CN102420150B - 形成用于导线回路和导电凸点的导线键合的方法 - Google Patents
形成用于导线回路和导电凸点的导线键合的方法 Download PDFInfo
- Publication number
- CN102420150B CN102420150B CN201110294325.1A CN201110294325A CN102420150B CN 102420150 B CN102420150 B CN 102420150B CN 201110294325 A CN201110294325 A CN 201110294325A CN 102420150 B CN102420150 B CN 102420150B
- Authority
- CN
- China
- Prior art keywords
- bond
- wire
- bonding
- target
- control value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/78268—Discharge electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
- H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
- H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
- H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85203—Thermocompression bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38670110P | 2010-09-27 | 2010-09-27 | |
| US61/386,701 | 2010-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102420150A CN102420150A (zh) | 2012-04-18 |
| CN102420150B true CN102420150B (zh) | 2016-12-07 |
Family
ID=45869649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110294325.1A Active CN102420150B (zh) | 2010-09-27 | 2011-09-26 | 形成用于导线回路和导电凸点的导线键合的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20120074206A1 (OSRAM) |
| JP (1) | JP6029269B2 (OSRAM) |
| KR (1) | KR101254218B1 (OSRAM) |
| CN (1) | CN102420150B (OSRAM) |
| SG (1) | SG179389A1 (OSRAM) |
| TW (1) | TWI489568B (OSRAM) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9153554B2 (en) * | 2012-04-22 | 2015-10-06 | Kulicke And Soffa Industries, Inc. | Methods of adjusting ultrasonic bonding energy on wire bonding machines |
| TWI534918B (zh) * | 2012-06-29 | 2016-05-21 | 庫利克和索夫工業公司 | 用以補償打線機上線徑變化之方法和系統 |
| US8899469B2 (en) * | 2013-03-04 | 2014-12-02 | Kulicke And Soffa Industries, Inc. | Automatic rework processes for non-stick conditions in wire bonding operations |
| US9093515B2 (en) * | 2013-07-17 | 2015-07-28 | Freescale Semiconductor, Inc. | Wire bonding capillary with working tip protrusion |
| US9257403B2 (en) * | 2013-11-26 | 2016-02-09 | Freescale Semiconductor, Inc. | Copper ball bond interface structure and formation |
| US20150194395A1 (en) * | 2014-01-03 | 2015-07-09 | Sohrab Safai | Bond pad having a trench and method for forming |
| US9889521B2 (en) * | 2014-12-02 | 2018-02-13 | Asm Technology Singapore Pte Ltd | Method and system for pull testing of wire bonds |
| JP6445943B2 (ja) * | 2015-08-24 | 2018-12-26 | 東芝メモリ株式会社 | 半導体装置の測定方法 |
| US10121759B2 (en) * | 2015-11-04 | 2018-11-06 | Kulicke And Soffa Industries, Inc. | On-bonder automatic overhang die optimization tool for wire bonding and related methods |
| CN105760591B (zh) * | 2016-02-04 | 2019-01-25 | 广州兴森快捷电路科技有限公司 | 封装基板键合引线的邦定方法 |
| US10325878B2 (en) | 2016-06-30 | 2019-06-18 | Kulicke And Soffa Industries, Inc. | Methods for generating wire loop profiles for wire loops, and methods for checking for adequate clearance between adjacent wire loops |
| CN110391129B (zh) * | 2018-04-20 | 2020-10-02 | 岛津分析技术研发(上海)有限公司 | 离子化装置、质谱仪、离子迁移谱仪及离子化方法 |
| EP3603826B1 (en) * | 2018-07-31 | 2023-05-10 | Infineon Technologies AG | Method for calibrating an ultrasonic bonding machine |
| TWI895537B (zh) | 2020-11-05 | 2025-09-01 | 美商庫利克和索夫工業公司 | 引線接合機的操作方法,包括監視引線接合機上的接合力的精確度的方法,以及其相關方法 |
| WO2023158625A1 (en) | 2022-02-15 | 2023-08-24 | Kulicke And Soffa Industries, Inc. | Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5566876A (en) * | 1993-07-16 | 1996-10-22 | Kaijo Corporation | Wire bonder and wire bonding method |
| US7699209B2 (en) * | 2005-12-28 | 2010-04-20 | Kabushiki Kaisha Shinkawa | Wire bonding apparatus, record medium storing bonding control program, and bonding method |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3458921A (en) * | 1965-07-19 | 1969-08-05 | Western Electric Co | Short pulse vibratory bonding |
| US5201454A (en) * | 1991-09-30 | 1993-04-13 | Texas Instruments Incorporated | Process for enhanced intermetallic growth in IC interconnections |
| JP2992427B2 (ja) * | 1993-07-16 | 1999-12-20 | 株式会社カイジョー | ワイヤボンディング装置及びその方法 |
| US5858142A (en) * | 1997-02-27 | 1999-01-12 | Inertia Friction Welding, Inc. | Angular orientation control system for friction welding |
| JP2000299348A (ja) | 1999-04-13 | 2000-10-24 | Rohm Co Ltd | ボール式ワイヤボンディングにおけるボール部の最適接合条件の算出方法 |
| KR100604316B1 (ko) | 2004-06-18 | 2006-07-24 | 삼성테크윈 주식회사 | 본딩 파라메터들이 자동적으로 설정되는 와이어 본더 |
| US8658942B2 (en) * | 2004-12-16 | 2014-02-25 | Illinois Tool Works Inc. | Method and system of welding with auto-determined startup parameters |
| US8546728B2 (en) * | 2005-03-04 | 2013-10-01 | Illinois Tool Works Inc. | Welder with integrated wire feeder having single-knob control |
| US7845542B2 (en) * | 2005-09-22 | 2010-12-07 | Palomar Technologies, Inc. | Monitoring deformation and time to logically constrain a bonding process |
| EP1897648B1 (en) * | 2006-09-05 | 2010-06-30 | Technische Universität Berlin | Method and device for controlling the generation of ultrasonic wire bonds |
| JP2008084897A (ja) * | 2006-09-25 | 2008-04-10 | Nagase Denshi Kiki Service Kk | 半導体パッケージの設計・製造システムおよびプログラム |
| JP4786500B2 (ja) * | 2006-10-26 | 2011-10-05 | 株式会社東芝 | ワイヤボンディング装置及びワイヤボンディング方法 |
| DE102007054626A1 (de) * | 2007-11-12 | 2009-05-14 | Hesse & Knipps Gmbh | Verfahren und Vorrichtung zum Ultraschallbonden |
| KR20090110406A (ko) * | 2008-04-18 | 2009-10-22 | 삼성테크윈 주식회사 | 와이어 본딩 방법 |
| US20090283501A1 (en) * | 2008-05-15 | 2009-11-19 | General Electric Company | Preheating using a laser beam |
| US8378249B2 (en) * | 2008-05-29 | 2013-02-19 | Illinois Tool Works Inc. | Method and apparatus for proportional valve actuation in a plasma cutter |
| US8927913B2 (en) * | 2008-06-30 | 2015-01-06 | The Invention Science Fund I, Llc | Microwave processing systems and methods |
| CA2733178C (en) * | 2008-08-11 | 2016-05-24 | Megastir Technologies Llc | A method for using modifiable tool control parameters to control the temperature of the tool during friction stir welding |
| US7762449B2 (en) * | 2008-11-21 | 2010-07-27 | Asm Assembly Automation Ltd | Bond head for heavy wire bonder |
| US8274020B2 (en) * | 2010-05-04 | 2012-09-25 | Whirlpool Corporation | Apparatus and method of controlling a triple heating element of a cooking appliance |
-
2011
- 2011-09-19 US US13/235,844 patent/US20120074206A1/en not_active Abandoned
- 2011-09-24 JP JP2011208268A patent/JP6029269B2/ja active Active
- 2011-09-26 CN CN201110294325.1A patent/CN102420150B/zh active Active
- 2011-09-26 KR KR20110096872A patent/KR101254218B1/ko active Active
- 2011-09-27 SG SG2011070091A patent/SG179389A1/en unknown
- 2011-09-27 TW TW100134754A patent/TWI489568B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5566876A (en) * | 1993-07-16 | 1996-10-22 | Kaijo Corporation | Wire bonder and wire bonding method |
| US7699209B2 (en) * | 2005-12-28 | 2010-04-20 | Kabushiki Kaisha Shinkawa | Wire bonding apparatus, record medium storing bonding control program, and bonding method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102420150A (zh) | 2012-04-18 |
| TWI489568B (zh) | 2015-06-21 |
| KR20120031909A (ko) | 2012-04-04 |
| JP6029269B2 (ja) | 2016-11-24 |
| KR101254218B1 (ko) | 2013-04-18 |
| JP2012074699A (ja) | 2012-04-12 |
| TW201214591A (en) | 2012-04-01 |
| US20120074206A1 (en) | 2012-03-29 |
| SG179389A1 (en) | 2012-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102420150B (zh) | 形成用于导线回路和导电凸点的导线键合的方法 | |
| CN101193724B (zh) | 形成低型面线弧的方法 | |
| EP0791955A2 (en) | Improvements in or relating to integrated circuit interconnections | |
| US9543267B2 (en) | Ultra fine pitch wedge for thicker wire | |
| US11495570B2 (en) | Systems and methods for optimizing looping parameters and looping trajectories in the formation of wire loops | |
| JP7780583B2 (ja) | ワイヤーループのワイヤーループプロファイルを生成する方法、および隣接したワイヤーループ間に十分な間隙があるか検証する方法 | |
| US7475802B2 (en) | Method for low loop wire bonding | |
| TW200529397A (en) | Method for producing a wedge-wedge wire connection | |
| US6270000B1 (en) | Wire bonding method | |
| CN101652844B (zh) | 在引线环中形成弯曲的方法 | |
| KR100548795B1 (ko) | 자동 와이어 본딩 시스템의 본더 뷰어 시스템 | |
| US12417997B2 (en) | Wire bonding apparatus, method for manufacture of semiconductor device, and semiconductor device | |
| Xu et al. | Wire Bonding Advances for Multi-Chip and System in Package Devices | |
| CN114725009A (zh) | 形成引线互连结构的方法以及相关的焊线工具 | |
| TW202038351A (zh) | 打線接合裝置、半導體裝置的製造方法以及半導體裝置 | |
| US20250201765A1 (en) | Methods of operating wire bonding systems, including methods of detecting and/or preventing wire fly-out on such systems | |
| TW202410312A (zh) | 改進導線接合操作的方法 | |
| WO2011037869A2 (en) | Methods of forming wire bonds for wire loops and conductive bumps | |
| US20240055388A1 (en) | Bump-forming device, bump-forming method, and non-transitory computer-readable medium | |
| Kumar et al. | A Wire Bond Process Optimization Strategy for Very Fine Pitch Development | |
| WO2022013955A1 (ja) | ワイヤボンディング装置及び半導体装置の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |