CN102436854B - Horizontal air-bearing table - Google Patents
Horizontal air-bearing table Download PDFInfo
- Publication number
- CN102436854B CN102436854B CN 201110256009 CN201110256009A CN102436854B CN 102436854 B CN102436854 B CN 102436854B CN 201110256009 CN201110256009 CN 201110256009 CN 201110256009 A CN201110256009 A CN 201110256009A CN 102436854 B CN102436854 B CN 102436854B
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- Prior art keywords
- slide unit
- direction slide
- grooved
- air
- venthole
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- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000009795 derivation Methods 0.000 claims description 3
- 230000008676 import Effects 0.000 claims description 2
- 230000003137 locomotive effect Effects 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The invention discloses a horizontal air-bearing table. The table comprises a base, wherein a trough type X-direction sliding table covers the base; a trough type Y-direction sliding table covers the X-direction sliding table; the trough type X-direction sliding table is provided with first air inlet holes and first air outlet holes, which are communicated with each other; when air is led in via the first air inlet holes, the air is led out via the first air outlet holes and forms an air film on the covering surface between the base and the trough type X-direction sliding table; the trough type Y-direction sliding table is provided with second air inlet holes and second air outlet holes, which are communicated with each other; and when the air is led in via the second air inlet holes, the air is led out via the second air outlet holes and forms air films between the top surface of the base and bottom surfaces of two vertical troughs of the trough type Y-direction sliding table as well as on the covering facades between the X-direction sliding table and the trough type Y-direction sliding table. In the horizontal air-bearing table, the top surface of the base is the only reference surface, so that the Y-direction sliding table no longer has the accumulative error caused by the X-direction sliding table, thus X-direction and Y-direction movements of the equipment can be more accurately controlled.
Description
Technical field
The present invention relates to a kind of air floating table structure, a kind of Horizontal air-bearing table structure that can provide X-direction and Y-direction to slide is provided.
Background technology
Machining and detection field often need to provide simultaneously the equipment of X-direction and Y-direction locomotive function.
In prior art, this kind equipment is generally that the X-direction slide unit is set on a base, and the Y-direction slide unit further is set on this X-direction slide unit, and realizes the locomotive function of X-direction and Y-direction by the motion track of controlling described X-direction slide unit and Y-direction slide unit.
Yet, in said structure, the Y-direction slide unit is to be arranged on the X-direction slide unit, but can not directly be arranged on base, this has been subject to the impact of X-direction slide unit with regard to the kinematic accuracy that makes the Y-direction slide unit, make the error of X-direction slide unit also be accumulated to the Y-direction slide unit, thereby have influence on the running orbit of the equipment that the Y-direction slide unit drives.
Summary of the invention
The present invention is directed to the drawback of prior art, a kind of Horizontal air-bearing table is provided.
Horizontal air-bearing table of the present invention comprises base, and described base upper cover is buckled with grooved X-direction slide unit, and described X-direction slide unit upper cover is buckled with grooved Y-direction slide unit;
Wherein, described grooved X-direction slide unit offers the first air admission hole and first venthole of conducting, and when described the first air admission hole imported gas, described gas was from the first venthole derivation and in cover buckle side place's formation air film of base and grooved X-direction slide unit;
Described grooved Y-direction slide unit offers the second air admission hole and second venthole of conducting, when described the second air admission hole imports gas, described gas from the second venthole derive and between the bottom surface of the end face of base and two vertical grooves of grooved Y-direction slide unit and the cover of grooved X-direction slide unit and grooved Y-direction slide unit buckle facade place's formation air film.
In Horizontal air-bearing table of the present invention, described the first air admission hole is opened in grooved X-direction slide unit sidewall; Described the second air admission hole is opened in grooved Y-direction slide unit sidewall.
In Horizontal air-bearing table of the present invention, described the first venthole is opened in two vertical groove inside surfaces of grooved X-direction slide unit and the level trough inside surface of grooved X-direction slide unit.
In Horizontal air-bearing table of the present invention, described the first venthole comprises a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger are by rectangle, triangle, linear or circular arrangement.
In Horizontal air-bearing table of the present invention, described the second venthole is opened in the inside surface of two vertical grooves of the bottom surface of two vertical grooves of grooved Y-direction slide unit and grooved Y-direction slide unit.
In Horizontal air-bearing table of the present invention, described the second venthole comprises a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger are by rectangle, triangle, linear or circular arrangement.
In Horizontal air-bearing table of the present invention, make described X-direction slide unit and Y-direction slide unit take the end face of same base as support, and realize that take this end face as benchmark X-direction is moved and the Y-direction motion, the cumulative errors that described Y-direction slide unit there will be no the X-direction slide unit to cause, thereby the X-direction motion of opertaing device and Y-direction motion more accurately.
Description of drawings
Fig. 1 is the structural representation of Horizontal air-bearing table of the present invention;
Fig. 2 is the structural representation of another view angle of Horizontal air-bearing table of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing, can implement according to this with reference to the instructions word to make those skilled in the art.
As shown in Figure 1 and Figure 2, Horizontal air-bearing table of the present invention comprises base 1, and described base 1 upper cover is buckled with grooved X-direction slide unit 2, and described X-direction slide unit 2 upper covers are buckled with grooved Y-direction slide unit 3; Described X-direction slide unit 2 can slide on base 1, and because it is trench structure, also makes it to slide along the direction initialization of base 1; Described Y-direction slide unit 3 is that cover is buckled on the X-direction slide unit, because it is trench structure, therefore, makes it to do direction initialization with respect to base 1 and slides.
Wherein, described grooved X-direction slide unit 2 offers the first air admission hole 4 and first venthole 5 of conducting, and when described the first air admission hole 4 imported gas, described gas was from the first venthole 5 derivation and in the cover buckle side place formation air film 6 of base 1 with grooved X-direction slide unit 2.As can be seen from Figure 1, the cover buckle side of described base 1 and grooved X-direction slide unit 2 has comprised the part between the inside surface of two vertical grooves of part between the level trough inside surface of base 1 end face and X-direction slide unit 2 and base 1 two sides and X-direction slide unit 2.Described air film 6 both provided the support to X-direction slide unit 2 upward directions, had also limited X-direction slide unit 2 rocking in the horizontal direction, made this X-direction slide unit 2 only can slide along the direction initialization friction free of base 1.
Described grooved Y-direction slide unit 3 offers the second air admission hole 7 and second venthole 8,9 of conducting, when described the second air admission hole 7 imported gas, air film 10 and grooved X-direction slide unit 2 and grooved Y-direction slide unit 3 were derived respectively and formed to described gas from the second venthole 8,9 between the bottom surface of the end face of base 1 and two vertical grooves of grooved Y-direction slide unit 3 cover was buckled facade place's formation air film 11.Described air film 10 provides the support to Y-direction slide unit 3 horizontal directions, and air film 11 has limited Y-direction slide unit 3 rocking in the horizontal direction, makes this Y-direction slide unit 3 only can slide along the direction initialization friction free of base 1.In the present invention, X-direction slide unit 2 should be worked in coordination with the thickness of Y-direction slide unit 3, can make like this Y-direction slide unit 3 only can be subject in vertical direction the support of base 1, and 2 pairs of Y-direction slide units 3 of X-direction slide unit there is no the acting force of vertical direction, thereby can not be subjected to the impact of X-direction slide unit mismachining tolerance when making Y-direction slide unit 3 move on X-direction slide unit 2, also just guarantee that the external unit that X-direction slide unit and Y-direction slide unit drive is to do the motion of X-direction or Y-direction take base 1 as unique reference field.
In the present invention, described the first air admission hole 4 is opened in the sidewall of grooved X-direction slide unit 2; Described the second air admission hole 7 is opened in the sidewall of grooved Y-direction slide unit 3.Described the first venthole 5 can be opened in two of grooved X-direction slide unit 2 and found the inside surface of grooves and the level trough inside surface of grooved X-direction slide unit 2.This first venthole 4 can comprise a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger can be by rectangle, triangle, linear or circular arrangement.
In the present invention, described the second venthole can be opened in the inside surface (for example venthole in Fig. 2 8) of two vertical grooves of the bottom surface (for example venthole in Fig. 2 9) of two vertical grooves of grooved Y-direction slide unit 3 and grooved Y-direction slide unit 3.Described the second venthole can comprise a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger are by rectangle, triangle, linear or circular arrangement.
Although embodiment of the present invention are open as above, but it is not restricted to listed utilization in instructions and embodiment, it can be applied to various suitable the field of the invention fully, for those skilled in the art, can easily realize other modification, therefore do not deviating under the universal that claim and equivalency range limit, the present invention is not limited to specific details and illustrates here and the legend of describing.
Claims (6)
1. a Horizontal air-bearing table, comprise base, it is characterized in that, described base upper cover is buckled with grooved X-direction slide unit, and described X-direction slide unit upper cover is buckled with grooved Y-direction slide unit;
Wherein, described grooved X-direction slide unit offers the first air admission hole and first venthole of conducting, and when described the first air admission hole imported gas, described gas was from the first venthole derivation and in cover buckle side place's formation air film of base and grooved X-direction slide unit;
Described grooved Y-direction slide unit offers the second air admission hole and second venthole of conducting, when described the second air admission hole imports gas, described gas from the second venthole derive and between the bottom surface of the end face of base and two vertical grooves of grooved Y-direction slide unit and the cover of grooved X-direction slide unit and grooved Y-direction slide unit buckle facade place's formation air film.
2. Horizontal air-bearing table as claimed in claim 1, is characterized in that, described the first air admission hole is opened in grooved X-direction slide unit sidewall; Described the second air admission hole is opened in grooved Y-direction slide unit sidewall.
3. Horizontal air-bearing table as claimed in claim 2, is characterized in that, described the first venthole is opened in two vertical groove inside surfaces of grooved X-direction slide unit and the level trough inside surface of grooved X-direction slide unit.
4. Horizontal air-bearing table as claimed in claim 3, is characterized in that, described the first venthole comprises a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger are by rectangle, triangle, linear or circular arrangement.
5. Horizontal air-bearing table as claimed in claim 2, is characterized in that, described the second venthole is opened in the inside surface of two vertical grooves of the bottom surface of two vertical grooves of grooved Y-direction slide unit and grooved Y-direction slide unit.
6. Horizontal air-bearing table as claimed in claim 5, is characterized in that, described the second venthole comprises a plurality of apertures of giving vent to anger, and described a plurality of apertures of giving vent to anger are by rectangle, triangle, linear or circular arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110256009 CN102436854B (en) | 2011-09-01 | 2011-09-01 | Horizontal air-bearing table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110256009 CN102436854B (en) | 2011-09-01 | 2011-09-01 | Horizontal air-bearing table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102436854A CN102436854A (en) | 2012-05-02 |
| CN102436854B true CN102436854B (en) | 2013-06-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110256009 Expired - Fee Related CN102436854B (en) | 2011-09-01 | 2011-09-01 | Horizontal air-bearing table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102436854B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104165238B (en) * | 2013-05-16 | 2016-06-08 | 德阳市利通印刷机械有限公司 | A kind of automatic snifting valve of spring loaded being applied to air cushion worktable |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3438131B2 (en) * | 1998-11-24 | 2003-08-18 | 住友重機械工業株式会社 | XY stage device |
| CN201303947Y (en) * | 2008-11-27 | 2009-09-09 | 江苏省医疗器械检验所 | Medical ultrasonic detection system |
| CN101746711A (en) * | 2009-12-18 | 2010-06-23 | 北京工业大学 | H-shaped two-dimensional ultraprecise worktable structure |
| CN101935965A (en) * | 2010-09-10 | 2011-01-05 | 厦门大学 | Air-suspending T-shaped rail slider |
-
2011
- 2011-09-01 CN CN 201110256009 patent/CN102436854B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3438131B2 (en) * | 1998-11-24 | 2003-08-18 | 住友重機械工業株式会社 | XY stage device |
| CN201303947Y (en) * | 2008-11-27 | 2009-09-09 | 江苏省医疗器械检验所 | Medical ultrasonic detection system |
| CN101746711A (en) * | 2009-12-18 | 2010-06-23 | 北京工业大学 | H-shaped two-dimensional ultraprecise worktable structure |
| CN101935965A (en) * | 2010-09-10 | 2011-01-05 | 厦门大学 | Air-suspending T-shaped rail slider |
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| Publication number | Publication date |
|---|---|
| CN102436854A (en) | 2012-05-02 |
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Effective date of registration: 20190111 Address after: 300300 Baodi District, Tianjin, No. 7 Baokang Road, Energy Conservation and Environmental Protection Industrial Zone Patentee after: TIANJIN ZHONGJING MICRO INSTRUMENT EQUIPMENT CO.,LTD. Address before: Room 508, Building 19, Qingta Dongli, Fengtai District, Beijing 100039 Patentee before: Zhang Ruijie |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 |