CN102383185A - 一种用于生产直拉重掺磷单晶的防爆装置及防爆方法 - Google Patents
一种用于生产直拉重掺磷单晶的防爆装置及防爆方法 Download PDFInfo
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CN201110308210.3A CN102383185B (zh) | 2011-10-12 | 2011-10-12 | 一种用于生产直拉重掺磷单晶的防爆装置及防爆方法 |
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CN201110308210.3A CN102383185B (zh) | 2011-10-12 | 2011-10-12 | 一种用于生产直拉重掺磷单晶的防爆装置及防爆方法 |
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CN102383185A true CN102383185A (zh) | 2012-03-21 |
CN102383185B CN102383185B (zh) | 2014-03-05 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107523878A (zh) * | 2017-09-05 | 2017-12-29 | 麦斯克电子材料有限公司 | 一种用于重掺磷硅单晶生产的防爆单晶炉及除磷方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0612867A1 (en) * | 1993-02-23 | 1994-08-31 | Shin-Etsu Handotai Company Limited | Inert gas rectifying/blowing apparatus for single crystal pulling device |
US6287528B1 (en) * | 1998-11-24 | 2001-09-11 | WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG | Method for removing dust |
CN1600905A (zh) * | 2003-09-28 | 2005-03-30 | 北京有色金属研究总院 | 一种生长直拉硅单晶的重掺杂方法及掺杂装置 |
CN101979719A (zh) * | 2010-11-03 | 2011-02-23 | 天津市环欧半导体材料技术有限公司 | 一种气相重掺磷区熔硅单晶的生产方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0612867A1 (en) * | 1993-02-23 | 1994-08-31 | Shin-Etsu Handotai Company Limited | Inert gas rectifying/blowing apparatus for single crystal pulling device |
US6287528B1 (en) * | 1998-11-24 | 2001-09-11 | WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG | Method for removing dust |
CN1600905A (zh) * | 2003-09-28 | 2005-03-30 | 北京有色金属研究总院 | 一种生长直拉硅单晶的重掺杂方法及掺杂装置 |
CN101979719A (zh) * | 2010-11-03 | 2011-02-23 | 天津市环欧半导体材料技术有限公司 | 一种气相重掺磷区熔硅单晶的生产方法 |
Non-Patent Citations (1)
Title |
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刘锋等: "重掺磷硅单晶生长技术研究", 《天津科技》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107523878A (zh) * | 2017-09-05 | 2017-12-29 | 麦斯克电子材料有限公司 | 一种用于重掺磷硅单晶生产的防爆单晶炉及除磷方法 |
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