CN102398316B - Anti-jumping method applied to slicing machine - Google Patents
Anti-jumping method applied to slicing machine Download PDFInfo
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- CN102398316B CN102398316B CN201010286086.0A CN201010286086A CN102398316B CN 102398316 B CN102398316 B CN 102398316B CN 201010286086 A CN201010286086 A CN 201010286086A CN 102398316 B CN102398316 B CN 102398316B
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Abstract
The invention provides an anti-jumping method applied to a slicing machine. The slicing machine is at least provided with a frame, a plurality of cutting lines and a plurality of cutting rollers. The cutting lines are correspondingly wound on the cutting rollers to form a cutting net. The method mainly comprises the following steps of: suspending a pair of vertically arranged guard plates above the cutting net and respectively arranging the pair of guard plates across the upper part of the adjacent cutting roller; descending the guard plates when operating the cutting lines, so that the guard plates are cut when the cutting lines are compressed by the guard plates; and stopping descending the guard plates when the guard plates are cut to a preset depth, at the time, forming limit grooves which are cut to be formed by the cutting lines on the guard plates, and providing anti-jumping protection on the cutting lines which continuously operate in the grooves by the limit grooves, so that the aim of preventing wire jumping is achieved, and thus, the processing quality and the production efficiency of a silicon slice are improved.
Description
Technical field
The present invention relates to multi-wire saw technical field, particularly relate to a kind of wire jumping prevention method that is applied to slicer.
Background technology
Multi-wire saw technology is current more advanced silicon chip process technology in the world, and its principle is to drive the cutting blade material being attached on steel wire to rub to hard brittle materials such as semiconductors by the steel wire of a high-speed motion, thereby reaches cutting effect.In whole process, steel wire is by the guiding of tens guide rollers, on main line roller, form a bracing cable net, and workpiece to be processed is realized the feeding of workpiece by the rise and fall of workbench, the hard brittle materials such as semiconductor once can be cut into hundreds of simultaneously, multi-wire saw technology has compared with traditional knife saw sheet, grinding wheel and inner circle cutting that to have efficiency high, and production capacity is high, precision advantages of higher, multi-wire saw technology is to adopt at present the most widely the hard brittle material cutting techniques such as semiconductor.
In the prior art, be by line of cut equably on columniform line storage tube, walk line mechanism by guide roller, cutting roller etc. and form the wire system of walking that can come and go.Described line of cut is wound to using in trough of cutting roller via guide roller guiding, so that described line of cut is not offset walking in line process.But, in the process of actual cut workpiece, because the rigidity of the precision of guide roller, coil holder and the tension force of line of cut on line storage tube can not uniformities, add and at a high speed walk line of cut in line process and can constantly shake, and walking line process is that Dragsaw type moves back and forth, so just be easy to line of cut is jumped out, cause cabling to be offset (claim in the industry wire jumper or jump silk), say specifically, described line of cut by original jumping in the trough for subsequent use on side with trough, make described line of cut depart from origin-location, just caused jumping the generation of silk phenomenon.
Due to what normally seal between the cutting area of multi-line cutting machine, operating personnel can not be observed visually the generation of wire jumper phenomenon, and the work piece cut inaccuracy being caused by wire jumper, cut surface produces the problems such as lines and directly has influence on the quality that silicon chip is processed, severe patient, more can cause the waste of silicon chip, not only loses time and cost, also reduced the efficiency of producing, a real large problem for can not be ignored simultaneously; Moreover, in order to solve the problem of wire jumper, the dealer of association area attempts additionally setting up the stopping means of cabling, but due to cabling interval or the cabling precision difference of different cutting operations requirements, be difficult to propose a kind of design of general wire jumping prevention method, for this reason, many design and manufacture costs have also been wasted.
So, how a kind of wire jumping prevention method that is applied to slicer is provided, to avoid above-described shortcoming, real is the current problem demanding prompt solution of dealer of association area.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of wire jumping prevention method that is applied to slicer, to solve the slicer of prior art in cutting process, the easy crudy that produces wire jumper phenomenon and then have influence on silicon chip, lose time with cost and reduce the problems such as production efficiency, simultaneously also in order to propose a kind of general wire jumping prevention method for designing.
For achieving the above object and other relevant objects, the invention provides a kind of wire jumping prevention method that is applied to slicer, described slicer at least has frame, many lines of cut and multiple cutting roller, described many line of cut correspondences are wrapped on described multiple cutting roller to form a cutting net, it is characterized in that: first, at the outstanding baffle of establishing a pair of vertical setting in the online side of described cutting, and make this baffle is located at respectively to the top of closing on described cutting roller; Then, move described line of cut; And vertically decline this to baffle, cut while making described baffle oppress described line of cut; In the time that described baffle is cut predetermined depth, stop declining this to baffle, now respectively on this baffle, be formed with the stopper slot that many cut line cuttings form, provide wire jumping prevention protection by described stopper slot to the line of cut remaining running in groove.
In the wire jumping prevention method that is applied to slicer of the present invention, a pair of connecting plate that can vertical lifting is set in described frame, this is located at respectively the top of described cutting roller to connecting plate.This is separately fixed at this on connecting plate to baffle, is driven and is declined by described connecting plate.Described baffle transverse width is greater than the width of this cutting net.Described baffle drops to lower than stopping after described cutting net 3～5mm and declines, so that the degree of depth of described stopper slot is 3～5mm.
As mentioned above, the wire jumping prevention method that is applied to slicer of the present invention is by cutting in advance a pair of baffle, form the stopper slot of many corresponding lines of cut on to baffle at this, provide wire jumping prevention protection by described stopper slot to the line of cut remaining running in groove, so to avoid slicer in the operation of cut workpiece, easily there is the phenomenon of wire jumper, and then raising product percent of pass has also improved the operational efficiency of equipment, the more important thing is, the method has also directly solved a kind of general wire jumping prevention design challenges of very difficult proposition in prior art, reduce the design and manufacture cost of equipment.
Brief description of the drawings
Figure 1A and Fig. 2 A are to be shown as side schematic view in the concrete enforcement state of the wire jumping prevention method that is applied to slicer of the present invention.
Figure 1B and Fig. 2 B are shown as forward schematic diagram in the concrete enforcement state of the wire jumping prevention method that is applied to slicer of the present invention.
Detailed description of the invention
Below, by specific instantiation explanation embodiments of the present invention, those skilled in the art can understand other advantages of the present invention and effect easily by content disclosed in the present specification.The present invention can also be implemented or be applied by other different detailed description of the invention, and the every details in this description also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present invention.
Refer to forward and side schematic view in the concrete enforcement state that Figure 1A, Figure 1B, Fig. 2 A and Fig. 2 B be shown as the wire jumping prevention method that is applied to slicer of the present invention, it should be noted that, the diagram providing in the present embodiment only illustrates basic conception of the present invention in a schematic way, satisfy and only show with assembly relevant in the present invention in graphic but not component count, shape and size drafting while implementing according to reality, when its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layout kenel also may be more complicated.
As shown in the figure, the invention provides a kind of wire jumping prevention method that is applied to slicer, described slicer is for operation that crystalline silicon ingot (not shown) is cut into slices, described slicer at least has frame 11, many lines of cut 12 and multiple cutting roller 13 and 13 ', described many lines of cut 12 correspondences are wrapped in described multiple cutting roller 13 and 13 ' above to form a cutting net (not indicating), it should be noted that, the orientation that is confined to present due to Figure 1A and Fig. 2 A, above-mentioned cutting net only can demonstrate a line of cut, but in the wire-moving system of concrete multi-line slicer, should there are many lines of cut and corresponding many line of cut cutting rollers 13 or 13 ', thereby in the present embodiment mode, the line mechanism of walking taking a line of cut is described as example.
First, at the outstanding baffle 14 and 14 ' of establishing a pair of vertical setting in described cutting net (being the line of cut 12 shown in Figure 1A) top, and make this baffle 14 and 14 ' is located at respectively to the top of closing on described cutting roller 13.
In the present embodiment mode; described baffle 14 and 14 ' is arranged in frame by a pair of connecting plate 15 and 15 '; as shown in the figure; a pair of connecting plate 15 and 15 ' that can vertical lifting is set in described frame 11; this is located at respectively the top of described cutting roller 13 to connecting plate 15 and 15 '; this is separately fixed at this to connecting plate 15 and 15 ' above to baffle 14 and 14 ', is driven and is declined by described connecting plate 15 and 15 '.
In the present embodiment mode; described baffle 14 and 14 ' transverse width are greater than the width of this cutting net; to ensure that all lines of cut 12 all can be at baffle 14 or 14 ' on cut out stopper slot 141; be as shown in Figure 1B; state the width M that baffle 14 and 14 ' transverse width N are greater than this cutting net, i.e. N > M.
It should be noted that, described connecting plate 15 and 15 ' can for example be connected by screw mandrel, is driven screw mandrel rotation and then is reached this connecting plate 15 or 15 of lifting in the vertical direction by motor '.
Then, direction is as shown by arrows in FIG. moved described line of cut 12; In the present embodiment mode, the speed of service of described line of cut 12 is 1000m/min.
Then, be as shown in Figure 1A or Figure 1B arrow, vertical direction declines this to baffle 14 and 14 ', makes described baffle 14 and 14 ' oppress described line of cut 12, and now described baffle 14 and 14 ' cut line 12 cut; In the time that described baffle 14 and 14 ' is cut predetermined depth; stop declining this to baffle 14 and 14 '; now respectively be formed with many cut lines 12 on this baffle 14 and 14 ' and cut the stopper slot 141 forming, provide wire jumping prevention protection by described stopper slot 141 to the line of cut 12 remaining running in groove.Be as shown in Fig. 2 A or Fig. 2 B arrow.
In the present embodiment mode, described baffle 14 and 14 ' drops to lower than stopping after described cutting net 3～5mm and declines, so that the degree of depth L of described stopper slot 141 is 3～5mm.
In sum; the present invention is mainly by cutting in advance a pair of baffle; form the stopper slot of many corresponding lines of cut on to baffle at this; provide wire jumping prevention protection by described stopper slot to the line of cut remaining running in groove; so to avoid slicer in the operation of cut workpiece; easily there is the phenomenon of wire jumper; and then raising product percent of pass has also improved the operational efficiency of equipment; the more important thing is; the method has also directly solved in prior art and has been difficult to propose a kind of general wire jumping prevention design challenges, has reduced the design and manufacture cost of equipment.Thereby the wire jumping prevention method that is applied to slicer of the present invention compared with prior art, has overcome various shortcoming of the prior art and tool high industrial utilization effectively.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any personage who has the knack of this technology all can, under spirit of the present invention and category, modify or change above-described embodiment.Therefore, such as in affiliated technical field, have and conventionally know that the knowledgeable, not departing from all equivalence modifications that complete under disclosed spirit and technological thought or changing, must be contained by claim of the present invention.
Claims (2)
1. be applied to a wire jumping prevention method for slicer, described slicer at least has frame, many lines of cut and multiple cutting roller, and described many line of cut correspondences are wrapped on described multiple cutting roller to form a cutting net, it is characterized in that:
At the outstanding baffle of establishing a pair of vertical setting in the online side of described cutting, and make this baffle is located at respectively to the top of closing on described cutting roller;
In described frame, arrange a pair of can vertical lifting and be located at respectively described cutting roller above connecting plate, this is separately fixed at this on connecting plate to baffle;
Move described line of cut;
Utilize described connecting plate and vertically decline this to baffle, cut while making described baffle oppress described line of cut; And
In the time that described baffle is cut and drop to the predetermined depth lower than described cutting net 3mm～5mm, stop declining this to baffle, now respectively on this baffle, be formed with the stopper slot that many cut line cuttings form, provide wire jumping prevention protection by described stopper slot to the line of cut remaining running in groove; The degree of depth of described stopper slot is 3mm～5mm.
2. the wire jumping prevention method that is applied to slicer according to claim 1, is characterized in that: described baffle transverse width is greater than the width of this cutting net.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010286086.0A CN102398316B (en) | 2010-09-17 | 2010-09-17 | Anti-jumping method applied to slicing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010286086.0A CN102398316B (en) | 2010-09-17 | 2010-09-17 | Anti-jumping method applied to slicing machine |
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| CN102398316A CN102398316A (en) | 2012-04-04 |
| CN102398316B true CN102398316B (en) | 2014-10-01 |
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| CN201010286086.0A Active CN102398316B (en) | 2010-09-17 | 2010-09-17 | Anti-jumping method applied to slicing machine |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108407116A (en) * | 2018-03-30 | 2018-08-17 | 青岛高测科技股份有限公司 | And line detector, method and the diamond cutting line slicing machine including this and line detector |
| CN108972924B (en) * | 2018-07-18 | 2020-07-17 | 阜宁协鑫光伏科技有限公司 | Silicon wafer cutting system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2757086B2 (en) * | 1992-02-13 | 1998-05-25 | 信越半導体株式会社 | Wafer separating method and wire saw device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4252193B2 (en) * | 2000-05-24 | 2009-04-08 | コバレントマテリアル株式会社 | Wire saw and cutting method using the same |
| JP2001347448A (en) * | 2000-06-05 | 2001-12-18 | Crystal System:Kk | Cutting method of solid material and cutting device of solid material therefor |
| JP2006305685A (en) * | 2005-04-28 | 2006-11-09 | Komatsu Electronic Metals Co Ltd | Wire saw device, guide bar for wire saw device and slurry supplying device for wire saw device |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2757086B2 (en) * | 1992-02-13 | 1998-05-25 | 信越半導体株式会社 | Wafer separating method and wire saw device |
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| CN102398316A (en) | 2012-04-04 |
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Effective date of registration: 20180524 Address after: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Patentee after: Haining Dijin science and Technology Co., Ltd. Address before: No. 1358, nine dry road, Si Jing Town, Songjiang District, Shanghai Patentee before: Shanghai Nissin Machine Tool Co., Ltd. |
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