CN102401630A - Spatial phase shift Fizeau spherical interferometer - Google Patents
Spatial phase shift Fizeau spherical interferometer Download PDFInfo
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Abstract
The invention relates to a spatial phase shift Fizeau spherical interferometer, which is characterized in that: the incident surface of a standard lens is plated with a double refraction film and is a plane, and the emergent surface is a spherical surface; the reflection light path of a first beam splitter is provided with a second beam splitter, a second collimation lens, a Dammann grating, an analyzer array, a second image sensor and a computer; a first image sensor is disposed in the reflection light direction of the second beam splitter, so that the spherical surface to be measured can be adjusted conveniently; and the computer is convenient for image data processing. The interferometer can realize profile measurement of measured elements on the spherical surface. The interferometer can obtain multiple phase shift interference images with a certain phase shift quantity. The interferometer uses the circular polarization reference light and the measuring light to reduce influence of residual double refraction of the collimation lens and the standard lens. 1/4 of wave plate is no longer used in the phase shift light path, so that measuring accuracy of surface shape is improved.
Description
Technical field
The present invention relates to field of optical measuring technologies, particularly a kind of space phase-shift fiso sphericity interferometer.
Background technology
The Feisuo interferometer is included in reference arm in the gage beam, has realized the common light path interference of measuring light and reference light and has had very high measuring accuracy, in optical measurement, is widely used.The space phase-shift fiso interferometer that the Feisuo interferometer combines with spacing phase shifter to form can be realized the anti-vibration measurement, has reduced the requirement to measurement environment, can also carry out the real-time measurement on corrugated.
Formerly technology [1] is (referring to Sanjib Chatterjeea; Y.Pawan Kumara; Et al..Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer.Optics & Laser Technology; 39,268-274,2007) a kind of space phase-shift fiso interferometer described.The linearly polarized light that is produced by light source becomes parallel beam through filtering, after expanding bundle, collimation, and it forms two-beam on the reference surface of standard mirror output terminal, a branch of light since reference surface reflect to form the linear polarization reference light, another bundle sees through reference surface and forms measuring light.Between standard mirror and detected element, place a quarter-wave plate, then measuring light makes its polarization direction half-twist through twice process quarter-wave plate before and after the tested surface reflection, and promptly the polarization direction of linear polarization measuring light is vertical with the polarization direction of reference light.Orthogonal measuring light in two bundle polarization directions and reference light can form several phase-shift interference images with certain amount of phase shift through another piece quarter-wave plate, optical splitter, analyzer array and imageing sensor successively simultaneously through behind the collimation.
Formerly technology [2] (referring to Ceng Aijun, Guo Xiaoxian, Jiang Xiaojun etc., synchronous phase-shift fiso interferometer. the patent No.: CN 200820151412.5) a kind of space phase-shift fiso interferometer described.This interferometer is coated with birefringent film and replaces the quarter-wave plate between the standard mirror and detected element in the technology [1] earlier to change the polarization direction of measuring light on the exit facet of standard mirror.The mutual interface of standard mirror and birefringent film is a reference surface, utilizes its reflection and transmission to form orthogonal linear polarization measuring light in polarization direction and linear polarization reference light.Reference light and measuring light produce several phase-shift interference images with certain amount of phase shift after getting into the synchro phase shifter that includes quarter-wave plate.
Above-mentioned two kinds of technology have been used quarter-wave plate or equivalent quarter-wave plate between standard mirror and detected element; And quarter-wave plate can only use in parallel beam; So can only realize that face shape is the measurement of the detected element on plane, promptly above-mentioned two kinds of space phase-shift fiso interferometers can only be the Feisuo flat interferometers.Reference light and measuring light are linearly polarized light, and its planar survey error and residual birefringence are linear, so measuring accuracy receives the influence of residual birefringence of spectroscope, collimating mirror and standard mirror big.In phase shifter, must use quarter-wave plate, its retardation sum of errors fast axis direction angle error all can reduce measuring accuracy.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned prior art, proposed a kind of space phase-shift fiso sphericity interferometer.This space phase-shift fiso sphericity interferometer can obtain to have several phase-shift interference images of certain amount of phase shift.This space phase-shift fiso sphericity interferometer is coated with birefringent film on the plane of incidence of standard mirror, the exit facet of standard mirror is a sphere, can realize the surface shape measurement of sphere detected element.This space phase-shift fiso sphericity interferometer adopts circular polarization reference light and measuring light, reduces the influence of the residual birefringence of collimation lens and standard mirror.Do not re-use quarter-wave plate in the phase shift light path, improve the measuring accuracy of face shape.
Technical solution of the present invention:
A kind of space phase-shift fiso sphericity interferometer; Characteristics are it and are made up of collimated light source, the circle polarizer, condenser lens, diaphragm, first beam splitter, first collimation lens, birefringent film type sphere standard mirror, second beam splitter, first imageing sensor, second collimation lens, Darman raster, analyzer array, second imageing sensor and computing machine; Its position relation is: along the light beam working direction of described collimated light source; Be the described round polarizer, condenser lens, diaphragm, first beam splitter, first collimation lens, birefringent film type sphere standard mirror successively, described diaphragm is positioned at the back focus of described condenser lens and the front focus of described first collimation lens.Place second beam splitter at described first beam splitter on perpendicular to the working direction of above-mentioned light beam; Second beam splitter is divided into two-way with light beam; Wherein one road light is received by first imageing sensor, and other one road light is through second collimation lens, Darman raster, analyzer array, second imageing sensor and computing machine.Be positioned at when sphere to be measured on the exit direction of described birefringent film type sphere standard mirror.The centre of sphere of sphere to be measured overlaps with the focus of birefringent film type sphere standard mirror.
Described birefringent film type sphere standard mirror is made up of birefringent film and sphere standard mirror, and the plane of incidence of sphere standard mirror is the plane, and exit facet is a sphere.Birefringent film is plated on the plane of incidence of sphere standard mirror, and its phase-delay quantity is 90 °.
Described Darman raster is two-dimentional zero suppression level Darman raster, and it utilizes diffraction effect that a branch of incident light is formed the beamlet that four light intensity equate.
Described analyzer array is combined to form in same plane by four analyzers, and the light transmission shaft direction of four analyzers is respectively 0 °, 45 °, 90 ° and 135 °.
With compared with techniques formerly, technique effect of the present invention is following:
1, space of the present invention phase-shift fiso sphericity interferometer; Characteristics are on the plane of incidence of standard mirror, to be coated with birefringent film, and the plane of incidence of this standard mirror is the plane, and exit facet is a sphere; On the reflected light path of first beam splitter; Be provided with second beam splitter, second collimation lens, Darman raster, analyzer array, second imageing sensor and computing machine, be provided with first imageing sensor, with the adjusting of convenient sphere to be measured in the reflected light direction of described second beam splitter; Described computing machine is convenient to the view data processing, and the present invention is at the surface shape measurement that can realize the sphere detected element.This space phase-shift fiso sphericity interferometer can obtain to have several phase-shift interference images of certain amount of phase shift.This space phase-shift fiso sphericity interferometer adopts circular polarization reference light and measuring light, reduces the influence of the residual birefringence of collimation lens and standard mirror.Do not re-use quarter-wave plate in the phase shift light path, improve the measuring accuracy of face shape.
2, measuring light and reference light are circularly polarized light, and its surface shape measurement error becomes quadratic relationship with residual birefringence.Because the residual birefringence of spectroscope, collimating mirror and standard mirror is smaller, so the surface shape measurement error is significantly less than the measuring error of linear polarization measuring light and linear polarization reference light.
3, do not re-use quarter-wave plate in the phase shift light path, improve the measuring accuracy of face shape.
Description of drawings
Fig. 1 is the structured flowchart of space of the present invention phase-shift fiso sphericity interferometer.
Fig. 2 is the structural drawing of birefringent film type sphere standard mirror in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further, but should limit protection scope of the present invention with this.
See also Fig. 1 earlier, Fig. 1 is the structural drawing of space of the present invention phase-shift fiso sphericity interferometer.Visible by Fig. 1; Space of the present invention phase-shift fiso sphericity interferometer is made up of with computing machine 14 collimated light source 1, the circle polarizer 2, condenser lens 3, diaphragm 4, first beam splitter 5, first collimation lens 6, birefringent film type sphere standard mirror 7, second beam splitter 8, first imageing sensor 9, second collimation lens 10, Darman raster 11, analyzer array 12, second imageing sensor 13.Its position relation is: along the light beam working direction of described collimated light source 1, be the described round polarizer 2, condenser lens 3, diaphragm 4, first beam splitter 5, first collimation lens 6, birefringent film type sphere standard mirror 7 successively.Described diaphragm 4 is positioned at the back focus of described condenser lens 3 and the front focus of described first collimation lens 6.Place second beam splitter 8 at described first beam splitter 5 perpendicular to the working direction of above-mentioned light beam; Second beam splitter 8 is divided into two-way with light beam; Wherein one road light is received by first imageing sensor 9, and other one road light is through second collimation lens 10, Darman raster 11, analyzer array 12, second imageing sensor 13 and computing machine 14.Sphere 15 to be measured is positioned at described collimated light beam through on the exit direction of described birefringent film type sphere standard mirror 7, and the centre of sphere of sphere 15 to be measured overlaps with the focus of birefringent film type sphere standard mirror 7.
In the present embodiment
The structure of described birefringent film type sphere standard mirror 7 is as shown in Figure 2, is made up of birefringent film 701 and sphere standard mirror 702, and the plane of incidence of sphere standard mirror 702 is the plane, and exit facet is a sphere.Birefringent film 701 is coated on the plane of incidence of sphere standard mirror 702, and its phase-delay quantity is 90 °.
Described Darman raster 11 is two-dimentional zero suppression level Darman rasters, and it utilizes diffraction effect that a branch of incident light is formed the beamlet that four light intensity equate.
Described analyzer array 12 is combined to form in same plane by four analyzers, and the light transmission shaft direction of four analyzers is respectively 0 °, 45 °, 90 ° and 135 °.
Measuring process of the present invention is following:
The light beam of collimated light source 1 output becomes circularly polarized light through the circle polarizer 2, and circularly polarized light is focused on by condenser lens 3 and carries out filtering on the diaphragm 4, and filtered light beam expands through first beam splitter 5, first collimation lens, 6 backs restraints into parallel beam.When this parallel beam passes through birefringent film type sphere standard mirror 7; On the front surface of birefringent film 701, produce two-beam; A branch of light forms reference light by the front surface reflection of birefringent film 701, and another bundle light transmission birefringent film 701 forms measuring light with sphere standard mirror 702.Measuring light is by tested surface reflection back twice process birefringent film 701, and the rotation direction of this circularly polarized light produces counter-rotating, and measuring light is vertical each other with the polarization direction of reference light.If reference light is a right-circularly polarized light, then measuring light is a left circularly polarized light.If reference light is a left circularly polarized light, then measuring light is a right-circularly polarized light.Measuring light and reference light get into second beam splitter 8 by first beam splitter, 5 reflection backs and are divided into two-way, and wherein one road light incides first imageing sensor 9.
Adjust the position of sphere 15 to be measured, the hot spot of measuring light and the hot spot of reference light are overlapped on first imageing sensor 9, during coincidence, the centre of sphere of sphere 15 then to be measured overlaps with the focus of described birefringent film type sphere standard mirror 7.
This moment, another road light became parallel beam through second collimation lens 10, and this light beam gets into Darman raster 11 backs and produces the beamlet that four intensity equate.This four sub-beams is received by second imageing sensor 13 through analyzer array 12 backs, forms to have four width of cloth phase-shift interference images of certain amount of phase shift, and is transferred to and carries out Flame Image Process in the computing machine 14, and the face shape that obtains sphere to be measured distributes.Its image processing algorithm sees also technology [2] (James Millerd formerly; Neal Brock, John Hayes, et al..Pixelated Phase-Mask Dynamic Interferometer.Proceedings of SPIE Vol.5531; 2048-314,2004).
The light channel structure of most preferred embodiment of the present invention is as shown in Figure 1, and its concrete structure and statement parameter are following:
Described collimated light source 1 is the He-Ne laser instrument, and the described round polarizer 2 is superior to 10 for the extinction ratio of utilizing calcite crystal and quartz crystal to be made into
-3The round polarizer; The focal length of described condenser lens 3 is 15mm; The diameter of described diaphragm 4 is 10 μ m, and described first beam splitter 5 and second beam splitter 8 are the depolarization Amici prism, and the focal length of described first collimation lens 6 is 300mm; The structure of described refraction film-type sphere standard mirror 7 is as shown in Figure 2, and birefringent film 701 equals 90 ° TiO for phase-delay quantity
2Birefringent film, the focal length of described second collimation lens 10 are 20mm, and the grid line width of described Darman raster 11 is that four analyzers in 20 μ m, the described analyzer array 12 are that extinction ratio is superior to 10
-2Polaroid, described first imageing sensor 9 and second imageing sensor 13 are ccd image sensor.
The described space of most preferred embodiment phase-shift fiso sphericity interferometer is carried out surface shape measurement to sphere 15 to be measured; Single acquisition can obtain four width of cloth phase-shift interference images that amount of phase shift is respectively 0 °, 90 °, 180 °, 270 ° simultaneously, and then obtains the face shape distribution of sphere to be measured.
Claims (4)
1. space phase-shift fiso sphericity interferometer; Comprise collimated light source (1), the circle polarizer (2), condenser lens (3), diaphragm (4), first beam splitter (5), first collimation lens (6), first imageing sensor (9), second collimation lens (10), Darman raster (11), analyzer array (12), second imageing sensor (13) and computing machine (14); It is characterized in that between described first collimation lens (6) and sphere to be measured (15), being provided with birefringent film type sphere standard mirror (7); Its position relation is: the light beam working direction that the described collimated light source in edge (1) sends; Be the described round polarizer (2), condenser lens (3), diaphragm (4), first beam splitter (5), first collimation lens (6), birefringent film type sphere standard mirror (7) and reach on the described sphere to be measured (15) successively; After the reflection of this sphere to be measured (15) on the reflected light path of described first beam splitter (5); Be second beam splitter (8), second collimation lens (10), Darman raster (11), analyzer array (12), second imageing sensor (11) and computing machine (14) successively; Reflected light direction at described second beam splitter (8) is provided with first imageing sensor (9); Described diaphragm (4) is positioned at the back focus of described condenser lens (3) and the front focus of described first collimation lens (6), and sphere to be measured (15) is positioned on the exit direction of described collimated light beam through described birefringent film type sphere standard mirror (7).
2. space according to claim 1 phase-shift fiso sphericity interferometer; It is characterized in that described birefringent film type sphere standard mirror (7) is made up of birefringent film and sphere standard mirror; The plane of incidence of sphere standard mirror is the plane; Exit facet is a sphere, and described birefringent film is plated on the plane of incidence of sphere standard mirror, and its phase-delay quantity is 90 °.
3. space according to claim 1 phase-shift fiso sphericity interferometer is characterized in that described Darman raster (11) is two-dimentional zero suppression level Darman raster, and it utilizes diffraction effect that a branch of incident light is formed the beamlet that four light intensity equate.
4. space according to claim 1 phase-shift fiso sphericity interferometer is characterized in that described analyzer array (12) is combined to form in same plane by four analyzers, and the light transmission shaft direction of four analyzers is respectively 0 °, 45 °, 90 ° and 135 °.
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| CN104315971A (en) * | 2014-10-30 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Dual-wavelength Fizeau laser interferometer |
| CN105091781A (en) * | 2015-05-21 | 2015-11-25 | 中国科学院光电技术研究所 | Optical surface measuring method and apparatus using single-frame interference fringe pattern |
| CN108061514A (en) * | 2016-11-07 | 2018-05-22 | 南京理工大学 | It is a kind of that aspherical dynamic modelling method is detected using axial scan optical interferometry |
| CN110319769A (en) * | 2019-06-25 | 2019-10-11 | 南京理工大学 | Anti-vibration Feisuo interferometric measuring means and method |
| CN112378346A (en) * | 2020-10-30 | 2021-02-19 | 中国计量大学 | Phase compensation method for polarization aberration of large-caliber polarization phase-shifting Fizeau interferometer |
| CN113728209A (en) * | 2019-04-26 | 2021-11-30 | 株式会社岛津制作所 | Interference image pickup device |
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Effective date of registration: 20190925 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 800-211 201800 post office box, Shanghai, Jiading District Patentee before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences |