CN102420150B - 形成用于导线回路和导电凸点的导线键合的方法 - Google Patents

形成用于导线回路和导电凸点的导线键合的方法 Download PDF

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CN102420150B
CN102420150B CN201110294325.1A CN201110294325A CN102420150B CN 102420150 B CN102420150 B CN 102420150B CN 201110294325 A CN201110294325 A CN 201110294325A CN 102420150 B CN102420150 B CN 102420150B
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bond
wire
bonding
target
control value
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CN102420150A (zh
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W·秦
J·W·布伦纳
P·A·里德
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Kulicke and Soffa Investments Inc
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
CN201110294325.1A 2010-09-27 2011-09-26 形成用于导线回路和导电凸点的导线键合的方法 Active CN102420150B (zh)

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Application Number Priority Date Filing Date Title
US38670110P 2010-09-27 2010-09-27
US61/386,701 2010-09-27

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CN102420150A CN102420150A (zh) 2012-04-18
CN102420150B true CN102420150B (zh) 2016-12-07

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US (1) US20120074206A1 (OSRAM)
JP (1) JP6029269B2 (OSRAM)
KR (1) KR101254218B1 (OSRAM)
CN (1) CN102420150B (OSRAM)
SG (1) SG179389A1 (OSRAM)
TW (1) TWI489568B (OSRAM)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9153554B2 (en) * 2012-04-22 2015-10-06 Kulicke And Soffa Industries, Inc. Methods of adjusting ultrasonic bonding energy on wire bonding machines
TWI534918B (zh) * 2012-06-29 2016-05-21 庫利克和索夫工業公司 用以補償打線機上線徑變化之方法和系統
US8899469B2 (en) * 2013-03-04 2014-12-02 Kulicke And Soffa Industries, Inc. Automatic rework processes for non-stick conditions in wire bonding operations
US9093515B2 (en) * 2013-07-17 2015-07-28 Freescale Semiconductor, Inc. Wire bonding capillary with working tip protrusion
US9257403B2 (en) * 2013-11-26 2016-02-09 Freescale Semiconductor, Inc. Copper ball bond interface structure and formation
US20150194395A1 (en) * 2014-01-03 2015-07-09 Sohrab Safai Bond pad having a trench and method for forming
US9889521B2 (en) * 2014-12-02 2018-02-13 Asm Technology Singapore Pte Ltd Method and system for pull testing of wire bonds
JP6445943B2 (ja) * 2015-08-24 2018-12-26 東芝メモリ株式会社 半導体装置の測定方法
US10121759B2 (en) * 2015-11-04 2018-11-06 Kulicke And Soffa Industries, Inc. On-bonder automatic overhang die optimization tool for wire bonding and related methods
CN105760591B (zh) * 2016-02-04 2019-01-25 广州兴森快捷电路科技有限公司 封装基板键合引线的邦定方法
US10325878B2 (en) 2016-06-30 2019-06-18 Kulicke And Soffa Industries, Inc. Methods for generating wire loop profiles for wire loops, and methods for checking for adequate clearance between adjacent wire loops
CN110391129B (zh) * 2018-04-20 2020-10-02 岛津分析技术研发(上海)有限公司 离子化装置、质谱仪、离子迁移谱仪及离子化方法
EP3603826B1 (en) * 2018-07-31 2023-05-10 Infineon Technologies AG Method for calibrating an ultrasonic bonding machine
TWI895537B (zh) 2020-11-05 2025-09-01 美商庫利克和索夫工業公司 引線接合機的操作方法,包括監視引線接合機上的接合力的精確度的方法,以及其相關方法
WO2023158625A1 (en) 2022-02-15 2023-08-24 Kulicke And Soffa Industries, Inc. Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566876A (en) * 1993-07-16 1996-10-22 Kaijo Corporation Wire bonder and wire bonding method
US7699209B2 (en) * 2005-12-28 2010-04-20 Kabushiki Kaisha Shinkawa Wire bonding apparatus, record medium storing bonding control program, and bonding method

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458921A (en) * 1965-07-19 1969-08-05 Western Electric Co Short pulse vibratory bonding
US5201454A (en) * 1991-09-30 1993-04-13 Texas Instruments Incorporated Process for enhanced intermetallic growth in IC interconnections
JP2992427B2 (ja) * 1993-07-16 1999-12-20 株式会社カイジョー ワイヤボンディング装置及びその方法
US5858142A (en) * 1997-02-27 1999-01-12 Inertia Friction Welding, Inc. Angular orientation control system for friction welding
JP2000299348A (ja) 1999-04-13 2000-10-24 Rohm Co Ltd ボール式ワイヤボンディングにおけるボール部の最適接合条件の算出方法
KR100604316B1 (ko) 2004-06-18 2006-07-24 삼성테크윈 주식회사 본딩 파라메터들이 자동적으로 설정되는 와이어 본더
US8658942B2 (en) * 2004-12-16 2014-02-25 Illinois Tool Works Inc. Method and system of welding with auto-determined startup parameters
US8546728B2 (en) * 2005-03-04 2013-10-01 Illinois Tool Works Inc. Welder with integrated wire feeder having single-knob control
US7845542B2 (en) * 2005-09-22 2010-12-07 Palomar Technologies, Inc. Monitoring deformation and time to logically constrain a bonding process
EP1897648B1 (en) * 2006-09-05 2010-06-30 Technische Universität Berlin Method and device for controlling the generation of ultrasonic wire bonds
JP2008084897A (ja) * 2006-09-25 2008-04-10 Nagase Denshi Kiki Service Kk 半導体パッケージの設計・製造システムおよびプログラム
JP4786500B2 (ja) * 2006-10-26 2011-10-05 株式会社東芝 ワイヤボンディング装置及びワイヤボンディング方法
DE102007054626A1 (de) * 2007-11-12 2009-05-14 Hesse & Knipps Gmbh Verfahren und Vorrichtung zum Ultraschallbonden
KR20090110406A (ko) * 2008-04-18 2009-10-22 삼성테크윈 주식회사 와이어 본딩 방법
US20090283501A1 (en) * 2008-05-15 2009-11-19 General Electric Company Preheating using a laser beam
US8378249B2 (en) * 2008-05-29 2013-02-19 Illinois Tool Works Inc. Method and apparatus for proportional valve actuation in a plasma cutter
US8927913B2 (en) * 2008-06-30 2015-01-06 The Invention Science Fund I, Llc Microwave processing systems and methods
CA2733178C (en) * 2008-08-11 2016-05-24 Megastir Technologies Llc A method for using modifiable tool control parameters to control the temperature of the tool during friction stir welding
US7762449B2 (en) * 2008-11-21 2010-07-27 Asm Assembly Automation Ltd Bond head for heavy wire bonder
US8274020B2 (en) * 2010-05-04 2012-09-25 Whirlpool Corporation Apparatus and method of controlling a triple heating element of a cooking appliance

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566876A (en) * 1993-07-16 1996-10-22 Kaijo Corporation Wire bonder and wire bonding method
US7699209B2 (en) * 2005-12-28 2010-04-20 Kabushiki Kaisha Shinkawa Wire bonding apparatus, record medium storing bonding control program, and bonding method

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TWI489568B (zh) 2015-06-21
KR20120031909A (ko) 2012-04-04
JP6029269B2 (ja) 2016-11-24
KR101254218B1 (ko) 2013-04-18
JP2012074699A (ja) 2012-04-12
TW201214591A (en) 2012-04-01
US20120074206A1 (en) 2012-03-29
SG179389A1 (en) 2012-04-27

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