 2020-10-16 2025-09-04 삼성전자주식회사 다채널 액체 파티클 계수기
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
KR102796808B1 (ko) * 2021-03-31 2025-04-16 스카이버스 테크놀로지 씨오., 엘티디. 검출 장치, 검출 기기 및 검출 방법
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR102528246B1 (ko) * 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统
EP4641176A1 (en) * 2024-04-24 2025-10-29 Automatizacion y Sistemas de Inspeccion en Linea Global, S.L. Vision system for an inspection apparatus

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EP0994646A1 (en) * 1998-10-13 2000-04-19 Yamagata Casio Co., Ltd. Illumination for use in electronic component mounting apparatus
WO2000038494A2 (en) * 1998-12-19 2000-06-29 Cyberoptics Corporation Automatic inspection system with stereovision
WO2009094489A1 (en) * 2008-01-23 2009-07-30 Cyberoptics Corporation High speed optical inspection system with multiple illumination imagery

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US1577388A (en) 1923-05-19 1926-03-16 Hilger Ltd Adam Projection apparatus
DE10194788T1 (de) 2000-01-07 2003-02-27 Cyberoptics Corp Phasenprofilometriesystem mit telezentrischem Projektor
CN1242290C (zh) * 2003-09-18 2006-02-15 中国科学院上海技术物理研究所 一种能使光束光能分布均匀的均化光学组件
US20100074515A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect Detection and Response

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
EP0994646A1 (en) * 1998-10-13 2000-04-19 Yamagata Casio Co., Ltd. Illumination for use in electronic component mounting apparatus
WO2000038494A2 (en) * 1998-12-19 2000-06-29 Cyberoptics Corporation Automatic inspection system with stereovision
WO2009094489A1 (en) * 2008-01-23 2009-07-30 Cyberoptics Corporation High speed optical inspection system with multiple illumination imagery

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104937367A (zh) * 2013-01-17 2015-09-23 赛博光学公司 用于电路板的三维成像的多照相机传感器
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
CN109000566A (zh) * 2018-08-15 2018-12-14 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
CN113287001A (zh) * 2019-01-14 2021-08-20 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN111060516A (zh) * 2019-12-10 2020-04-24 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
CN113380661A (zh) * 2020-03-09 2021-09-10 捷进科技有限公司 芯片贴装装置及半导体器件的制造方法
CN113380661B (zh) * 2020-03-09 2023-09-29 捷进科技有限公司 芯片贴装装置及半导体器件的制造方法
TWI826990B (zh) * 2021-03-31 2023-12-21 大陸商深圳中科飛測科技股份有限公司 一種檢測設備及檢測方法
US12510474B2 (en) 2021-03-31 2025-12-30 Skyverse Technology Co., Ltd. Detection device, detection apparatus and detection method

Also Published As

Publication number Publication date
CN102656444A (zh) 2012-09-05
KR20120084738A (ko) 2012-07-30
WO2011037905A1 (en) 2011-03-31
CN102656444B (zh) 2016-08-03
JP2013505465A (ja) 2013-02-14
WO2011037903A1 (en) 2011-03-31
DE112010003742T5 (de) 2013-06-06
JP5809628B2 (ja) 2015-11-11
JP2013505464A (ja) 2013-02-14

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Application publication date: 20120613