CN102455540A - Apparatus for fabricating flexible liquid crystal display - Google Patents
Apparatus for fabricating flexible liquid crystal display Download PDFInfo
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- CN102455540A CN102455540A CN2011103163191A CN201110316319A CN102455540A CN 102455540 A CN102455540 A CN 102455540A CN 2011103163191 A CN2011103163191 A CN 2011103163191A CN 201110316319 A CN201110316319 A CN 201110316319A CN 102455540 A CN102455540 A CN 102455540A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133305—Flexible substrates, e.g. plastics, organic film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
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- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention relates to an apparatus for fabricating a flexible liquid crystal display, which greatly reduces process time and defective rate in a vacuum binding process of roll sheet mode. The apparatus for fabricating the flexible liquid crystal display comprises the following components: an upper gripping head which is used for fixing a plate-shaped upper plate that is machined through a first flexible substrate and has a first width; a lower gripping head which is used for fixing a lower plate that is provided with a net-shaped second flexible substrate with a second width that is larger than the first width; a vacuum chamber cover which is combined with the upper gripping head so as to move along with the upper gripping head, wherein the lower plate is used as a vacuum chamber bottom, thereby forming a vacuum area with the lower plate; and an upper plate moving device which moves the vacuum chamber cover and the upper gripping head that is combined with the vacuum chamber cover, thereby bonding the upper plate of the upper gripping head on the lower plate. According to the invention, when the flexible display is manufactured, quality and production benefit are improved greatly.
Description
Technical field
The present invention relates to the manufacturing installation of soft LCD, relate in particular to the manufacturing installation that can in the vacuum bonding technology of volume and sheet (Roll&Sheet) mode, significantly reduce the soft LCD of process time and disqualification rate.
Background technology
Flexible display (Flexible Display) is the flat-panel monitor that is formed on the flexible substrates such as plastics; It is because of when guaranteeing outstanding display characteristic; Collapsible, crooked or curling, therefore, extensively paid close attention to as the next-generation technology of current flat panel display market.
Flexible display is that the characteristic that is utilized in not the display of giving prior art is when bringing loss; The same display that can on thin and soft substrate crooked, folding or curling within the number cm range, make of sensitive paper; Different with the hard display of the use glass substrate of prior art; Flexible display is frivolous, and resistance to impact is strong, but and the display of free bend.Flexible display can be divided into the display of non-friable (Rugged) display, flexible (Bending) display and can curl (Rollable) according to its purposes and function.Frivolous, firm and can curl display can be used for DMB (DMB), WiBro, palm PC portable high-grade mobile devices such as (PDA), and, will develop into curling escope from now on.
Fig. 1 is the manufacturing process flow diagram of the LCD of prior art.
As shown in Figure 1, in order to make LCD, be divided into TFT (TFT, Thin Film Transistor) substrate and color filter (Color Filter) substrate usually and carry out the panel manufacturing process with glass substrate.That is, on the TFT substrate, carry out tft array (Array) technology (S20) forming as the switching of LCD and the TFT of driving element, and coating and grind alignment film (S21) on the TFT substrate, and distribute technology (S23) through cleaning (S22) and liquid crystal.In addition, on another glass substrate, form color filter (S10), and be coated with and grind (S11), cleaning (S12), sealing (S13), distribute (S14) and sept distribution technology (S15) through alignment film.Afterwards, bonding (S30) two substrates (upper plate and lower plate) afterwards, through the unit that the hardening process (S31) through sealant (Sealant) is separated into a plurality of liquid crystal cells form technology (S32) and through final the examination after, process Polarizer attach process (S33).
The LCD that uses above-mentioned glass substrate is through sheet sheet (sheet to sheet) mode to be made LCD, now, with the research with flexible base plate instead of glass substrate of prior art, mainly concentrates on sheet to sheet mode.That is, on a soft board, form tft array, form color filter and bonding above-mentioned two plates on another plate, but this will reduce productivity effect greatly, and can not bring into play the advantage of flexible material.
Therefore; In order to address the above problem; The inventor is in korean patent application 2009-90279 number, and proposition can significantly improve manufacturing system and the manufacturing approach of flexible display of soft LCD of volume to volume (roll to roll) or the Roll&Sheet mode of soft production of liquid crystal displays benefit.In above-mentioned technology; Roll to roll mode is the roll mode of on upper plate and lower plate, all using, though can obtain high productivity effect, can not prevent the production of defective substrate because of the characteristics that roll produces; Therefore; If any one generation in upper plate or lower plate is defective, then will causes the defective of entire product, thereby increase defective incidence.In addition, in vacuum assembly system (VAS, VacuumAssembly System), the method for clamping (Chucking) netted (Web) substrate is complicated, and, when producing defective panel, also be difficult to remove.
In addition, in korean patent application 2009-90279 number, except that roll to roll mode, the Roll&Sheet mode is proposed also.Fig. 2 is the concept map in order to flexible display adhesive bonding method that the Roll&Sheet mode that applicant of the present invention proposes is described in korean patent application 2009-90279 number.As shown in Figure 2, be arranged in order in the one side (bottom surfaces) of first flexible base plate 100 possess color filter, the upper plate of alignment film etc., but only represent a upper plate 150 for the ease of explanation.As stated, upper plate 150 is meant the plate bonding with lower plate that comprises upper plate process area 1002.First flexible base plate 100 that is arranged in order a plurality of upper plates that comprise above-mentioned upper plate 150 is moved into bonder 300 with second flexible base plate 200 that is arranged in order a plurality of lower plates, and first flexible base plate 100 is through cutter sweep 350 cuttings.Before or after accomplishing above-mentioned cutting; One side at first flexible base plate 100 that comprises upper plate process area 1002; Support until fixing upper plate 150 through mechanical chuck (Mechanical Chuck) or vacuum chuck (Vacuum Chuck) 360; And, in order under vacuum state, to keep the absorption of upper plate, support upper plate 150 and mobile with bonding with lower plate by electrostatic chuck (Electrostatic Chuck) 370.That is, electrostatic chuck 370 utilizes electrostatic attraction to adhere to after the upper plate 150 at the face that does not comprise upper plate process area 1002, and moves so that upper plate process area 1002 after the upper side of lower plate 250, aligns and be bonding.Lower plate 250 can support until fixing through mechanical chuck or vacuum chuck 380.
In addition, the bonding mode of the flexible display of the Roll&Sheet mode that korean patent application proposes for 2009-90279 number can not be understood the generation of defective panel in VAS, therefore, needs in the previous step or a back step of technology definite through checking.In addition, do not have to propose not have a stroke method of decreasing clamping (Chucking) upper plate under the underproof situation such as (Scratch).
Summary of the invention
Problem to be solved
The manufacturing installation that the objective of the invention is to overcome prior art and a kind of soft LCD is provided; It reduces the volume of the vacuum chamber of accomplishing base plate bonding and simplifies its structure; Thereby not only accomplish technology fast, and, the pollution that operation caused of unnecessary device feature prevented to miscellaneous part; For example, the operation through door (Gate) portion to distributing the pollution of (Dispensing) portion.
Technical scheme
The manufacturing installation of soft LCD of the present invention comprises: upper jaw is used for fixing the tabular upper plate that possesses first width that utilizes first flexible base plate to process; Lower jaw is used for fixing the lower plate that is formed by netted second flexible base plate that possesses second width wideer than above-mentioned first width; Vacuum room cover combines so that move with above-mentioned upper jaw with above-mentioned upper jaw, and with above-mentioned lower plate as the vacuum chamber bottom, thereby together constitute vacuum area with above-mentioned lower plate; The upper plate mobile device moves above-mentioned vacuum room cover and combine upper jaw on it, thereby the upper plate that will be fixed in above-mentioned upper jaw is bonded in above-mentioned lower plate.
At this moment, preferably, also comprise the upper jaw mobile device, so that above-mentioned upper jaw independently moves with respect to above-mentioned vacuum room cover.
In addition; Preferably; Above-mentioned upper jaw and lower jaw are respectively from vacuum chuck (Vacuum Chuck), electrostatic chuck (ESC; Electro Static Chuck), at least a of selection forms as the unit chuck in physical adhesion chuck (PSC, Physical Sticky Chuck), porous ceramics chuck (Porous Ceramic Chuck) and the eddy current chuck (Vortex Chuck).
Especially, also comprise the lower jaw mobile device that is used for moving above-mentioned lower plate.
At least one in above-mentioned upper jaw and the lower jaw also comprise UVW platform or XY theta stage, so that can move.
In addition, also comprise ultraviolet ray (UV) curing system, be used for the adhesion technique partially hardened afterwards of above-mentioned upper plate and lower plate.
In addition, preferably, also comprise camera, be used for adhesion technique, check aligned condition etc. with visual manner in above-mentioned upper plate and lower plate.
In addition; The first tabular flexible base plate than first width of above-mentioned second narrow width of getting everything ready fully is as the criterion; Use the net that just possesses first width originally; Or possess the both sides of the net of the width wideer than first width by first width cutting, or the both sides that possess the width net wideer than first width with the bending apparatus bending are afterwards with electrostatic chuck ESC clamps.
In addition, also comprise the air float-up device,, thereby, move the lower plate that constitutes by the above-mentioned second netted flexible base plate with no damage on the top of above-mentioned lower jaw so that above-mentioned lower plate do not contact with above-mentioned lower jaw.
At this, preferably, above-mentioned upper jaw and lower jaw are made up of a plurality of unit chuck of arranging with mesh shape respectively, and possess the unit chuck control device of the operation of regulating the said units chuck successively.
In addition, preferably, also comprise netted cutter sweep, with above-mentioned first flexible base plate with respect to its length direction perpendicular cuts, thereby above-mentioned flexible base plate is processed into tabular upper plate.
At this moment, preferably, above-mentioned net cutter sweep is made up of blade type, wheel (wheel) type or laser class.
In addition, at this moment, also comprise the particulate removal device that constitutes by air suction/discharge portion, the particulate that produces when remove using above-mentioned net cutter sweep.In addition, also available electro-dissociator (Ionizer) nozzle (Nozzle), the particulate of effectively removing cutting and being produced through static.
In addition, also comprise carrier, when stating the net cutter sweep in the use, for moving of net clamps the net sidepiece.
In addition, can form by the flexibility material of corrugated tube form around the bottom of above-mentioned vacuum room cover, or above-mentioned vacuum room cover is made up of rigid body, and O type ring is installed in the bottom of above-mentioned vacuum chamber.
In addition, above-mentioned upper jaw and vacuum room cover possessed at least two row side by side on the above-mentioned second netted flexible base plate, to carry out the above vacuum bonding in two places simultaneously.
Beneficial effect
According to the present invention, can when making flexible display, significantly improve the quality and productivity effect.
Description of drawings
Fig. 1 is the manufacturing process flow diagram of the LCD of prior art;
Fig. 2 is the concept map in order to the flexible display adhesive bonding method that the Roll&Sheet mode that applicant of the present invention proposes in korean patent application 2009-90279 number is described;
Fig. 3 is the concept map in order to the flexible display adhesive bonding method of the Roll&Sheet mode of explanation use device of the present invention;
Fig. 4 is the synoptic diagram that in using device of the present invention, forms the process of vacuum chamber;
Fig. 5 explains that the supply of upper plate is to cut the synoptic diagram of upper plate, lower plate, vacuum room cover and upper jaw perpendicular to the length direction of the lower plate that is made up of the second netted flexible base plate;
Fig. 6 transfers the sectional view of the process of lower plate in device of the present invention for explanation;
Fig. 7 a to Fig. 7 e is held on the sectional view of the process of lower jaw for the explanation lower plate;
Fig. 8 is held on the sectional view of the process of upper jaw for upper plate;
Fig. 9 a to Fig. 9 e is processed into the first netted flexible base plate for explanation the synoptic diagram of the net cutter of tabular upper plate.
Description of reference numerals
First flexible base plate that 150 upper plates 151 are netted
200 lower plates, 375 upper jaw
376 upper jaw mobile devices, 385 lower jaw
The special-purpose camera of 401 vacuum room cover, 407 visual inspections
901 carriers, 902 net cutter sweeps
Embodiment
Below, in conjunction with accompanying drawing preferred embodiment of the present invention is elaborated.Following embodiment is intended to help to understand the present invention, and those skilled in the art can carry out various distortion within technological thought scope of the present invention.Therefore, interest field of the present invention does not receive the restriction of these embodiment.
Fig. 3 is the concept map in order to the flexible display adhesive bonding method of the Roll&Sheet mode of explanation use device of the present invention, and Fig. 4 is the synoptic diagram that in using device of the present invention, forms the process of vacuum chamber.
As shown in Figure 3, though with shown in Figure 2 similar, most important difference is that bonder is different, does not take sizable part of drive division among Fig. 3, and only forms vacuum space 301 in very little space.This possesses following structure through the manufacturing installation that makes soft LCD and realizes.On the upper jaw 375 of the fixing tabular upper plate 150 that possesses the first width a that processes by first flexible base plate 100, combine vacuum room cover 401, and vacuum room cover 401 moves with upper jaw 375.Vacuum room cover 401 can be fixing with respect to upper jaw 375, but also can make upper jaw 375 with respect to vacuum room cover 401 independent moving through upper jaw mobile device 376.
As long as can form vacuum area really, the structure and material of vacuum room cover 401 can adopt any form, and under the situation like Fig. 4 a, the flexibility material by corrugated tube 403 shapes around the bottom of vacuum room cover 401 forms.Under the situation of Fig. 4 b, vacuum room cover 401 is made up of rigid body, and in the bottom of vacuum chamber O type ring 404 is installed.In addition, below lower jaw 385, be provided with camera 407 so that in the adhesion technique of upper plate 150 and lower plate 200, vision (Vision) inspection alignment (Align) state etc., thus after bonding, pick out defective panel in advance.Utilizing said apparatus after vacuum area 401 is accomplished the adhesion technique of upper plate 150 and lower plate 200, in UV curing system 302, carry out partially hardened technology.
[supply of upper plate]
Fig. 5 explains that the supply of upper plate is to cut the synoptic diagram of upper plate 150, lower plate 200, vacuum room cover 401 and upper jaw 375 perpendicular to the length direction of the lower plate 200 that is made up of the second netted flexible base plate.As stated, the first width a of upper plate 150 is narrower than the second width b of lower plate 200, just can guarantee the integrality that seals, prevents to reveal.Therefore, upper plate 150 can mode as shown in Figure 5 be supplied.
The first, if the first width a of upper plate 150 is narrower than the second width b of lower plate 200, then shown in the left side of Fig. 5, directly it is supplied to roll and gets final product.
The second, if the original width c of upper plate 150 is identical or bigger than it with the second width b of lower plate 200; Then shown in the centre of Fig. 5; Cutting knife (Slitter) 501 cuttings (Cutting) that utilization is arranged at both sides are contracted to the first width a width d of upper plate 150, carry out panel (Cell) manufacturing process and cleaning (Cleaning) afterwards.
Three, if the original width c of upper plate 150 is identical or bigger than it with the second width b of lower plate 200; Then shown in the right side of Fig. 5; Utilize the bending apparatus (not shown) and the ESC anchor clamps (not shown) of net bottom, make the first width a of upper plate become narrower than the second width b of lower plate.
[handover of lower plate]
The lower plate that constitutes by the second netted flexible base plate be fixed under the state of lower jaw bonding with upper plate.But, before lower plate is fixed in lower jaw, need to transfer to the length direction of lower jaw, but if the bottom surface of lower plate contact with lower jaw when transferring on the top of lower jaw, then to produce technology defective because of sending a stroke damage (Scratch).In addition,, therefore, can not contact, and the mip rolls of press-down type (Nip Roll) can only make the contact of edge (Edge) portion, and cause the distortion of net (Web) because of the upper side of lower plate is coated with liquid crystal, sealant etc.Therefore, as shown in Figure 6, lower plate 200 is on the top of lower jaw 385, the state of being separated by side by side with lower jaw 385 down and lower jaw 385 transfer side by side.Fig. 6 passes through the sectional view that roller (Roll) 408 is transferred the process of lower plates 200 for explanation in device of the present invention.Lower jaw 385 can be in a plurality of positions; For example in the mesh shape position with from vacuum chuck (Vacuum Chuck), electrostatic chuck (ESC; That Electro Static Chuck), selects in physical adhesion chuck (PSC, Physical Sticky Chuck), porous ceramics chuck (Porous Ceramic Chuck) and the eddy current chuck (vortex chuck) is at least a as the unit chuck.At this moment, vacuum chuck vacuum capable of using sucks fixedly lower plate 200, but but the also hair-dryer of double as air suspension (Air Blower), so that lower plate 200 is with respect to lower jaw 385 air suspensions (Air Floating).Such air suspension notion also can be equally applicable to upper plate and upper jaw.What preferably, lower plate 200 was separated by from lower jaw 385 through air suspension is 100～500 μ m apart from f.
[clamping of lower plate (chucking)]
Fig. 7 a to Fig. 7 e is held on the sectional view of the process of lower jaw for the explanation lower plate.Shown in Fig. 7 a, the lower plate of transferring with the state of air suspension 200 descends, with lower jaw 385 clampings of arranging with mesh shape through porous ceramics chuck 701 and electrostatic chuck 702.At this moment, if lower plate 200 sharply contacts lower jaw 385, then have lower plate 200 distortions or draw the danger of decreasing, therefore, unit chuck control device 703 is at first through porous ceramics chuck 701 injection airs, so that lower plate 200 air suspensions.
Then, shown in Fig. 7 b,, at first form vacuum through the porous ceramics chuck 701 that is positioned at lower jaw 385 central parts and suck through control module chuck control device 703.In the present embodiment, the porous ceramics chuck 701 of the central part through being positioned at lower jaw 385 at first forms vacuum and sucks, but according to condition of different, also can form vacuum in other sides and suck.But, vacuum is sucked carry out successively.
Then, shown in Fig. 7 c, through control module chuck control device 703, expansion forms the zone that vacuum sucks through porous ceramics chuck 701.
At last,, form vacuum through whole porous ceramics chuck 701 and suck,, then will become the state shown in Fig. 7 e that lower plate 200 is contacted with whole lower jaw 385 to become the state shown in Fig. 7 d through control module chuck control device 703.Lower plate 200 is with after lower jaw 385 contacts, operation electrostatic chuck 702.
Why beginning to form successively the vacuum suction from central portion or a certain side like this, is the distortion for the lower plate 200 that prevents to be made up of the second netted flexible base plate.
In the present embodiment, porous ceramics chuck 701 and electrostatic chuck 702 only have been described, but also can have been used vacuum chuck, physical adhesion chuck and eddy current chuck.
[clamping of upper plate (chucking)]
Fig. 8 is held on the sectional view of the process of upper jaw for upper plate.Upper plate 150 is also because thin thickness if upper jaw 375 is processed into the form with gross blow hole, then can't use because of the vacuum suction pressure causes upper plate 150 distortion.Therefore, the same with the lower jaw 385 of the foregoing description, upper jaw 375 also can be made up of porous ceramics chuck 701 and electrostatic chuck 702.At this moment; For upper plate 150 being held on upper jaw 375, the following process of process:, then form air suspension if pass through porous ceramics chuck 701 injection airs of lower jaw 385; And, begin to enlarge successively positive hole binding domain in upper jaw 375 from its central portion or a certain side.
[structure of net cutter]
Fig. 9 a to Fig. 9 e explains the synoptic diagram that the first netted flexible base plate is processed into the net cutter of tabular upper plate, and each figure is the sectional view to the length direction of netted first flexible base plate 151.
Shown in Fig. 9 a, the sidepiece that is clamped the first netted flexible base plate 151 by carrier 901 also moves through LM guide 903 to the right, thereby accomplishes net supply (Web Feeding).Lower jaw 385 through as the porous ceramics chuck (not shown) of self unit chuck to its top one side injection air, thereby supply first flexible base plate 151 through the air suspension mode.In the both sides of lower jaw 385, the net cutter sweep 902 with respect to its length direction perpendicular cuts first flexible base plate 151 is set.Above-mentioned net cutter sweep 902 is made up of blade type, wheel (wheel) type or laser class.Net cutter sweep 902 possesses air and sucks the particulate that produces when net is cut to remove to the direction of arrow by discharge portion 904.In order to utilize electrostatic precipitation, also can possess electro-dissociator (Ionizer).Available electro-dissociator nozzle (Nozzle), the particulate of effectively removing cutting and being produced through static.Then, shown in Fig. 9 b, upper jaw 375 and vacuum room cover 401 are together descended, with clamping first flexible base plate 151 from top.Then, shown in Fig. 9 c, carrier 901 restores to the original position, thereby can not make carrier 901 hinder the net cutting operation.Then, shown in Fig. 9 d, net cutter sweep 902 is from following rising, forms particulate with the both ends with upper jaw 375 and removes with chamber and cut first flexible base plate 151.The method that prevents of the particulate that is produced during cutting does, is blown into air at the both ends of upper jaw 375 and sucks discharge portion 904 from the air of net cutter sweep 902 to extract out.Shown in Fig. 9 e, to accomplish after the cutting, net cutter sweep 902 moves down, and the tabular upper plate 150 that upper jaw 375 fixedly is cut and mobile, thereby prepare with lower plate bonding.
The manufacturing installation of aforesaid soft LCD of the present invention in the vacuum bonding technology of Roll&Sheet mode, can significantly reduce process time and disqualification rate.In addition, above-mentioned upper jaw 375 and vacuum room cover 401 are possessed at least two row side by side on the above-mentioned second netted flexible base plate 151, carrying out the above vacuum bonding in two places simultaneously, thereby significantly shorten the process time.
Claims (17)
1. the manufacturing installation of a soft LCD is characterized in that, comprising:
Upper jaw is used for fixing the tabular upper plate that possesses first width that utilizes first flexible base plate to process;
Lower jaw is used for fixing the lower plate that is formed by netted second flexible base plate that possesses second width wideer than above-mentioned first width;
Vacuum room cover combines so that move with above-mentioned upper jaw with above-mentioned upper jaw, and with above-mentioned lower plate as the vacuum chamber bottom, thereby together constitute vacuum area with above-mentioned lower plate;
The upper plate mobile device moves above-mentioned vacuum room cover and combine upper jaw on it, thereby the upper plate that will be fixed in above-mentioned upper jaw is bonded in above-mentioned lower plate.
2. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises the upper jaw mobile device, so that above-mentioned upper jaw independently moves with respect to above-mentioned vacuum room cover.
3. the manufacturing installation of soft LCD according to claim 1; It is characterized in that above-mentioned upper jaw and lower jaw are respectively from vacuum chuck, electrostatic chuck, physical adhesion chuck, porous ceramics chuck and eddy current chuck, select at least a as the unit chuck.
4. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises the lower jaw mobile device that is used for moving above-mentioned lower plate.
5. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises UVW platform or XY theta stage, so that at least one in above-mentioned upper jaw and the lower jaw can move.
6. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises ultraviolet curing device, is used for the adhesion technique partially hardened afterwards of above-mentioned upper plate and lower plate.
7. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises camera, is used for the adhesion technique in above-mentioned upper plate and lower plate, checks aligned condition etc. with visual manner.
8. the manufacturing installation of soft LCD according to claim 1; It is characterized in that; The first tabular flexible base plate than first width of above-mentioned second narrow width of getting everything ready fully is as the criterion; Use the net that just possessed first width originally, or possess the both sides of the net of the width wideer, or use the electrostatic chuck clamps afterwards with the both sides that the bending apparatus bending possesses the width net wideer than first width than first width by the cutting of first width.
9. the manufacturing installation of soft LCD according to claim 1; It is characterized in that; Also comprise the air float-up device; So that above-mentioned lower plate do not contact with above-mentioned lower jaw, thereby, move the lower plate that constitutes by the above-mentioned second netted flexible base plate with no damage on the top of above-mentioned lower jaw.
10. according to the manufacturing installation of any described soft LCD in the claim 1,3 and 9; It is characterized in that; Also comprise: above-mentioned upper jaw and lower jaw are made up of a plurality of unit chuck of arranging with mesh shape respectively, and possess the unit chuck control device of the operation of regulating the said units chuck successively.
11. the manufacturing installation of soft LCD according to claim 1 is characterized in that, also comprises netted cutter sweep, with above-mentioned first flexible base plate with respect to its length direction perpendicular cuts, thereby above-mentioned flexible base plate is processed into tabular upper plate.
12. the manufacturing installation of soft LCD according to claim 11 is characterized in that, above-mentioned net cutter sweep is made up of blade type, wheel type or laser class.
13. the manufacturing installation of soft LCD according to claim 11; It is characterized in that; Also comprise: the particulate removal device and the electro-dissociator that constitute by air suction/discharge portion; The particulate removal device is used to remove the particulate that produces when using above-mentioned net cutter sweep, and electro-dissociator is used for effectively removing particulate through static.
14. the manufacturing installation of soft LCD according to claim 11 is characterized in that, also comprises carrier, when stating the net cutter sweep in the use, for moving of net clamps the net sidepiece.
15. the manufacturing installation of soft LCD according to claim 1 is characterized in that, can be formed by the flexibility material of corrugated tube form around the bottom of above-mentioned vacuum room cover.
16. the manufacturing installation of soft LCD according to claim 1 is characterized in that, above-mentioned vacuum room cover is made up of rigid body, and in the bottom of above-mentioned vacuum chamber O type ring is installed.
17. the manufacturing installation of soft LCD according to claim 1 is characterized in that, above-mentioned upper jaw and vacuum room cover is possessed at least two row side by side on the above-mentioned second netted flexible base plate, to carry out the above vacuum bonding in two places simultaneously.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2010-0101596 | 2010-10-18 | ||
| KR1020100101596A KR101182172B1 (en) | 2010-10-18 | 2010-10-18 | Apparatus for fabricating flexible liquid crystal display |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102455540A true CN102455540A (en) | 2012-05-16 |
| CN102455540B CN102455540B (en) | 2014-10-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110316319.1A Expired - Fee Related CN102455540B (en) | 2010-10-18 | 2011-10-18 | Apparatus for fabricating flexible liquid crystal display |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101182172B1 (en) |
| CN (1) | CN102455540B (en) |
| TW (1) | TWI467277B (en) |
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| WO2018120898A1 (en) * | 2016-12-26 | 2018-07-05 | 惠科股份有限公司 | Ultraviolet curing apparatus and load-bearing platform |
| CN112684630A (en) * | 2019-10-17 | 2021-04-20 | 北京小米移动软件有限公司 | Backlight module assembly method, backlight module and terminal equipment |
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| US10434804B2 (en) | 2008-06-13 | 2019-10-08 | Kateeva, Inc. | Low particle gas enclosure systems and methods |
| US11975546B2 (en) | 2008-06-13 | 2024-05-07 | Kateeva, Inc. | Gas enclosure assembly and system |
| CN103292720B (en) * | 2012-06-29 | 2016-01-27 | 上海中航光电子有限公司 | substrate deflection test method and system |
| KR101980764B1 (en) * | 2012-12-24 | 2019-08-28 | 엘지디스플레이 주식회사 | Desorption apparatus having drum pad of arch form and method of fabricating lightweight and thin liquid crystal display device using thereof |
| KR101970449B1 (en) | 2013-12-26 | 2019-04-18 | 카티바, 인크. | Apparatus and techniques for thermal treatment of electronic devices |
| US9343678B2 (en) | 2014-01-21 | 2016-05-17 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
| EP3975229A1 (en) * | 2014-01-21 | 2022-03-30 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
| KR102059313B1 (en) | 2014-04-30 | 2019-12-24 | 카티바, 인크. | Gas cushion apparatus and techniques for substrate coating |
| KR102190329B1 (en) * | 2019-07-11 | 2020-12-11 | 이상진 | Apparatus and method for aligning fccl |
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- 2011-10-18 CN CN201110316319.1A patent/CN102455540B/en not_active Expired - Fee Related
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| CN1527116A (en) * | 2003-03-07 | 2004-09-08 | 株式会社半导体能源研究所 | Liquid crystal display device and producing method thereof |
| US20070052914A1 (en) * | 2005-05-25 | 2007-03-08 | Masaaki Ito | Substrate assembly apparatus and substrate assembly method |
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| CN112684630A (en) * | 2019-10-17 | 2021-04-20 | 北京小米移动软件有限公司 | Backlight module assembly method, backlight module and terminal equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101182172B1 (en) | 2012-09-12 |
| KR20120040070A (en) | 2012-04-26 |
| TW201222076A (en) | 2012-06-01 |
| TWI467277B (en) | 2015-01-01 |
| CN102455540B (en) | 2014-10-22 |
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