CN102375327B - 嵌入衰减式相位移光罩及其制作方法 - Google Patents
嵌入衰减式相位移光罩及其制作方法 Download PDFInfo
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- CN102375327B CN102375327B CN201010261599.6A CN201010261599A CN102375327B CN 102375327 B CN102375327 B CN 102375327B CN 201010261599 A CN201010261599 A CN 201010261599A CN 102375327 B CN102375327 B CN 102375327B
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CN102375327A CN102375327A (zh) | 2012-03-14 |
CN102375327B true CN102375327B (zh) | 2014-08-13 |
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CN115542655A (zh) * | 2022-09-21 | 2022-12-30 | 京东方科技集团股份有限公司 | 相移掩膜版、制备方法及膜层开孔方法 |
CN116535108B (zh) * | 2023-07-05 | 2023-09-22 | 上海传芯半导体有限公司 | 衬底回收方法、再生的光掩模基版及光掩模版的制造方法 |
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CN1573538A (zh) * | 2003-06-16 | 2005-02-02 | 台湾积体电路制造股份有限公司 | 具有双嵌附层的减光型相移光罩及其制作方法 |
CN101030539A (zh) * | 2006-02-27 | 2007-09-05 | 台湾积体电路制造股份有限公司 | 制作半导体元件的方法 |
CN101131535A (zh) * | 2006-08-21 | 2008-02-27 | 台湾积体电路制造股份有限公司 | 一种包含光罩的装置以及制造该光罩的方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN1573538A (zh) * | 2003-06-16 | 2005-02-02 | 台湾积体电路制造股份有限公司 | 具有双嵌附层的减光型相移光罩及其制作方法 |
CN2713515Y (zh) * | 2003-06-16 | 2005-07-27 | 台湾积体电路制造股份有限公司 | 具有双嵌附层的减光型相移光罩 |
CN101030539A (zh) * | 2006-02-27 | 2007-09-05 | 台湾积体电路制造股份有限公司 | 制作半导体元件的方法 |
CN101131535A (zh) * | 2006-08-21 | 2008-02-27 | 台湾积体电路制造股份有限公司 | 一种包含光罩的装置以及制造该光罩的方法 |
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